DC performance analysis of a 20nm gate lenght n-type silicon GAA junctionless (Si JL-GAA) transistor

With integrated circuit scales in the 22-nm regime, conventional planar MOSFETs have approached the limit of their potential performance. To overcome short channel effects 'SCEs' that appears for deeply scaled MOSFETs beyond 10nm technology node many new device structures and channel materials have been proposed. Among these devices such as Gate-all-around FET. Recentely, junctionless GAA MOSFETs JL-GAA MOSFETs have attracted much attention since the junctionless MOSFET has been presented. In this paper, DC characteristics of an n-type JL-GAA MOSFET are presented using a 3-D quantum transport model .This new generation device is conceived with the same doping concentration level in its channel source/drain allowing to reduce fabrication complexity . The performance of our 3D JL-GAA structure with a 20nm gate length and a rectangular cross section have been obtained using SILVACO TCAD tools allowing also to study short channel effects. Our device reveals a favorable on/off current ratio and better SCE characteristics compared to an inversion-mode GAA transistor. Our device reveals a threshold voltage of 0.55 V, a sub-threshold slope of 63mV / decade which approaches the ideal value, an Ion / Ioff ratio of 10e + 10 value and a drain induced barrier lowring (DIBL) value of 98mV / V

Transport properties and electrical device characteristics with the TiMeS computational platform: application in silicon nanowires

Nanoelectronics requires the development of a priori technology evaluation for materials and device design that takes into account quantum physical effects and the explicit chemical nature at the atomic scale. Here, we present a cross-platform quantum transport computation tool. Using first-principles electronic structure, it allows for flexible and efficient calculations of materials transport properties and realistic device simulations to extract current-voltage and transfer characteristics. We apply this computational method to the calculation of the mean free path in silicon nanowires with dopant and surface oxygen impurities. The dependence of transport on basis set is established, with the optimized double zeta polarized basis giving a reasonable compromise between converged results and efficiency. The current-voltage characteristics of ultrascaled (3 nm length) nanowire-based transistors with p-i-p and p-n-p doping profiles are also investigated. It is found that charge self-consistency affects the device characteristics more significantly than the choice of the basis set. These devices yield source-drain tunneling currents in the range of 0.5 nA (p-n-p junction) to 2 nA (p-i-p junction), implying that junctioned transistor designs at these length scales would likely fail to keep carriers out of the channel in the off-state

Simulation of multigate SOI transistors with silicon, germanium and III-V channels

In this work by employing numerical three-dimensional simulations we study the electrical performance and short channel behavior of several multi-gate transistors based on advanced SOI technology. These include FinFETs, triple-gate and gate-all-around nanowire FETs with different channel material, namely Si, Ge, and III-V compound semiconductors, all most promising candidates for future nanoscale CMOS technologies. Also, a new type of transistor called “junctionless nanowire transistor” is presented and extensive simulations are carried out to study its electrical characteristics and compare with the conventional inversion- and accumulation-mode transistors. We study the influence of device properties such as different channel material and orientation, dimensions, and doping concentration as well as quantum effects on the performance of multi-gate SOI transistors. For the modeled n-channel nanowire devices we found that at very small cross sections the nanowires with silicon channel are more immune to short channel effects. Interestingly, the mobility of the channel material is not as significant in determining the device performance in ultrashort channels as other material properties such as the dielectric constant and the effective mass. Better electrostatic control is achieved in materials with smaller dielectric constant and smaller source-to-drain tunneling currents are observed in channels with higher transport effective mass. This explains our results on Si-based devices. In addition to using the commercial TCAD software (Silvaco and Synopsys TCAD), we have developed a three-dimensional Schrödinger-Poisson solver based on the non-equilibrium Green’s functions formalism and in the framework of effective mass approximation. This allows studying the influence of quantum effects on electrical performance of ultra-scaled devices. We have implemented different mode-space methodologies in our 3D quantum-mechanical simulator and moreover introduced a new method to deal with discontinuities in the device structures which is much faster than the coupled-mode-space approach

ANALYTICAL COMPACT MODELING OF NANOSCALE MULTIPLE-GATE MOSFETS.

