A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

International audienceThere are wafer fabrication processes in cluster tools that require wafer revisiting. The adoption of a swap strategy for such tools forms a 3-wafer cyclic (3-WC) period with three wafers completed in each period. It has been shown that, by such a scheduling strategy, the minimal cycle time cannot be reached for some cases. This raises a question of whether there is a scheduling method such that the performance can be improved. To answer this question, a dual-arm cluster tool with wafer revisiting is modeled by a Petri net. Based on the model, the dynamical behavior of the process is analyzed. Then, a 2-wafer cyclic (2-WC) scheduling strategy is revealed for the first time. Cycle time analysis is conducted for the proposed strategy to evaluate its performance. It shows that, for some cases, the performance obtained by a 2-WC schedule is better than that obtained by any existing 3-WC ones. Thus, they can be used to complement each other in scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are given

Lifted structural invariant analysis of Petri net product lines

Petri nets are commonly used to represent concurrent systems. However, they lack support for modelling and analysing system families, like variants of controllers, different variations of a process model, or the possible configurations of a flexible assembly line. To facilitate modelling potentially large collections of similar systems, in this paper, we enrich Petri nets with variability mechanisms based on product line engineering. Moreover, we present methods for the efficient analysis of the place and transition invariants in all defined versions of a Petri net. Efficiency is achieved by analysing the system family as a whole, instead of analysing each possible net variant separately. For this purpose, we lift the notion of incidence matrix to the product line level, and rely on constraint solving techniques. We present tool support and evaluate the benefits of our techniques on synthetic and realistic examples, achieving in some cases speed-ups of two orders of magnitude with respect to analysing each net variant separatelyThis work has been funded by the Spanish Ministry of Science (PID2021-122270OB-I00) and the R&D programme of Madrid (P2018/TCS-4314

Makespan Minimization in Re-entrant Permutation Flow Shops

Re-entrant permutation flow shop problems occur in practical applications such as wafer manufacturing, paint shops, mold and die processes and textile industry. A re-entrant material flow means that the production jobs need to visit at least one working station multiple times. A comprehensive review gives an overview of the literature on re-entrant scheduling. The influence of missing operations received just little attention so far and splitting the jobs into sublots was not examined in re-entrant permutation flow shops before. The computational complexity of makespan minimization in re-entrant permutation flow shop problems requires heuristic solution approaches for large problem sizes. The problem provides promising structural properties for the application of a variable neighborhood search because of the repeated processing of jobs on several machines. Furthermore the different characteristics of lot streaming and their impact on the makespan of a schedule are examined in this thesis and the heuristic solution methods are adjusted to manage the problem’s extension

Expanding the Horizons of Manufacturing: Towards Wide Integration, Smart Systems and Tools

This research topic aims at enterprise-wide modeling and optimization (EWMO) through the development and application of integrated modeling, simulation and optimization methodologies, and computer-aided tools for reliable and sustainable improvement opportunities within the entire manufacturing network (raw materials, production plants, distribution, retailers, and customers) and its components. This integrated approach incorporates information from the local primary control and supervisory modules into the scheduling/planning formulation. That makes it possible to dynamically react to incidents that occur in the network components at the appropriate decision-making level, requiring fewer resources, emitting less waste, and allowing for better responsiveness in changing market requirements and operational variations, reducing cost, waste, energy consumption and environmental impact, and increasing the benefits. More recently, the exploitation of new technology integration, such as through semantic models in formal knowledge models, allows for the capture and utilization of domain knowledge, human knowledge, and expert knowledge toward comprehensive intelligent management. Otherwise, the development of advanced technologies and tools, such as cyber-physical systems, the Internet of Things, the Industrial Internet of Things, Artificial Intelligence, Big Data, Cloud Computing, Blockchain, etc., have captured the attention of manufacturing enterprises toward intelligent manufacturing systems

Petri Net-Based Scheduling of Single-Arm Cluster Tools with Reentrant Atomic Layer Deposition Processes

International audienceFor some wafer fabrication processes in cluster tools, e.g., atomic layer deposition (ALD), wafer revisiting is required. Typically, in such processes, wafers need to visit two consecutive processing steps several times. Such a revisiting process can be denoted as (mi, mi + 1)h, where i means the ith-step and mi and mi + 1 mean the corresponding quantity of the processing modules in i and (i+1)th steps, and h the number of visiting times. This paper conducts a study for scheduling single-arm cluster tools with such a wafer revisiting process. The system is modeled by Petri nets (PNs) to guarantee the feasibility of robot activities. Based on the model, a deadlock avoidance policy is presented. With the control policy, cycle time analysis for the revisiting process is made. With the fact that wafer processing times are much longer than robot movement times in cluster tools, it is shown that, when mi = mi + 1 = 1, i.e., each step has only one processing module, the optimal one-wafer cyclic schedule is deterministic and unique, and the minimal cycle time can be calculated by an analytical expression. It is also shown that, when mi = 1 and mi + 1 = 2 or mi = 2 and mi + 1 = 1, the optimal one-wafer cyclic schedule can be obtained by finding h deterministic schedules and the one with the least cycle time. A novel analytical method is finally presented to schedule the overall system containing such reentrant wafer flow. This represents a significant advance in single-arm cluster equipment automation

