Development of the UMAC-based control system with application to 5-axis ultraprecision micromilling machines

This thesis was submitted for the degree of Doctor of Philosophy and awarded by Brunel University.Increasing demands from end users in the fields of optics, defence, automotive, medical, aerospace, etc. for high precision 3D miniaturized components and microstructures from a range of materials have driven the development in micro and nano machining and changed the manufacturing realm. Conventional manufacturing processes such as chemical etching and LIGA are found unfavourable or limited due to production time required and have led mechanical micro machining to grow further. Mechanical micro machining is an ideal method to produce high accuracy micro components and micro milling is the most flexible enabling process and is thus able to generate a wider variety of complex micro components and microstructures. Ultraprecision micromilling machine tools are required so as to meet the accuracy, surface finish and geometrical complexity of components and parts. Typical manufacturing requirements are high dimensional accuracy being better than 1 micron, flatness and roundness better than 50 nm and surface finish ranging between 10 and 50 nm. Manufacture of high precision components and parts require very intricate material removal procedure. There are five key components that include machine tools, cutting tools, material properties, operation variables and environmental conditions, which constitute in manufacturing high quality components and parts. End users assess the performance of a machine tool based on the dimensional accuracy and surface quality of machined parts including the machining time. In this thesis, the emphasis is on the design and development of a control system for a 5-axis bench-type ultraprecision micromilling machine- Ultra-Mill. On the one hand, the developed control system is able to offer high motion and positioning accuracy, dynamic stiffness and thermal stability for motion control, which are essential for achieving the machining accuracy and surface finish desired. On the other hand, the control system is able to undertake in-process inspection and condition monitoring of the machine tool and process. The control of multi-axis precision machines with high-speed and high-accuracy motions and positioning are desirable to manufacture components with high accuracy and complex features to increase productivity and maintain machine stability, etc. The development of the control system has focused on fast, accurate and robust positioning requirements at the machine system design stage. Apart from the mechanical design, the performance of the entire precision systems is greatly dependent on diverse electrical and electronics subsystems, controllers, drive instruments, feedback devices, inspection and monitoring system and software. There are some variables that dynamically alter the system behaviour and sensitivity to disturbance that are not ignorable in the micro and nano machining realm. In this research, a structured framework has been developed and integrated to aid the design and development of the control system. The framework includes critically reviewing the state of the art of ultraprecision machining tools, understanding the control system technologies involved, highlighting the advantages and disadvantages of various control system methods for ultraprecision machines, understanding what is required by end-users and formulating what actually makes a machine tool be an ultraprecision machine particularly from the control system perspective. In the design and development stage, the possession of mechatronic know-how is essential as the design and development of the Ultra-Mill is a multidisciplinary field. Simulation and modelling tool such as Matlab/Simulink is used to model the most suitable control system design. The developed control system was validated through machining trials to observe the achievable accuracy, experiments and testing of subsystems individually (slide system, tooling system, monitoring system, etc.). This thesis has successfully demonstrated the design and development of the control system for a 5-axis ultraprecision machine tool- Ultra-Mill, with high performance characteristics, fast, accurate, precise, etc. for motion and positioning, high dynamic stiffness, robustness and thermal stability, whereby was provided and maintained by the control system

Development of the UMAC-based control system with application to 5-axis ultraprecision micromilling machines

Increasing demands from end users in the fields of optics, defence, automotive, medical, aerospace, etc. for high precision 3D miniaturized components and microstructures from a range of materials have driven the development in micro and nano machining and changed the manufacturing realm. Conventional manufacturing processes such as chemical etching and LIGA are found unfavourable or limited due to production time required and have led mechanical micro machining to grow further. Mechanical micro machining is an ideal method to produce high accuracy micro components and micro milling is the most flexible enabling process and is thus able to generate a wider variety of complex micro components and microstructures. Ultraprecision micromilling machine tools are required so as to meet the accuracy, surface finish and geometrical complexity of components and parts. Typical manufacturing requirements are high dimensional accuracy being better than 1 micron, flatness and roundness better than 50 nm and surface finish ranging between 10 and 50 nm. Manufacture of high precision components and parts require very intricate material removal procedure. There are five key components that include machine tools, cutting tools, material properties, operation variables and environmental conditions, which constitute in manufacturing high quality components and parts. End users assess the performance of a machine tool based on the dimensional accuracy and surface quality of machined parts including the machining time. In this thesis, the emphasis is on the design and development of a control system for a 5-axis bench-type ultraprecision micromilling machine- Ultra-Mill. On the one hand, the developed control system is able to offer high motion and positioning accuracy, dynamic stiffness and thermal stability for motion control, which are essential for achieving the machining accuracy and surface finish desired. On the other hand, the control system is able to undertake in-process inspection and condition monitoring of the machine tool and process. The control of multi-axis precision machines with high-speed and high-accuracy motions and positioning are desirable to manufacture components with high accuracy and complex features to increase productivity and maintain machine stability, etc. The development of the control system has focused on fast, accurate and robust positioning requirements at the machine system design stage. Apart from the mechanical design, the performance of the entire precision systems is greatly dependent on diverse electrical and electronics subsystems, controllers, drive instruments, feedback devices, inspection and monitoring system and software. There are some variables that dynamically alter the system behaviour and sensitivity to disturbance that are not ignorable in the micro and nano machining realm. In this research, a structured framework has been developed and integrated to aid the design and development of the control system. The framework includes critically reviewing the state of the art of ultraprecision machining tools, understanding the control system technologies involved, highlighting the advantages and disadvantages of various control system methods for ultraprecision machines, understanding what is required by end-users and formulating what actually makes a machine tool be an ultraprecision machine particularly from the control system perspective. In the design and development stage, the possession of mechatronic know-how is essential as the design and development of the Ultra-Mill is a multidisciplinary field. Simulation and modelling tool such as Matlab/Simulink is used to model the most suitable control system design. The developed control system was validated through machining trials to observe the achievable accuracy, experiments and testing of subsystems individually (slide system, tooling system, monitoring system, etc.). This thesis has successfully demonstrated the design and development of the control system for a 5-axis ultraprecision machine tool- Ultra-Mill, with high performance characteristics, fast, accurate, precise, etc. for motion and positioning, high dynamic stiffness, robustness and thermal stability, whereby was provided and maintained by the control system.EThOS - Electronic Theses Online ServiceGBUnited Kingdo

