Study Of Nanoscale Cmos Device And Circuit Reliability

The development of semiconductor technology has led to the significant scaling of the transistor dimensions -The transistor gate length drops down to tens of nanometers and the gate oxide thickness to 1 nm. In the future several years, the deep submicron devices will dominate the semiconductor industry for the high transistor density and the corresponding performance enhancement. For these devices, the reliability issues are the first concern for the commercialization. The major reliability issues caused by voltage and/or temperature stress are gate oxide breakdown (BD), hot carrier effects (HCs), and negative bias temperature instability (NBTI). They become even more important for the nanoscale CMOS devices, because of the high electrical field due to the small device size and high temperature due to the high transistor densities and high-speed performances. This dissertation focuses on the study of voltage and temperature stress-induced reliability issues in nanoscale CMOS devices and circuits. The physical mechanisms for BD, HCs, and NBTI have been presented. A practical and accurate equivalent circuit model for nanoscale devices was employed to simulate the RF performance degradation in circuit level. The parameter measurement and model extraction have been addressed. Furthermore, a methodology was developed to predict the HC, TDDB, and NBTI effects on the RF circuits with the nanoscale CMOS. It provides guidance for the reliability considerations of the RF circuit design. The BD, HC, and NBTI effects on digital gates and RF building blocks with the nanoscale devices low noise amplifier, oscillator, mixer, and power amplifier, have been investigated systematically. The contributions of this dissertation include: It provides a thorough study of the reliability issues caused by voltage and/or temperature stresses on nanoscale devices from device level to circuit level; The more real voltage stress case high frequency (900 MHz) dynamic stress, has been first explored and compared with the traditional DC stress; A simple and practical analytical method to predict RF performance degradation due to voltage stress in the nanoscale devices and RF circuits was given based on the normalized parameter degradations in device models. It provides a quick way for the designers to evaluate the performance degradations; Measurement and model extraction technologies, special for the nanoscale MOSFETs with ultra-thin, ultra-leaky gate oxide, were addressed and employed for the model establishments; Using the present existing computer-aided design tools (Cadence, Agilent ADS) with the developed models for performance degradation evaluation due to voltage or/and temperature stress by simulations provides a potential way that industry could use to save tens of millions of dollars annually in testing costs. The world now stands at the threshold of the age of nanotechnology, and scientists and engineers have been exploring here for years. The reliability is the first challenge for the commercialization of the nanoscale CMOS devices, which will be further downscaling into several tens or ten nanometers. The reliability is no longer the post-design evaluation, but the pre-design consideration. The successful and fruitful results of this dissertation, from device level to circuit level, provide not only an insight on how the voltage and/or temperature stress effects on the performances, but also methods and guidance for the designers to achieve more reliable circuits with nanoscale MOSFETs in the future

Strain-Engineered MOSFETs

This book brings together new developments in the area of strain-engineered MOSFETs using high-mibility substrates such as SIGe, strained-Si, germanium-on-insulator and III-V semiconductors into a single text which will cover the materials aspects, principles, and design of advanced devices, their fabrication and applications. The book presents a full TCAD methodology for strain-engineering in Si CMOS technology involving data flow from process simulation to systematic process variability simulation and generation of SPICE process compact models for manufacturing for yield optimization

Miniaturized Transistors, Volume II

In this book, we aim to address the ever-advancing progress in microelectronic device scaling. Complementary Metal-Oxide-Semiconductor (CMOS) devices continue to endure miniaturization, irrespective of the seeming physical limitations, helped by advancing fabrication techniques. We observe that miniaturization does not always refer to the latest technology node for digital transistors. Rather, by applying novel materials and device geometries, a significant reduction in the size of microelectronic devices for a broad set of applications can be achieved. The achievements made in the scaling of devices for applications beyond digital logic (e.g., high power, optoelectronics, and sensors) are taking the forefront in microelectronic miniaturization. Furthermore, all these achievements are assisted by improvements in the simulation and modeling of the involved materials and device structures. In particular, process and device technology computer-aided design (TCAD) has become indispensable in the design cycle of novel devices and technologies. It is our sincere hope that the results provided in this Special Issue prove useful to scientists and engineers who find themselves at the forefront of this rapidly evolving and broadening field. Now, more than ever, it is essential to look for solutions to find the next disrupting technologies which will allow for transistor miniaturization well beyond silicon’s physical limits and the current state-of-the-art. This requires a broad attack, including studies of novel and innovative designs as well as emerging materials which are becoming more application-specific than ever before