Microgravity Science and Applications: Program Tasks and Bibliography for Fiscal Year 1996

NASA's Microgravity Science and Applications Division (MSAD) sponsors a program that expands the use of space as a laboratory for the study of important physical, chemical, and biochemical processes. The primary objective of the program is to broaden the value and capabilities of human presence in space by exploiting the unique characteristics of the space environment for research. However, since flight opportunities are rare and flight research development is expensive, a vigorous ground-based research program, from which only the best experiments evolve, is critical to the continuing strength of the program. The microgravity environment affords unique characteristics that allow the investigation of phenomena and processes that are difficult or impossible to study an Earth. The ability to control gravitational effects such as buoyancy driven convection, sedimentation, and hydrostatic pressures make it possible to isolate phenomena and make measurements that have significantly greater accuracy than can be achieved in normal gravity. Space flight gives scientists the opportunity to study the fundamental states of physical matter-solids, liquids and gasses-and the forces that affect those states. Because the orbital environment allows the treatment of gravity as a variable, research in microgravity leads to a greater fundamental understanding of the influence of gravity on the world around us. With appropriate emphasis, the results of space experiments lead to both knowledge and technological advances that have direct applications on Earth. Microgravity research also provides the practical knowledge essential to the development of future space systems. The Office of Life and Microgravity Sciences and Applications (OLMSA) is responsible for planning and executing research stimulated by the Agency's broad scientific goals. OLMSA's Microgravity Science and Applications Division (MSAD) is responsible for guiding and focusing a comprehensive program, and currently manages its research and development tasks through five major scientific areas: biotechnology, combustion science, fluid physics, fundamental physics, and materials science. FY 1996 was an important year for MSAD. NASA continued to build a solid research community for the coming space station era. During FY 1996, the NASA Microgravity Research Program continued investigations selected from the 1994 combustion science, fluid physics, and materials science NRAS. MSAD also released a NASA Research Announcement in microgravity biotechnology, with more than 130 proposals received in response. Selection of research for funding is expected in early 1997. The principal investigators chosen from these NRAs will form the core of the MSAD research program at the beginning of the space station era. The third United States Microgravity Payload (USMP-3) and the Life and Microgravity Spacelab (LMS) missions yielded a wealth of microgravity data in FY 1996. The USMP-3 mission included a fluids facility and three solidification furnaces, each designed to examine a different type of crystal growth

Life Sciences Program Tasks and Bibliography for FY 1997

This document includes information on all peer reviewed projects funded by the Office of Life and Microgravity Sciences and Applications, Life Sciences Division during fiscal year 1997. This document will be published annually and made available to scientists in the space life sciences field both as a hard copy and as an interactive internet web page

Life Sciences Program Tasks and Bibliography for FY 1996

This document includes information on all peer reviewed projects funded by the Office of Life and Microgravity Sciences and Applications, Life Sciences Division during fiscal year 1996. This document will be published annually and made available to scientists in the space life sciences field both as a hard copy and as an interactive Internet web page

Advances in Manufacturing Technology XXVII: Proceedings of the 11th International Conference on Manufacturing Research (ICMR2013)

ICMR2013 was organised by Cranfield University on the 19-20 September 2013. The conference focuses on any aspects of product development, manufacturing technology, manufacturing systems, information systems and digital technologies. It provides an excellent avenue for researchers to present state-of-the-art multidisciplinary manufacturing research and exchange ideas. In addition to the four keynote speeches from Airbus and Rolls-Royce and three invited presentations, there are 108 papers in these proceedings. These papers are split into 24 technical sessions. The International Conference on Manufacturing Research is a major event for academics and industrialists engaged in manufacturing research. Held annually in the UK since the late 1970s, the conference is renowned as a friendly and inclusive environment that brings together a broad community of researchers who share a common goal; developing and managing the technologies and operations that are key to sustaining the success of manufacturing businesses. For over two decades, ICMR has been the main manufacturing research conference organised in the UK, successfully bringing researchers, academics and industrialists together to share their knowledge and experiences. Initiated a National Conference by the Consortium of UK University Manufacturing Engineering Heads (COMEH), it became an International Conference in 2003. COMEH is an independent body established in 1978. Its main aim is to promote manufacturing engineering education, training and research. To achieve this, the Consortium maintains a close liaison with government bodies concerned with the training and continuing development of professional engineers, while responding to the appropriate consultative and discussion documents and other initiatives. COMEH is represented on the Engineering Professor’s council (EPC) and it organises and supports national manufacturing engineering education research conferences and symposia