A Rigorous Simulation Based Study of Gate Misalignment Effects in Gate Engineered Double-Gate (DG) MOSFETs

In this work, a numerical simulation based study on the effects of gate misalignment between the front and the back gate for gate engineered double-gate (DG) Metal-Oxide-Semiconductor Field-Effect-Transistors (MOSFETs) has been presented. A comparative study of electrical characteristics and its effects on device performance between single material double gate (SMDG), double material double gate (DMDG) and triple material double gate (TMDG) MOSFETs have been investigated qualitatively. Both source side misalignment (SSM) and drain side misalignment (DSM) of different lengths in the back gate have been considered to investigate the effects of gate misalignment on device performance. In this context, an extensive simulation has been performed by a commercially available two-dimensional (2D) device simulator (ATLASTM, SILVACO Int.) to figure out the impacts of misalignment on device characteristics like surface potential, threshold voltage, drain-induced-barrier lowering (DIBL), subthreshold swing, subthreshold current, maximum drain current, transconductance and output conductance

Dielectric-Modulated TFETs as Label-Free Biosensors

This chapter presents tunnel field effect transistors (TFETs) as dielectric-modulated (DM) label-free biosensors, and discusses various aspects related to them. A brief survey of the dielectric-modulated TFET biosensors is presented. The concept of dielectric modulation in TFETs is discussed with focus on principle and design perspectives. A Technology Computer Aided Design (TCAD) based approach to incorporate embedded nanogaps in TFET geometries along with appropriate physics-based simulation models are mentioned. Non-ideal conditions in dielectric-modulated biosensors are brought to light, keeping in view the practical considerations of the devices. A gate engineered TFET is taken up for analysis of sensitivities under different conditions through TCAD simulations. Finally, a status map of the sensitivities of the most significant works in dielectric-modulated label-free biosensors is depicted, and the status of the proposed TFET is highlighted

Enhanced Performance Of 19 Single Gate MOSFET With High Permittivity Dielectric Material

In this research, the performance of the 19 nm single gate MOSFET is enhanced through the implementation of the high permittivity dielectric material. The MOSFET scaling trends necessities in device dimensions can be satisfied through the implementation of the high-K dielectric materials in place of the SiO2. Therefore, the 19 nm n-channel MOSFET device with different High-K dielectric materials are implemented and its performance improvement has also been analysed. Virtual fabrication is exercised through ATHENA module from Silvaco TCAD tool. Meanwhile, the device characteristic was utilized by using an ATLAS module. The aforementioned materials have also been simulated and compared with the conventional gate oxide SiO2 for the same structure. At the end, the results have proved that Titanium oxide (TiO2) device is the best dielectric material with a combination of metal gate Tungsten Silicides (WSix). The drive current (ION) of this device (WSix/TiO2) is 587.6 µA/um at 0.534 V of threshold voltage (VTH) as opposed to the targeted 0.530 V predicted, as well as a relatively low IOFF that is obtained at 1.92 pA/µm. This ION value meets the minimum requirement predicted by International Technology Roadmap for Semiconductor (ITRS) 2013 prediction for low performance (LP) technology

Scaling and intrinsic parameter fluctuations in nanoCMOS devices

The core of this thesis is a thorough investigation of the scaling properties of conventional nano-CMOS MOSFETs, their physical and operational limitations and intrinsic parameter fluctuations. To support this investigation a well calibrated 35 nm physical gate length real MOSFET fabricated by Toshiba was used as a reference transistor. Prior to the start of scaling to shorter channel lengths, the simulators were calibrated against the experimentally measured characteristics of the reference device. Comprehensive numerical simulators were then used for designing the next five generations of transistors that correspond to the technology nodes of the latest International Technology Roadmap for Semiconductors (lTRS). The scaling of field effect transistors is one of the most widely studied concepts in semiconductor technology. The emphases of such studies have varied over the years, being dictated by the dominant issues faced by the microelectronics industry. The research presented in this thesis is focused on the present state of the scaling of conventional MOSFETs and its projections during the next 15 years. The electrical properties of conventional MOSFETs; threshold voltage (VT), subthreshold slope (S) and on-off currents (lon, Ioffi ), which are scaled to channel lengths of 35, 25, 18, 13, and 9 nm have been investigated. In addition, the channel doping profile and the corresponding carrier mobility in each generation of transistors have also been studied and compared. The concern of limited solid solubility of dopants in silicon is also addressed along with the problem of high channel doping concentrations in scaled devices. The other important issue associated with the scaling of conventional MOSFETs are the intrinsic parameter fluctuations (IPF) due to discrete random dopants in the inversion layer and the effects of gate Line Edge Roughness (LER). The variations of the three important MOSFET parameters (loff, VT and Ion), induced by random discrete dopants and LER have been comprehensively studied in the thesis. Finally, one of the promising emerging CMOS transistor architectures, the Ultra Thin Body (UTB) SOl MOSFET, which is expected to replace the conventional MOSFET, has been investigated from the scaling point of view