L’objectiu principal d’aquest treball és el desenvolupament d’un model compacte per a MOSFETs de múltiple porta d’escala nanomètrica, que sigui analític, basat en la física del dispositiu, i predictiu per a simulacions AC i DC. Els dispositius investigats són el MOSFET estàndar en mode d’inversió, a més d’un nou dispositiu anomenat “junctionless MOSFET” (MOSFET sense unions). El model es va desenvolupar en una formulació compacta amb l’ajuda de l’equació de Poisson i la tècnica de la transformación conforme de Schwarz-Cristoffel. Es varen obtenir les equacions del voltatge llindar i el pendent subllindar. Usant la funció W de Lambert, a més d’una funció de suavització per a la transcició entre les regions de depleció i acumulació, s’obté un model unificat de la densitat de càrrega, vàlid per a tots els modes d’operació del transistor. S’estudien també les dependències entre els paràmetres físics del dispositiu i el seu impacte en el seu rendiment. Es tenen en compteefectes importants de canal curt i de quantització. Es discuteixen també la simetria al voltant de Vds= 0 V, i la continuïtat del corrent de drenador en les derivades d’ordre superior. El model va ser validat mitjançant simulacions TCAD numèriques i mesures experimentals.El objetivo principal de este trabajo es el desarrollo de un modelo compacto para MOSFETs de múltiple puerta de escala nanométrica, que sea analítico, basado en la física del dispositivo, y predictivo para simulaciones AC y DC. Los dispositivos investigados son el MOSFET estándar en modo inversión, además de un nuevo dispositivo llamado “junctionless MOSFET” (MOSFET sin uniones). El modelo se desarrolló en una formulación compacta con la ayuda de la ecuación de Poisson y la técnica de transformación conforme de Schwarz-Cristoffel. Se obtuvieron las ecuaciones del voltaje umbral y la pendiente subumbral. Usando la función W de Lambert, además de una función de suavización para la transición entre las regiones de depleción y acumulación, se obtiene un modelo unificado de la densidad de carga, válido para todos los modos de operación del transistor. Se estudian también las dependencias entre los parámetros físicos del dispositivo y su impacto en su rendimiento. Se tienen en cuenta efectos importantes de canal corto y de cuantización. Se discuten también la simetría alrededor de Vds= 0 V, y la continuidad de la corriente de drenador en las derivadas de orden superior. El modelo fue validado mediante simulaciones TCAD numéricas y medidas experimentales.The main focus is on the development of an analytical, physics-based and predictive DC and AC compact model for nanoscale multiple-gate MOSFETs. The investigated devices are the standard inversion mode MOSFET and a new device concept called junctionless MOSFET. The model is derived in closed-from with the help of Poisson's equation and the conformal mapping technique by Schwarz-Christoffel. Equations for the calculation of the threshold voltage and subthreshold slope are derived. Using Lambert's W-function and a smoothing function for the transition between the depletion and accumulation region, an unified charge density model valid for all operating regimes is developed. Dependencies between the physical device parameters and their impact on the device performance are worked out. Important short-channel and quantization effects are taken into account. Symmetry around Vds = 0 V and continuity of the drain current at derivatives of higher order are discussed. The model is validated versus numerical TCAD simulations and measurement data

Charge-based continuous model for long-channel Symmetric Double-Gate Junctionless Transistors

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A sectorial scheme of gate-all-around field effect transistor with improved electrical characteristics

Reliability and controllability for a new scheme of gate-all-around field effect transistor (GAA-FET) with a silicon channel utilizing a sectorial cross section is evaluated in terms of Ion/Ioff current ratio, transconductance, subthreshold slope, threshold voltage roll-off, and drain induced barrier lowering (DIBL). In addition, the scaling behavior of electronic figures of merit is comprehensively studied with the aid of physical simulations. The electrical characteristic of proposed structure is compared with a circular GAA-FET, which is previously calibrated with an IBM sample at the 22 nm channel length using 3D-TCAD simulations. Our simulation results show that sectorial cross section GAA-FET is a superior structure for controlling short channel effects (SCEs) and to obtain better performance compared to conventional circular cross section counterpart

Impact of multiple channels on the Characteristics of Rectangular GAA MOSFET

Square gate all around MOSFETs are a very promising device structures allowing to continue scaling due to their superior control over the short channel effects. In this work a numerical study of a square structure with single channel is compared to a structure with 4 channels in order to highlight the impact of channels number on the device’s DC parameters (drain current and threshold voltage). Our single channel rectangular GAA MOSFET showed reasonable ratio Ion/Ioff of 104, while our four channels GAA MOSFET showed a value of 103. In addition, a low value of drain induced barrier lowering (DIBL) of 60mV/V was obtained for our single channel GAA and a lower value of with 40mv/v has been obtained for our four channel one. Also, an extrinsic transconductance of 88ms/µm have been obtained for our four channels GAA compared to the single channel that is equal to 7ms/µm

