Millimeter-Wave Concurrent Dual-Band Sige Bicmos Rfic Phased-Array Transmitter and Components

A concurrent dual-band phased-array transmitter (TX) and its constituent components are studied in this dissertation. The TX and components are designed for the unlicensed bands, 22–29 and 57–64 GHz, using a 0.18-μm BiCMOS technology. Various studies have been done to design the components, which are suitable for the concurrent dual-band phased-array TX. The designed and developed components in this study are an attenuator, switch, phase shifter, power amplifier and power divider. Attenuators play a key role in tailoring main beam and side-lobe patterns in a phased-array TX. To perform the function in the concurrent dual-band phased-array TX, a 22–29 and 57–64 GHz concurrent dual-band attenuator with low phase variations is designed. Signal detection paths are employed at the output of the phased-array TX to monitor the phase and amplitude deviations/errors, which are larger in the high-frequency design. The detected information enables the TX to have an accurate beam tailoring and steering. A 10–67 GHz wide-band attenuator, covering the dual bands, is designed to manipulate the amplitude of the detected signal. New design techniques for an attenuator with a wide attenuation range and improved flatness are proposed. Also, a topology of dual-function circuit, attenuation and switching, is proposed. The switching turns on and off the detection path to minimize the leakages while the path is not used. Switches are used to minimize the number of components in the phased-array transceiver. With the switches, some of the bi-directional components in the transceiver such as an attenuator, phase shifter, filter, and antenna can be shared by the TX and receiver (RX) parts. In this dissertation, a high-isolation switch with a band-pass filtering response is proposed. The band-pass filtering response suppresses the undesired harmonics and intermodulation products of the TX. Phase shifters are used in phased-array TXs to steer the direction of the beam. A 24-GHz phase shifter with low insertion loss variation is designed using a transistor-body-floating technique for our phased-array TX. The low insertion loss variation minimizes the interference in the amplitude control operation (by attenuator or variable gain amplifier) in phased-array systems. BJTs in a BiCMOS process are characterized across dc to 67 GHz. A novel characterization technique, using on-wafer calibration and EM-based de-embedding both, is proposed and its accuracy at high frequencies is verified. The characterized BJT is used in designing the amplifiers in the phased-array TX. A concurrent dual-band power amplifier (PA) centered at 24 and 60 GHz is proposed and designed for the dual-band phased-array TX. Since the PA is operating in the dual frequency bands simultaneously, significant linearity issues occur. To resolve the problems, a study to find significant intermodulation (IM) products, which increase the third intermodulation (IM3) products most, has been done. Also, an advanced simulation and measurement methodology using three fundamental tones is proposed. An 8-way power divider with dual-band frequency response of 22–29 and 57–64 GHz is designed as a constituent component of the phased-array TX

Microstrip broadband thin-film attenuators without via-hole-ground at millimeter wave frequencies

A comprehensive design methodology for microstrip broadband attenuators is presented. Closed-form design equations are given for two types of distributed attenuators. The attenuators are based on a cascade connection of thin-film resistors and microstrip line sections. The structure provides maximally flat attenuation and wideband performance without the need of plated via holes to ground, facilitating manufacture as well as achieving proper performance at millimeter wave frequencies. Experimental results demonstrate the validity of the technique applied to 3 dB and 13 dB broadband attenuators on aluminasubstrate up to 67 GHz. The proposed topology can be applied not only to MIC, but also to MMIC designs at the highest frequencies.This work was supported by the Spanish Ministry of Economy and Competitiveness mainly under Grant ESP2015-70646-C2-2-R and additionally under Grant TEC2017-83343-C4-1-R, and Ministry of Science, Innovation and Universities under Grant AYA2017-92153-EXP. The authors thank Eva Cuerno for her assistance during the attenuators assembly

SiGe BiCMOS ICs for X-Band 7-Bit T/R module with high precision amplitude and phase control