Design of a five-axis ultra-precision micro-milling machine—UltraMill. Part 2: Integrated dynamic modelling, design optimisation and analysis

Using computer models to predict the dynamic performance of ultra-precision machine tools can help manufacturers to substantially reduce the lead time and cost of developing new machines. However, the use of electronic drives on such machines is becoming widespread, the machine dynamic performance depending not only on the mechanical structure and components but also on the control system and electronic drives. Bench-top ultra-precision machine tools are highly desirable for the micro-manufacturing of high-accuracy micro-mechanical components. However, the development is still at the nascent stage and hence lacks standardised guidelines. Part 2 of this two-part paper proposes an integrated approach, which permits analysis and optimisation of the entire machine dynamic performance at the early design stage. Based on the proposed approach, the modelling and simulation process of a novel five-axis bench-top ultra-precision micro-milling machine tool—UltraMill—is presented. The modelling and simulation cover the dynamics of the machine structure, the moving components, the control system and the machining process and are used to predict the entire machine performance of two typical configurations

A holistic integrated dynamic design and modelling approach applied to the development of ultraprecision micro-milling machines

Ultraprecision machines with small footprints or micro-machines are highly desirable for micro-manufacturing high-precision micro-mechanical components. However, the development of the machines is still at the nascent stage by working on an individual machine basis and hence lacks generic scientific approach and design guidelines. Using computer models to predict the dynamic performance of ultraprecision machine tools can help manufacturers substantially reduce the lead time and cost of developing new machines. Furthermore, the machine dynamic performance depends not only upon the mechanical structure and components but also the control system and electronic drives. This paper proposed a holistic integrated dynamic design and modelling approach, which supports analysis and optimization of the overall machine dynamic performance at the early design stage. Based on the proposed approach the modelling and simulation process on a novel 5-axis bench-top ultraprecision micro-milling machine tool – UltraMill – is presented. The modelling and simulation cover the dynamics of the machine structure, moving components, control system and the machining process, and are used to predict the overall machine performance of two typical configurations. Preliminary machining trials have been carried out and provided the evidence of the approach being helpful to assure the machine performing right at the first setup

System integration for a novel positioning system using a model based control approach

This dissertation presents a model-based approach to perform system integration of a novel positioning sensing method, termed \u27Direct Position Sensing.\u27 Direct Position Sensing can actively monitor the planar position changes of motion control devices without the dependency of the conventional position sensor combined with kinematic model to estimate the planar position. Instead, Direct Position Sensing uses the technology of computer vision and digital display to directly monitor the planar position displacement of a motion control device by actively tracking the desired position of the device based on the displayed target showed on the digital screen. The integration of the computer vision as the feedback system to the motion controller, introduces intermittency and latency in the controller\u27s feedback loop. In order to integrate the slower computer vision sensor to the motion controller, a model-based controller architecture, Smith Predictor approach was first implemented to the Direct Position Sensing system. The Smith Predictor uses a mathematical plant model that is running in parallel with the actual plant so that the model predicts the plant output when the actual output of the system is unavailable. Due to the intermittency feedback of the system, a path prediction algorithm was developed to minimize the model residual during the intermittent feedback so that the tracking performance of the system can be improved. Furthermore, a model input corrector was also developed to correct the control action to the plant model based on the model residual to enhance the path prediction. Simulations and hardware experiments results show that the model-based strategy provides improved tracking performance of the system when latency and intermittency exist in the controller feedback loop

Active magnetic bearing for ultra precision flexible electronics production system

