Propriétés optiques et électroniques du diamant fortement dopé au bore

This PhD thesis reports on an experimental study of optical, electronic and structural properties of heavily boron-doped diamond. This wide bandgap semiconductor can be synthesized by Plasma Enhanced Chemical Vapor (MPCVD). Diamond is an insulator that may turn metallic and even superconductor (conventional) upon p-type doping.This work can be divided into three main parts :The first one involves the development of spectroscopic ellipsometry for characterizing single crystal diamond epilayers. First, optical models have been developed to derive the thickness, resistivity and carrier concentrations of several sets of samples measured ex situ. These values were then compared to those obtained through SIMS profiles (Secondary Ion Mass Spectroscopy) and transport measurements. As a result, an optical effective mass of carriers was determined. Second, this technique has been implemented to be set up in situ on the reactor. The influence of the temperature and the geometry of the growth chamber has been evaluated, and real time growth monitoring was achieved.The second part is related to the sample synthesis and optimization of growth parameters. In this section, we reveal the presence of a transient regime in the boron incorporation leading to a doping inhomogeneity. An increase of boron incorporation with the gas flow was also observed for the first time. Finally, the deterioration of the crystalline structure of diamond, above a critical dopant concentration, was identified and discussed.The third axis of this research is dedicated to the investigation of the electronic properties of heavily doped diamond by magneto-transport from 300K to 50 mK. First, the importance of the Hall bar mesa patterning for transport measurements is stressed. The use of a “controlled” geometry limited parasitic currents associated with doping inhomogeneities. Thus we could construct a new phase diagram, differing from previous reports in the literature. A metallic and non-superconducting layer has been unveiled for the first time. A study of the metal-insulator transition is reported and the critical exponents deduced from its modelling are discussed. Finally, the study of the superconducting state revealed a new dependence of the transition temperature (Tc) on doping which is compared with ab initio calculations. However, not any significant reduction of Tc was observed when the layer thickness dropped from 2 µm to 10 nm.Ce manuscrit de thèse présente une étude expérimentale des propriétés optiques, électroniques et structurales du diamant fortement dopé au bore. Ce semi-conducteur à large bande interdite peut être synthétisé par dépôt chimique en phase vapeur assisté par plasma micro-onde (MPCVD). Il est intrinsèquement isolant mais devient métallique, voire supraconducteur conventionnel par dopage de type p. Ce travail s'articule autour de trois grands axes :Le premier concerne le développement de l'ellipsométrie spectroscopique pour la caractérisation de couches de diamant monocristallin. Dans un premier temps, des modèles optiques ont été développés afin de déduire les épaisseurs, résistivités et concentrations de porteurs de plusieurs séries d'échantillons mesurés ex situ. Ces valeurs ont été confrontées à celles obtenues par le biais de mesures SIMS (Spectroscopie par Emission d'ion Secondaires) et de transport électronique. Une masse effective optique des porteurs a pu ainsi être évaluée. Dans un second temps, cette technique a été mise en oeuvre in situ sur le réacteur. L'influence de la température et de la géométrie de la chambre de réaction a été évaluée et des suivis de croissance en temps réel sont présentés.Le second axe porte sur la synthèse des échantillons et l'optimisation des paramètres de croissance. Dans cette partie, nous révélons la présence d'un transitoire dans l'incorporation du bore conduisant à une inhomogénéité de dopage des échantillons. Une augmentation de l'incorporation du bore avec le débit a également été observée pour la première fois. Enfin, la détérioration de la qualité cristalline du diamant, au delà d'une concentration critique d'atomes de bore, est identifiée et discutée.Le troisième et dernier axe de ces travaux de recherche, est dédié à l'investigation des propriétés électroniques du diamant fortement dopé par magnéto-transport de 300K à 50 mK. Dans un premier temps, l'importance de la mésa-structuration de croix de Hall lors des mesures de transport est mise en évidence. L'utilisation d'une géométrie « maîtrisée », permet en effet de limiter les courants parasites dus à l'inhomogénéité de dopage des couches. Nous avons ainsi pu construire un diagramme de phase différent de celui qui avait été rapporté dans la littérature. Une phase métallique et non supraconductrice a été mise en évidence pour la première fois. Une étude de la transition métal-isolant est présentée, et les exposants critiques issus de sa modélisation sont discutés. L'étude de l'état supraconducteur enfin, nous a permis d'aboutir à une nouvelle dépendance de la température de transition (Tc) avec le dopage. Cette dernière est comparée aux calculs ab initio de la littérature. Aucune réduction de la Tc avec l'épaisseur n'a en revanche été observée dans la gamme des couches synthétisées à savoir de 10 nm à 2 µm