Over the last few decades, phased array radar systems had been utilizing Transmit/Receive (T/R) modules implemented in III-V semiconductor based technologies. However, their high cost, size, weight and low integration capability created a demand for seeking alternative solutions to realize T/R modules. In recent years, SiGe BiCMOS technologies are rapidly growing their popularity in T/R module applications by virtue of meeting high performance requirements with more reduced cost and power dissipation with respect to III-V technologies. The next generation phased array radar systems require a great number of fully integrated, high yield, small-scale and high accuracy T/R modules. In line with these trends, this thesis presents the design and implementation of the first and only 7-Bit X-Band T/R module with high precision amplitude and phase control in the open literature, which is realized in IHP 0.25μ SiGe BiCMOS technology. In the scope of this thesis, sub-blocks of the designed T/R module such as low noise amplifier (LNA), inter-stage amplifier, SiGe Hetero-Junction Bipolar Transistor (HBT) Single- Pole Double-Throw (SPDT) switch and 7-Bit digitally controlled step attenuator are extensively discussed. The designed LNA exhibits Noise Figure (NF) of 1.7 dB, gain of 23 dB, Output Referred Compression Point (OP1dB) of 16 dBm while the inter-stage amplifier gives measured NF of 3 dB, gain of 15 dB and OP1dB of 18 dBm. Moreover, the designed SPDT switch has an Insertion Loss (IL) of 1.7 dB, isolation of 40 dB and OP1dB of 28 dBm. Lastly, the designed 7-Bit SiGe HBT digitally controlled step attenuator demonstrates IL of 8 dB, RMS attenuation error of 0.18 dB, RMS phase error of 2° and OP1dB of 16 dBm. The 7-Bit T/R module is constructed by using the sub-blocks given above, along with a 7- Bit phase shifter (PS) and a power amplifier (PA). Post-layout simulation results show that the designed T/R module exhibits a gain of 38 dB, RMS phase error of 2.6°, RMS amplitude error of 0.82 dB and Rx-Tx isolation of 80 dB across X-Band. The layout of T/R module occupies an area of 11.37 mm2

A Millimeter-Wave Coexistent RFIC Receiver Architecture in 0.18-µm SiGe BiCMOS for Radar and Communication Systems

Innovative circuit architectures and techniques to enhance the performance of several key BiCMOS RFIC building blocks applied in radar and wireless communication systems operating at the millimeter-wave frequencies are addressed in this dissertation. The former encapsulates the development of an advanced, low-cost and miniature millimeter-wave coexistent current mode direct conversion receiver for short-range, high-resolution radar and high data rate communication systems. A new class of broadband low power consumption active balun-LNA consisting of two common emitters amplifiers mutually coupled thru an AC stacked transformer for power saving and gain boosting. The active balun-LNA exhibits new high linearity technique using a constant gm cell transconductance independent of input-outputs variations based on equal emitters’ area ratios. A novel multi-stages active balun-LNA with innovative technique to mitigate amplitude and phase imbalances is proposed. The new multi-stages balun-LNA technique consists of distributed feed-forward averaging recycles correction for amplitude and phase errors and is insensitive to unequal paths parasitic from input to outputs. The distributed averaging recycles correction technique resolves the amplitude and phase errors residuals in a multi-iterative process. The new multi-stages balun-LNA averaging correction technique is frequency independent and can perform amplitude and phase calibrations without relying on passive lumped elements for compensation. The multi-stage balun-LNA exhibits excellent performance from 10 to 50 GHz with amplitude and phase mismatches less than 0.7 dB and 2.86º, respectively. Furthermore, the new multi-stages balun-LNA operates in current mode and shows high linearity with low power consumption. The unique balun-LNA design can operates well into mm-wave regions and is an integral block of the mm-wave radar and communication systems. The integration of several RFIC blocks constitutes the broadband millimeter-wave coexistent current mode direct conversion receiver architecture operating from 22- 44 GHz. The system and architectural level analysis provide a unique understanding into the receiver characteristics and design trade-offs. The RF front-end is based on the broadband multi-stages active balun-LNA coupled into a fully balanced passive mixer with an all-pass in-phase/quadrature phase generator. The trans-impedance amplifier converts the input signal current into a voltage gain at the outputs. Simultaneously, the high power input signal current is channelized into an anti-aliasing filter with 20 dB rejection for out of band interferers. In addition, the dissertation demonstrates a wide dynamic range system with small die area, cost effective and very low power consumption

A Millimeter-Wave Coexistent RFIC Receiver Architecture in 0.18-µm SiGe BiCMOS for Radar and Communication Systems

