A lifting and actuating unit for a planar nanoprecision drive system

Ein wesentlicher Treiber in vielen heutigen Technologiebereichen ist die Miniaturisierung von elektrischen, optischen und mechanischen Systemen. Mehrachsige Geräte mit großen Verfahrbereichen und extremer Präzision spielen dabei nicht nur in der Messung und Qualitätssicherung, sondern auch in der Fabrikation und Manipulation von Nanometerstrukturen eine entscheidende Rolle. Die vertikale Bewegungsaufgabe stellt eine besondere Herausforderung dar, da die Schwerkraft des bewegten Objektes permanent kompensiert werden muss. Diese Arbeit schlägt dafür eine Vertikalhub- und -aktuiereinheit vor und trägt damit zur Weiterentwicklung von Nanometer-Präzisionsantriebssystemen bei. Grundlegende mögliche kinematische Integrationsvarianten werden betrachtet und entsprechend anwendungsrelevanter Kriterien gegenübergestellt. Der gezeigte parallelkinematische Ansatz zeichnet sich durch seine gute Integrierbarkeit, geringe negative Einflüsse auf die umliegenden Systeme, sowie die Verteilung der Last auf mehrere Stellglieder aus. Folgend wird ein konstruktiver Entwicklungsprozess zusammengestellt, um diese favorisierte Variante weiter auszuarbeiten. Im Laufe dieses Prozesses wird die zu entwickelnde Einheit in das Gesamtsystem eingeordnet und ihre Anforderungen, Randbedingungen und enthaltenen Teilsysteme definiert. Die vertikale Aktuierung besteht dabei aus zwei Systemen: Einer pneumatische Gewichtskraftkompensation und einem elektromagnetischen Präzisionsantrieb. Das technische Prinzip der Hubeinheit wird erstellt und die Teilsysteme im verfügbaren Bauraum angeordnet. Daraus wird ein detailliertes Modell des pneumatischen Aktors abgeleitet, dieser dimensioniert und dessen Eigenschaften bestimmt. Die Ausdehnung dieses Teilsystems definiert die räumlichen Grenzen für den umliegenden Präzisionsantrieb. Zur Auslegung dieses Antriebs wird das Kraft-/Leistungsverhältnis als Zielgröße definiert. Mit Hilfe von numerischer Simulation und Optimierung werden Geometrien für verschiedenste Topologien entworfen und bewertet. Die geeignetste Variante wird mit allen Teilsystemen in eine Einheit integriert und auskonstruiert. Abschließend werden zukünftige Schritte für die Integration der Einheit in ein Präzisionsantriebssystem dargestellt und mögliche Anwendungsszenarien in der Nanofabrikation präsentiert.A central driver in many of today's fields of technology is the miniaturization of electrical, optical and mechanical systems. Multi-axis devices with large travel ranges and extreme precision play a decisive role, not only in measurement and quality assurance, but also in the fabrication and manipulation of nanometer structures. The vertical movement task poses a special challenge, since the gravitational load of the moving object must be compensated permanently. This thesis proposes a vertically lifting and actuating unit and thus contributes to the further development of nanometer precision drive systems. Basic possible kinematic integration variants are considered and compared according to application relevant criteria. The presented parallel kinematic approach is characterized by its good integrability, its minimal negative influences on the surrounding systems, as well as the distribution of the load to several actuators. Subsequently, a constructive development process is compiled to further develop this favoured variant. During this process the unit to be developed is integrated into the overall system. Further, its requirements, boundary conditions and subsystems are defined. The vertical actuation consists of two systems: A pneumatic weight force compensation and an electromagnetic precision drive. The technical principle of the lifting unit is developed and the subsystems are arranged in the available design space. Based on this, a detailed model of the pneumatic actuator is created, its dimensions derived and properties obtained. These dimensions define the spatial limits for the surrounding precision actuator. For the design of this actuator, the force-power ratio is chosen as the objective quantity. Using numerical simulations and optimization, geometries for various topologies are created and evaluated. The most suitable variant is designed and integrated with all other subsystems into one unit. Finally, upcoming steps for integrating the unit into a precision drive system are outlined and possible future applications in the field of nanofabrication are presented

Development of a current to pressure (I/P) converter. System analysis of a current to pressure (I/P) converter through physical modelling and experimental investigation, leading to a design for improved linearity and temperature independence.