A review of selected topics in physics based modeling for tunnel field-effect transistors

The research field on tunnel-FETs (TFETs) has been rapidly developing in the last ten years, driven by the quest for a new electronic switch operating at a supply voltage well below 1 V and thus delivering substantial improvements in the energy efficiency of integrated circuits. This paper reviews several aspects related to physics based modeling in TFETs, and shows how the description of these transistors implies a remarkable innovation and poses new challenges compared to conventional MOSFETs. A hierarchy of numerical models exist for TFETs covering a wide range of predictive capabilities and computational complexities. We start by reviewing seminal contributions on direct and indirect band-to-band tunneling (BTBT) modeling in semiconductors, from which most TCAD models have been actually derived. Then we move to the features and limitations of TCAD models themselves and to the discussion of what we define non-self-consistent quantum models, where BTBT is computed with rigorous quantum-mechanical models starting from frozen potential profiles and closed-boundary Schr\uf6dinger equation problems. We will then address models that solve the open-boundary Schr\uf6dinger equation problem, based either on the non-equilibrium Green's function NEGF or on the quantum-transmitting-boundary formalism, and show how the computational burden of these models may vary in a wide range depending on the Hamiltonian employed in the calculations. A specific section is devoted to TFETs based on 2D crystals and van der Waals hetero-structures. The main goal of this paper is to provide the reader with an introduction to the most important physics based models for TFETs, and with a possible guidance to the wide and rapidly developing literature in this exciting research field

Simulation of FinFET Structures

The intensive downscaling of MOS transistors has been the major driving force behind the aggressive increases in transistor density and performance, leading to more chip functionality at higher speeds. While on the other side the reduction in MOSFET dimensions leads to the close proximity between source and drain, which in turn reduces the ability of the gate electrode to control the potential distribution and current flow in the channel region and also results in some undesirable effects called the short-channel effects. These limitations associated with downscaling of MOSFET device geometries have lead device designers and researchers to number of innovative techniques which include the use of different device structures, different channel materials, different gate-oxide materials, different processes such as shallow trench isolation, source/drain silicidation, lightly doped extensions etc. to enable controlled device scaling to smaller dimensions. A lot of research and development works have been done in these and related fields and more remains to be carried out in order to exploit these devices for the wider applications

Modeling Of Two Dimensional Graphene And Non-graphene Material Based Tunnel Field Effect Transistors For Integrated Circuit Design