Propriétés optiques et électroniques du diamant fortement dopé au bore

This PhD thesis reports on an experimental study of optical, electronic and structural properties of heavily boron-doped diamond. This wide bandgap semiconductor can be synthesized by Plasma Enhanced Chemical Vapor (MPCVD). Diamond is an insulator that may turn metallic and even superconductor (conventional) upon p-type doping.This work can be divided into three main parts :The first one involves the development of spectroscopic ellipsometry for characterizing single crystal diamond epilayers. First, optical models have been developed to derive the thickness, resistivity and carrier concentrations of several sets of samples measured ex situ. These values were then compared to those obtained through SIMS profiles (Secondary Ion Mass Spectroscopy) and transport measurements. As a result, an optical effective mass of carriers was determined. Second, this technique has been implemented to be set up in situ on the reactor. The influence of the temperature and the geometry of the growth chamber has been evaluated, and real time growth monitoring was achieved.The second part is related to the sample synthesis and optimization of growth parameters. In this section, we reveal the presence of a transient regime in the boron incorporation leading to a doping inhomogeneity. An increase of boron incorporation with the gas flow was also observed for the first time. Finally, the deterioration of the crystalline structure of diamond, above a critical dopant concentration, was identified and discussed.The third axis of this research is dedicated to the investigation of the electronic properties of heavily doped diamond by magneto-transport from 300K to 50 mK. First, the importance of the Hall bar mesa patterning for transport measurements is stressed. The use of a “controlled” geometry limited parasitic currents associated with doping inhomogeneities. Thus we could construct a new phase diagram, differing from previous reports in the literature. A metallic and non-superconducting layer has been unveiled for the first time. A study of the metal-insulator transition is reported and the critical exponents deduced from its modelling are discussed. Finally, the study of the superconducting state revealed a new dependence of the transition temperature (Tc) on doping which is compared with ab initio calculations. However, not any significant reduction of Tc was observed when the layer thickness dropped from 2 µm to 10 nm.Ce manuscrit de thèse présente une étude expérimentale des propriétés optiques, électroniques et structurales du diamant fortement dopé au bore. Ce semi-conducteur à large bande interdite peut être synthétisé par dépôt chimique en phase vapeur assisté par plasma micro-onde (MPCVD). Il est intrinsèquement isolant mais devient métallique, voire supraconducteur conventionnel par dopage de type p. Ce travail s'articule autour de trois grands axes :Le premier concerne le développement de l'ellipsométrie spectroscopique pour la caractérisation de couches de diamant monocristallin. Dans un premier temps, des modèles optiques ont été développés afin de déduire les épaisseurs, résistivités et concentrations de porteurs de plusieurs séries d'échantillons mesurés ex situ. Ces valeurs ont été confrontées à celles obtenues par le biais de mesures SIMS (Spectroscopie par Emission d'ion Secondaires) et de transport électronique. Une masse effective optique des porteurs a pu ainsi être évaluée. Dans un second temps, cette technique a été mise en oeuvre in situ sur le réacteur. L'influence de la température et de la géométrie de la chambre de réaction a été évaluée et des suivis de croissance en temps réel sont présentés.Le second axe porte sur la synthèse des échantillons et l'optimisation des paramètres de croissance. Dans cette partie, nous révélons la présence d'un transitoire dans l'incorporation du bore conduisant à une inhomogénéité de dopage des échantillons. Une augmentation de l'incorporation du bore avec le débit a également été observée pour la première fois. Enfin, la détérioration de la qualité cristalline du diamant, au delà d'une concentration critique d'atomes de bore, est identifiée et discutée.Le troisième et dernier axe de ces travaux de recherche, est dédié à l'investigation des propriétés électroniques du diamant fortement dopé par magnéto-transport de 300K à 50 mK. Dans un premier temps, l'importance de la mésa-structuration de croix de Hall lors des mesures de transport est mise en évidence. L'utilisation d'une géométrie « maîtrisée », permet en effet de limiter les courants parasites dus à l'inhomogénéité de dopage des couches. Nous avons ainsi pu construire un diagramme de phase différent de celui qui avait été rapporté dans la littérature. Une phase métallique et non supraconductrice a été mise en évidence pour la première fois. Une étude de la transition métal-isolant est présentée, et les exposants critiques issus de sa modélisation sont discutés. L'étude de l'état supraconducteur enfin, nous a permis d'aboutir à une nouvelle dépendance de la température de transition (Tc) avec le dopage. Cette dernière est comparée aux calculs ab initio de la littérature. Aucune réduction de la Tc avec l'épaisseur n'a en revanche été observée dans la gamme des couches synthétisées à savoir de 10 nm à 2 µm