Analyse et modélisation des phénomènes de mismatch des transistors MOSFET avancées

For correct operation, certain analog and digital circuits, such as current mirrors or SRAM, require pairs of MOS transistors that are electrically identical. Real devices, however, suffer from random local variations in the electrical parameters, a problem referred to as mismatch. The aim of this thesis is to understand the physical causes of mismatch, to quantify this phenomenon, and to propose solutions that enable to reduce its effects. In this context, four major areas are treated. The first one focuses on the optimization of mismatch measurement methodologies. A new technique for the measurement of Vt and β mismatch and an ID mismatch model are proposed, analyzed and applied to experimental data for 28 nm Bulk and FD SOI technologies. The second area focuses on the characterization of different configurations of MOS transistors in order to propose design architectures that are optimized for certain applications. Specifically, the possibility of replacing LDEMOS with transistors in cascode configuration is analyzed. The third area focuses on the analysis and modeling of mismatch phenomena in advanced Bulk and SOI transistors. Three aspects are analyzed: 1) the impact of the introduction of germanium in P channel of 28nm BULK transistors; 2) the elimination of the metal gate contribution to Vt mismatch by using 20nm Gate-last Bulk technology; 3) a descriptive study of the principal contributions to Vt, β and ID mismatch in 28 and 14 nm FD SOI technologies. The last area treats the mismatch trends with transistor aging. NBTI stress tests were applied to PMOS 28nm FD SOI transistors. Models of the Vt and β mismatch trends as a function of the induced interface traps and fixed charges at the Si/SiO2 interface and in the oxide were developed and discussed.Afin de réaliser correctement leur fonction, certains blocs analogiques ou numériques comme les miroirs de courant ou les SRAM, nécessitent des paires de transistors MOS électriquement identiques. Cependant, les dispositifs sur silicium, même appariés, subissent des variations locales aléatoires ce qui fait varier leurs performances électriques. Ce phénomène est connu sous le nom désappariement. L'objectif de cette thèse est de comprendre les causes physiques de ce désappariement, de le quantifier et de proposer des solutions pour le réduire. Dans ce contexte, quatre thèmes principaux sont développés. Le premier thème se focalise sur l'optimisation des méthodologies de mesures des phénomènes de désappariement. Une nouvelle méthode de mesure du désappariement de Vt et de β ainsi qu'un nouveau modèle de désappariement de ID sont proposés, analysés et appliqués à des données mesurées sur des technologies 28nm Bulk et FD SOI. Le second thème se concentre sur la caractérisation des différentes configurations de transistor MOS afin de proposer l'architecture optimale en fonction des applications visées. Ainsi, la possibilité de remplacer le LDEMOS par une configuration cascode est analysée en détail. Le troisième thème se focalise sur l'analyse et la modélisation des phénomènes de désappariement des transistors MOS avancés. Trois aspects sont analysés : 1) l'introduction du Ge dans le canal P des technologies 28nm BULK, 2) la suppression de la contribution de la grille sur le désappariement de Vt en utilisant la technologie 20 nm métal-Gate-Last 3) un descriptif des principaux contributeurs au désappariement de Vt, β et ID dans les technologies 28 et 14nm FD SOI. Le dernier thème traite du comportement du désappariement des transistors MOS après vieillissement. Un vieillissement NBTI a été appliqué sur des PMOS de la technologie 28nm FD SOI. Des modèles de comportement de Vt et de β en fonction du nombre de charges fixes ou d'états d'interfaces induits à l'interface Si/SiO2 ou dans l'oxyde sont proposés et analysés

Advanced Silicon and Germanium Transistors for Future P-channel MOSFET Applications

Ph.DDOCTOR OF PHILOSOPH

Cmos Rf Cituits Sic] Variability And Reliability Resilient Design, Modeling, And Simulation

