Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated

micromachined inertial sensors: the state-of-the-art and a look into the future

peer reviewe

MEMS Gyroscopes for Consumers and Industrial Applications

none2mixedAntonello, Riccardo; Oboe, RobertoAntonello, Riccardo; Oboe, Robert

Readout Method And Electronic Bandwidth Control For A Silicon In-plane Tuning Fork Gyroscope

Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ~0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/√hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz.Georgia Tech Research Coporatio

Development and experimental analysis of a micromachined Resonant Gyrocope

This thesis is concerned with the development and experimental analysis of a resonant gyroscope. Initially, this involved the development of a fabrication process suitable for the construction of metallic microstructures, employing a combination of nickel electroforming and sacrificial layer techniques to realise free-standing and self-supporting mechanical elements. This was undertaken and achieved. Simple beam elements of typically 2.7mm x 1mm x 40µm dimensions have been constructed and subject to analysis using laser doppler interferometry. This analysis tool was used to implement a fill modal analysis in order to experimentally derive dynamic parameters. The characteristic resonance frequencies of these cantilevers have been measured, with 3.14kHz, 23.79kHz, 37.94kHz and 71.22kHz being the typical frequencies of the first four resonant modes. Q-factors of 912, 532, 1490 and 752 have been measured for these modes respectively at 0.01mbar ambient pressure. Additionally the mode shapes of each resonance was derived experimentally and found to be in excellent agreement with finite element predictions. A 4mm nickel ring gyroscope structure has been constructed and analysed using both optical analysis tools and electrical techniques. Using laser doppler interferometry the first four out-of-plane modes of the ring structure were found to be typically 9.893 kHz, 11.349 kHz, 11.418 kHz and 13.904 kHz with respective Q-factors of 1151, 1659, 1573 and 1407 at 0.01 mbar ambient pressure. Although electrical measurements were found to be obscured through cross coupling between drive and detection circuitry, the in-plane operational modes of the gyroscope were sucessfully determined. The Cos2Ө and Sin2Ө operational modes were measured at 36.141 kHz and 36.346 kHz, highlighting a frequency split of 205kHz. Again all experimentally derived modal parameters were in good agreement with finite element predictions. Furthermore, using the analysis model, the angular resolution of the gyroscope has been predicted to be approximately 4.75º/s

Review on the Modeling of Electrostatic MEMS

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices

The feasibility of micromachined dynamic resonant beam coriolis true mass flow meter

The technological advances of micro-electro-mechanical systems (MEMS) in the past two decades have been remarkable for innovations in microfluidic systems as well as automotive applications such as pressure sensors and accelerometers. MEMS flow sensing has emerged as a field of interest in microfluidics, with a variety of sensing methods being miniaturized, such as thermal anemometry, ultrasonic sensing and flow measurement based on the Coriolis effect. Coriolis sensing is particularly attractive since, unlike most other methods which provide volumetric flow information, Coriolis sensing is capable of providing a direct, true mass flow measurement. Because of this advantage, Coriolis flow sensing has engendered strong interest in developing miniature device designs, fabrication techniques, and sensitive Coriolis detection methods. Research and development efforts have been undertaken both in academia and industry to make inexpensive, highly sensitive, reliable, and appropriately packaged Coriolis solutions. One research focus has been on detection and read-out methods for Coriolis-induced signals. Piezoresistive, optical and capacitive methods have all been tried. This dissertation introduces the resonant beam as a detecting method for Coriolis mass flow sensing. Because resonant beams measure frequency changes, they can be highly sensitive, much more so than the previously tried methods. Resonant beams have been successfully demonstrated in MEMS pressure sensors and accelerometers. This work extends their application to Coriolis mass flow devices

Master of Science

thesisMicroelectromechanical gyroscopes are readily used in cars and cell phones. Tactical gyroscopes are available inexpensively and they offer 0.01 to 0.1 % scale factor inaccuracy. On the other hand, strategic gyroscopes with much better performance levels are 100,000 times more expensive. The main objective of this work is to explore the possibility of developing inexpensive strategic grade gyroscopes using microelectromechanical systems technology. Most of the available gyroscopes are surface micromachined due to fabrication issues and misalignment problems involved in multistep fabrication processes necessary to use the bulk of the wafer as the proofmass in MEMS gyroscopes. It can be shown that the sensitivity of the gyroscope is inversely proportional to the natural frequency; so if bulk micromachining technique is used it is possible to decrease the natural frequency further than current limits of surface micromachining in order to increase sensitivity. This thesis is focused on proposing a way to use bulk of the silicon wafer in the gyroscope to decrease the natural frequency to very low levels, such as sub-KHz regime, that cannot be achieved by single mask surface micromachining processes. It then proposes a solution for solving the misalignment problems caused by using multiple fabrication steps and masks instead of using only one mask in surface micromachined gyroscopes. In our design discrete proofmasses are linked together around a circle by compliant structures to ensure the highest effective mass and lowest effective spring constant. By using a proposed double sided fabrication technology the effect of misalignments on frequency mismatch can be reduced. ANSYS software simulations show that 20 µm misalignment between the masks causes a frequency shift equal to 0.3% of the natural frequency that can be compensated using electrostatic frequency tuning. Acceleration parasitic effects can also be a major problem in a low natural frequency gyroscope. In our design a multiple sensing electrode configuration is used that cancels the acceleration effects completely. The sensitivity of the gyroscope with 3126 Hz natural frequency is simulated to be 574 mV/(deg/sec) , or about four times higher than 132 mV/(deg/sec) , which was used as a benchmark for a sensitive gyroscope

High performance 3-folded symmetric decoupled MEMS gyroscopes

This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict the drive/sense mode matching capability of the proposed designs. Based on the comparison with the best recently reported performance towards inertial grade operation, it is expected that the novel architecture further lowers the dominant Brownian (thermo-mechanical) noise level by more than an order of magnitude (down to 0.08º/hr). Moreover, the gyroscope\u27s figure of merit, such as output sensitivity (150 mV/º/s), is expected to be improved by more than two orders of magnitude. This necessarily results in a signal to noise ratio (SNR) which is up to three orders of magnitude higher (up to 1,900mV/ º/hr). Furthermore, the novel concept introduced in this work for building MEMS gyroscopes allows reducing the sense parasitic capacitance by up to an order of magnitude. This in turn reduces the drive mode coupling or quadrature errors in the sensor\u27s output signal. The new approach employs Silicon-on-Insulator (SOI) substrates that allows the realization of large mass (\u3e1.6mg), large sense capacitance (\u3e2.2pF), high quality factors (\u3e21,000), large drive amplitude (~2-4 µm) and low resonance frequency (~3-4 KHz) as well as the consequently suppressed noise floor and reduced support losses for high-performance vacuum operation. Several challenges were encountered during fabrication that required developing high aspect ratio (up to 1:20) etching process for deep trenches (up to 500 µm). Frequency Response measurement platform was built for devices characterization. The measurements were performed at atmospheric pressures causing huge drop of the devices performance. Therefore, various MEMS gyroscope packaging technologies are studied. Wafer Level Packaging (WLP) is selected to encapsulate the fabricated devices under vacuum by utilizing wafer bonding. Through Silicon Via (TSV) technology was developed (as connections) to transfer the electrical signals (of the fabricated devices) outside the cap wafers