Dry Etch of Shadow Trench Isolation

Shallow trench isolation (STI) planarized with chemical mechanical polishing (CMP) has replaced local oxidation of silicon (LOCOS) as the conventional isolation technique for sub-micron devices. STI increases transistor-packing density, allowing for more functionality and speed per unit area. STI offer superior latch-up immunity, smaller channel-width encroachment and better planarity. The implementation and feasibility of STI has been examined for device fabrication at RIT previously. The process utilized was etching of shallow trenches using SF6-02 dry chemistry and trench fill by TEOS (tetraethylorthosilicate) oxide deposition. The etch chemistry used did not yield anisotropic etching and appreciable undercutting was observed. In the present study, STI process used includes 60 nm of thermal pad oxide and 160 nm of LPCVD nitride as the hard mask. To create the shallow trenches, Si is etched using SF6-CHF3 chemistry for dry etching. The objective is to etch the trenches of depth — 0.5 μm - 0.8 μm deep without undercutting and with high selectivity on resist. A series of experiments have been done to study the Si trench etching using SF6-CHF3 chemistry in the DryTek Quad tool by varying process parameters. The results will be presented at the conference

The Status of GMSB After 1/fb at the LHC

We thoroughly investigate the current status of supersymmetry in light of the latest searches at the LHC, using General Gauge Mediation (GGM) as a well-motivated signature generator that leads to many different simplified models. We consider all possible promptly-decaying NLSPs in GGM, and by carefully reinterpreting the existing LHC searches, we derive limits on both colored and electroweak SUSY production. Overall, the coverage of GGM parameter space is quite good, but much discovery potential still remains even at 7 TeV. We identify several regions of parameter space where the current searches are the weakest, typically in models with electroweak production, third generation sfermions or squeezed spectra, and we suggest how ATLAS and CMS might modify their search strategies given the understanding of GMSB at 1/fb. In particular, we propose the use of leptonic $M_{T2}$ to suppress $t{\bar t}$ backgrounds. Because we express our results in terms of simplified models, they have broader applicability beyond the GGM framework, and give a global view of the current LHC reach. Our results on 3rd generation squark NLSPs in particular can be viewed as setting direct limits on naturalness.Comment: 44 pages, refs added, typos fixed, improved MC statistics in fig 1

First observation of Bs -> D_{s2}^{*+} X mu nu decays

Using data collected with the LHCb detector in proton-proton collisions at a centre-of-mass energy of 7 TeV, the semileptonic decays Bs -> Ds+ X mu nu and Bs -> D0 K+ X mu nu are detected. Two structures are observed in the D0 K+ mass spectrum at masses consistent with the known D^+_{s1}(2536) and $D^{*+}_{s2}(2573) mesons. The measured branching fractions relative to the total Bs semileptonic rate are B(Bs -> D_{s2}^{*+} X mu nu)/B(Bs -> X mu nu)= (3.3\pm 1.0\pm 0.4)%, and B(Bs -> D_{s1}^+ X munu)/B(Bs -> X mu nu)= (5.4\pm 1.2\pm 0.5)%, where the first uncertainty is statistical and the second is systematic. This is the first observation of the D_{s2}^{*+} state in Bs decays; we also measure its mass and width.Comment: 8 pages 2 figures. Published in Physics Letters

Colorectal cancer incidences in Lynch syndrome: a comparison of results from the prospective lynch syndrome database and the international mismatch repair consortium

Objective To compare colorectal cancer (CRC) incidences in carriers of pathogenic variants of the MMR genes in the PLSD and IMRC cohorts, of which only the former included mandatory colonoscopy surveillance for all participants. Methods CRC incidences were calculated in an intervention group comprising a cohort of confirmed carriers of pathogenic or likely pathogenic variants in mismatch repair genes (path_MMR) followed prospectively by the Prospective Lynch Syndrome Database (PLSD). All had colonoscopy surveillance, with polypectomy when polyps were identified. Comparison was made with a retrospective cohort reported by the International Mismatch Repair Consortium (IMRC). This comprised confirmed and inferred path_MMR carriers who were first- or second-degree relatives of Lynch syndrome probands. Results In the PLSD, 8,153 subjects had follow-up colonoscopy surveillance for a total of 67,604 years and 578 carriers had CRC diagnosed. Average cumulative incidences of CRC in path_MLH1 carriers at 70 years of age were 52% in males and 41% in females; for path_MSH2 50% and 39%; for path_MSH6 13% and 17% and for path_PMS2 11% and 8%. In contrast, in the IMRC cohort, corresponding cumulative incidences were 40% and 27%; 34% and 23%; 16% and 8% and 7% and 6%. Comparing just the European carriers in the two series gave similar findings. Numbers in the PLSD series did not allow comparisons of carriers from other continents separately. Cumulative incidences at 25 years were < 1% in all retrospective groups. Conclusions Prospectively observed CRC incidences (PLSD) in path_MLH1 and path_MSH2 carriers undergoing colonoscopy surveillance and polypectomy were higher than in the retrospective (IMRC) series, and were not reduced in path_MSH6 carriers. These findings were the opposite to those expected. CRC point incidence before 50 years of age was reduced in path_PMS2 carriers subjected to colonoscopy, but not significantly so

GA4GH: International policies and standards for data sharing across genomic research and healthcare.

The Global Alliance for Genomics and Health (GA4GH) aims to accelerate biomedical advances by enabling the responsible sharing of clinical and genomic data through both harmonized data aggregation and federated approaches. The decreasing cost of genomic sequencing (along with other genome-wide molecular assays) and increasing evidence of its clinical utility will soon drive the generation of sequence data from tens of millions of humans, with increasing levels of diversity. In this perspective, we present the GA4GH strategies for addressing the major challenges of this data revolution. We describe the GA4GH organization, which is fueled by the development efforts of eight Work Streams and informed by the needs of 24 Driver Projects and other key stakeholders. We present the GA4GH suite of secure, interoperable technical standards and policy frameworks and review the current status of standards, their relevance to key domains of research and clinical care, and future plans of GA4GH. Broad international participation in building, adopting, and deploying GA4GH standards and frameworks will catalyze an unprecedented effort in data sharing that will be critical to advancing genomic medicine and ensuring that all populations can access its benefits

Prompt K_short production in pp collisions at sqrt(s)=0.9 TeV

The production of K_short mesons in pp collisions at a centre-of-mass energy of 0.9 TeV is studied with the LHCb detector at the Large Hadron Collider. The luminosity of the analysed sample is determined using a novel technique, involving measurements of the beam currents, sizes and positions, and is found to be 6.8 +/- 1.0 microbarn^-1. The differential prompt K_short production cross-section is measured as a function of the K_short transverse momentum and rapidity in the region 0 < pT < 1.6 GeV/c and 2.5 < y < 4.0. The data are found to be in reasonable agreement with previous measurements and generator expectations.Comment: 6+18 pages, 6 figures, updated author lis