Low Noise and High Photodetection Probability SPAD in 180 nm Standard CMOS Technology

A square shaped, low noise and high photo-response single photon avalanche diode suitable for circuit integration, implemented in a standard CMOS 180 nm high voltage technology, is presented. In this work, a p+ to shallow n-well junction was engineered with a very smooth electric field profile guard ring to attain a photo detection probability peak higher than 50% with a median dark count rate lower than 2 Hz/μm2 when operated at an excess bias of 4 V. The reported timing jitter full width at half maximum is below 300 ps for 640 nm laser pulses

Development of a Portable CMOS Time-Domain Fluorescence Lifetime Imager

Modern laboratory equipments to measure the excited-state lifetime of fluorophores usually include an expensive picosecond pulsed-laser excitation source, a fragile photomultiplier tube, and a large instrument body for optics. A portable and robust device to make fluorescence lifetime measurement in nanosecond scale is of great attraction for chemists and biologists. This dissertation reports the development of a portable LED time-domain fluorimeter from an all-solid-state discrete-component prototype to its advanced CMOS integrated circuit implementation. The motivation of the research is to develop a multiplexed fluorimeter for point-of-care diagnosis. Instruments developed by this novel method have higher fill factor, are more portable, and are fabricated at lower cost

A 72 × 60 Angle-Sensitive SPAD Imaging Array for Lens-less FLIM

We present a 72 × 60, angle-sensitive single photon avalanche diode (A-SPAD) array for lens-less 3D fluorescence lifetime imaging. An A-SPAD pixel consists of (1) a SPAD to provide precise photon arrival time where a time-resolved operation is utilized to avoid stimulus-induced saturation, and (2) integrated diffraction gratings on top of the SPAD to extract incident angles of the incoming light. The combination enables mapping of fluorescent sources with different lifetimes in 3D space down to micrometer scale. Futhermore, the chip presented herein integrates pixel-level counters to reduce output data-rate and to enable a precise timing control. The array is implemented in standard 180 nm complementary metal-oxide-semiconductor (CMOS) technology and characterized without any post-processing

A 192×128 Time Correlated SPAD Image Sensor in 40-nm CMOS Technology

A 192 X 128 pixel single photon avalanche diode (SPAD) time-resolved single photon counting (TCSPC) image sensor is implemented in STMicroelectronics 40-nm CMOS technology. The 13% fill factor, 18.4\,\,\mu \text {m} \times 9.2\,\,\mu \text{m} pixel contains a 33-ps resolution, 135-ns full scale, 12-bit time-to-digital converter (TDC) with 0.9-LSB differential and 5.64-LSB integral nonlinearity (DNL/INL). The sensor achieves a mean 219-ps full-width half-maximum (FWHM) impulse response function (IRF) and is operable at up to 18.6 kframes/s through 64 parallelized serial outputs. Cylindrical microlenses with a concentration factor of 3.25 increase the fill factor to 42%. The median dark count rate (DCR) is 25 Hz at 1.5-V excess bias. A digital calibration scheme integrated into a column of the imager allows off-chip digital process, voltage, and temperature (PVT) compensation of every frame on the fly. Fluorescence lifetime imaging microscopy (FLIM) results are presented

Feasibility of Geiger-mode avalanche photodiodes in CMOS standard technologies for tracker detectors

The next generation of particle colliders will be characterized by linear lepton colliders, where the collisions between electrons and positrons will allow to study in great detail the new particle discovered at CERN in 2012 (presumably the Higgs boson). At present time, there are two alternative projects underway, namely the ILC (International Linear Collider) and CLIC (Compact LInear Collider). From the detector point of view, the physics aims at these particle colliders impose such extreme requirements, that there is no sensor technology available in the market that can fulfill all of them. As a result, several new detector systems are being developed in parallel with the accelerator. This thesis presents the development of a GAPD (Geiger-mode Avalanche PhotoDiode) pixel detector aimed mostly at particle tracking at future linear colliders. GAPDs offer outstanding qualities to meet the challenging requirements of ILC and CLIC, such as an extraordinary high sensitivity, virtually infinite gain and ultra-fast response time, apart from compatibility with standard CMOS technologies. In particular, GAPD detectors enable the direct conversion of a single particle event onto a CMOS digital pulse in the sub-nanosecond time scale without the utilization of either preamplifiers or pulse shapers. As a result, GAPDs can be read out after each single bunch crossing, a unique quality that none of its competitors can offer at the moment. In spite of all these advantages, GAPD detectors suffer from two main problems. On the one side, there exist noise phenomena inherent to the sensor, which induce noise pulses that cannot be distinguished from real particle events and also worsen the detector occupancy to unacceptable levels. On the other side, the fill-factor is too low and gives rise to a reduced detection efficiency. Solutions to the two problems commented that are compliant with the severe specifications of the next generation of particle colliders have been thoroughly investigated. The design and characterization of several single pixels and small arrays that incorporate some elements to reduce the intrinsic noise generated by the sensor are presented. The sensors and the readout circuits have been monolithically integrated in a conventional HV-CMOS 0.35 μm process. Concerning the readout circuits, both voltage-mode and current-mode options have been considered. Moreover, the time-gated operation has also been explored as an alternative to reduce the detected sensor noise. The design and thorough characterization of a prototype GAPD array, also monolithically integrated in a conventional 0.35 μm HV-CMOS process, is presented in the thesis as well. The detector consists of 10 rows x 43 columns of pixels, with a total sensitive area of 1 mm x 1 mm. The array is operated in a time-gated mode and read out sequentially by rows. The efficiency of the proposed technique to reduce the detected noise is shown with a wide variety of measurements. Further improved results are obtained with the reduction of the working temperature. Finally, the suitability of the proposed detector array for particle detection is shown with the results of a beam-test campaign conducted at CERN-SPS (European Organization for Nuclear Research-Super Proton Synchrotron). Apart from that, a series of additional approaches to improve the performance of the GAPD technology are proposed. The benefits of integrating a GAPD pixel array in a 3D process in terms of overcoming the fill-factor limitation are examined first. The design of a GAPD detector in the Global Foundries 130 nm/Tezzaron 3D process is also presented. Moreover, the possibility to obtain better results in light detection applications by means of the time-gated operation or correction techniques is analyzed too.Aquesta tesi presenta el desenvolupament d’un detector de píxels de GAPDs (Geiger-mode Avalanche PhotoDiodes) dedicat principalment a rastrejar partícules en futurs col•lisionadors lineals. Els GAPDs ofereixen unes qualitats extraordinàries per satisfer els requisits extremadament exigents d’ILC (International Linear Collider) i CLIC (Compact LInear Collider), els dos projectes per la propera generació de col•lisionadors que s’han proposat fins a dia d’avui. Entre aquestes qualitats es troben una sensibilitat extremadament elevada, un guany virtualment infinit i una resposta molt ràpida, a part de ser compatibles amb les tecnologies CMOS estàndard. En concret, els detectors de GAPDs fan possible la conversió directa d’un esdeveniment generat per una sola partícula en un senyal CMOS digital amb un temps inferior al nanosegon. Com a resultat d’aquest fet, els GAPDs poden ser llegits després de cada bunch crossing (la col•lisió de les partícules), una qualitat única que cap dels seus competidors pot oferir en el moment actual. Malgrat tots aquests avantatges, els detectors de GAPDs pateixen dos grans problemes. D’una banda, existeixen fenòmens de soroll inherents al sensor, els quals indueixen polsos de soroll que no poden ser distingits dels esdeveniments reals generats per partícules i que a més empitjoren l’ocupació del detector a nivells inacceptables. D’altra banda, el fill-factor (és a dir, l’àrea sensible respecte l’àrea total) és molt baix i redueix l’eficiència detectora. En aquesta tesi s’han investigat solucions als dos problemes comentats i que a més compleixen amb les especificacions altament severes dels futurs col•lisionadors lineals. El detector de píxels de GAPDs, el qual ha estat monolíticament integrat en un procés HV-CMOS estàndard de 0.35 μm, incorpora circuits de lectura en mode voltatge que permeten operar el sensor en l’anomenat mode time-gated per tal de reduir el soroll detectat. L’eficiència de la tècnica proposada queda demostrada amb la gran varietat d’experiments que s’han dut a terme. Els resultats del beam-test dut a terme al CERN indiquen la capacitat del detector de píxels de GAPDs per detectar partícules altament energètiques. A banda d’això, també s’han estudiat els beneficis d’integrar un detector de píxels de GAPDs en un procés 3D per tal d’incrementar el fill-factor. L’anàlisi realitzat conclou que es poden assolir fill-factors superiors al 90%

