Heterogeneous 2.5D integration on through silicon interposer

© 2015 AIP Publishing LLC. Driven by the need to reduce the power consumption of mobile devices, and servers/data centers, and yet continue to deliver improved performance and experience by the end consumer of digital data, the semiconductor industry is looking for new technologies for manufacturing integrated circuits (ICs). In this quest, power consumed in transferring data over copper interconnects is a sizeable portion that needs to be addressed now and continuing over the next few decades. 2.5D Through-Si-Interposer (TSI) is a strong candidate to deliver improved performance while consuming lower power than in previous generations of servers/data centers and mobile devices. These low-power/high-performance advantages are realized through achievement of high interconnect densities on the TSI (higher than ever seen on Printed Circuit Boards (PCBs) or organic substrates), and enabling heterogeneous integration on the TSI platform where individual ICs are assembled at close proximity

Thermal performance enhancement of packaging substrates with integrated vapor chamber

The first part of this research investigates the effects of copper structures, such as copper through-package-vias (TPVs), and copper traces in redistribution layer (RDL), on the thermal performance of glass interposers through numerical and experimental approaches. Numerical parametric study on 2.5D interposers shows that as more copper structures are incorporated in glass interposers, the performance of silicon and glass interposers becomes closer, showing 31% difference in thermal resistance, compared to 53% difference without any copper structures in both interposers. In the second part of this study, a thermal model of glass interposer mounted on the vapor chamber integrated PCB is developed using multi-scale modeling scheme. The comparison of thermal performance between silicon and glass interposers shows that integration of vapor chamber with PCB makes thermal performance of both interposers almost identical, overcoming the limitation posed by low thermal conductivity of glass. The third part of this thesis focuses on design, fabrication, and performance measurement of PCB integrated with vapor chamber. Copper micropillar wick structure is fabricated on PCB with electroplating process, and its wettability is enhanced by silica nanoparticle coating. Design of the wick for the vapor chamber is determined based on the capillary performance and permeability test results. Fabricated device with ultra-thin thickness (~800 µm) shows higher thermal performance than copper plated PCB with the same thickness. Finally, 3D computational fluid dynamics/heat transfer model of the vapor chamber is developed, and modeling result is compared with test result.Ph.D

Graphene Nanotechnology the Next Generation Logic, Memory and 3D Integrated Circuits

Title from PDF of title page viewed August 28, 2017Dissertation advisor: Masud H. ChowdhuryVitaIncludes bibliographical references (pages 120-136)Thesis (Ph.D.)--School of Computing and Engineering. University of Missouri--Kansas City, 2016Floating gate transistor is the basic building block of non-volatile flash memory, which is one of the most widely used memory gadgets in modern micro and nano electronic applications. Recently there has been a surge of interest to introduce a new generation of memory devices using graphene nanotechnology. In this paper we present a new floating gate transistor (FGT) design based on multilayer graphene nanoribbon (MLGNR) and carbon nanotube (CNT). In the proposed graphene based floating gate transistor (GFGT) a multilayer structure of graphene nanoribbon (GNR) would be used as the channel of the field effect transistor (FET) and a layer of CNTs would be used as the floating gate. We have performed an analysis of the charge accumulation mechanism in the floating gate and its dependence on the applied terminal voltages. Based on our analysis we have observed that proposed graphene based floating gate transistor could be operated at a reduced voltage compared to conventional silicon based floating gate devices. We have presented detail analysis of the operation and the programming and erasing processes of the proposed FGT, dependency of the programming and erasing current density on different parameters, impact of scaling the thicknesses of the control and tunneling oxides. These analyses are done based on the equivalent capacitance model of the device. We have analyze the programming and erasing by the tunneling current mechanism in the proposed graphene-CNT floating gate transistor. In this paper, we have investigated the mechanism of programming current and the factors that would influence this current and the behavior of the proposed floating gate transistor. The analysis reveals that programming is a strong function of the high field induced by the control gate, and the thicknesses of the control oxide and the tunnel oxide. With the growing demand for nonvolatile flash memory devices and increasing limitations of silicon technologies, there has been a growing interest to develop emerging flash memory by using alternative nanotechnology. The proposed FGT device for nonvolatile flash memory contains an MLGNR channel and a CNT floating gate with SiO₂ as the tunnel oxide. In this paper, we have presented detail analysis of the electrical properties and performance characteristics of the proposed FGT device. We have focused on the following aspects: current voltage (I-V) characteristics, threshold voltage variation (∆VTH), programming, erasing and reading power consumptions compared to the existing FGTs, and layer-by-layer current voltage characteristics comparison of the proposed GFGT device. To realize graphene field effect transistor (GFET), a general model is developed, validated and analyzed. This model is also used to estimate graphene channel behavior of the proposed GFGT. Reliability is the major concern of the Flash memory technology. We have analyzed retention characteristics of the proposed GFGT. We also have developed a radiation harness test model for the Si-FGT by using VTH variation principle due to the radiation exposure. Flash memory experiences adverse effects due to radiation. These effects can be raised in terms of doping, feature size, supply voltages, layout, shielding. The operating point shift of the device forced to enter the logically-undefined region and cause upset and data errors under radiation exposure. In this research, the threshold voltage shift of the floating gate transistor (FGT) is analyzed by a mathematical model. Molybdenum disulfide (MoS2) based field effect transistor is considered as one of the promising future logic devices. Many other nanoelectronic devices based on MoS2 are currently under investigation. However, the challenge of providing reliable and efficient contact between 2D materials like MoS2 and the metal is still unresolved. The contact resistance between metal and MoS2 limits the application of MoS2 in current semiconductor technologies. In this paper, a detail analysis of metal-MoS2 contact has been presented. Specific contributions of this work are:investigation of the physical, material and electrical parameters that would determine the contact properties, analysis of the combined impact of the top and back gates for the first time, modeling of the crucial metal-MoS2 contact parameters, such as, sheet resistance (RSh), contact resistivity (ρc), contact resistance (RC) and transfer length (LT), investigation of the ways to incorporate the developed contact model into the electronic design automation (EDA) tools and investigation of different contact materials for the metal-MoS2 contact. The three dimensional integrated circuit (3D- IC) is expected to extend Moore's law. To reduce interconnects and time delay, semiconductor industry is shifting 2D-IC to 2.5D-IC and 3D-IC. 3D-IC is the ultimate goal of the semiconductor industry, where 2.5D-IC is an intermediate state. It is important to realize CAD design challenges of the 2.5D-IC/3D-IC when minimum spacing interconnects are used. The major contributions of this research work are as follows. Previously, for the small scale experimental purpose, small numbers (10-20) of TSVs, interconnects, bumps are fabricated together by hand calculation. However in the real 3D-IC design, thousands of TSVs, interconnects, bumps are reuired. Therefore, an automated CAD solution is required to provide precise physical design and verification. Therefore, a solid CAD solution is provided here. Compatible with 40nm-technology design, which enables the Silicon Interposer to integrate with the digital, analog and RF dies together. Dimensions and spacing of the TSV and Bump are optimized by the 3D EM full wave field solver. To our best knowledge, at the interposer level, this design reports the most dense and well-defined RDL, TSV and micro-bump co-design on Silicon Interposer, which will be used for 2.5D-IC.Introduction and background -- Proposed Graphene Based Flash Memory -- Physical and Electrical Parameters of the Proposed Graphene Flash Memory Device -- Programming and Erasing Operation of the Proposed Graphene Flash Memory Device -- Reliability Analysis of the Proposed Graphene Flash Memory Device -- Radiation Hardness Analysis of the Floating Gate Transistor -- Benchmarking of the Proposed Graphene Flash Memory Device -- Graphene Field Effect Transistor (GFET) Generalized Model -- MoS2 FET Device and Contact Characterization and Modelling based on Modified Transfer Length Method (TLM) -- 2.5D Silicon Interposer Design in 40nm-Technology for 2D-IC and 3D-IC -- Conclusion and Future Wor

Microfluidic thermal management of 2.5D and 3D microsystems

Both 2.5 dimensional (2.5D) and 3 dimensional (3D) stacked integrated chip (SIC) heterogeneous architectures are promising to go beyond Moore's law for compact, high-performance, energy-efficient microsystems. However, these systems face significant thermal management challenges due to the increased volumetric heat generation rates, and reduced surface area. In addition, highly spatially and temporally non-uniform heat generation occurs due to different functionalities of various heterogeneous chips. This dissertation focuses on thermal management challenges for both 2.5D and 3D-SICs, by utilizing micro-gap liquid cooling with enhanced non-uniform heterogeneous pin-fin structures. Single phase convection thermal performance of heterogeneous pin-fin enhanced micro-gap liquid cooling under non-uniform power map has been evaluated under steady state conditions. Heat transfer and pressure drop characteristics of dielectric coolants in cooling manifold with cooling enhanced structure and hergeneous pin-fins have been parametrically studied by full-scale computational fluid mechanics/heat transfer (CFD/HT) to achieve non-uniform cooling capacities for multi-chip test structures of 2.5D-SICs. Non-uniform heterogeneous pin-fin structures in cold plates have been numerically and systematically optimized using design of experiment method, coupling with full-scale CFD/HT simulations. A compact thermal model accounting for both spatially and temporally varying heat-flux distributions for inter-layer liquid cooling of 3D-SICs, with realistic leakage power simulation feature has also been developed as a thermal-electrical co-design tool for 3D-SICs. In addition to the active micro-gap liquid cooling thermal managements, this dissertation also investigates the passive micro-gap two-phase liquid cooling using a miniature-thermosyphon with dielectric coolant Novec 7200, for future 3D-SICs. Experimental characterizations, including heat transfer measurements, and bubble flow visualizations are performed under two phase conditions. Implementation of miniature-thermosyphon on 3D-SICs provides non-uniform in-plane as well as cross-plane cooling capacities, which can be used and further enhanced for 3D-SICs thermal management with heterogeneous chips.Ph.D

