Evaluation and extension of threaded control for high-mix semiconductor manufacturing

textIn the recent years threaded run-to-run (RtR) control algorithms have experienced drawbacks under certain circumstances, one such trait is when applied to high-mix of products such as in Application Specific Integrated Circuits (ASIC) foundries. The variations in the process are a function of the product being manufactured as well as the tool being used. The presence of semiconductor layers increases the number of times the lithography process must be repeated. Successive layers having different patterns must be exposed using different reticles/masks in order to maximize tool utilizations. The objectives of this research are to develop a set of methodologies for evaluation and extension of threaded control applied to overlay. This project defines methods to quantify the efficacy of threaded controls, finds the drawbacks of threaded control under production of high mix of semiconductors and suggests extensions and alternatives to improve threaded control. To evaluate the performance of threaded control, extensive simulations were performed in MATLAB. The effects of noise, disturbances, sampling and delays on the control and estimation performance of threaded controller were studied through these simulations. Based on the results obtained, several ideas to extend threaded control by reducing overall number of threads, by improving thread definitions and combination have been introduced. A unique idea of sampling the measurements dynamically based on the estimation accuracy is also presented. Future work includes implementing the extensions to threaded control suggested in this work in real production data and comparing the results without the use of those methods. Future work also includes building new alternatives to threaded control.Electrical and Computer Engineerin

Doctor of Philosophy

dissertationIn order to ensure high production yield of semiconductor devices, it is desirable to characterize intermediate progress towards the final product by using metrology tools to acquire relevant measurements after each sequential processing step. The metrology data are commonly used in feedback and feed-forward loops of Run-to-Run (R2R) controllers to improve process capability and optimize recipes from lot-to-lot or batch-to-batch. In this dissertation, we focus on two related issues. First, we propose a novel non-threaded R2R controller that utilizes all available metrology measurements, even when the data were acquired during prior runs that differed in their contexts from the current fabrication thread. The developed controller is the first known implementation of a non-threaded R2R control strategy that was successfully deployed in the high-volume production semiconductor fab. Its introduction improved the process capability by 8% compared with the traditional threaded R2R control and significantly reduced out of control (OOC) events at one of the most critical steps in NAND memory manufacturing. The second contribution demonstrates the value of developing virtual metrology (VM) estimators using the insight gained from multiphysics models. Unlike the traditional statistical regression techniques, which lead to linear models that depend on a linear combination of the available measurements, we develop VM models, the structure of which and the functional interdependence between their input and output variables are determined from the insight provided by the multiphysics describing the operation of the processing step for which the VM system is being developed. We demonstrate this approach for three different processes, and describe the superior performance of the developed VM systems after their first-of-a-kind deployment in a high-volume semiconductor manufacturing environment

Prognostic Algorithms for Condition Monitoring and Remaining Useful Life Estimation

To enable the benets of a truly condition-based maintenance philosophy to be realised, robust, accurate and reliable algorithms, which provide maintenance personnel with the necessary information to make informed maintenance decisions, will be key. This thesis focuses on the development of such algorithms, with a focus on semiconductor manufacturing and wind turbines. An introduction to condition-based maintenance is presented which reviews dierent types of maintenance philosophies and describes the potential benets which a condition- based maintenance philosophy will deliver to operators of critical plant and machinery. The issues and challenges involved in developing condition-based maintenance solutions are discussed and a review of previous approaches and techniques in fault diagnostics and prognostics is presented. The development of a condition monitoring system for dry vacuum pumps used in semi- conductor manufacturing is presented. A notable feature is that upstream process mea- surements from the wafer processing chamber were incorporated in the development of a solution. In general, semiconductor manufacturers do not make such information avail- able and this study identies the benets of information sharing in the development of condition monitoring solutions, within the semiconductor manufacturing domain. The developed solution provides maintenance personnel with the ability to identify, quantify, track and predict the remaining useful life of pumps suering from degradation caused by pumping large volumes of corrosive uorine gas. A comprehensive condition monitoring solution for thermal abatement systems is also presented. As part of this work, a multiple model particle ltering algorithm for prog- nostics is developed and tested. The capabilities of the proposed prognostic solution for addressing the uncertainty challenges in predicting the remaining useful life of abatement systems, subject to uncertain future operating loads and conditions, is demonstrated. Finally, a condition monitoring algorithm for the main bearing on large utility scale wind turbines is developed. The developed solution exploits data collected by onboard supervisory control and data acquisition (SCADA) systems in wind turbines. As a result, the developed solution can be integrated into existing monitoring systems, at no additional cost. The potential for the application of multiple model particle ltering algorithm to wind turbine prognostics is also demonstrated

Performance of the LHCb vertex locator

The Vertex Locator (VELO) is a silicon microstrip detector that surrounds the proton-proton interaction region in the LHCb experiment. The performance of the detector during the first years of its physics operation is reviewed. The system is operated in vacuum, uses a bi-phase CO2 cooling system, and the sensors are moved to 7 mm from the LHC beam for physics data taking. The performance and stability of these characteristic features of the detector are described, and details of the material budget are given. The calibration of the timing and the data processing algorithms that are implemented in FPGAs are described. The system performance is fully characterised. The sensors have a signal to noise ratio of approximately 20 and a best hit resolution of 4 μm is achieved at the optimal track angle. The typical detector occupancy for minimum bias events in standard operating conditions in 2011 is around 0.5%, and the detector has less than 1% of faulty strips. The proximity of the detector to the beam means that the inner regions of the n+-on-n sensors have undergone space-charge sign inversion due to radiation damage. The VELO performance parameters that drive the experiment's physics sensitivity are also given. The track finding efficiency of the VELO is typically above 98% and the modules have been aligned to a precision of 1 μm for translations in the plane transverse to the beam. A primary vertex resolution of 13 μm in the transverse plane and 71 μm along the beam axis is achieved for vertices with 25 tracks. An impact parameter resolution of less than 35 μm is achieved for particles with transverse momentum greater than 1 GeV/c

AFIT School of Engineering Contributions to Air Force Research and Technology Calendar Year 1973

This report contains abstracts of Master of Science Theses, Doctoral dissertations, and selected faculty publications completed during the 1973 calendar year at the School of Engineering, Air Force Institute of Technology, at Wright-Patterson Air Force Base, Ohio

The ALICE TPC, a large 3-dimensional tracking device with fast readout for ultra-high multiplicity events

The design, construction, and commissioning of the ALICE Time-Projection Chamber (TPC) is described. It is the main device for pattern recognition, tracking, and identification of charged particles in the ALICE experiment at the CERN LHC. The TPC is cylindrical in shape with a volume close to 90 m^3 and is operated in a 0.5 T solenoidal magnetic field parallel to its axis. In this paper we describe in detail the design considerations for this detector for operation in the extreme multiplicity environment of central Pb--Pb collisions at LHC energy. The implementation of the resulting requirements into hardware (field cage, read-out chambers, electronics), infrastructure (gas and cooling system, laser-calibration system), and software led to many technical innovations which are described along with a presentation of all the major components of the detector, as currently realized. We also report on the performance achieved after completion of the first round of stand-alone calibration runs and demonstrate results close to those specified in the TPC Technical Design Report.Comment: 55 pages, 82 figure

AFIT School of Engineering Contributions to Air Force Research and Technology Calendar Year 1973

This report contains abstracts of Master of Science Theses, Doctoral dissertations, and selected faculty publications completed during the 1973 calendar year at the School of Engineering, Air Force Institute of Technology, at Wright-Patterson Air Force Base, Ohio