Application of laser scanning confocal microscope in micro-electro-mechanical system

研究了激光共焦扫描显微镜(LSCM)在微结构分析中的应用,综述了该项应用的优势。LSCM的高分辨率和光强调节功能,使其可用于大角度测量;与图像处理系统相结合,便于微结构的定性和定量分析;而全自动样片台沿X轴和Y轴的自动扫描实现了图像的拼接功能。实验结果表明:运用LSCM测量的斜面最大角度至少可以达到50°;在悬臂梁的形貌分析中,可获得清晰的三维形貌,同时通过二维定量分析精确测得其形变为3.145μm;在100×物镜下,运用拼接功能获得384μm×288μm的视场面积,解决了高放大倍数下,在单帧显微图像中无法获取所观测对象全貌的问题。LSCM在微结构分析中的应用弥补了其它形貌分析设备测量功能上的不足,提升了微机电系统的测试水平。An application of Laser Scanning Confocal Microscope (LSCM) in micro-structure analysis was discussed in order to enhance the analyzing and measuring levels of micro structure.LSCM could be used to measure large angle because of its high resolution and adjustable light intensity,and could analyze the micro structure by combining with picture disposal system qualitatively and quantitatively,also its full-automatic sample stand could automatically scan along X axis and Y axis to realize a picture mosaic.The experimental results indicate that the maximum slope angle measured by LSCM reaches at least 50°,and the clear three dimensional profile is obtained in the profile analysis of cantilever.Meanwhile,the deformation accurately measured by two dimensional quantitative analysis is 3.145 μm,and the field area is 384 μm×288 μm in mosaic function equipped with LSCM in 100× objective,which can solve the problem that the watched object's total shape in single frame micrographic image can not be obtained under high microscopic enlargement times.Experimental results show that the LSCM can make up for measuring functional deficiency of other profile analytic equipment and can improve the testing level of MEMS.厦门大学科技创新预研基金资助项目(No.Y07002

Contact Lithography Method for Preparing Nano-Gap Electrodes

提出一种称之为“阵列误差光刻“的方法。采用两次接触光刻和两次金属剥离工艺,形成两组顶端相对的电极阵列,利用第二次接触光刻时的对准误差,在这两组电极之间按照概率分布形成了一个最小的纳米间隙。设计并制作了一种含有16对电极的验证器件,按照光刻对准误差的范围为±2.0μM进行估算,理论上最小间隙的分布范围为0~150 nM。通过扫描电镜测量实际制造的样品,获得了大量50 nM以下的电极对,最小间隙为16.6 nM,并且制备的电极层厚度可以达到200 nM,使串联电阻较小。这种纳米间隙电极的制备方法简单有效。An approach so-called "arrayed error lithography" was proposed.Two groups of electrodes array were prepared from tip to tip by two steps of the contact lithographies and metal lift-off processes.A minimized nano-gap between two groups of electrodes was formed in the probability distribution by the alignment error in the second contact lithography.A verification device with 16 pairs of electrodes was designed and fabricated.The minimum nano-gap range from 0 to 150 nm can be realized in theory if the lithography alignment error is set as ±2.0 μm.A number of electrode pairs below 50 nm were found in the samples by scanning electron microscopy(SEM) while a minimized gap is 16.6 nm.In addition,the thickness of the electrode can reach 200 nm to obtain lower serial resistance.The preparation method of nano-gap electrodes is easy and effective.国家自然科学基金资助项目(61071010

JUNO Sensitivity on Proton Decay p→νˉK+p\to \bar\nu K^+ Searches

The Jiangmen Underground Neutrino Observatory (JUNO) is a large liquid scintillator detector designed to explore many topics in fundamental physics. In this paper, the potential on searching for proton decay in $p\to \bar\nu K^+$ mode with JUNO is investigated.The kaon and its decay particles feature a clear three-fold coincidence signature that results in a high efficiency for identification. Moreover, the excellent energy resolution of JUNO permits to suppress the sizable background caused by other delayed signals. Based on these advantages, the detection efficiency for the proton decay via $p\to \bar\nu K^+$ is 36.9% with a background level of 0.2 events after 10 years of data taking. The estimated sensitivity based on 200 kton-years exposure is $9.6 \times 10^{33}$ years, competitive with the current best limits on the proton lifetime in this channel

JUNO sensitivity on proton decay p → ν K + searches*

The Jiangmen Underground Neutrino Observatory (JUNO) is a large liquid scintillator detector designed to explore many topics in fundamental physics. In this study, the potential of searching for proton decay in the $p\to \bar{\nu} K^+$ mode with JUNO is investigated. The kaon and its decay particles feature a clear three-fold coincidence signature that results in a high efficiency for identification. Moreover, the excellent energy resolution of JUNO permits suppression of the sizable background caused by other delayed signals. Based on these advantages, the detection efficiency for the proton decay via $p\to \bar{\nu} K^+$ is 36.9% ± 4.9% with a background level of $0.2\pm 0.05({\rm syst})\pm$$0.2({\rm stat})$ events after 10 years of data collection. The estimated sensitivity based on 200 kton-years of exposure is $9.6 \times 10^{33}$ years, which is competitive with the current best limits on the proton lifetime in this channel and complements the use of different detection technologies