Geiger-Mode Avalanche Photodiodes in Standard CMOS Technologies

Photodiodes are the simplest but most versatile semiconductor optoelectronic devices. They can be used for direct detection of light, of soft X and gamma rays, and of particles such as electrons or neutrons. For many years, the sensors of choice for most research and industrial applications needing photon counting or timing have been vacuum-based devices such as Photo-Multiplier Tubes, PMT, and Micro-Channel Plates, MCP (Renker, 2004). Although these photodetectors provide good sensitivity, noise and timing characteristics, they still suffer from limitations owing to their large power consumption, high operation voltages and sensitivity to magnetic fields, as well as they are still bulky, fragile and expensive. New approaches to high-sensitivity imagers tend to use CCD cameras coupled with either MCP Image Intensifiers, I-CCDs, or Electron Multipliers, EM-CCDs (Dussault & Hoess, 2004), but they still have limited performances in extreme time-resolved measurements. A fully solid-state solution can improve design flexibility, cost, miniaturization, integration density, reliability and signal processing capabilities in photodetectors. In particular, Single- Photon Avalanche Diodes, SPADs, fabricated by conventional planar technology on silicon can be used as particle (Stapels et al., 2007) and photon (Ghioni et al., 2007) detectors with high intrinsic gain and speed. These SPAD are silicon Avalanche PhotoDiodes biased above breakdown. This operation regime, known as Geiger mode, gives excellent single-photon sensitivity thanks to the avalanche caused by impact ionization of the photogenerated carriers (Cova et al., 1996). The number of carriers generated as a result of the absorption of a single photon determines the optical gain of the device, which in the case of SPADs may be virtually infinite. The basic concepts concerning the behaviour of G-APDs and the physical processes taking place during their operation will be reviewed next, as well as the main performance parameters and noise sources

Fast-Gated 16 x 16 SPAD Array With 16 on-Chip 6 ps Time-to-Digital Converters for Non-Line-of-Sight Imaging

We present the design and characterization of a fully-integrated array of 16 x 16 Single-Photon Avalanche Diodes (SPADs) with fast-gating capabilities and 16 on-chip 6 ps time-to-digital converters, which has been embedded in a compact imaging module. Such sensor has been developed for Non-Line-Of-Sight imaging applications, which require: i) a narrow instrument response function, for a centimeter-accurate single-shot precision; ii) fast-gated SPADs, for time-filtering of directly reflected photons; iii) high photon detection probability, for acquiring faint signals undergoing multiple scattering events. Thanks to a novel multiple differential SPAD-SPAD sensing approach, SPAD detectors can be swiftly activated in less than 500 ps and the full-width at half maximum of the instrument response function is always less than 75 ps (60 ps on average). Temporal responses are consistently uniform throughout the gate window, showing just few picoseconds of time dispersion when 30 ns gate pulses are applied, while the differential non-linearity is as low as 250 fs. With a photon detection probability peak of 70% at 490 nm, a fill-factor of 9.6% and up to 1.6 . 10(8) photon time-tagging measurements per second, such sensor fulfills the demand for fully-integrated imaging solutions optimized for non-line-of-sight imaging applications, enabling to cut exposure times while also optimizing size, weight, power and cost, thus paving the way for further scaled architectures

A Sub-Centimeter Ranging Precision LIDAR Sensor Prototype Based on ILO-TDC

This thesis introduces a high-resolution light detection and ranging (LIDAR) sensor system-on-a-chip (SoC) that performs sub-centimeter ranging precision and maximally 124-meter ranging distance. With off-chip connected avalanche photodiodes (APDs), the time-of-flight (ToF) are resolved through 31×1 time-correlated single photon counting (TCSPC) channels. Embedded time-to-digital converters (TDCs) support 52-ps time resolution and 14-bit dynamic range. A novel injection-locked oscillator (ILO) based TDC are proposed to minimize the power of fine TDC clock distribution, and improve time precision. The global PVT variation among ILO clock distribution is calibrated by an on-chip phase-looked-loop (PLL) that assures a reliable counting performance over wide operating range. The proposed LIDAR sensor is designed, fabricated, and tested in the 65nm CMOS technology. Whole SoC consumes 37mW and each TDC channel consumes 788μW at nominal operation. The proposed TDC design achieved single-shot precision of 38.5 ps, channel uniformity of 14 ps, and DNL/INL of 0.56/1.56 LSB, respectively. The performance of proposed ILO-TDC makes it an excellent candidate for global counting TCSPC in automotive LIDAR