Current-to-pressure (I/P) converters are pneumatic devices which provide precise control of pressure in various industries – for example these devices are often used in valve positioner systems (typically found in the oil and gas industry) and tensioning systems (typically used in the packaging industry). With an increasing demand for such devices to operate in harsh environments all by delivering acceptable performance means that Current-to-pressure converters need to be carefully designed such that environmental factors have no or minimal effects on its performance. This work presents an investigation of the principles of operation of an existing I/P converter through mathematical modelling. A simulation model has been created and which allows prediction of performance of the I/P converter. This tool has been used to identify areas of poor performances through theoretical analysis and consequently led to optimisation of certain areas of the I/P converter through a design change to deliver improved performances, for instance the average percentage shift in gain at 1mA input signal (over the temperature range of -40°C to 85°C) on the new I/P converter is 2.13% compared to the average gain of 4.24% on the existing I/P converter, which represents an improvement of almost two fold. Experimental tests on prototypes have been carried out and tests results showed that improved linearity and temperature sensitivity can be expected from the new design

Design and analysis of a high performance valve

Most valves available in the fluid power industry today are capable of achieving either a large flow rate or a quick response time; however, often they are unable to deliver both simultaneously. Commercially available valves that can produce both at the same time require complex geometries with multiple actuation stages and piloting pressures, making them expensive components. To establish their active usage in applications across the fluid power industry, a reduction in price for these components is paramount. The Energy Coupling Actuated Valve (ECAV) is capable of solving the large flow rates with fast actuation speeds trade-off by utilizing a new, high performance actuation system. The Energy Coupling Actuator (ECA) is an innovative actuation system that separates the kinetic energy source mass from the actuation mass. Intermittently coupling the actuator to a constantly rotating disk creates an energy transfer from the rotating disk’s kinetic energy to the normally stationary actuator. This intermittent coupling process is controlled by changing the magnetic field inside the actuator’s two coils. Magnetorheological (MR) fluid resides in a 0.5mm fluid gap between the spinning disk and the actuator, and when the magnetic flux builds across this gap, it causes the actuator to move rapidly in a translational movement. The MR fluid changes to a solid between the gap and frictionally binds the actuator to the disk, causing the actuator to move up or down, depending on which coil is actuated on the spinning disk. The liquid-solid conversion from the MR fluid occurs in less than one millisecond and is completely reversible. The shear strength of the fluid is proportional to the magnetic field strength inside the system. The actuator is connected to either a poppet or spool assembly for valve actuation, and the position is controlled through intermittently binding the actuator to the disk. Two valve prototypes, one poppet and one spool type, were machined, and concept validation has been done in both simulation and experimentally. Experimental results show that the poppet reaches a 4mm displacement in 19.8ms opening and 17ms in closing under 33 L/min flow. The spool valve experimentally transitioned in 4.8ms at the same flow rate

Systems study for an Integrated Digital-Electric Aircraft (IDEA)

The results of the Integrated Digital/Electric Aircraft (IDEA) Study are presented. Airplanes with advanced systems were, defined and evaluated, as a means of identifying potential high payoff research tasks. A baseline airplane was defined for comparison, typical of a 1990's airplane with advanced active controls, propulsion, aerodynamics, and structures technology. Trade studies led to definition of an IDEA airplane, with extensive digital systems and electric secondary power distribution. This airplane showed an improvement of 3% in fuel use and 1.8% in DOC relative to the baseline configuration. An alternate configuration, an advanced technology turboprop, was also evaluated, with greater improvement supported by digital electric systems. Recommended research programs were defined for high risk, high payoff areas appropriate for implementation under NASA leadership

Application of precision engineering for nanometre focussing of hard X-rays in synchrotron beam lines

This thesis was submitted for the degree of Master of Philosophy and awarded by Brunel University.Many modern synchrotron beamlines are able to focus X-rays to a few microns in size. Although the technology to achieve this is well established, performing routine experiments with such beams is still time consuming and requires careful set up. Furthermore there is a need to be able to carry out experiments using hard X-ray beams with even smaller beams of between 100nm and 10nm. There are focussing optics that are able to do this but integrating these optics into a stable and a usable experimental set up are challenging. Experiments can often take some hours and any change in position of the beam on the sample will adversely affect the quality of the results. Experiments will often require scanning of the beam across the sample and so mechanisms suitable for high resolution but stable scanning are required. Performing routine experiments with nanometre sized beams requires mechanical systems to be able to position the sample, focussing optics, detectors and diagnostics with significantly higher levels of stability and motion resolution than is required from so called micro focus beam lines. This dissertation critically reviews precision engineering and associated technologies that are relevant for building nano focus beamlines, and the following key issues are explored: • Long term position stability due to thermal effects • Short term position stability due to vibration • Position motion with nanometre incremental motion • Results of some tests are presented and recommendations given. Some test results are presented and guidance on designing nano focus beamlines presented.Diamond Light Sourc

Functionality analysis of electric actuators in renewable energy systems - A review

