108 research outputs found

    Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

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    The study presented here was initiated by a discussion to investigate the possibility of using synchrotron radiation as a source for the Next Generation Lithography (NGL) based on the EUV-concept (Extreme Ultra-Violet; here 13.5 nm or 11.3 nm radiation, respectively). The requirements are: 50 W, 2% bandwidth and minimal power outside this bandwidth. Three options were investigated. The first two deal with radiation from bending magnets and undulators. The results confirm the earlier work by Oxfords Instrument and others that these light-sources lack in-band power while emitting excessive out-of-band radiation. The third approach is a FEL (Free Electron Laser) driven by a 500 MeV linear accelerator with a superconducting mini-undulator as radiation emitting device. Such a device would produce in-band EUV-power in excess of 50 W with negligible out-of-band power.Comment: Submitted to Nuclear Instruments and Methods

    VUV/EUV ionising radiation and atoms and ions: dual laser plasma investigations

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    The interaction of ionising radiation with atoms and ions is a key fundamental process. This report concentrates on studies of photoexcitation/photoionisation using laser-produced plasmas as continuum sources and synchronised laser plasma plumes to provide the absorbing atom or ion species. Examples from studies of the interaction of ionising radiation with atoms and ions ranging from few-electron atomic and ionic systems to the many-electron high atomic number actinides are reviewed and illustrate the advantages and limitations of the Dual Laser Plasma technique

    Development of an advanced x-ray generator based on Compton back-scattering: a proposal for Science for Peace sub-program of NATO

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    An extended form of a cooperative project proposal is presented. The main goal of the proposal is the design and construction of a storage ring X-ray generator based on Compton backscattering. The project’s primary objectives and organisation, together with a draft plan for the required N-100 storage ring reconstruction effort, are outlined
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