The Moore’s law of scaling of metal oxide semiconductor field effect transistor (MOSFET) had been a driving force toward the unprecedented advancement in development of integrated circuit over the last five decades. As the technology scales down to 7 nm node and below following the Moore’s law, conventional MOSFETs are becoming more vulnerable to extremely high off-state leakage current exhibiting a tremendous amount of standby power dissipation. Moreover, the fundamental physical limit of MOSFET of 60 mV/decade subthreshold slope exacerbates the situation further requiring current transport mechanism other than drift and diffusion for the operation of transistors. One way to limit such unrestrained amount of power dissipation is to explore novel materials with superior thermal and electrical properties compared to traditional bulk materials. On the other hand, energy efficient steep subthreshold slope devices are the other possible alternatives to conventional MOSFET based on emerging novel materials. This dissertation addresses the potential of both advanced materials and devices for development of next generation energy efficient integrated circuits. Among the different steep subthreshold slope devices, tunnel field effect transistor (TFET) has been considered as a promising candidate after MOSFET. A superior gate control on source-channel band-to-band tunneling providing subthreshold slopes well below than 60 mV/decade. With the emergence of atomically thin two-dimensional (2D) materials, interest in the design of TFET based on such novel 2D materials has also grown significantly. Graphene being the first and the most studied among 2D materials with exotic electronic and thermal properties. This dissertation primarily considers current transport modeling of graphene based tunnel devices from transport phenomena to energy efficient integrated circuit design. Three current transport models: semi-classical, semi-quantum and numerical simulations are described for the modeling of graphene nanoribbon tunnel field effect transistor (GNR TFET) where the semi-classical model is in close agreement with the quantum transport simulation. Moreover, the models produced are also extended for integrated circuit design using Verilog-A hardware description language for logic design. In order to overcome the challenges associated with the band gap engineering for making graphene transistor for logic operation, the promise of graphene based interlayer tunneling transistors are discussed along with their existing fundamental physical limitation of subthreshold slope. It has been found that such interlayer tunnel transistor has very poor electrostatic gate control on drain current. It gives subthreshold slope greater than the thermionic limit of 60 mV/decade at room temperature. In order to resolve such limitation of interlayer tunneling transistors, a new type of transistor named “junctionless tunnel effect transistor (JTET)” has been invented and modeled for the first time considering graphene-boron nitride (BN)-graphene and molybdenum disulfide (MoS2)-boron nitride (BN) heterostructures, where the interlayer tunneling mechanism controls the source-drain ballistic transport instead of depleting carriers in the channel. Steep subthreshold slope, low power and high frequency THz operation are few of the promising features studied for such graphene and MoS2 JTETs. From current transport modeling to energy efficient integrated circuit design using Verilog-A has been carried out for these new devices as well. Thus, findings in this dissertation would suggest the exciting opportunity of a new class of next generation energy efficient material based transistors as switches

Novel Approaches to Power Efficient GaN and Negative Capacitance Devices

Recent emergence of data-driven and computation hungry algorithms has fuelled the demand for energy and processing power at an unprecedented rate. Semiconductor industry is, therefore, under constant pressure towards developing energy efficient devices. A Shift towards materials with higher figure-of-merit compared to Si, such as GaN for power conversion is one of the options currently being pursued. A minimisation in parasitic and static power losses in GaN can be brought about by realising on-chip CMOS based gate drivers for GaN power devices. At present, p-channel MOSHFETs in GaN show poor performance due to the low mobility and the severe trade-off between |ION| and |Vth|. For the first time, it is shown that despite a poor hole mobility, it is possible to improve the on-current as well as minimise |ION| - |Vth| trade-off, by adopting a combination of techniques: using an AlGaN cap, biased two-dimensional electron gas, and shrinking source-gate and gate-drain access region and channel lengths. As part of this work, a novel vertical p-channel heterojunction tunnel FET (TFET) utilising polarisation induced tunnel junction (PITJ) is also explored, which unlike common TFETs, shows non-ambipolar transfer characteristics and a better electrostatic control over the tunneling region via the gate. Meeting the ever-increasing demand for computation would require continuous scaling of transistor physical dimensions and supply voltage. While a further reduction in physical dimension is expected to come from adopting a vertical integration scheme, scaling in supply voltage would require achieving sub-60 mV/dec of subthreshold swing. The two common approaches to achieve this are TFETs and negative capacitance (NC) FETs, where the NC operation is commonly associated with ferroelectric materials. This work develops a model to explain sub-60 mV/dec, observed in Ta2O5/ZnO thin-film-transistors, which is governed by the motion of oxygen ions inside Ta2O5, leading to NC under dynamic gate bias sweep

Etude des transistors MOSFET à barrière Schottky, à canal Silicium et Germanium sur couches minces