Transport properties and low-frequency noise in low-dimensional structures

Les propriétés électriques et physiques de structures à faible dimensionalité ont été étudiées pour des applications dans des domaines divers comme l électronique, les capteurs. La mesure du bruit bruit à basse fréquence est un outil très utile pour obtenir des informations relatives à la dynamique des porteurs, au piègeage des charges ou aux mécanismes de collision. Dans cette thèse, le transport électronique et le bruit basse fréquence mesurés dans des structures à faible dimensionnalité comme les dispositifs multi-grilles (FinFET, JLT ), les nanofils 3D en Si/SiGe, les nanotubes de carbone ou à base de graphène sont présentés. Pour les approches top-down et bottom-up , l impact du bruit est analysé en fonction de la dimensionalité, du type de conduction (volume vs surface), de la contrainte mécanique et de la présence de jonction metal-semiconducteur.Electrical and physical properties of low-dimensional structures have been studied for the various applications such as electronics, sensors, and etc. Low-frequency noise measurement is also a useful technique to give more information for the carrier dynamics correlated to the oxide traps, channel defects, and scattering. In this thesis, the electrical transport and low-frequency noise of low-dimensional structure devices such as multi-gate structures (e.g. FinFETs and Junctionless FETs), 3-D stacked Si/SiGe nanowire FETs, carbon nanotubes, and graphene are presented. From the view point of top-down and bottom-up approaches, the impacts of LF noise are investigated according to the dimensionality, conduction mechanism (surface or volume conduction), strain technique, and metal-semiconductor junctions.SAVOIE-SCD - Bib.électronique (730659901) / SudocGRENOBLE1/INP-Bib.électronique (384210012) / SudocGRENOBLE2/3-Bib.électronique (384219901) / SudocSudocFranceF

Caractérisation électrique et modélisation du transport dans matériaux et dispositifs SOI avancés

This thesis is dedicated to the electrical characterization and transport modeling in advanced SOImaterials and devices for ultimate micro-nano-electronics. SOI technology is an efficient solution tothe technical challenges facing further downscaling and integration. Our goal was to developappropriate characterization methods and determine the key parameters. Firstly, the conventionalpseudo-MOSFET characterization was extended to heavily-doped SOI wafers and an adapted modelfor parameters extraction was proposed. We developed a nondestructive electrical method to estimatethe quality of bonding interface in metal-bonded wafers for 3D integration. In ultra-thin fully-depletedSOI MOSFETs, we evidenced the parasitic bipolar effect induced by band-to-band tunneling, andproposed new methods to extract the bipolar gain. We investigated multiple-gate transistors byfocusing on the coupling effect in inversion-mode vertical double-gate SOI FinFETs. An analyticalmodel was proposed and subsequently adapted to the full depletion region of junctionless SOI FinFETs.We also proposed a compact model of carrier profile and adequate parameter extraction techniques forjunctionless nanowires.Cette thèse est consacrée à la caractérisation et la modélisation du transport électronique dans des matériaux et dispositifs SOI avancés pour la microélectronique. Tous les matériaux innovants étudiés(ex: SOI fortement dopé, plaques obtenues par collage etc.) et les dispositifs SOI sont des solutions possibles aux défis technologiques liés à la réduction de taille et à l'intégration. Dans ce contexte,l'extraction des paramètres électriques clés, comme la mobilité, la tension de seuil et les courants de fuite est importante. Tout d'abord, la caractérisation classique pseudo-MOSFET a été étendue aux plaques SOI fortement dopées et un modèle adapté pour l'extraction de paramètres a été proposé. Nous avons également développé une méthode électrique pour estimer la qualité de l'interface de collage pour des plaquettes métalliques. Nous avons montré l'effet bipolaire parasite dans des MOSFET SOI totalement désertés. Il est induit par l’effet tunnel bande-à-bande et peut être entièrement supprimé par une polarisation arrière. Sur cette base, une nouvelle méthode a été développée pour extraire le gain bipolaire. Enfin, nous avons étudié l'effet de couplage dans le FinFET SOI double grille, en mode d’inversion. Un modèle analytique a été proposé et a été ensuite adapté aux FinFETs sans jonction(junctionless). Nous avons mis au point un modèle compact pour le profil des porteurs et des techniques d’extraction de paramètres