Design, Optimization and Fabrication of Amorphous Silicon Tunable RF MEMS Inductors and Transformers

High performance inductors are playing an increasing role in modern communication systems. Despite the superior performance offered by discrete components, parasitic capacitances from bond pads, board traces and packaging leads reduce the high frequency performance and contribute to the urgency of an integrated solution. Embedded inductors have the potential for significant increase in reliability and performance of the IC. Due to the driving force of CMOS integration and low costs of silicon-based IC fabrication, these inductors lie on a low resistivity silicon substrate, which is a major source of energy loss and limits the frequency response. Therefore, the quality factor of inductors fabricated on silicon continues to be low. The research presented in this thesis investigates amorphous Si and porous Si to improve the resistivity of Si substrates and explores amorphous Si as a structural material for low temperature MEMS fabrication. Planar inductors are built-on undoped amorphous Si in a novel application and a 56% increase in quality factor was measured. Planar inductors are also built-on a porous Si and amorphous Si bilayer and showed 47% improvement. Amorphous Si is also proposed as a low temperature alternative to polysilicon for MEMS devices. Tunable RF MEMS inductors and transformers are fabricated based on an amorphous Si and aluminum bimorph coil that is suspended and warps in a controllable manner. The 3-D displacement is accurately predicted by thermomechanical simulations. The tuning of the devices is achieved by applying a DC voltage and due to joule heating the air gap can be adjusted. A tunable inductor with a 32% tuning range from 5.6 to 8.2 nH and a peak Q of 15 was measured. A transformer with a suspended coil demonstrated a 24% tuning range of the mutual coupling between two stacked windings. The main limitation posed by post-CMOS integration is a strict thermal budget which cannot exceed a critical temperature where impurities can diffuse and materials properties can change. The research carried out in this work accommodates this temperature restriction by limiting the RF fabrication processes to 150°C to facilitate system integration on silicon

A constraint-based approach for assessing the capabilities of existing designs to handle product variation

All production machinery is designed with an inherent capability to handle slight variations in product. This is initially achieved by simply providing adjustments to allow, for example, changes that occur in pack sizes to be accommodated, through user settings or complete sets of change parts. By the appropriate use of these abilities most variations in product can be handled. However when extreme conditions of setups, major changes in product size and configuration, are considered there is no guarantee that the existing machines are able to cope. The problem is even more difficult to deal with when completely new product families are proposed to be made on an existing product line. Such changes in product range are becoming more common as producers respond to demands for ever increasing customization and product differentiation. An issue exists due to the lack of knowledge on the capabilities of the machines being employed. This often forces the producer to undertake a series of practical product trials. These however can only be undertaken once the product form has been decided and produced in sufficient numbers. There is then little opportunity to make changes that could greatly improve the potential output of the line and reduce waste. There is thus a need for a supportive modelling approach that allows the effect of variation in products to be analyzed together with an understanding of the manufacturing machine capability. Only through their analysis and interaction can the capabilities be fully understood and refined to make production possible. This thesis presents a constraint-based approach that offers a solution to the problems above. While employing this approach it has been shown that, a generic process can be formed to identify the limiting factors (constraints) of variant products to be processed. These identified constraints can be mapped to form the potential limits of performance for the machine. The limits of performance of a system (performance envelopes) can be employed to assess the design capability to cope with product variation. The approach is successfully demonstrated on three industrial case studies.EThOS - Electronic Theses Online ServiceGBUnited Kingdo

A constraint-based approach for assessing the capabilities of existing designs to handle product variation