Until the early 2000’s Dennard’s scaling rules at the transistor level have enabled to achieve a performance gain while still preserving the basic structure of the MOSFET building block from one generation to the next. However, this conservative approach has already reached its limits as shown by the introduction of channel stressors for the sub-130 nm technological nodes, and later high-k/metal gate stacks for the sub-65 nm nodes. Despite the introduction of high-k gate dielectrics, constraints in terms of gate leakage and reliability have been delaying the diminution of the equivalent oxide thickness (EOT). Concurrently, lowering the supply voltage (VDD) has become a critical necessity to reduce both the active and passive power density in integrated circuits. Hence the challenge: how to keep decreasing both gate length and supply voltage faster than the EOT without losing in terms of ON-state/OFF-state performance trade-off? Several solutions can be proposed aiming at solving this conundrum for nanoscale transistors, with architectures in rupture with the plain old Silicon-based MOSFET with doped Source and Drain invented in 1960. One approach consists in achieving an ION increase while keeping IOFF (and Vth) mostly unchanged. Specifically, two options are considered in detail in this manuscript through a review of their respective historical motivations, state-of-the-art results as well as remaining fundamental (and technological) challenges: i/ the reduction of the extrinsic parasitic resistance through the implementation of metallic Source and Drain (Schottky Barrier FET architecture); ii/ the reduction of the intrinsic channel resistance through the implementation of Germanium-based mobility boosters (Ge CMOS, compressively-strained SiGe channels, n-sSi/p-sSiGe Dual Channel co-integration). In particular, we study the case of thin films on insulator (SOI, SiGeOI, GeOI substrates), a choice justified by: the preservation of the electrostatic integrity for the targeted sub-22nm nodes; the limitation of ambipolar leakage in SBFETs; the limitation of junction leakage in (low-bandgap) Ge-based FETs. Finally, we show why, and under which conditions the association of the SBFET architecture with a Ge-based channel could be potentially advantageous with respect to conventional Si CMOS.Jusqu’au début des années 2000, les règles de scaling de Dennard ont permis de réaliser des gains en performance tout en conservant la structure de la brique de base transistor d’une génération technologique à la suivante. Cependant, cette approche conservatrice a d’ores et déjà atteint ses limites, comme en témoigne l’introduction de la contrainte mécanique pour les générations sub-130nm, et les empilements de grille métal/high-k pour les nœuds sub-65nm. Malgré l’introduction de diélectriques à forte permittivité, des limites en termes de courants de fuite de grille et de fiabilité ont ralenti la diminution de l’épaisseur équivalente d’oxyde (EOT). De façon concommitante, la diminution de la tension d’alimentation (VDD) est devenue une priorité afin de réduire la densité de puissance dissipée dans les circuits intégrés. D’où le défi actuel: comment continuer de réduire à la fois la longueur de grille et la tension d’alimentation plus rapidement que l’EOT sans pour autant dégrader le rapport de performances aux états passant et bloqué (ON et OFF) ? Diverses solutions peuvent être proposées, passant par des architectures s’éloignant du MOSFET conventionnel à canal Si avec source et drain dopés tel que défini en 1960. Une approche consiste en réaliser une augmentation du courant passant (ION) tout en laissant le courant à l’état bloqué (IOFF) et la tension de seuil (Vth) inchangés. Concrètement, deux options sont considérées en détail dans ce manuscrit à travers une revue de leurs motivations historiques respectives, les résultats de l’état de l’art ainsi que les obstacles (fondamentaux et technologiques) à leur mise en œuvre : i/ la réduction de la résistance parasite extrinsèque par l’introduction de source et drain métalliques (architecture transistor à barrière Schottky) ; ii/ la réduction de la résistance de canal intrinsèque par l’introduction de matériaux à haute mobilité à base de Germanium (CMOS Ge, canaux SiGe en contrainte compressive, co-intégration Dual Channel n-sSi/p-sSiGe). En particulier, nous étudions le cas de couches minces sur isolant (substrats SOI, SiGeOI, GeOI), un choix motivé par: la préservation de l’intégrité électrostatique pour les nœuds technologiques sub-22nm; la limitation du courant de fuite ambipolaire dans les SBFETs; la limitation du courant de fuites de jonctions dans les MOSFETs à base de Ge (qui est un matériau à faible bandgap). Enfin, nous montrons pourquoi et dans quelles conditions l’association d’une architecture SBFET et d’un canal à base de Germanium peut être avantageuse vis-à-vis du CMOS Silicium conventionnel