The work presents a novel voltage biasing design that helps the CMOS RF circuits resilient to variability and reliability. The biasing scheme provides resilience through the threshold voltage (VT) adjustment, and at the mean time it does not degrade the PA performance. Analytical equations are established for sensitivity of the resilient biasing under various scenarios. Power Amplifier (PA) and Low Noise Amplifier (LNA) are investigated case by case through modeling and experiment. PTM 65nm technology is adopted in modeling the transistors within these RF blocks. A traditional class-AB PA with resilient design is compared the same PA without such design in PTM 65nm technology. Analytical equations are established for sensitivity of the resilient biasing under various scenarios. A traditional class-AB PA with resilient design is compared the same PA without such design in PTM 65nm technology. The results show that the biasing design helps improve the robustness of the PA in terms of linear gain, P1dB, Psat, and power added efficiency (PAE). Except for post-fabrication calibration capability, the design reduces the majority performance sensitivity of PA by 50% when subjected to threshold voltage (VT) shift and 25% to electron mobility (μn) degradation. The impact of degradation mismatches is also investigated. It is observed that the accelerated aging of MOS transistor in the biasing circuit will further reduce the sensitivity of PA. In the study of LNA, a 24 GHz narrow band cascade LNA with adaptive biasing scheme under various aging rate is compared to LNA without such biasing scheme. The modeling and simulation results show that the adaptive substrate biasing reduces the sensitivity of noise figure and minimum noise figure subject to process variation and iii device aging such as threshold voltage shift and electron mobility degradation. Simulation of different aging rate also shows that the sensitivity of LNA is further reduced with the accelerated aging of the biasing circuit. Thus, for majority RF transceiver circuits, the adaptive body biasing scheme provides overall performance resilience to the device reliability induced degradation. Also the tuning ability designed in RF PA and LNA provides the circuit post-process calibration capability

Rf Power Amplifier And Oscillator Design For Reliability And Variability

CMOS RF circuit design has been an ever-lasting research field. It gained so much attention since RF circuits have high mobility and wide band efficiency, while CMOS technology has the advantage of low cost and better capability of integration. At the same time, IC circuits never stopped scaling down for the recent many decades. Reliability issues with RF circuits have become more and more severe with device scaling down: reliability effects such as gate oxide break down, hot carrier injection, negative bias temperature instability, have been amplified as the device size shrinks. Process variability issues also become more predominant as the feature size decreases. With these insights provided, reliability and variability evaluations on typical RF circuits and possible compensation techniques are highly desirable. In this work, a class E power amplifier is designed and laid out using TSMC 0.18 µm RF technology and the chip was fabricated. Oxide stress and hot electron tests were carried out at elevated supply voltage, fresh measurement results were compared with different stress conditions after 10 hours. Test results matched very well with mixed mode circuit simulations, proved that hot carrier effects degrades PA performances like output power, power efficiency, etc. Self- heating effects were examined on a class AB power amplifier since PA has high power operations. Device temperature simulation was done both in DC and mixed mode level. Different gate biasing techniques were analyzed and their abilities to compensate output power were compared. A simple gate biasing circuit turned out to be efficient to compensate selfheating effects under different localized heating situations. iv Process variation was studied on a classic Colpitts oscillator using Monte-Carlo simulation. Phase noise was examined since it is a key parameter in oscillator. Phase noise was modeled using analytical equations and supported by good match between MATLAB results and ADS simulation. An adaptive body biasing circuit was proposed to eliminate process variation. Results from probability density function simulation demonstrated its capability to relieve process variation on phase noise. Standard deviation of phase noise with adaptive body bias is much less than the one without compensation. Finally, a robust, adaptive design technique using PLL as on-chip sensor to reduce Process, Voltage, Temperature (P.V.T.) variations and other aging effects on RF PA was evaluated. The frequency and phase of ring oscillator need to be adjusted to follow the frequency and phase of input in PLL no matter how the working condition varies. As a result, the control signal of ring oscillator has to fluctuate according to the working condition, reflecting the P.V.T changes. RF circuits suffer from similar P.V.T. variations. The control signal of PLL is introduced to RF circuits and converted to the adaptive tuning voltage for substrate bias. Simulation results illustrate that the PA output power under different variations is more flat than the one with no compensation. Analytical equations show good support to what has been observed

Caractérisation et modélisation de la fiabilité relative au piégeage dans des transistors décananométriques et des mémoires SRAM en technologie FDSOI

Nowadays, microelectronic industry is able to manufacture transistors with gate length down to 30nm.At such scales, the variability and reliability issues are a growing concern. Hence, understanding the interplaybetween these two concerns is essential to guarantee good lifetime estimation of the devices. Currently, theBias Temperature Instability (BTI), which is mostly due to the carrier trapping occurring in the gate oxide,appears to be the principal source of degradation responsible for the ageing of transistor device. Thismanuscript presents a complete study of the BTI degradation occurring on small and big transistors and onStatic Random Access Memory (SRAM) cells. Thus, as a first step, several electrical characterization techniquesto evaluate the BTI degradation are presented. The necessity of fast measurement in order to avoid most of therelaxation effect occurring after the BTI stress is emphasized. Then, using these fast measurement techniques,a complete study of the Negative BTI (NBTI) on large devices is presented. Then, the manuscript focuses on thesmall devices: transistors and memory cells. First, a modeling of the trapping mechanism in the gate oxide ofsmall transistor is presented. In particular, 3D electrostatic simulations allowed us to understand the particularinfluence of the traps over the threshold voltage (VT) of the small transistors. Finally, the case of the SRAM isstudied. Finally, the impact of the degradation occurring at transistor level and impacting the functioning of theSRAM bitcells is investigated.L’industrie microélectronique arrive aujourd’hui à concevoir des transistors atteignant quelquesdizaines de nanomètres. A de telles dimensions, les problématiques de fiabilité et de variabilité des dispositifsprennent une ampleur toujours plus importante. Notamment, le couplage de ces deux difficultés nécessite uneétude approfondie pour garantir des estimations correctes de la durée de vie des dispositifs. Aujourd’hui, ladégradation BTI (pour Bias Temperature Instability), due principalement aux mécanismes de piégeage dansl’oxyde de grille, apparait comme étant la principale source de dégradation responsable du vieillissement destransistors. Ce manuscrit présente une étude complète de la dégradation BTI intervenant sur des transistors depetites et grandes dimensions et sur des cellules mémoires SRAM (pour Static Random Access Memory). Dansun premier temps, une présentation des différentes méthodes de caractérisations rapides permettant demesurer correctement cette dégradation est faite. L’importance de l’utilisation de techniques de mesuresrapides afin de limiter les effets de relaxation qui succèdent à la dégradation BTI est clairement exposée. Puis, àl’aide de ces techniques de mesures, une étude exclusivement consacrée à la caractérisation et la modélisationde la dégradation NBTI (pour Negative BTI) sur des dispositifs de grandes dimensions est réalisée. Ensuite, lemanuscrit se focalise sur la dégradation intervenant dans des dispositifs de petites dimensions : transistors etcellules mémoires. Tout d’abord, une modélisation des phénomènes de piégeages dans l’oxyde de grille depetits transistors est effectuée. En particulier, des simulations 3D électrostatiques ont permis d’expliquerl’influence des pièges d’oxyde sur la tension de seuil (VT) dans des transistors décananométriques. Enfin, uneétude de la fiabilité de cellules SRAM est présentée. Notamment, nous montrons comment évoluent lesperformances et le fonctionnement des cellules lorsque les transistors qui les constituent sont affectés par unedégradation BTI

Sensor de envelhecimento para células de memória CMOS

Dissertação de Mestrado, Engenharia e Tecnologia, Instituto Superior de Engenharia, Universidade do Algarve, 2016As memórias Complementary Metal Oxide Semiconductor (CMOS) ocupam uma percentagem de área significativa nos circuitos integrados e, com o desenvolvimento de tecnologias de fabrico a uma escala cada vez mais reduzida, surgem problemas de performance e de fiabilidade. Efeitos como o BTI (Bias Thermal Instability), TDDB (Time Dependent Dielectric Breakdown), HCI (Hot Carrier Injection), EM (Electromigration), degradam os parâmetros físicos dos transístores de efeito de campo (MOSFET), alterando as suas propriedades elétricas ao longo do tempo. O efeito BTI pode ser subdividido em NBTI (Negative BTI) e PBTI (Positive BTI). O efeito NBTI é dominante no processo de degradação e envelhecimento dos transístores CMOS, afetando os transístores PMOS, enquanto o efeito PBTI assume especial relevância na degradação dos transístores NMOS. A degradação provocada por estes efeitos, manifesta-se nos transístores através do incremento do módulo da tensão de limiar de condução |ℎ| ao longo do tempo. A degradação dos transístores é designada por envelhecimento, sendo estes efeitos cumulativos e possuindo um grande impacto na performance do circuito, em particular se ocorrerem outras variações paramétricas. Outras variações paramétricas adicionais que podem ocorrer são as variações de processo (P), tensão (V) e temperatura (T), ou considerando todas estas variações, e de uma forma genérica, PVTA (Process, Voltage, Temperature and Aging). As células de memória de acesso aleatório (RAM, Random Access Memory), em particular as memórias estáticas (SRAM, Static Random Access Memory) e dinâmicas (DRAM, Dynamic Random Access Memory), possuem tempos de leitura e escrita precisos. Quando ao longo do tempo ocorre o envelhecimento das células de memória, devido à degradação das propriedades dos transístores MOSFET, ocorre também uma degradação da performance das células de memória. A degradação de performance é, portanto, resultado das transições lentas que ocorrem, devido ao envelhecimento dos transístores MOSFET que comutam mais tarde, comparativamente a transístores novos. A degradação de performance nas memórias devido às transições lentas pode traduzir-se em leituras e escritas mais lentas, bem como em alterações na capacidade de armazenamento da memória. Esta propriedade pode ser expressa através da margem de sinal ruído (SNM). O SNM é reduzido com o envelhecimento dos transístores MOSFET e, quando o valor do SNM é baixo, a célula perde a sua capacidade de armazenamento, tornando-se mais vulnerável a fontes de ruído. O SNM é, portanto, um valor que permite efetuar a aferição (benchmarking) e comparar as características da memória perante o envelhecimento ou outras variações paramétricas que possam ocorrer. O envelhecimento das memórias CMOS traduz-se portanto na ocorrência de erros nas memórias ao longo do tempo, o que é indesejável especialmente em sistemas críticos. O trabalho apresentado nesta dissertação tem como objetivo o desenvolvimento de um sensor de envelhecimento e performance para memórias CMOS, detetando e sinalizando para o exterior o envelhecimento em células de memória SRAM devido à constante monitorização da sua performance. O sensor de envelhecimento e performance é ligado na bit line da célula de memória e monitoriza ativamente as operações de leitura e escrita decorrentes da operação da memória. O sensor de envelhecimento é composto por dois blocos: um detetor de transições e um detetor de pulsos. O detetor de transições é constituído por oito inversores e uma porta lógica XOR realizada com portas de passagem. Os inversores possuem diferentes relações nos tamanhos dos transístores P/N, permitindo tempos de comutação em diferentes valores de tensão. Assim, quando os inversores com tensões de comutações diferentes são estimulados pelo mesmo sinal de entrada e são ligados a uma porta XOR, permitem gerar na saída um impulso sempre que existe uma comutação na bit line. O impulso terá, portanto, uma duração proporcional ao tempo de comutação do sinal de entrada, que neste caso particular são as operações de leitura e escrita da memória. Quando o envelhecimento ocorre e as transições se tornam mais lentas, os pulsos possuem uma duração superior face aos pulsos gerados numa SRAM nova. Os pulsos gerados seguem para um elemento de atraso (delay element) que provoca um atraso aos pulsos, invertendo-os de seguida, e garantindo que a duração dos pulsos é suficiente para que exista uma deteção. O impulso gerado é ligado ao bloco seguinte que compõe o sensor de envelhecimento e performance, sendo um circuito detetor de pulso. O detetor de pulso implementa um NOR CMOS, controlado por um sinal de relógio (clock) e pelos pulsos invertidos. Quando os dois sinais de input do NOR são ‘0’ o output resultante será ‘1’, criando desta forma uma janela de deteção. O sensor de envelhecimento será ajustado em cada implementação, de forma a que numa célula de memória nova os pulsos invertidos se encontrem alinhados temporalmente com os pulsos de relógio. Este ajuste é feito durante a fase de projeto, em função da frequência de operação requerida para a célula, quer pelo dimensionamento do delay element (ajustando o seu atraso), quer pela definição do período do sinal de relógio. À medida que o envelhecimento dos circuitos ocorre e as comutações nos transístores se tornam mais lentas, a duração dos pulsos aumenta e consequentemente entram na janela de deteção, originando uma sinalização na saída do sensor. Assim, caso ocorram operações de leitura e escrita instáveis, ou seja, que apresentem tempos de execução acima do expectável ou que os seus níveis lógicos estejam degradados, o sensor de envelhecimento e performance devolve para o exterior ‘1’, sinalizando um desempenho crítico para a operação realizada, caso contrário a saída será ‘0’, indicando que não é verificado nenhum erro no desempenho das operações de escrita e leitura. Os transístores do sensor de envelhecimento e performance são dimensionados de acordo com a implementação; por exemplo, os modelos dos transístores selecionados, tensões de alimentação, ou número de células de memória conectadas na bit line, influenciam o dimensionamento prévio do sensor, já que tanto a performance da memória como o desempenho do sensor dependem das condições de operação. Outras soluções previamente propostas e disponíveis na literatura, nomeadamente o sensor de envelhecimento embebido no circuito OCAS (On-Chip Aging Sensor), permitem detetar envelhecimento numa SRAM devido ao envelhecimento por NBTI. Porém esta solução OCAS apenas se aplica a um conjunto de células SRAM conectadas a uma bit line, não sendo aplicado individualmente a outras células de memória como uma DRAM e não contemplando o efeito PBTI. Uma outra solução já existente, o sensor Scout flip-flop utilizado para aplicações ASIC (Application Specific Integrated Circuit) em circuitos digitais síncronos, atua também como um sensor de performance local e responde de forma preditiva na monitorização de faltas por atraso, utilizando por base janelas de deteção. Esta solução não foi projetada para a monitorização de operações de leitura e escrita em memórias SRAM e DRAM. No entanto, pela sua forma de atuar, esta solução aproxima-se mais da solução proposta neste trabalho, uma vez que o seu funcionamento se baseia em sinalização de sinais atrasados. Nesta dissertação, o recurso a simulações SPICE (Simulation Program with Integrated Circuit Emphasis) permite validar e testar o sensor de envelhecimento e performance. O caso de estudo utilizado para aplicar o sensor é uma memória CMOS, SRAM, composta por 6 transístores, juntamente com os seus circuitos periféricos, nomeadamente o amplificador sensor e o circuito de pré-carga e equalização, desenvolvidos em tecnologia CMOS de 65nm e 22nm, com recurso aos modelos de MOSFET ”Berkeley Predictive Technology Models (PTM)”. O sensor é devolvido e testado em 65nm e em 22nm com os modelos PTM, permitindo caracterizar o sensor de envelhecimento e performance desenvolvido, avaliando também de que forma o envelhecimento degrada as operações de leitura e escrita da SRAM, bem como a sua capacidade de armazenamento e robustez face ao ruído. Por fim, as simulações apresentadas provam que o sensor de envelhecimento e performance desenvolvido nesta tese de mestrado permite monitorizar com sucesso a performance e o envelhecimento de circuitos de memória SRAM, ultrapassando os desafios existentes nas anteriores soluções disponíveis para envelhecimento de memórias. Verificou-se que na presença de um envelhecimento que provoque uma degradação igual ou superior a 10%, o sensor de envelhecimento e performance deteta eficazmente a degradação na performance, sinalizando os erros. A sua utilização em memórias DRAM, embora possível, não foi testada nesta dissertação, ficando reservada para trabalho futuro