Fundamental Characterization of Low Dimensional Carbon Nanomaterials for 3D Electronics Packaging

Transistor miniaturization has over the last half century paved the way for higher value electronics every year along an exponential pace known as \u27Moore\u27s law\u27. Now, as the industry is reaching transistor features that no longer makes economic sense, this way of developing integrated circuits (ICs) is coming to its definitive end. As a solution to this problem, the industry is moving toward higher hanging fruits that can enable larger sets of functionalities and ensuring a sustained performance increase to continue delivering more cost-effective ICs every product cycle. These design strategies beyond Moore\u27s law put emphasis on 3D stacking and heterogeneous integration, which if implemented correctly, will deliver a continued development of ICs for a foreseeable future. However, this way of building semiconductor systems does bring new issues to the table as this generation of devices will place additional demands on materials to be successful. The international roadmap of devices and systems (IRDS) highlights the need for improved materials to remove bottlenecks in contemporary as well as future systems in terms of thermal dissipation and interconnect performance. For this very purpose, low dimensional carbon nanomaterials such as graphene and carbon nanotubes (CNTs) are suggested as potential candidates due to their superior thermal, electrical and mechanical properties. Therefore, a successful implementation of these materials will ensure a continued performance to cost development of IC devices.This thesis presents a research study on some fundamental materials growth and reliability aspects of low dimensional carbon based thermal interface materials (TIMs) and interconnects for electronics packaging applications. Novel TIMs and interconnects based on CNT arrays and graphene are fabricated and investigated for their thermal resistance contributions as well electrical performance. The materials are studied and optimized with the support of chemical and structural characterization. Furthermore, a reliability study was performed which found delamination issues in CNT array TIMs due to high strains from thermal expansion mismatches. This study concludes that CNT length is an important factor when designing CNT based systems and the results show that by further interface engineering, reliability can be substantially improved with maintained thermal dissipation and electrical performance. Additionally, a heat treatment study was made that enables improvement of the bulk crystallinity of the materials which will enable even better performance in future applications

Thermal Isolation of High Power Devices in Heterogeneous Integration

Heterogeneous integration (HI) technologies present an important development in the pursuit of higher performance and reduced size, weight, power and cost of electronic systems (SWAP-C). HI systems, however, pose additional challenges for thermal management due to the disparate operating conditions of the devices. If the thermal coupling between devices can be reduced through a strategy of thermal isolation, then the SWAP-C of the accompanying thermal solution can also be reduced. This is in contrast to the alternative scenario of cooling the entire package to the maximum reliable temperature of the most sensitive devices. This isolation strategy must be implemented without a significant increase in device interconnect distances. A counter-intuitive approach is to seek packaging materials of low thermal conductivity – e.g. glass – and enhance them with arrays of metallic through-layer vias. This dissertation describes the first ever demonstration of integrating such via-enhanced interposers with microfluidic cooling, a thermal solution key to the high power applications for which HI was developed. Among the interposers tested, the best performing were shown to exhibit lower thermal coupling than bulk silicon in selective regions, validating their ability to provide thermal isolation. In the course of the study, the via-enhanced interposer is modeled as a thermal metamaterial with desirable, highly-anisotropic properties. Missing from the supporting literature is an accurate treatment of these interposers under such novel environments as microfluidic cooling. This dissertation identifies a new phenomenon, thermal microspreading, which governs how heat couples into a conductive via array from its surroundings. Both finite element analysis (FEA) and a new analytic solution of the associated boundary value problem (BVP) are used to develop a model for describing microspreading. This improves the ability to correctly predict the thermal behavior of via-enhanced interposers under diverse conditions

