18 research outputs found

    X-ray characterization of oriented β-tantalum films

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    Includes bibliographical references (pages 408-409).Tantalum (Ta) metal films (10-70 nm) were deposited on a Si(100) substrate with a 500 nm silicon dioxide (SiO2) interlayer by ion-beam assisted sputtering. The as-deposited films have been characterized by X-ray diffraction (XRD) and X-ray reflectivity (XRR) techniques. XRD measurements showed the presence of films of the tetragonal phase of tantalum (β-Ta) oriented along the (00l) plane. XRR measurements indicated the presence of graded Ta films, with a thin interface layer between the 500 nm SiO2 layer and the Ta films. The thickness and density of this interface layer was estimated to be 1.9±0.2 nm and 10.5±0.5 g/cm3, respectively. X-ray photoelectron spectroscopy (XPS) was used to probe the chemical composition of this interface layer. XPS investigative studies indicated that the interface was likely composed of tantalum silicide (TaSi2) and tantalum silicate (TaSiOx). However, the TaSiOx layer was reduced during Ar ion sputter depth profile analysis

    Comparison of nanometer-thick films by x-ray reflectivity and spectroscopic ellipsometry

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    Includes bibliographical references (pages 023906-5).Films of tantalum pentoxide (Ta2O5) with thickness of 10-100 nm were deposited on Si wafers and have been compared using spectroscopic ellipsometry (SE) and x-ray reflectivity (XRR). (Ta2O5) was chosen for comparison work based on various criterions for material selection outlined in this article. Measurements were performed at six positions across the sample area to take into consideration thickness and composition inhomogeneity. SE and XRR fitted curves required the incorporation of a linearly graded interface layer. SE systematically measured higher values of film thickness as compared to XRR. A linear equation was established between the thickness measurements using SE and XRR. The slope of the linear equation established was found to be 1.02±0.01. However, the intercepts were found to be 1.7±0.2 and 2.6±0.3 when the interface was excluded and included, respectively. These differences in the values of intercepts were attributed to the uncertainties in the determination of the interface layer

    Thigh-length compression stockings and DVT after stroke

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    Controversy exists as to whether neoadjuvant chemotherapy improves survival in patients with invasive bladder cancer, despite randomised controlled trials of more than 3000 patients. We undertook a systematic review and meta-analysis to assess the effect of such treatment on survival in patients with this disease
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