An Elementary Theory of Layout Wirability

Coordinated Science Laboratory was formerly known as Control Systems LaboratorySemiconductor Research Corporation / SRC RSCH 84-06-04

Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance

A new fabrication technology for stretchable electrical interconnections is presented. This technology can be used to connect various non-stretchable polyimide islands hosting conventional electronic components. The interconnections are realized by patterning a 200 nm thick sputter-deposited gold film into meandering horseshoe shapes, functioning as 'two-dimensional springs' when embedded in a silicone elastomer. Polyimide support is introduced around the meandering conductors as a means to improve the mechanical performance. Processing is done on a temporary carrier; the islands and interconnections are embedded in polydimethylsiloxane in a final stage. To this end, a release technique compatible with high temperatures up to 350 °C based on the evaporation of a 400 nm thick layer of potassium chloride is developed. Test structures consisting of stretchable interconnections with a varying polyimide support width were fabricated. These were strained up to twice their original length without compromising their functionality. Also cyclic mechanical loading at various strains was performed, indicating the influence of the polyimide support width on the lifetime. At strains of 10%, a minimum lifetime of 500 000 cycles is demonstrated. The presented technology thus provides a promising route towards the fabrication of stretchable electronic circuits with enhanced reliability

Functionalized three-dimensional multilayer ceramic modules

Three-dimensional interconnect devices are still strongly related to plastic materials. Since the use of these materials is limited in harsh environments, there is an application gap, which could be filled by ceramic circuit carriers. Low-temperature cofired ceramics (LTCC) offer promising solutions to fill this gap. This work provides a feasibility study, including the whole technological chain of ceramic multilayer processing. Targeting a curved multilayer substrate, fully equipped with SMD (Surface-mounted device) components, the particularities of single process steps are investigated. Two shaping methods based on quartz glass molds are compared with regard to shape fidelity and technological effort. The investigation of internal conductor lines and via connections reveals that the metallization should have a minimum width of 200 µm and the via diameter is limited to 150 µm. Further considerations focus on the possible footprint of components and use of cavities to increase the footprint of components. The limits of wire bonding on curved surfaces were inspected. Finally, the work presents a demonstrator of a fully equipped four-layer ceramic circuit, including internal wiring. Hence, the transfer of the 2.5-dimensional multilayer ceramic technology into the third dimension is proven

Fully Biodegradable Temperature Sensors with High Mechanical Stability and Low Thermal Mass

In this work we have successfully designed, fabricated and extensively characterized a flexible and stretchable temperature sensor that biodegrade in the environment. The design is based on a ultrathin resistance temperature detector (RTD). The core material used is Magnesium, which is transient and biocompatible material. It has been encapsulated from both sides with a transparent and degradable elastomer. It shows high mechanical stability and a transient time of two month