Développement d'un procédé innovant pour le remplissage des tranchées d'isolation entre transistors des technologies CMOS avancées.

Réalisées au début du processus de fabrication des circuits intégrés, les tranchées d'isolation permettent d'éviter les fuites de courant latérales qui pourraient avoir lieu entre les transistors. Les tranchées sont remplies par un film d'oxyde de silicium réalisé par des procédés de dépôt chimiques en phase vapeur (aussi appelés CVD). Le remplissage des tranchées est couramment réalisé par un procédé CVD à pression sub-atmosphérique (SACVD TEOS/O3). Cependant, la capacité de remplissage de ce procédé pour les nœuds technologiques CMOS 28 nm et inférieurs est dégradée à cause de profils trop verticaux dans les tranchées. Cela induit la formation de cavités dans l'oxyde et entraine des courts-circuits. Afin de pallier ce problème, une nouvelle stratégie de remplissage en trois étapes est proposée pour la technologie CMOS 14 nm. Dans la première étape, un film mince d'oxyde est déposé dans les tranchées. Puis, dans la deuxième étape, les flancs du film sont gravés à l'aide d'un procédé de gravure innovant, basé sur un plasma délocalisé de NF3/NH3, permettant de créer une pente favorable au remplissage final réalisé au cours de la troisième étape. Le développement de cette nouvelle stratégie de remplissage s'est déroulé selon plusieurs axes. Tout d'abord, le procédé de dépôt a été caractérisé afin de sélectionner les conditions optimales pour la première étape de la stratégie. Puis, le procédé de gravure innovant a été caractérisé en détail. L'influence des paramètres de gravure a été étudiée sur pleine plaque et sur plaques avec motifs afin de comprendre les mécanismes de gravure et de changement de pente dans les tranchées. Enfin, dans un troisième temps, la stratégie de remplissage a été développée et intégrée pour la technologie CMOS 14 nm. Nous montrons ainsi qu'il est possible de contrôler le changement de pente avec les conditions de gravure et que cette stratégie permet un remplissage des tranchées d'isolation sans cavités.Achieved at the beginning of the integrated circuits manufacturing, shallow trench isolation permits to electrically isolate transistors from each other's to avoid current leakage. Trenches are filled with silicon dioxide film deposited by chemical vapor deposition (also called CVD). Trenches gap-filling is usually performed by TEOS/O3 Sub-Atmospheric Chemical Vapor Deposition (TEOS/O3 SACVD). However, trenches gap-filling with SACVD process reveals some limitations for advanced technology nodes (mainly 28 nm & 14 nm) due to quasi-vertical trenches profile and slope sensitivity of SACVD, which can lead to voids formation in gap-filling oxide and consequently to electrical isolation failure. To solve this issue, a new three steps gap-fill strategy is proposed for the CMOS 14 nm technology node. During the first step, a thin oxide liner is deposited into trenches. Then, in the second step, film sidewalls are etched with an innovative process, based on downstream plasma of NF3/NH3, to create tapered profile favorable for final SACVD gap-fill achieved in the third step. The development of this strategy has followed three work leads. First, the deposition process has been characterized to select best conditions for the first step. Then, the innovative etching process has been widely characterized. The influence of etching parameters has been studied on blanket and patterned wafers to understand etching mechanisms and slope modification. Finally, the gap-fill strategy has been developed and integrated for the CMOS 14 nm technology node. We demonstrate that it is possible to control the slope modification by tuning etching conditions and that strategy allows a void-free trenches filling.SAVOIE-SCD - Bib.électronique (730659901) / SudocGRENOBLE1/INP-Bib.électronique (384210012) / SudocGRENOBLE2/3-Bib.électronique (384219901) / SudocSudocFranceF

Control of anterior GRadient 2 (AGR2) dimerization links endoplasmic reticulum proteostasis to inflammation

International audienceAnterior gradient 2 (AGR2) is a dimeric protein disulfide isomerase family member involved in the regulation of protein quality control in the endoplasmic reticulum (ER). Mouse AGR2 deletion increases intestinal inflammation and promotes the development of inflammatory bowel disease (IBD). Although these biological effects are well established, the underlying molecular mechanisms of AGR2 function toward inflammation remain poorly defined. Here, using a protein-protein interaction screen to identify cellular regulators of AGR2 dimerization, we unveiled specific enhancers, including TMED2, and inhibitors of AGR2 dimerization, that control AGR2 functions. We demonstrate that modulation of AGR2 dimer formation, whether enhancing or inhibiting the process, yields pro-inflammatory phenotypes, through either autophagy-dependent processes or secretion of AGR2, respectively. We also demonstrate that in IBD and specifically in Crohn's disease, the levels of AGR2 dimerization modulators are selectively deregulated, and this correlates with severity of disease. Our study demonstrates that AGR2 dimers act as sensors of ER homeostasis which are disrupted upon ER stress and promote the secretion of AGR2 monomers. The latter might represent systemic alarm signals for pro-inflammatory responses

Measurement of the top quark forward-backward production asymmetry and the anomalous chromoelectric and chromomagnetic moments in pp collisions at √s = 13 TeV

Abstract The parton-level top quark (t) forward-backward asymmetry and the anomalous chromoelectric (d̂ t) and chromomagnetic (μ̂ t) moments have been measured using LHC pp collisions at a center-of-mass energy of 13 TeV, collected in the CMS detector in a data sample corresponding to an integrated luminosity of 35.9 fb−1. The linearized variable AFB(1) is used to approximate the asymmetry. Candidate t t ¯ events decaying to a muon or electron and jets in final states with low and high Lorentz boosts are selected and reconstructed using a fit of the kinematic distributions of the decay products to those expected for t t ¯ final states. The values found for the parameters are AFB(1)=0.048−0.087+0.095(stat)−0.029+0.020(syst),μ̂t=−0.024−0.009+0.013(stat)−0.011+0.016(syst), and a limit is placed on the magnitude of | d̂ t| < 0.03 at 95% confidence level. [Figure not available: see fulltext.