Thermal Heating in ReRAM Crossbar Arrays: Challenges and Solutions

Increasing popularity of deep-learning-powered applications raises the issue of vulnerability of neural networks to adversarial attacks. In other words, hardly perceptible changes in input data lead to the output error in neural network hindering their utilization in applications that involve decisions with security risks. A number of previous works have already thoroughly evaluated the most commonly used configuration - Convolutional Neural Networks (CNNs) against different types of adversarial attacks. Moreover, recent works demonstrated transferability of the some adversarial examples across different neural network models. This paper studied robustness of the new emerging models such as SpinalNet-based neural networks and Compact Convolutional Transformers (CCT) on image classification problem of CIFAR-10 dataset. Each architecture was tested against four White-box attacks and three Black-box attacks. Unlike VGG and SpinalNet models, attention-based CCT configuration demonstrated large span between strong robustness and vulnerability to adversarial examples. Eventually, the study of transferability between VGG, VGG-inspired SpinalNet and pretrained CCT 7/3x1 models was conducted. It was shown that despite high effectiveness of the attack on the certain individual model, this does not guarantee the transferability to other models.Comment: 18 page

Study of the impact of lithography techniques and the current fabrication processes on the design rules of tridimensional fabrication technologies

Working for the photolithography tool manufacturer leader sometimes gives me the impression of how complex and specific is the sector I am working on. This master thesis topic came with the goal of getting the overall picture of the state-of-the-art: stepping out and trying to get a helicopter view usually helps to understand where a process is in the productive chain, or what other firms and markets are doing to continue improvingUniversidad de sevilla.Máster Universitario en Microelectrónica: Diseño y Aplicaciones de Sistemas Micro/Nanométrico

Through Silicon Via Field-Effect Transistor with Hafnia-based Ferroelectrics and the Doping of Silicon by Gallium Implantation Utilizing a Focused Ion Beam System

3-dimensional integration has become a standard to further increase the transistor density and to enhance the integrated functionality in microchips. Integrated circuits are stacked on top of each other and copper-filled through-silicon VIAs (TSVs) are the industry-accepted choice for their vertical electrical connection. The aim of this work is to functionalize the TSVs by implementing vertical field-effect transistors inside the via holes. The front and back sides of 200 ... 300 µm thin silicon wafers were doped to create the source/drain regions of n- and p-FETs. The TSVFETs showed very stable saturation currents and on/off current ratios of about 10^6 (n-TSVFET) and 10^3 (p-TSVFET) for a gate voltage magnitude of 4V. The use of hafnium zirconium oxide on a thin SiO_2 interface layer as gate dielectric material in a p-TSVFET, enabled the implementation of a charge trapping memory inside the TSVs, showing a memory window of about 1V. This allows the non-volatile storage of the transistor on/off state. In addition, the demonstration of the use of gallium as the source/drain dopant in planar p-FET test structures (ion implanted from a focused ion beam tool) paves the way for maskless doping and for a process flow with a low thermal budget. It was shown, that ion implanted gallium can be activated and annealed at relatively low temperatures of 500 °C ... 700 °C.:Abstract / Kurzzusammenfassung Danksagung Index I List of Figures III List of Tables X List of Symbols XI List of Abbreviations XV 1 Introduction 1 2 Fundamentals 5 2.1 Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) 5 2.1.1 Historical Development - Technological Advancements 7 2.1.2 Field-Effect Transistors in Semiconductor Memories 10 2.2 3D Integration and the Use of TSVs (Through Silicon VIAs) 16 2.3 Doping of Silicon 19 2.3.1 Doping by Thermal Diffusion 20 2.3.2 Doping by Ion Implantation 22 3 Electrical Characterization 24 3.1 Resistivity Measurements 24 3.1.1 Resistance Determination by Four-Point Probes Measurement 24 3.1.2 Contact Resistivity 27 3.1.3 Doping Concentration 32 3.2 C-V Measurements 35 3.2.1 Fundamentals of MIS C-V Measurements 35 3.2.2 Interpretation of C-V Measurements 37 3.3 Transistor Measurements 41 3.3.1 Output Characteristics (I_D-V_D) 41 3.3.2 Transfer Characteristics (I_D-V_G) 42 4 TSV Transistor 45 4.1 Idea and Motivation 45 4.2 Design and Layout of the TSV Transistor 47 4.2.1 Design of the TSV Transistor Structures 47 4.2.2 Test Structures for Planar FETs 48 5 Variations in the Integration Scheme of the TSV Transistor 51 5.1 Doping by Diffusion from Thin Films 51 5.1.1 Determination of Doping Profiles 52 5.1.2 n- and p- TSVFETs Doped Manufactures by the Use of the Diffusion Technique 59 5.2 Ferroelectric Hafnium-Zirconium-Oxide (HZO) in the Gate Stack 81 5.2.1 Planar ferroelectric p-MOSFETs Doped by Thermal Diffusion 82 5.2.2 p-TSVFETs with Hafnium-Zirconium-Oxide Metal Gate 90 5.3 Doping by Ion Implantation of Gallium with a Focused Ion Beam (FIB) Tool 96 5.3.1 Ga doped Si Diodes 97 5.3.2 Planar p-MOSFETs Doped by Ga Implantation 108 5.3.3 Proposal for a parallel integration of Cu TSVs and p-TSVFETs 117 6 Summary and Outlook 120 Bibliography XVIII A Appendix XXXVI A.1 Resistivity and Dopant Density XXXVI A.2 Mask set for the TSVFET XXXVII A.3 Mask Design of the Planar Test Structures XXXVIII Curriculum Vitae XXXIX List of Scientific Publications XL