Spectroscopic ellipsometry of homoepitaxial diamond multilayers and delta-doped structures

5 pagesInternational audienceThe optimization of diamond-based unipolar electronic devices such as pseudo-vertical Schottky diodes or delta-doped field effect transistors relies in part on the sequential growth of nominally undoped (p-) and heavily boron doped (p þþ ) layers with well-controlled thicknesses and steep interfaces. Optical ellipsometry offers a swift and contactless method to characterize the thickness, roughness, and electronic properties of semiconducting and metallic diamond layers. We report ellipsometric studies carried out on delta-doped structures and other epitaxial multilayers with various boron concentrations and thicknesses (down to the nanometer range). The results are compared with Secondary Ion Mass Spectroscopy and transport measurements. Copyright 2014 AIP Publishing LLC

Boron-doped superlattices and Bragg mirrors in diamond

International audienceA periodic modulation of the boron doping level of single crystal diamond multilayers over more than three orders of magnitude during epitaxial growth by microwave plasma-enhanced chemical vapor deposition is shown to yield Bragg mirrors in the visible. The thicknesses and doping level of the individual layers were controlled by in situ spectroscopic ellipsometry, enabling to tune the reflec-tance peak to the wavelength range of diamond color centers, such as NV 0 or NV À . The crystalline quality, periodicity, and sharpness of the doping transitions in these doping superlattices over tens of periods were confirmed by high resolution X-ray diffraction

Electronic and physico-chemical properties of nanmetric boron delta-doped diamond structures

Heavily boron doped diamond epilayers with thicknesses ranging from 40 to less than 2 nm and buried between nominally undoped thicker layers have been grown in two different reactors. Two types of [100]-oriented single crystal diamond substrates were used after being characterized by X-ray white beam topography. The chemical composition and thickness of these so-called deltadoped structures have been studied by secondary ion mass spectrometry, transmission electron microscopy, and spectroscopic ellipsometry. Temperature-dependent Hall effect and four probe resistivity measurements have been performed on mesa-patterned Hall bars. The temperature dependence of the hole sheet carrier density and mobility has been investigated over a broad temperature range (6K<T<450 K). Depending on the sample, metallic or non-metallic behavior was observed. A hopping conduction mechanism with an anomalous hopping exponent was detected in the non-metallic samples. All metallic delta-doped layers exhibited the same mobility value, around 3.660.8 cm2/Vs, independently of the layer thickness and the substrate type. Comparison with previously published data and theoretical calculations showed that scattering by ionized impurities explained only partially this low common value. None of the delta-layers showed any sign of confinement-induced mobility enhancement, even for thicknesses lower than 2 nm.14 page

Novel graphene electrode for retinal implants : an in vivo biocompatibility study

Altres ajuts: this work has made use of the Spanish ICTS Network MICRONANOFABS partially supported by MICINN and the ICTS 'NANBIOSIS'.Evaluating biocompatibility is a core essential step to introducing a new material as a candidate for brain-machine interfaces. Foreign body reactions often result in glial scars that can impede the performance of the interface. Having a high conductivity and large electrochemical window, graphene is a candidate material for electrical stimulation with retinal prosthesis. In this study, non-functional devices consisting of chemical vapor deposition (CVD) graphene embedded onto polyimide/SU-8 substrates were fabricated for a biocompatibility study. The devices were implanted beneath the retina of blind P23H rats. Implants were monitored by optical coherence tomography (OCT) and eye fundus which indicated a high stability in vivo up to 3 months before histology studies were done. Microglial reconstruction through confocal imaging illustrates that the presence of graphene on polyimide reduced the number of microglial cells in the retina compared to polyimide alone, thereby indicating a high biocompatibility. This study highlights an interesting approach to assess material biocompatibility in a tissue model of central nervous system, the retina, which is easily accessed optically and surgically

Carbon incorporation in MOCVD of MoS2 thin films grown from an organosulfide precursor