Miniaturized Optical Probes for Near Infrared Spectroscopy

RÉSUMÉ L’étude de la propagation de la lumière dans des milieux hautement diffus tels que les tissus biologiques (imagerie optique diffuse) est très attrayante, car elle offre la possibilité d’explorer de manière non invasive le milieu se trouvant profondément sous la surface, et de retrouver des informations sur l’absorption (liée à la composition chimique) et sur la diffusion (liée à la microstructure). Dans la gamme spectrale 600-1000 nm, également appelée gamme proche infrarouge (NIR en anglais), l'atténuation de la lumière par le tissu biologique (eau, lipides et hémoglobine) est relativement faible, ce qui permet une pénétration de plusieurs centimètres dans le tissu. En spectroscopie proche infrarouge (NIRS en anglais), de photons sont injectés dans les tissus et le signal émis portant des informations sur les constituants tissulaires est mesuré. La mesure de très faibles signaux dans la plage de longueurs d'ondes visibles et proche infrarouge avec une résolution temporelle de l'ordre de la picoseconde s'est révélée une technique efficace pour étudier des tissus biologiques en imagerie cérébrale fonctionnelle, en mammographie optique et en imagerie moléculaire, sans parler de l'imagerie de la durée de vie de fluorescence, la spectroscopie de corrélation de fluorescence, informations quantiques et bien d’autres. NIRS dans le domaine temporel (TD en anglais) utilise une source de lumière pulsée, généralement un laser fournissant des impulsions lumineuses d'une durée de quelques dizaines de picosecondes, ainsi qu'un appareil de détection avec une résolution temporelle inférieure à la nanoseconde. Le point essentiel de ces mesures est la nécessité d’augmenter la sensibilité pour de plus grandes profondeurs d’investigation, en particulier pour l’imagerie cérébrale fonctionnelle, où la peau, le crâne et le liquide céphalo-rachidien (LCR) masquent fortement le signal cérébral. À ce jour, l'adoption plus large de ces techniques optique non invasives de surveillance est surtout entravée par les composants traditionnels volumineux, coûteux, complexes et fragiles qui ont un impact significatif sur le coût et la dimension de l’ensemble du système. Notre objectif est de développer une sonde NIRS compacte et miniaturisée, qui peut être directement mise en contact avec l'échantillon testé pour obtenir une haute efficacité de détection des photons diffusés, sans avoir recours à des fibres et des lentilles encombrantes pour l'injection et la collection de la lumière. Le système proposé est composé de deux parties: i) une unité d’émission de lumière pulsée et ii) un module de détection à photon unique qui peut être activé et désactivé rapidement. L'unité d'émission de lumière utilisera une source laser pulsée à plus de 80 MHz avec une largeur d'impulsion de picoseconde.----------ABSTRACT The study of light propagation into highly diffusive media like biological tissues (Diffuse Optical Imaging) is highly appealing due to the possibility to explore the medium non-invasively, deep beneath the surface and to recover information both on absorption (related to chemical composition) and on scattering (related to microstructure). In the 600–1000 nm spectral range also known as near-infrared (NIR) range, light attenuation by the biological tissue constituents (i.e. water, lipid, and hemoglobin) is relatively low and allows for penetration through several centimeters of tissue. In near-infrared spectroscopy (NIRS), a light signal is injected into the tissues and the emitted signal carrying information on tissue constituents is measured. The measurement of very faint light signals in the visible and near-infrared wavelength range with picosecond timing resolution has proven to be an effective technique to study biological tissues in functional brain imaging, optical mammography and molecular imaging, not to mention fluorescence lifetime imaging, fluorescence correlation spectroscopy, quantum information and many others. Time Domain (TD) NIRS employs a pulsed light source, typically a laser providing light pulses with duration of a few tens of picoseconds, and a detection circuit with temporal resolution in the sub-nanosecond scale. The key point of these measurements is the need to increase the sensitivity to higher penetration depths of investigation, in particular for functional brain imaging, where skin, skull, and cerebrospinal fluid (CSF) heavily mask the brain signal. To date, the widespread adoption of the non-invasive optical monitoring techniques is mainly hampered by the traditional bulky, expensive, complex and fragile components which significantly impact the overall cost and dimension of the system. Our goal is the development of a miniaturized compact NIRS probe, that can be directly put in contact with the sample under test to obtain high diffused photon harvesting efficiency without the need for cumbersome optical fibers and lenses for light injection and collection. The proposed system is composed of two parts namely; i) pulsed light emission unit and ii) gated single-photon detection module. The light emission unit will employ a laser source pulsed at over 80MHz with picosecond pulse width generator embedded into the probe along with the light detection unit which comprises single-photon detectors integrated with other peripheral control circuitry. Short distance source and detector pairing, most preferably on a single chip has the potential to greatly expedites the traditional method of portable brain imaging