Innovative circuit architectures and techniques to enhance the performance of several key BiCMOS RFIC building blocks applied in radar and wireless communication systems operating at the millimeter-wave frequencies are addressed in this dissertation. The former encapsulates the development of an advanced, low-cost and miniature millimeter-wave coexistent current mode direct conversion receiver for short-range, high-resolution radar and high data rate communication systems. A new class of broadband low power consumption active balun-LNA consisting of two common emitters amplifiers mutually coupled thru an AC stacked transformer for power saving and gain boosting. The active balun-LNA exhibits new high linearity technique using a constant gm cell transconductance independent of input-outputs variations based on equal emitters’ area ratios. A novel multi-stages active balun-LNA with innovative technique to mitigate amplitude and phase imbalances is proposed. The new multi-stages balun-LNA technique consists of distributed feed-forward averaging recycles correction for amplitude and phase errors and is insensitive to unequal paths parasitic from input to outputs. The distributed averaging recycles correction technique resolves the amplitude and phase errors residuals in a multi-iterative process. The new multi-stages balun-LNA averaging correction technique is frequency independent and can perform amplitude and phase calibrations without relying on passive lumped elements for compensation. The multi-stage balun-LNA exhibits excellent performance from 10 to 50 GHz with amplitude and phase mismatches less than 0.7 dB and 2.86º, respectively. Furthermore, the new multi-stages balun-LNA operates in current mode and shows high linearity with low power consumption. The unique balun-LNA design can operates well into mm-wave regions and is an integral block of the mm-wave radar and communication systems. The integration of several RFIC blocks constitutes the broadband millimeter-wave coexistent current mode direct conversion receiver architecture operating from 22- 44 GHz. The system and architectural level analysis provide a unique understanding into the receiver characteristics and design trade-offs. The RF front-end is based on the broadband multi-stages active balun-LNA coupled into a fully balanced passive mixer with an all-pass in-phase/quadrature phase generator. The trans-impedance amplifier converts the input signal current into a voltage gain at the outputs. Simultaneously, the high power input signal current is channelized into an anti-aliasing filter with 20 dB rejection for out of band interferers. In addition, the dissertation demonstrates a wide dynamic range system with small die area, cost effective and very low power consumption

Low-Overhead Built-In Self-Test for Advanced RF Transceiver Architectures

abstract: Due to high level of integration in RF System on Chip (SOC), the test access points are limited to the baseband and RF inputs/outputs of the system. This limited access poses a big challenge particularly for advanced RF architectures where calibration of internal parameters is necessary and ensure proper operation. Therefore low-overhead built-in Self-Test (BIST) solution for advanced RF transceiver is proposed. In this dissertation. Firstly, comprehensive BIST solution for RF polar transceivers using on-chip resources is presented. In the receiver, phase and gain mismatches degrade sensitivity and error vector magnitude (EVM). In the transmitter, delay skew between the envelope and phase signals and the finite envelope bandwidth can create intermodulation distortion (IMD) that leads to violation of spectral mask requirements. Characterization and calibration of these parameters with analytical model would reduce the test time and cost considerably. Hence, a technique to measure and calibrate impairments of the polar transceiver in the loop-back mode is proposed. Secondly, robust amplitude measurement technique for RF BIST application and BIST circuits for loop-back connection are discussed. Test techniques using analytical model are explained and BIST circuits are introduced. Next, a self-compensating built-in self-test solution for RF Phased Array Mismatch is proposed. In the proposed method, a sinusoidal test signal with unknown amplitude is applied to the inputs of two adjacent phased array elements and measure the baseband output signal after down-conversion. Mathematical modeling of the circuit impairments and phased array behavior indicates that by using two distinct input amplitudes, both of which can remain unknown, it is possible to measure the important parameters of the phased array, such as gain and phase mismatch. In addition, proposed BIST system is designed and fabricated using IBM 180nm process and a prototype four-element phased-array PCB is also designed and fabricated for verifying the proposed method. Finally, process independent gain measurement via BIST/DUT co-design is explained. Design methodology how to reduce performance impact significantly is discussed. Simulation and hardware measurements results for the proposed techniques show that the proposed technique can characterize the targeted impairments accurately.Dissertation/ThesisDoctoral Dissertation Electrical Engineering 201

Radio Frequency and Millimeter Wave Circuit Component Design with SiGe BiCMOS Technology

The objective of this research is to study and leverage the unique properties and advantages of silicon-germanium (SiGe) heterojunction bipolar transistor (HBT) integrated circuit technologies to better design radio frequency (RF) and millimeter wave (mm-wave) circuit components. With recent developments, the high yield and modest cost silicon-based semiconductor technologies have proven to be attractive and cost-effective alternatives to high-performance III-V technology platforms. Between SiGe bipolar complementary metal-oxide-semiconductor (BiCMOS) technology and advanced RF complementary metal-oxide-semiconductor (CMOS) technology, the fundamental device-level differences between SiGe HBTs and field-effect transistors (FETs) grant SiGe HBTs clear advantages as well as unique design concerns. The work presented in this dissertation identifies several advantages and challenges on design using SiGe HBTs and provides design examples that exploit and address these unique benefits and problems with circuit component designs using SiGe HBTs.Ph.D

Reconfigurable Impedance Matching Networks Based on RF-MEMS and CMOS-MEMS Technologies