MUSiC : a model-unspecific search for new physics in proton-proton collisions at root s=13TeV

Results of the Model Unspecific Search in CMS (MUSiC), using proton-proton collision data recorded at the LHC at a centre-of-mass energy of 13 TeV, corresponding to an integrated luminosity of 35.9 fb(-1), are presented. The MUSiC analysis searches for anomalies that could be signatures of physics beyond the standard model. The analysis is based on the comparison of observed data with the standard model prediction, as determined from simulation, in several hundred final states and multiple kinematic distributions. Events containing at least one electron or muon are classified based on their final state topology, and an automated search algorithm surveys the observed data for deviations from the prediction. The sensitivity of the search is validated using multiple methods. No significant deviations from the predictions have been observed. For a wide range of final state topologies, agreement is found between the data and the standard model simulation. This analysis complements dedicated search analyses by significantly expanding the range of final states covered using a model independent approach with the largest data set to date to probe phase space regions beyond the reach of previous general searches.Peer reviewe

Search for new particles in events with energetic jets and large missing transverse momentum in proton-proton collisions at root s=13 TeV

A search is presented for new particles produced at the LHC in proton-proton collisions at root s = 13 TeV, using events with energetic jets and large missing transverse momentum. The analysis is based on a data sample corresponding to an integrated luminosity of 101 fb(-1), collected in 2017-2018 with the CMS detector. Machine learning techniques are used to define separate categories for events with narrow jets from initial-state radiation and events with large-radius jets consistent with a hadronic decay of a W or Z boson. A statistical combination is made with an earlier search based on a data sample of 36 fb(-1), collected in 2016. No significant excess of events is observed with respect to the standard model background expectation determined from control samples in data. The results are interpreted in terms of limits on the branching fraction of an invisible decay of the Higgs boson, as well as constraints on simplified models of dark matter, on first-generation scalar leptoquarks decaying to quarks and neutrinos, and on models with large extra dimensions. Several of the new limits, specifically for spin-1 dark matter mediators, pseudoscalar mediators, colored mediators, and leptoquarks, are the most restrictive to date.Peer reviewe

Measurement of prompt open-charm production cross sections in proton-proton collisions at root s=13 TeV

The production cross sections for prompt open-charm mesons in proton-proton collisions at a center-of-mass energy of 13TeV are reported. The measurement is performed using a data sample collected by the CMS experiment corresponding to an integrated luminosity of 29 nb(-1). The differential production cross sections of the D*(+/-), D-+/-, and D-0 ((D) over bar (0)) mesons are presented in ranges of transverse momentum and pseudorapidity 4 < p(T) < 100 GeV and vertical bar eta vertical bar < 2.1, respectively. The results are compared to several theoretical calculations and to previous measurements.Peer reviewe

Combined searches for the production of supersymmetric top quark partners in proton-proton collisions at root s=13 TeV

A combination of searches for top squark pair production using proton-proton collision data at a center-of-mass energy of 13 TeV at the CERN LHC, corresponding to an integrated luminosity of 137 fb(-1) collected by the CMS experiment, is presented. Signatures with at least 2 jets and large missing transverse momentum are categorized into events with 0, 1, or 2 leptons. New results for regions of parameter space where the kinematical properties of top squark pair production and top quark pair production are very similar are presented. Depending on themodel, the combined result excludes a top squarkmass up to 1325 GeV for amassless neutralino, and a neutralinomass up to 700 GeV for a top squarkmass of 1150 GeV. Top squarks with masses from 145 to 295 GeV, for neutralino masses from 0 to 100 GeV, with a mass difference between the top squark and the neutralino in a window of 30 GeV around the mass of the top quark, are excluded for the first time with CMS data. The results of theses searches are also interpreted in an alternative signal model of dark matter production via a spin-0 mediator in association with a top quark pair. Upper limits are set on the cross section for mediator particle masses of up to 420 GeV

Measurement of b jet shapes in proton-proton collisions at root s=5.02 TeV

We present the first study of charged-hadron production associated with jets originating from b quarks in proton-proton collisions at a center-of-mass energy of 5.02 TeV. The data sample used in this study was collected with the CMS detector at the CERN LHC and corresponds to an integrated luminosity of 27.4 pb(-1). To characterize the jet substructure, the differential jet shapes, defined as the normalized transverse momentum distribution of charged hadrons as a function of angular distance from the jet axis, are measured for b jets. In addition to the jet shapes, the per-jet yields of charged particles associated with b jets are also quantified, again as a function of the angular distance with respect to the jet axis. Extracted jet shape and particle yield distributions for b jets are compared with results for inclusive jets, as well as with the predictions from the pythia and herwig++ event generators.Peer reviewe

Probing effective field theory operators in the associated production of top quarks with a Z boson in multilepton final states at root s=13 TeV

Peer reviewe

Measurement of B-c(2S)(+) and B-c*(2S)(+) cross section ratios in proton-proton collisions at root s=13 TeV

Peer reviewe