Altres ajuts: CERCA Programme/Generalitat de CatalunyaWith the rise of two-dimensional (2D) transition-metal dichalcogenide (TMD) semiconductors and their prospective use in commercial (opto)electronic applications, it has become key to develop scalable and reliable TMD synthesis methods with well-monitored and controlled levels of impurities. While metal-organic chemical vapor deposition (MOCVD) has emerged as the method of choice for large-scale TMD fabrication, carbon (C) incorporation arising during MOCVD growth of TMDs has been a persistent concern-especially in instances where organic chalcogen precursors are desired as a less hazardous alternative to more toxic chalcogen hydrides. However, the underlying mechanisms of such unintentional C incorporation and the effects on film growth and properties are still elusive. Here, we report on the role of C-containing side products of organosulfur precursor pyrolysis in MoS2 thin films grown from molybdenum hexacarbonyl Mo(CO)6 and diethyl sulfide (CH3CH2)2S (DES). By combining in situ gas-phase monitoring with ex situ microscopy and spectroscopy analyses, we systematically investigate the effect of temperature and Mo(CO)6/DES/H2 gas mixture ratios on film morphology, chemical composition, and stoichiometry. Aiming at high-quality TMD growth that typically requires elevated growth temperatures and high DES/Mo(CO)6 precursor ratios, we observed that temperatures above DES pyrolysis onset (â 600 °C) and excessive DES flow result in the formation of nanographitic carbon, competing with MoS2 growth. We found that by introducing H2 gas to the process, DES pyrolysis is significantly hindered, which reduces carbon incorporation. The C content in the MoS2 films is shown to quench the MoS2 photoluminescence and influence the trion-To-exciton ratio via charge transfer. This finding is fundamental for understanding process-induced C impurity doping in MOCVD-grown 2D semiconductors and might have important implications for the functionality and performance of (opto)electronic devices

Novel Graphene Electrode for Retinal Implants: An in vivo Biocompatibility Study

Evaluating biocompatibility is a core essential step to introducing a new material as a candidate for brain-machine interfaces. Foreign body reactions often result in glial scars that can impede the performance of the interface. Having a high conductivity and large electrochemical window, graphene is a candidate material for electrical stimulation with retinal prosthesis. In this study, non-functional devices consisting of chemical vapor deposition (CVD) graphene embedded onto polyimide/SU-8 substrates were fabricated for a biocompatibility study. The devices were implanted beneath the retina of blind P23H rats. Implants were monitored by optical coherence tomography (OCT) and eye fundus which indicated a high stability in vivo up to 3 months before histology studies were done. Microglial reconstruction through confocal imaging illustrates that the presence of graphene on polyimide reduced the number of microglial cells in the retina compared to polyimide alone, thereby indicating a high biocompatibility. This study highlights an interesting approach to assess material biocompatibility in a tissue model of central nervous system, the retina, which is easily accessed optically and surgically.This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No. 785219 (GrapheneCore2) and No. 881603 (GrapheneCore3). DN has received funding from the doctoral school of Cerveau, cognition, comportement (3C) of Sorbonne Université. SP was also supported by the French state funds managed by the Agence Nationale de la Recherche within the Programme Investissements d’Avenir, LABEX LIFESENSES (ANR-10-LABX-65) and IHU FOReSIGHT (ANR-18-IAHU-0001). This work has made use of the Spanish ICTS Network MICRONANOFABS partially supported by MICINN and the ICTS ‘NANBIOSIS,’ more specifically by the Micro-NanoTechnology Unit of the CIBER in Bioengineering, Biomaterials and Nanomedicine (CIBER-BBN) at the IMB-CNM

Improved metal-graphene contacts for low-noise, high-density microtransistor arrays for neural sensing

Poor metal contact interfaces are one of the main limitations preventing unhampered access to the full potential of two-dimensional materials in electronics. Here we present graphene solution-gated field-effect-transistors (gSGFETs) with strongly improved linearity, homogeneity and sensitivity for small sensor sizes, resulting from ultraviolet ozone (UVO) contact treatment. The contribution of channel and contact region to the total device conductivity and flicker noise is explored experimentally and explained with a theoretical model. Finally, in-vitro recordings of flexible microelectrocorticography (μ-ECoG) probes were performed to validate the superior sensitivity of the UVO-treated gSGFET to brain-like activity. These results connote an important step towards the fabrication of high-density gSGFET μ-ECoG arrays with state-of-the-art sensitivity and homogeneity, thus demonstrating the potential of this technology as a versatile platform for the new generation of neural interfaces