Various mechanical, hydraulic, pneumatic, electrical, and hybrid actuators can alter motion per the requirements of particular applications. However, except for electrical ones, all actuators are restricted due to their size, complex auxiliary equipment, frequent need for maintenance, and sluggish environment in renewable applications. This brief review paper highlights some unique and significant research works on applying electrical actuators to renewable applications. Four renewable energy resources, i.e., solar, wind, bio-energy, and geothermal energy, are considered to review electric actuators applicable to renewable energy systems. This review analyses the types of actuators associated with the mentioned renewable application, their functioning, their motion type, present use, advantages, disadvantages, and operational problems. The information gathered in this paper may open up new ways of optimization opportunities and control challenges in electrical actuators, thereby making more efficient systems. Furthermore, some energy-efficient and cost-effective replacements of convectional actuators with new innovative ones are suggested. This work aims to benefit scientists and new entrants working on actuators in renewable energy systems.Web of Science2211art. no. 427

Investigations into the design of a wheelchair-mounted rehabilitation robotic manipulator

This research describes the steps towards the development of a low-cost wheelchair-mounted manipulator for use by the physically disabled and elderly. A detailed review of world rehabilitation robotics research has been conducted, covering fifty-six projects. This identified the main areas of research, their scope and results. From this review, a critical investigation of past and present wheelchair-mounted robotic arm projects was undertaken. This led to the formulation of the key design parameters in a final design specification. The results of a questionnaire survey of fifty electric wheelchair users is presented, which has for the first time established the needs and abilities of this disability group. An analysis of muscle type actuators, which mimic human muscle, is presented and their application to robotics, orthotics and prosthetics is given. A new type of rotary pneumatic muscle actuator, the flexator, is introduced and through extensive testing its performance characteristics elucidated. A review of direct-drive rotary pneumatic, hydraulic and electrical actuators has highlighted their relative performance characteristics and has rated their efficiency in terms of their peak torque to motor mass ratio, Tp/MM. From this, the flexator actuator has been shown to have a higher Tp/MM ratio than most conventional actuators. A novel kinematic arrangement is presented which combines the best features of the SCARA and vertically articulated industrial robot geometries, to form the 'Scariculated' arm design. The most appropriate actuator for each joint of this hybrid manipulator was selected, based on the criteria of high Tp/MM ratio, low cost, safety and compatibility. The final design incorporates conventional pneumatic linear double-acting cylinders, a vane type rotary actuator, two dual flexator actuators, and stepping motors for the fme control of the wrist/end effector. An ACSL simulation program has been developed which uses mass flow rate equations, based on one-dimensional compressible flow theory and suppressed critical pressure ratios, to simulate the dual flexator actuator. Theoretical and empirical data is compared and shows a high degree of correlation between results. Finally, the design and development work on two prototypes is discussed. The latest prototype consists of a five-axis manipulator whose pneumatic joints are driven by pulse width modulated solenoid valves. An 8051 microprocessor with proportional error feedback modilles the mark to space ratio of the PWM signal in proportion to the angular error of the joints. This enables control over individual joint speeds, reprogrammable memory locations and position monitoring of each joint. The integration of rehabilitation robotic manipulators into the daily lives of the physically disabled and elderly will significantly influence the role of personal rehabilitation in the next century

Multiplex pneumatic control method for multi-drive system

Pneumatic actuators have several advantages such as light weight safety low cost and high compliance However many pneumatic actuators have complicated systems that include a compressor air tubes and pneumatic valves with electrical wires This research proposes a new control method for a multiplex pneumatic transmission constructed with special resonant valves and air tubes with a control system driven by air vibration in air tubes without electrical wires The control is simplified and effective for pneumatic systems having many degrees of freedom In this paper the development of a primitive model of the resonant valve and a prototype valve is described In addition two control methods which are a superimposing method and a time-sharing method are shown and the independent driving of four actuators is realized by using one of the control methods with air tubes only

Electrohydraulic servovalves – past, present, and future

In 2016 it is 70 years since the first patent for a two-stage servovalve was filed, and 60 years since the double nozzle-flapper two-stage valve patent was granted. This paper reviews the many alternative servovalve designs that were investigated at that time, focusing on two-stage valves. The development of single-stage valves – otherwise known as direct drive or proportional valves – for industrial rather than aerospace application is also briefly reviewed. Ongoing research into alternative valve technology is then discussed, particularly focussing on piezoelectric actuation and the opportunities afforded by additive manufacturing

Technical Translation in Use

Данное пособие предназначено для студентов 3-4 курсов, обучающихся по направлениям подготовки "Филология", "Перевод, переводоведение". Учебное пособие состоит из лекционного материала и текстов, каждый из которых посвящен определенной области науки и техники, а именно: машиностроению, самолетостроению, приборостроению, электронике, медицине, физике и химии. Основными целями данного пособия являются ознакомление студентов с основными особенностями научно-технического текста, развитие навыков установления эквивалентности при переводе на русский язык научно-технических текстов и расширение запаса знаний в области науки и техники.16