Reconfigurable impedance matching networks are an integral part of multiband radio-frequency (RF) transceivers. They are used to compensate for the input/output impedance variations between the different blocks caused by switching the frequency band of operation or by adjusting the output power level. Various tuning techniques have been developed to construct tunable impedance matching networks employing solid-state p-i-n diodes and varactors. At millimeter-wave frequencies, the increased loss due to the low quality factor of the solid-state devices becomes an important issue. Another drawback of the solid-state tuning elements is the increased nonlinearity and noise at higher RF power levels. The objective of the research described in this thesis is to investigate the feasibility of using RF microelectromechanical systems (RF-MEMS) technology to develop reconfigurable impedance matching networks. Different types of tunable impedance matching networks with improved impedance tuning range, power handling capability, and lower insertion loss have been developed. Another objective is to investigate the realization of a fully integrated one-chip solution by integrating MEMS devices in standard processes used for RF integrated circuits (RFICs). A new CMOS-MEMS post-processing technique has been developed that allows the integration of tunable RF MEMS devices with vertical actuation within a CMOS chip. Various types of CMOS-MEMS components used as tuning elements in reconfigurable RF transceivers have been developed. These include tunable parallel-plate capacitors that outperform the available CMOS solid-state varactors in terms of quality factor and linearity. A tunable microwave band-pass filter has been demonstrated by employing the proposed RF MEMS tunable capacitors. For the first time, CMOS-MEMS capacitive type switches for microwave and millimeter-wave applications have been developed using TSMC 0.35-µm CMOS process employing the proposed CMOS-MEMS integration technique. The switch demonstrates an excellent RF performance from 10-20 GHz. Novel MEMS-based reconfigurable impedance matching networks integrated in standard CMOS technologies are also presented. An 8-bit reconfigurable impedance matching network based on the distributed MEMS transmission line (DMTL) concept operating at 13-24 GHz is presented. The network is implemented using standard 0.35-µm CMOS technology and employs a novel suspended slow-wave structure on a silicon substrate. To our knowledge, this is the first implementation of a DMTL tunable MEMS impedance matching network using a standard CMOS technology. A reconfigurable amplifier chip for WLAN applications operating at 5.2 GHz is also designed and implemented. The amplifier achieves maximum power gain under variable load and source impedance conditions by using the integrated RF-MEMS impedance matching networks. This is the first single-chip implementation of a reconfigurable amplifier using high-Q MEMS impedance matching networks. The monolithic CMOS implementation of the proposed RF MEMS impedance matching networks enables the development of future low-cost single-chip RF multiband transceivers with improved performance and functionality

Development of Tunable RF Integrated Passive Devices

Radio frequency (RF) lumped elements are crucial building blocks for designing any type of passives circuits for RF front-end applications in mobile devices. In particular, high-quality (Q) factor lumped elements are desirable for improving both insertion loss and noise performance. Integrated passive devices (IPD) technology is a platform that can provide miniature inductors, and capacitors with high- Q values that are unattainable with traditional CMOS technologies. Over the past several years, IPD technology has been used to implement devices such as filters, couplers and impedance-matching networks for a wide range of system-in-package applications. However, most of the IPD circuits do not yet have any tunable/reconfigurable functions for use in frequency agile applications. The objective of this research is to develop tunable integrated passive devices (IPDs) using barium strontium titanate (BST) and micro-electrical-mechanical-systems (MEMS) technologies. Another objective is to develop a fabrication process for monolithic integration of MEMS switches and IPD devices. A 4-mask IPD glass/alumina-based fabrication process is developed at the University of Waterloo for the first time. Details of the modeling and characterization of high-Q lumped elements, L and C, are investigated. The RF performance of these elements is compared with that of similar designs fabricated in a commercial IPD foundry. To highlight the benefits of the IPD process, lumped element bandpass filters are designed, fabricated, and tested. BST varactors are integrated with IPD circuits to demonstrate a highly miniaturized tunable impedance matching network featuring a wide impedance coverage from 2-3 GHz and an insertion loss of approximately 1 dB. The network promises to be useful in a broad range of wireless applications. A high performance tunable IPD/BST bandstop filter with a wideband balun as a multichip module is also proposed. Reconfigurable IPD/BST bandpass filters with tunable transmission zeros are presented and investigated experimentally for operation under high power levels. Intermodulation test results are presented for the integrated IPD/BST devices. Making use of the fact that the IPD fabrication process is amenable to the realization of MEMS devices, the IPD process originally developed for realizing passive circuits is further expanded to accommodate monolithic integration of MEMS switches with IPD circuits. Contact-type MEMS switches are developed, fabricated and tested. Also, a monolithically integrated IPD/MEMS 3-bit high resolution true-time delay network and high-Q switched-capacitor bank are fabricated and tested to demonstrate the benefits of integrating MEMS technology with the IPD technology