Synchrotron-radiation-stimulated etching of polydimethylsiloxane using XeF2 as a reaction gas

Synchrotron-radiation-stimulated etching of silicon elastomer polydimethylsiloxane using XeF2 as an etching gas is demonstrated

Underwater sound transmission through arrays of disk cavities in a soft elastic medium

Scattering from a cavity in a soft elastic medium, such as silicone rubber, resembles scattering from an underwater bubble in that low-frequency monopole resonance is obtainable in both cases. Arrays of cavities can therefore be used to reduce underwater sound transmission using thin layers and low void fractions. This article examines the role of cavity shape by microfabricating arrays of disk-shaped air cavities into single and multiple layers of polydimethylsiloxane. Comparison is made with the case of equivalent volume cylinders which approximate spheres. Measurements of ultrasonic underwater sound transmission are compared with finite element modeling predictions. The disks provide a deeper transmission minimum at a lower frequency owing to the drum-type breathing resonance. The resonance of a single disk cavity in an unbounded medium is also calculated and compared with a derived estimate of the natural frequency of the drum mode. Variation of transmission is determined as a function of disk tilt angle, lattice constant, and layer thickness. A modeled transmission loss of 18 dB can be obtained at a wavelength about 20 times the three-layer thickness, and thinner results (wavelength/thickness ~240) are possible for the same loss with a single layer depending on allowable hydrostatic pressure

An ultra-thin PDMS membrane as a bio/micro-nano interface: fabrication and characterization

We report a method for making ultra-thin PDMS membrane devices. Freely suspended membranes as thin as 70 nm have been fabricated. Bulging tests were performed with a custom built fluidic cell to characterize large circular membranes. The fluidic cell allows the media (such as air or water) to wet one side of the membrane while maintaining the other side dry. Pressure was applied to the membrane via a liquid manometer through the fluidic cell. The resulting load-deflection curves show membranes that are extremely flexible, and they can be reproducibly loaded and unloaded. Such devices may potentially be used as mechanical and chemical sensors, and as a bio-nano/micro interface to study cellular mechanics in both static and dynamic environments

Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning

We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive

Chapter 2 High-throughput microfluidic single-cell trapping arrays for biomolecular and imaging analysis

Single-cell analysis is of critical importance in revealing population heterogeneity, identifying minority sub-populations of interest, as well as discovering unique characteristics of individual cells. Microfluidic platforms work at the scale comparable to cell diameter and is suitable for single-cell manipulation. Here we present a microfluidic trapping array which is able to rapidly and deterministically trap single-cells in highly-packed microwells. This chapter first describes the design and fabrication protocols of the trapping array, and then presents its two representative applications: single-cell mRNA probing when integrated with a dielectrophoretic nanotweezer (DENT), and live-cell real-time imaging when combined with fluorescence lifetime imaging microscopy (FLIM). As the single-cell trapping efficiency is determined by the channel design instead of the flow rate, this trapping array can be coupled with different microfluidic sample processing units with different flow rates for various single-cell analyses