Through-Silicon Vias in SiGe BiCMOS and Interposer Technologies for Sub-THz Applications

Im Rahmen der vorliegenden Dissertation zum Thema „Through-Silicon Vias in SiGe BiCMOS and Interposer Technologies for Sub-THz Applications“ wurde auf Basis einer 130 nm SiGe BiCMOS Technologie ein Through-Silicon Via (TSV) Technologiemodul zur Herstellung elektrischer Durchkontaktierungen für die Anwendung im Millimeterwellen und Sub-THz Frequenzbereich entwickelt. TSVs wurden mittels elektromagnetischer Simulationen modelliert und in Bezug auf ihre elektrischen Eigenschaften bis in den sub-THz Bereich bis zu 300 GHz optimiert. Es wurden die Wechselwirkungen zwischen Modellierung, Fertigungstechnologie und den elektrischen Eigenschaften untersucht. Besonderes Augenmerk wurde auf die technologischen Einflussfaktoren gelegt. Daraus schlussfolgernd wurde das TSV Technologiemodul entwickelt und in eine SiGe BiCMOS Technologie integriert. Hierzu wurde eine Via-Middle Integration gewählt, welche eine Freilegung der TSVs von der Wafer Rückseite erfordert. Durch die geringe Waferdicke von ca. 75 μm wird einen Carrier Wafer Handling Prozess verwendet. Dieser Prozess wurde unter der Randbedingung entwickelt, dass eine nachfolgende Bearbeitung der Wafer innerhalb der BiCMOS Pilotlinie erfolgen kann. Die Rückseitenbearbeitung zielt darauf ab, einen Redistribution Layer auf der Rückseite der BiCMOS Wafer zu realisieren. Hierzu wurde ein Prozess entwickelt, um gleichzeitig verschiedene TSV Strukturen mit variablen Geometrien zu realisieren und damit eine hohe TSV Design Flexibilität zu gewährleisten. Die TSV Strukturen wurden von DC bis über 300 GHz charakterisiert und die elektrischen Eigenschaften extrahiert. Dabei wurde gezeigt, dass TSV Verbindungen mit sehr geringer Dämpfung <1 dB bis 300 GHz realisierbar sind und somit ausgezeichnete Hochfrequenzeigenschaften aufweisen. Zuletzt wurden vielfältige Anwendungen wie das Grounding von Hochfrequenzschaltkreisen, Interposer mit Waveguides und 300 GHz Antennen dargestellt. Das Potential für Millimeterwellen Packaging und 3D Integration wurde evaluiert. TSV Technologien sind heutzutage in vielen Anwendungen z.B. im Bereich der Systemintegration von Digitalschaltkreisen und der Spannungsversorgung von integrierten Schaltkreisen etabliert. Im Rahmen dieser Arbeit wurde der Einsatz von TSVs für Millimeterwellen und dem sub-THz Frequenzbereich untersucht und die Anwendung für den sub-THz Bereich bis 300 GHz demonstriert. Dadurch werden neue Möglichkeiten der Systemintegration und des Packaging von Höchstfrequenzsystemen geschaffen.:Bibliographische Beschreibung List of symbols and abbreviations Acknowledgement 1. Introduction 2. FEM Modeling of BiCMOS & Interposer Through-Silicon Vias 3. Fabrication of BiCMOS & Silicon Interposer with TSVs 4. Characterization of BiCMOS Embedded Through-Silicon Vias 5. Applications 6. Conclusion and Future Work 7. Appendix 8. Publications & Patents 9. Bibliography 10. List of Figures and Table