Roll-to-roll printing on continuous plastic films could enable the production of flexible electronics at high speed and low cost, but the granularity of feature sizes is limited by the system accuracy. Technologies such as gravure printing and nanoimprint lithography demand a level of rotary motion precision that cannot be achieved with rolling element bearings. Manufacturing tolerances of the rotating parts, thermal drift and process forces in combination with structural compliance add up to additional error motions. In this master by research an active magnetic bearing (AMB) solution is designed for a new, super-sized roll-to-roll flexible electronics production machine, which was so far based on hydrostatic bearings. The magnetic bearing could actively compensate the accumulated synchronous error and maintain high accuracy under all conditions. However, the asynchronous error of a conventional AMB with the required size and power is a problem. In order to reduce the relatively high positioning uncertainty of active magnetic bearings an innovative radial position measurement based on linear, incremental encoders with optical conversion principle is proposed. A commercial encoder scanning head faces a round scale with concentric, coplanar lines on its face. By counting these lines the radial position can be measured. Because such a scale is not readily available, it is made by micro-machining. In experiments, different machining methods are compared. Then a magnetic bearing is built to demonstrate the efficacy of the proposed sensor. As a result, the best measurement noise is 3.5nm at 10kHz and a position uncertainty of approximately 0.25µm has been achieved for the magnetic bearing. These promising results are especially interesting for applications with high precision requirements at low speed of rotation

Low cost attitude control system scanwheel development

In order to satisfy a growing demand for low cost attitude control systems for small spacecraft, development of low cost scanning horizon sensor coupled to a low cost/low power consumption Reaction Wheel Assembly was initiated. This report addresses the details of the versatile design resulting from this effort. Tradeoff analyses for each of the major components are included, as well as test data from an engineering prototype of the hardware

A dynamics-driven approach to precision machines design for micro-manufacturing and its implementation perspectives

Precision machines are essential elements in fabricating high quality micro products or micro features and directly affect the machining accuracy, repeatability and efficiency. There are a number of literatures on the design of industrial machine elements and a couple of precision machines commercially available. However, few researchers have systematically addressed the design of precision machines from the dynamics point of view. In this paper, the design issues of precision machines are presented with particular emphasis on the dynamics aspects as the major factors affecting the performance of the precision machines and machining processes. This paper begins with a brief review of the design principles of precision machines with emphasis on machining dynamics. Then design processes of precision machines are discussed, and followed by a practical modelling and simulation approaches. Two case studies are provided including the design and analysis of a fast tool servo system and a 5-axis bench-top micro-milling machine respectively. The design and analysis used in the two case studies are formulated based on the design methodology and guidelines

DEVELOPMENT OF A VERSATILE HIGH SPEED NANOMETER LEVEL SCANNING MULTI-PROBE MICROSCOPE

The motivation for development of a multi-probe scanning microscope, presented in this dissertation, is to provide a versatile measurement tool mainly targeted for biological studies, especially on the mechanical and structural properties of an intracellular system. This instrument provides a real-time, three-dimensional (3D) scanning capability. It is capable of operating on feedback from multiple probes, and has an interface for confocal photo-detection of fluorescence-based and single molecule imaging sensitivity. The instrument platform is called a Scanning Multi-Probe Microscope (SMPM) and enables 45 microm by 45 microm by 10 microm navigation of specimen with simultaneous optical and mechanical probing with each probe location being adjustable for collocation or for probing with known probe separations. The 3D positioning stage where the specimen locates was designed to have nanometer resolution and repeatability at 10 Hz scan speed with either open loop or closed loop operating modes. The fine motion of the stage is comprises three orthogonal flexures driven by piezoelectric actuators via a lever linkage. The flexures design is able to scan in larger range especially in z axis and serial connection of the stages helps to minimize the coupling between x, y and z axes. Closed-loop control was realized by the capacitance gauges attached to a rectangular block mounted to the underside of the fine stage upon which the specimen is mounted. The stage's performance was studied theoretically and verified by experimental test. In a step response test and using a simple proportional and integral (PI) controller, standard deviations of 1.9 nm 1.8 nm and 0.41 nm in the x, y and z axes were observed after settling times of 5 ms and 20 ms for the x and y axes. Scanning and imaging of biological specimen and artifact grating are presented to demonstrate the system operation. For faster, short range scanning, novel ultra-fast fiber scanning system was integrated into the xyz fine stage to achieve a super precision dual scanning system. The initial design enables nanometer positioning resolution and runs at 100 Hz scan speed. Both scanning systems are capable of characterization using dimensional metrology tools. Additionally, because the high-bandwidth, ultra-fast scanning system operates through a novel optical attenuating lever, it is physically separate from the longer range scanner and thereby does not introduce additional positioning noise. The dual scanner provides a fine scanning mechanism at relatively low speed and large imaging area using the xyz stage, and focus on a smaller area of interested in a high speed by the ultra-fast scanner easily. Such functionality is beneficial for researchers to study intracellular dynamic motion which requires high speed imaging. Finally, two high end displacement sensor systems, a knife edge sensor and fiber interferometer, were demonstrated as sensing solutions for potential feedback tools to boost the precision and resolution performance of the SMPM

Design, control and error analysis of a fast tool positioning system for ultra-precision machining of freeform surfaces

This thesis was previously held under moratorium from 03/12/19 to 03/12/21Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis.Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis