Integrated interface electronics for capacitive MEMS inertial sensors

This thesis is composed of 13 publications and an overview of the research topic, which also summarizes the work. The research presented in this thesis concentrates on integrated circuits for the realization of interface electronics for capacitive MEMS (micro-electro-mechanical system) inertial sensors, i.e. accelerometers and gyroscopes. The research focuses on circuit techniques for capacitive detection and actuation and on high-voltage and clock generation within the sensor interface. Characteristics of capacitive accelerometers and gyroscopes and the electronic circuits for accessing the capacitive information in open- and closed-loop configurations are introduced in the thesis. One part of the experimental work, an accelerometer, is realized as a continuous-time closed-loop sensor, and is capable of achieving sub-micro-g resolution. The interface electronics is implemented in a 0.7-µm high-voltage technology. It consists of a force feedback loop, clock generation circuits, and a digitizer. Another part of the experimental work, an analog 2-axis gyroscope, is optimized not only for noise, but predominantly for low power consumption and a small chip area. The implementation includes a pseudo-continuous-time sense readout, analog continuous-time drive loop, phase-locked loop (PLL) for clock generation, and high-voltage circuits for electrostatic excitation and high-voltage detection. The interface is implemented in a 0.35-µm high-voltage technology within an active area of 2.5 mm². The gyroscope achieves a spot noise of 0.015 °/s/√H̅z̅ for the x-axis and 0.041 °/s/√H̅z̅ for the y-axis. Coherent demodulation and discrete-time signal processing are often an important part of the sensors and also typical examples that require clock signals. Thus, clock generation within the sensor interfaces is also reviewed. The related experimental work includes two integrated charge pump PLLs, which are optimized for compact realization but also considered with regard to their noise performance. Finally, this thesis discusses fully integrated high-voltage generation, which allows a higher electrostatic force and signal current in capacitive sensors. Open- and closed-loop Dickson charge pumps and high-voltage amplifiers have been realized fully on-chip, with the focus being on optimizing the chip area and on generating precise spurious free high-voltage signals up to 27 V

Advanced deep space communication systems study Final report

Deep space communication system requirements for period 1970 to 198

고속 시리얼 링크를 위한 고리 발진기를 기반으로 하는 주파수 합성기

학위논문(박사) -- 서울대학교대학원 : 공과대학 전기·정보공학부, 2022. 8. 정덕균.In this dissertation, major concerns in the clocking of modern serial links are discussed. As sub-rate, multi-standard architectures are becoming predominant, the conventional clocking methodology seems to necessitate innovation in terms of low-cost implementation. Frequency synthesis with active, inductor-less oscillators replacing LC counterparts are reviewed, and solutions for two major drawbacks are proposed. Each solution is verified by prototype chip design, giving a possibility that the inductor-less oscillator may become a proper candidate for future high-speed serial links. To mitigate the high flicker noise of a high-frequency ring oscillator (RO), a reference multiplication technique that effectively extends the bandwidth of the following all-digital phase-locked loop (ADPLL) is proposed. The technique avoids any jitter accumulation, generating a clean mid-frequency clock, overall achieving high jitter performance in conjunction with the ADPLL. Timing constraint for the proper reference multiplication is first analyzed to determine the calibration points that may correct the existent phase errors. The weight for each calibration point is updated by the proposed a priori probability-based least-mean-square (LMS) algorithm. To minimize the time required for the calibration, each gain for the weight update is adaptively varied by deducing a posteriori which error source dominates the others. The prototype chip is fabricated in a 40-nm CMOS technology, and its measurement results verify the low-jitter, high-frequency clock generation with fast calibration settling. The presented work achieves an rms jitter of 177/223 fs at 8/16-GHz output, consuming 12.1/17-mW power. As the second embodiment, an RO-based ADPLL with an analog technique that addresses the high supply sensitivity of the RO is presented. Unlike prior arts, the circuit for the proposed technique does not extort the RO voltage headroom, allowing high-frequency oscillation. Further, the performance given from the technique is robust over process, voltage, and temperature (PVT) variations, avoiding the use of additional calibration hardware. Lastly, a comprehensive analysis of phase noise contribution is conducted for the overall ADPLL, followed by circuit optimizations, to retain the low-jitter output. Implemented in a 40-nm CMOS technology, the frequency synthesizer achieves an rms jitter of 289 fs at 8 GHz output without any injected supply noise. Under a 20-mVrms white supply noise, the ADPLL suppresses supply-noise-induced jitter by -23.8 dB.본 논문은 현대 시리얼 링크의 클락킹에 관여되는 주요한 문제들에 대하여 기술한다. 준속도, 다중 표준 구조들이 채택되고 있는 추세에 따라, 기존의 클라킹 방법은 낮은 비용의 구현의 관점에서 새로운 혁신을 필요로 한다. LC 공진기를 대신하여 능동 소자 발진기를 사용한 주파수 합성에 대하여 알아보고, 이에 발생하는 두가지 주요 문제점과 각각에 대한 해결 방안을 탐색한다. 각 제안 방법을 프로토타입 칩을 통해 그 효용성을 검증하고, 이어서 능동 소자 발진기가 미래의 고속 시리얼 링크의 클락킹에 사용될 가능성에 대해 검토한다. 첫번째 시연으로써, 고주파 고리 발진기의 높은 플리커 잡음을 완화시키기 위해 기준 신호를 배수화하여 뒷단의 위상 고정 루프의 대역폭을 효과적으로 극대화 시키는 회로 기술을 제안한다. 본 기술은 지터를 누적 시키지 않으며 따라서 깨끗한 중간 주파수 클락을 생성시켜 위상 고정 루프와 함께 높은 성능의 고주파 클락을 합성한다. 기준 신호를 성공적으로 배수화하기 위한 타이밍 조건들을 먼저 분석하여 타이밍 오류를 제거하기 위한 방법론을 파악한다. 각 교정 중량은 연역적 확률을 기반으로한 LMS 알고리즘을 통해 갱신되도록 설계된다. 교정에 필요한 시간을 최소화 하기 위하여, 각 교정 이득은 타이밍 오류 근원들의 크기를 귀납적으로 추론한 값을 바탕으로 지속적으로 제어된다. 40-nm CMOS 공정으로 구현된 프로토타입 칩의 측정을 통해 저소음, 고주파 클락을 빠른 교정 시간안에 합성해 냄을 확인하였다. 이는 177/223 fs의 rms 지터를 가지는 8/16 GHz의 클락을 출력한다. 두번째 시연으로써, 고리 발진기의 높은 전원 노이즈 의존성을 완화시키는 기술이 포함된 주파수 합성기가 설계되었다. 이는 고리 발진기의 전압 헤드룸을 보존함으로서 고주파 발진을 가능하게 한다. 나아가, 전원 노이즈 감소 성능은 공정, 전압, 온도 변동에 대하여 민감하지 않으며, 따라서 추가적인 교정 회로를 필요로 하지 않는다. 마지막으로, 위상 노이즈에 대한 포괄적 분석과 회로 최적화를 통하여 주파수 합성기의 저잡음 출력을 방해하지 않는 방법을 고안하였다. 해당 프로토타입 칩은 40-nm CMOS 공정으로 구현되었으며, 전원 노이즈가 인가되지 않은 상태에서 289 fs의 rms 지터를 가지는 8 GHz의 클락을 출력한다. 또한, 20 mVrms의 전원 노이즈가 인가되었을 때에 유도되는 지터의 양을 -23.8 dB 만큼 줄이는 것을 확인하였다.1 Introduction 1 1.1 Motivation 3 1.1.1 Clocking in High-Speed Serial Links 4 1.1.2 Multi-Phase, High-Frequency Clock Conversion 8 1.2 Dissertation Objectives 10 2 RO-Based High-Frequency Synthesis 12 2.1 Phase-Locked Loop Fundamentals 12 2.2 Toward All-Digital Regime 15 2.3 RO Design Challenges 21 2.3.1 Oscillator Phase Noise 21 2.3.2 Challenge 1: High Flicker Noise 23 2.3.3 Challenge 2: High Supply Noise Sensitivity 26 3 Filtering RO Noise 28 3.1 Introduction 28 3.2 Proposed Reference Octupler 34 3.2.1 Delay Constraint 34 3.2.2 Phase Error Calibration 38 3.2.3 Circuit Implementation 51 3.3 IL-ADPLL Implementation 55 3.4 Measurement Results 59 3.5 Summary 63 4 RO Supply Noise Compensation 69 4.1 Introduction 69 4.2 Proposed Analog Closed Loop for Supply Noise Compensation 72 4.2.1 Circuit Implementation 73 4.2.2 Frequency-Domain Analysis 76 4.2.3 Circuit Optimization 81 4.3 ADPLL Implementation 87 4.4 Measurement Results 90 4.5 Summary 98 5 Conclusions 99 A Notes on the 8REF 102 B Notes on the ACSC 105박

LASER Tech Briefs, September 1993

This edition of LASER Tech briefs contains a feature on photonics. The other topics include: Electronic Components and Circuits. Electronic Systems, Physical Sciences, Materials, Computer Programs, Mechanics, Machinery, Fabrication Technology, Mathematics and Information Sciences, Life Sciences and books and reports

Digital enhancement techniques for fractional-N frequency synthesizers

Meeting the demand for unprecedented connectivity in the era of internet-of-things (IoT) requires extremely energy efficient operation of IoT nodes to extend battery life. Managing the data traffic generated by trillions of such nodes also puts severe energy constraints on the data centers. Clock generators that are essential elements in these systems consume significant power and therefore must be optimized for low power and high performance. The focus of this thesis is on improving the energy efficiency of frequency synthesizers and clocking modules by exploring design techniques at both the architectural and circuit levels. In the first part of this work, a digital fractional-N phase locked loop (FNPLL) that employs a high resolution time-to-digital converter (TDC) and a truly ΔΣ fractional divider to achieve low in-band noise with a wide bandwidth is presented. The fractional divider employs a digital-to-time converter (DTC) to cancel out ΔΣ quantization noise in time domain, thus alleviating TDC dynamic range requirements. The proposed digital architecture adopts a narrow range low-power time-amplifier based TDC (TA-TDC) to achieve sub 1ps resolution. Fabricated in 65nm CMOS process, the prototype PLL achieves better than -106dBc/Hz in-band noise and 3MHz PLL bandwidth at 4.5GHz output frequency using 50MHz reference. The PLL achieves excellent jitter performance of 490fsrms, while consumes only 3.7mW. This translates to the best reported jitter-power figure-of-merit (FoM) of -240.5dB among previously reported FNPLLs. Phase noise performance of ring oscillator based digital FNPLLs is severely compromised by conflicting bandwidth requirements to simultaneously suppress oscillator phase and quantization noise introduced by the TDC, ΔΣ fractional divider, and digital-to-analog converter (DAC). As a consequence, their FoM that quantifies the power-jitter tradeoff is at least 25dB worse than their LC-oscillator based FNPLL counterparts. In the second part of this thesis, we seek to close this performance gap by extending PLL bandwidth using quantization noise cancellation techniques and by employing a dual-path digital loop filter to suppress the detrimental impact of DAC quantization noise. A prototype was implemented in a 65nm CMOS process operating over a wide frequency range of 2.0GHz-5.5GHz using a modified extended range multi-modulus divider with seamless switching. The proposed digital FNPLL achieves 1.9psrms integrated jitter while consuming only 4mW at 5GHz output. The measured in-band phase noise is better than -96 dBc/Hz at 1MHz offset. The proposed FNPLL achieves wide bandwidth up to 6MHz using a 50 MHz reference and its FoM is -228.5dB, which is at about 20dB better than previously reported ring-based digital FNPLLs. In the third part, we propose a new multi-output clock generator architecture using open loop fractional dividers for system-on-chip (SoC) platforms. Modern multi-core processors use per core clocking, where each core runs at its own speed. The core frequency can be changed dynamically to optimize for performance or power dissipation using a dynamic frequency scaling (DFS) technique. Fast frequency switching is highly desirable as long as it does not interrupt code execution; therefore it requires smooth frequency transitions with no undershoots. The second main requirement in processor clocking is the capability of spread spectrum frequency modulation. By spreading the clock energy across a wide bandwidth, the electromagnetic interference (EMI) is dramatically reduced. A conventional PLL clock generation approach suffers from a slow frequency settling and limited spread spectrum modulation capabilities. The proposed open loop fractional divider architecture overcomes the bandwidth limitation in fractional-N PLLs. The fractional divider switches the output frequency instantaneously and provides an excellent spread spectrum performance, where precise and programmable modulation depth and frequency can be applied to satisfy different EMI requirements. The fractional divider has unlimited modulation bandwidth resulting in spread spectrum modulation with no filtering, unlike fractional-N PLL; consequently it achieves higher EMI reduction. A prototype fractional divider was implemented in a 65nm CMOS process, where the measured peak-to-peak jitter is less than 27ps over a wide frequency range from 20MHz to 1GHz. The total power consumption is about 3.2mW for 1GHz output frequency. The all-digital implementation of the divider occupies the smallest area of 0.017mm2 compared to state-of-the-art designs. As the data rate of serial links goes higher, the jitter requirements of the clock generator become more stringent. Improving the jitter performance of conventional PLLs to less than (200fsrms) always comes with a large power penalty (tens of mWs). This is due to the PLL coupled noise bandwidth trade-off, which imposes stringent noise requirements on the oscillator and/or loop components. Alternatively, an injection-locked clock multiplier (ILCM) provides many advantages in terms of phase noise, power, and area compared to classical PLLs, but they suffer from a narrow lock-in range and a high sensitivity to PVT variations especially at a large multiplication factor (N). In the fourth part of this thesis, a low-jitter, low-power LC-based ILCM with a digital frequency-tracking loop (FTL) is presented. The proposed FTL relies on a new pulse gating technique to continuously tune the oscillator's free-running frequency. The FTL ensures robust operation across PVT variations and resolves the race condition existing in injection locked PLLs by decoupling frequency tuning from the injection path. As a result, the phase locking condition is only determined by the injection path. This work also introduces an accurate theoretical large-signal analysis for phase domain response (PDR) of injection locked oscillators (ILOs). The proposed PDR analysis captures the asymmetric nature of ILO's lock-in range, and the impact of frequency error on injection strength and phase noise performance. The proposed architecture and analysis are demonstrated by a prototype fabricated in 65 nm CMOS process with active area of 0.25mm2. The prototype ILCM multiplies the reference frequency by 64 to generate an output clock in the range of 6.75GHz-8.25GHz. A superior jitter performance of 190fsrms is achieved, while consuming only 2.25mW power. This translates to a best FoM of -251dB. Unlike conventional PLLs, ILCMs have been fundamentally limited to only integer-N operation and cannot synthesize fractional-N frequencies. In the last part of this thesis, we extend the merits of ILCMs to fractional-N and overcome this fundamental limitation. We employ DTC-based QNC techniques in order to align injected pulses to the oscillator's zero crossings, which enables it to pull the oscillator toward phase lock, thus realizing a fractional-N ILCM. Fabricated in 65nm CMOS process, a prototype 20-bit fractional-N ILCM with an output range of 6.75GHz-8.25GHz consumes only 3.25mW. It achieves excellent jitter performance of 110fsrms and 175fsrms in integer- and fractional-N modes respectively, which translates to the best-reported FoM in both integer- (-255dB) and fractional-N (-252dB) modes. The proposed fractional-N ILCM also features the first-reported rapid on/off capability, where the transient absolute jitter performance at wake-up is bounded below 4ps after less than 4ns. This demonstrates almost instantaneous phase settling. This unique capability enables tremendous energy saving by turning on the clock multiplier only when needed. This energy proportional operation leverages idle times to save power at the system-level of wireline and wireless transceivers

Design, Construction, and Applications of a High-Resolution Terahertz Time-Domain Spectrometer

This thesis reports on the design, construction, and initial applications of a high-resolution terahertz time-domain ASOPS spectrometer. The instrument employs asynchronous optical sampling (ASOPS) between two Ti:sapphire ultrafast lasers operating at a repetition rate of approximately 80 MHz, and we thus demonstrate a THz frequency resolution approaching the limit of that repetition rate. This is an order of magnitude improvement in resolution over typical THz time-domain spectrometers. The improved resolution is important for our primary effort of collecting THz spectra for far-infrared astronomy. We report on various spectroscopic applications including the THz rotational spectrum of water, where we achieve a mean frequency error, relative to established line centers, of 27.0 MHz. We also demonstrate application of the THz system to the long-duration observation of a coherent magnon mode in a anti-ferromagnetic yttrium iron oxide (YFeO3) crystal. Furthermore, we apply the all-optical virtual delay line of ASOPS to a transient thermoreflectance experiment for quickly measuring the thermal conductivity of semiconductors

Challenges and Solutions for High Performance Analog Circuits with Robust Operation in Low Power Digital CMOS

In modern System-on-Chip products, analog circuits need to co-exist with digital circuits integrated on the same chip. This brings on a lot of challenges since analog circuits need to maintain their performance while being subjected to disturbances from the digital circuits. Device size scaling is driven by digital applications to reduce size and improve performance but also results in the need to reduce the supply voltage. Moreover, in some applications, digital circuits require a changing supply voltage to adapt performance to workloads. So it is further desirable to develop design solutions for analog circuits that can operate with a flexible supply voltage, which can be reduced well below 1V. In this thesis challenges and solutions for key high performance analog circuit functions are explored and demonstrated that operate robustly in a digital environment, function with flexible supply voltages or have a digital-like operation. A combined phase detector consisting of a phase-frequency detector and sub-sampling phase detector is proposed for phase-locked loops (PLLs). The phase-frequency function offers robust operation and the sub-sampling detector leads to low in-band phase noise. A 2.2GHz PLL with a combined phase detector was prototyped in a 65nm CMOS process, with an on-chip loop filter area of only 0.04mm². The experimental results show that the PLL with the combined phase detector is more robust to disturbances than a sub-sampling PLL, while still achieving a measured in-band phase noise of -122dBc/Hz which is comparable to the excellent noise performance of a sub-sampling PLL. A pulse-controlled common-mode feedback (CMFB) circuit is proposed for a 0.6V-1.2V supply-scalable fully-differential amplifier that was implemented in a low power/leakage 65nm CMOS technology. An integrator built with the amplifier occupies an active area of 0.01mm². When the supply is changed from 0.6V to 1.2V, the measured frequency response changes are small, demonstrating the flexible supply operation of the differential amplifier with the pulse-controlled CMFB. Next, models are developed to study the performance scaling of a continuous-time sigma-delta modulator (SDM) with a varying supply voltage. It is demonstrated that the loop filter and the quantizer exhibit different supply dependence. The loop noise performance becomes better at a higher supply thanks to larger signal swings and better signal-to-noise ratio, while the figure of merit determined by the quantization noise gets better at a lower supply voltage, thanks to the quantizer power dissipation reduction. The theoretical models were verified with simulations of a 0.6V-1.2V 2MHz continuous-time SDM design in a 65nm CMOS low power/leakage process. Finally, two design techniques are introduced that leverage the continued improvement of digital circuit blocks for the realization of analog functions. A voltage-controlled-ring-oscillator-based amplifier with zero compensation is proposed that internally uses a phase-domain representation of the analog signal. This provides a huge DC gain without significant penalties on the unity-gain bandwidth or area. With this amplifier a 4th-order 40-MHz active-UGB-RC filter was implemented that offers a wide bandwidth, superior linearity and small area. The filter prototype in a 55nm CMOS process has an active area of 0.07mm² and a power consumption of 7.8mW at 1.2V. The in-band IIP3 and out-of-band IIP3 are measured as 27.3dBm and 22.5dBm, respectively. A digital in-situ biasing technique is proposed to overcome the design challenges of conventional analog biasing circuits in an advanced CMOS process. A digital CMFB was simulated in a 65nm CMOS technology to demonstrate the advantages of this digital biasing scheme. Using time-based successive approximation conversion, the digital CMFB provides the desired analog output with a more robust operation and a smaller area, but without needing any stability compensation schemes like in conventional analog CMFBs. In summary, analog design techniques are continuously evolving to adapt to the integration with digital circuits on the same chip and are increasingly using digital-like blocks to realize analog functions in highly-integrated SOC chips. The signal representation in analog circuits is moving from traditional electrical signals such as voltage or current, to time and phase-domain representations. These changes make analog circuits more robust to voltage disturbances and supply variations. In addition to improved robustness, analog circuits based on timing signals benefit from the faster and smaller transistors offered by the continued feature scaling in CMOS technologies

Space programs summary no. 37-45, volume IV FOR the period April 1, 1967 to May 31, 1967. Supporting research and advanced development

Space exploration projects on systems, guidance and control, environmental simulation, space sciences, propulsion, telecommunications, and engineering mechanic

Thermal unfolding dynamics of proteins probed by nonlinear infrared spectroscopy

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 2007.Vita.Includes bibliographical references.This thesis presents spectroscopic approaches to study the thermal unfolding dynamics of proteins. The spectroscopic tool is nonlinear infrared (IR) spectroscopy of the protein amide I band. Among various nonlinear IR techniques, two-dimensional infrared (2D IR) spectroscopy, which is an IR analogue of 2D NMR, is the most informative. A 2D IR spectrum is obtained from a double Fourier transform of the heterodyned third-order nonlinear signal, which is generated by three consecutive interactions between femtosecond IR pulses and the vibrations of the system. This technique is sensitive to the presence of P-sheet structure in proteins through the formation of cross peaks between the two characteristic vibrational modes of 0-sheets. In this work, 2D IR spectroscopy is used to measure equilibrium thermal unfolding of ribonuclease A and ubiquitin. For transient unfolding studies, the temperature of the solution is rapidly raised by a nanosecond temperature jump (T-jump) laser, which is followed by probing structural changes of proteins with dispersed vibrational echo (DVE) spectroscopy or 2D IR spectroscopy.(cont.) DVE spectroscopy is a homodyne measurement of the third-order signal, in which the spectrum is related to a projection of a complex 2D IR spectrum onto one of the frequency axes (03). In spite of its reduced dimension measurement, DVE spectroscopy is sensitive enough to be utilized in transient probing with less experimental challenges. From transient thermal unfolding studies of ubiquitin probed by DVE spectroscopy, complicated non-exponential relaxations are observed on the microsecond timescale, which are followed by ms unfolding. Non-exponential relaxation is interpreted as downhill unfolding of a transient species populated around the top of a barrier (transition state) due to the barrier shift caused by a rapid T-jump. Variations in the unfolding transition state of ubiquitin are further investigated with temperature-dependent T-jump experiments and mutation studies. Experimental conclusions are supported by calculations of the unfolding free energy surfaces using statistical mechanical modeling. T-jump 2D IR spectroscopy is also performed to remove ambiguities in the projected domain of DVE spectroscopy and provide a new spectroscopic measure for transient unfolding through line-broadening analysis.by Hoi Sung Chung.Ph.D