Modeling of the chemical vapor deposition of YBa₂Cu₃O, TiB₂, and SiC thin films onto continuous ceramic tows

Ph.D.J. K. Cochra

Grain Structure and Growth of Dispersed Phase BN-AlN Coatings Grown via Chemical Vapor Deposition

This paper discusses the variation in microstructures encountered during the separate depositions of boron nitride (BN) and aluminium nitride (AlN) as well as during the codeposition of BN-AlN dispersed phase ceramic coatings. This combination was chosen in order to take advantage of the self lubricating properties of hexagonal BN along with the hard, erosion resistance of AlN. Films were characterized using scanning and transmission electron microscopy (SEM and TEM), x-ray photoelectron spectroscopy (XPS), and x-ray diffraction (XRD). A range of coating microstructures are possible depending on the conditions of deposition. The best films produced, in terms of hardness, density, and tenacity, were a fine mixture of turbostratic BN and preferentially oriented A1N whiskers aligned with the whisker axis perpendicular to the substrate surface as seen by both electron microscopy and x-ray diffraction. 4 refs., 9 figs., 1 tab