Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes

Reactive radio frequency (RF) sputter processes are highly relevant for thin film deposition, but there is no complete understanding of the fundamentals of their operation. While the Berg model describes the hysteresis regime considering the oxygen coverage of the boundary surfaces, a complete fundamental understanding of the plasma–surface interactions and their effects on the discharge is still missing. In this work, we provide such fundamental insights based on an extensive experimental analysis of the physics in the hysteresis regime of magnetized reactive sputter processes, where the same reactive gas admixture can lead to different discharge characteristics depending on the previous state of the plasma. A variety of plasma and surface diagnostics is used to reveal these insights. A low pressure capacitively coupled RF discharge (CCP, 13.56 MHz) with a magnetron-like magnetic field topology adjacent to the target is operated in argon gas with a variable admixture of O$_2$. The applied RF power, the gas flows/pumping speed, as well as the neutral gas pressure are changed systematically to understand the effects of these external control parameters on the hysteresis regime. The magnetic asymmetry effect is found to play an important role, since an axially non-uniform magnetic field is used to realize a local electron confinement at the target. Similar to process control in applications, the DC self-bias is measured to stabilize the surface composition using a feedback controller with the oxygen gas flow as the manipulated variable

Performance of the ATLAS Detector using First Collision Data

More than half a million minimum-bias events of LHC collision data were collected by the ATLAS experiment in December 2009 at centre-of-mass energies of 0.9 TeV and 2.36 TeV. This paper reports on studies of the initial performance of the ATLAS detector from these data. Comparisons between data and Monte Carlo predictions are shown for distributions of several track- and calorimeter-based quantities. The good performance of the ATLAS detector in these first data gives confidence for successful running at higher energies