All production machinery is designed with an inherent capability to handle slight variations in product. This is initially achieved by simply providing adjustments to allow, for example, changes that occur in pack sizes to be accommodated, through user settings or complete sets of change parts. By the appropriate use of these abilities most variations in product can be handled. However when extreme conditions of setups, major changes in product size and configuration, are considered there is no guarantee that the existing machines are able to cope. The problem is even more difficult to deal with when completely new product families are proposed to be made on an existing product line. Such changes in product range are becoming more common as producers respond to demands for ever increasing customization and product differentiation. An issue exists due to the lack of knowledge on the capabilities of the machines being employed. This often forces the producer to undertake a series of practical product trials. These however can only be undertaken once the product form has been decided and produced in sufficient numbers. There is then little opportunity to make changes that could greatly improve the potential output of the line and reduce waste. There is thus a need for a supportive modelling approach that allows the effect of variation in products to be analyzed together with an understanding of the manufacturing machine capability. Only through their analysis and interaction can the capabilities be fully understood and refined to make production possible. This thesis presents a constraint-based approach that offers a solution to the problems above. While employing this approach it has been shown that, a generic process can be formed to identify the limiting factors (constraints) of variant products to be processed. These identified constraints can be mapped to form the potential limits of performance for the machine. The limits of performance of a system (performance envelopes) can be employed to assess the design capability to cope with product variation. The approach is successfully demonstrated on three industrial case studies.EThOS - Electronic Theses Online ServiceGBUnited Kingdo

Research and Technology, 1998

This report selectively summarizes the NASA Lewis Research Center's research and technology accomplishments for the fiscal year 1998. It comprises 134 short articles submitted by the staff scientists and engineers. The report is organized into five major sections: Aeronautics, Research and Technology, Space, Engineering and Technical Services, and Commercial Technology. A table of contents and an author index have been developed to assist readers in finding articles of special interest. This report is not intended to he a comprehensive summary of all the research and technology work done over the past fiscal year. Most of the work is reported in Lewis-published technical reports, journal articles, and presentations prepared by Lewis staff and contractors. In addition, university grants have enabled faculty members and graduate students to engage in sponsored research that is reported at technical meetings or in journal articles. For each article in this report, a Lewis contact person has been identified, and where possible, reference documents are listed so that additional information can be easily obtained. The diversity of topics attests to the breadth of research and technology being pursued and to the skill mix of the staff that makes it possible. At the time of publication, NASA Lewis was undergoing a name change to the NASA John H. Glenn Research Center at Lewis Field

Electroosmotic Soft Actuators

This dissertation details the research involved in creating the first paper-based soft actuator driven by electroosmosis. To accomplish this, research breakthroughs were made in the fields of electrokinetic pumping and device manufacturing using soft materials. Electroosmosis is an electrically induced microfluidic flow phenomenon. When an electric field is applied to the fluid, across the microchannels, electroosmotic flow occurs in the direction of the applied electric field. In this work, liquid was electroosmotically displaced within a flexible microfluidic device to actuate an elastomeric membrane. The goal of this work was to create a fully sealed fluidic actuator. It was therefore necessary to encapsulate the pumping fluid within the device, and to maximize pressure it was necessary to eliminate compliance caused by trapped gases. Electrolytic gas formation is well known to disrupt pumping in DC electroosmotic systems that use water as the pumping liquid. In this work, electrolysis was eliminated by replacing water with propylene carbonate (PC): PC was determined to be electrochemically stable up to at least 10 kV, in the absence of moisture or salt contaminants. Bubble-free electroosmotic pumping with PC was achieved within sealed miniature actuators, which could be continuously operated for at least one hour. Benchtop fabrication techniques were developed to build encapsulated fluidic actuators composed entirely of soft, flexible materials. Stretchable electrochemically stable electrodes were made using a conductive paint made by mixing carbon nanoparticles into a silicone base. High-density microchannel networks were incorporated by using paper and other flexible porous materials, instead of conventional planar replica-molded microchannels. The device was filled with pumping fluid without the use of external tubing, and then encapsulated by casting a film of elastomer over the filled reservoir to form the actuating membrane. The resulting actuators were flexible and stretchable, demonstrating significant membrane deformations (hundreds of micrometers) within seconds of applying the electric field and ability to lift large loads (tens of grams). These polymeric electroosmotic actuators are unique among electroactive polymer actuators because they are able to simultaneously generate high force as well as large stroke. It is envisioned that this research will pave the way for the creation of artificial muscles and smart shape-changing materials that can be actuated by electroosmosis