Modular Analytical Multicomponent Analysis in Gas Sensor Aarrays

A multi-sensor system is a chemical sensor system which quantitatively andqualitatively records gases with a combination of cross-sensitive gas sensor arrays andpattern recognition software. This paper addresses the issue of data analysis foridentification of gases in a gas sensor array. We introduce a software tool for gas sensorarray configuration and simulation. It concerns thereby about a modular software packagefor the acquisition of data of different sensors. A signal evaluation algorithm referred to asmatrix method was used specifically for the software tool. This matrix method computes thegas concentrations from the signals of a sensor array. The software tool was used for thesimulation of an array of five sensors to determine gas concentration of CH4, NH3, H2, COand C2H5OH. The results of the present simulated sensor array indicate that the softwaretool is capable of the following: (a) identify a gas independently of its concentration; (b)estimate the concentration of the gas, even if the system was not previously exposed to thisconcentration; (c) tell when a gas concentration exceeds a certain value. A gas sensor database was build for the configuration of the software. With the data base one can create,generate and manage scenarios and source files for the simulation. With the gas sensor database and the simulation software an on-line Web-based version was developed, with whichthe user can configure and simulate sensor arrays on-line

CMOS-compatible nanoscale gas-sensor based on field effect

The integration of a solid state gas sensor of the metal oxide sensor type into CMOS technology still is a challenge because of the high temperatures during metal oxide annealing and sensor operation that do not comply with silicon device stability. In the presence of an external electric field sensor sensitivity can be controlled through a change of the Fermi energy level and consequently it is possible to reduce the operation temperature. Based in this effect, a novel field effect gas sensor was developed resembling a reversed insulated gate field effect transistor (IGFET) with the thickness of gas sensing layer in the range of the Debye length (L-D). Under these conditions the controlling electrical field reaches the sensitive surface and a modulation of the Fermi energy level occurs, producing an effective control of gas sensitivity and sensor response. In this paper several aspects are treated, like technological fabrication process, complete sensor characterization by means of an electrical model and sensor response measurements. Other effects as base-line drift effects and layer thickness implications also are studied

Modular analytical multicomponent analysis in gas sensor aarrays

Abstract: A multi-sensor system is a chemical sensor system which quantitatively and qualitatively records gases with a combination of cross-sensitive gas sensor arrays and pattern recognition software. This paper addresses the issue of data analysis for identification of gases in a gas sensor array. We introduce a software tool for gas sensor array configuration and simulation. It concerns thereby about a modular software package for the acquisition of data of different sensors. A signal evaluation algorithm referred to as matrix method was used specifically for the software tool. This matrix method computes the gas concentrations from the signals of a sensor array. The software tool was used for the simulation of an array of five sensors to determine gas concentration of CH4, NH3, H2, CO and C2H5OH. The results of the present simulated sensor array indicate that the software tool is capable of the following: (a) identify a gas independently of its concentration; (b) estimate the concentration of the gas, even if the system was not previously exposed to this concentration; (c) tell when a gas concentration exceeds a certain value. A gas sensor data base was build for the configuration of the software. With the data base one can create, generate and manage scenarios and source files for the simulation. With the gas sensor dat

CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models

Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given

Modular Analytical Multicomponent Analysis in Gas Sensor Aarrays

A multi-sensor system is a chemical sensor system which quantitatively andqualitatively records gases with a combination of cross-sensitive gas sensor arrays andpattern recognition software. This paper addresses the issue of data analysis foridentification of gases in a gas sensor array. We introduce a software tool for gas sensorarray configuration and simulation. It concerns thereby about a modular software packagefor the acquisition of data of different sensors. A signal evaluation algorithm referred to asmatrix method was used specifically for the software tool. This matrix method computes thegas concentrations from the signals of a sensor array. The software tool was used for thesimulation of an array of five sensors to determine gas concentration of CH4, NH3, H2, COand C2H5OH. The results of the present simulated sensor array indicate that the softwaretool is capable of the following: (a) identify a gas independently of its concentration; (b)estimate the concentration of the gas, even if the system was not previously exposed to thisconcentration; (c) tell when a gas concentration exceeds a certain value. A gas sensor database was build for the configuration of the software. With the data base one can create,generate and manage scenarios and source files for the simulation. With the gas sensor database and the simulation software an on-line Web-based version was developed, with whichthe user can configure and simulate sensor arrays on-line