PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Characterization and System Identification of XY Flexural Mechanism Using Double Parallelogram Manipulator for High Precision Scanning

This article represents modeling of double parallelogram flexural manipulator derived from basic classical mechanics theory. Fourth order vibration wave equation is used for mathematical modeling and its performance is determined for step input and sinusoidal forced input. Static characterization of DFM is carried out to determine stiffness and force deflection characteristics over the entire motion range and dynamic characteristics is carried out using Transient response and Frequency response. Transient response is determined using step input to DFM which gives system properties such as damping, rise time and settling time. These parameters are then compared with theoretical model presented previously. Frequency response of DFM system gives characteristics of system with different frequency inputs which is used for experimental modeling of DFM device. Here, Voice Coil Motor is used as Actuator and optical encoder is used for positioning sensing of motion stage. It is noted that theoretical model is having 5% accuracy with experimental results. To achieve better position and accuracy, PID and LQR (Linear Quadratic Regulator) implementation was carried out on experimental model. PID gains are optimally tuned by using Ziegler Nichols approach. PID control is implemented experimentally using dSPACE DS1104 microcontroller and Control Desk software. Experimentally, it is observed that positioning accuracy is less than 5 μm. Further multiple DFM blocks are arranged for developing XY flexural mechanism and static characterization was carried out on it. The comparison of experimental and FEA results for X-direction and Y-direction is presented at end of paper

A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing

Precision positioning stages with large strokes and high positioning accuracy are attractive for high-performance micro/nano manufacturing. This paper presents the dynamic design and characteristic investigation of a novel XY micropositioning stage. Firstly, the mechanism of the stage was introduced. The XY stage was directly driven by two linear motors, and the X- and Y- axes kinematic decoupling was realized through a novel flexible decoupling mechanism based on flexure hinges and preloaded spring. The dynamic model of the XY stage was established, and the influences of the rotational stiffness of the flexure hinge and the initial positions of the working table on the dynamic rotation of the positioning stage were investigated. The stiffness and geometric parameters of the flexure hinges were determined at the condition that the angular displacements of the working table were within ±0.5° with a motion stroke of ±25 mm. Finally the stage performance was investigated through simulation and experiments, the X- and Y-axes step responses, the rotation angular and positioning accuracy of the stage were obtained. The results show that the stage exhibits good performance and can be used for micro/nano manufacturing

DEVELOPMENT OF A NOVEL Z-AXIS PRECISION POSITIONING STAGE WITH MILLIMETER TRAVEL RANGE BASED ON A LINEAR PIEZOELECTRIC MOTOR

Piezoelectric-based positioners are incorporated into stereotaxic devices for microsurgery, scanning tunneling microscopes for the manipulation of atomic and molecular-scale structures, nanomanipulator systems for cell microinjection and machine tools for semiconductor-based manufacturing. Although several precision positioning systems have been developed for planar motion, most are not suitable to provide long travel range with large load capacity in vertical axis because of their weights, size, design and embedded actuators. This thesis develops a novel positioner which is being developed specifically for vertical axis motion based on a piezoworm arrangement in flexure frames. An improved estimation of the stiffness for Normally Clamped (NC) clamp is presented. Analytical calculations and finite element analysis are used to optimize the design of the lifting platform as well as the piezoworm actuator to provide maximum thrust force while maintaining a compact size. To make a stage frame more compact, the actuator is integrated into the stage body. The complementary clamps and the amplified piezoelectric actuators based extenders are designed such that no power is needed to maintain a fixed vertical position, holding the payload against the force of gravity. The design is extended to a piezoworm stage prototype and validated through several tests. Experiments on the prototype stage show that it is capable of a speed of 5.4 mm/s, a force capacity of 8 N and can travel over 16 mm

Wide Range Control and Performance Evaluation of a Single-Axis Compliant Nano-Positioning System

This thesis is focused on the development of compliant nano-positioning system. The mechanical design is presented and each component is thoroughly described. The control algorithm developed is based on a PID feedback position control and a force feedforward control. This thesis focuses on 3 achievements. First, improvement of the closed-loop control taking into account the nonlinearities. Secondly, the dynamic behavior has been analyzed. Finally, the cross-axis coupling has been examined

Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.Includes bibliographical references (p. 204-206).The intent of this research is to generate the knowledge required to design, fabricate and operate a device capable of high speed nano-scale vertical positioning of microscopy samples. The high speed focusing device (HSFD) created during this research utilizes a new combination of technologies for the purpose of imaging: Lorentz coil actuation, flexural bearings and strain gage sensing. The application of the technologies combined with precision design principles, as used in the HSFD, result in a demonstrated combination of performance and cost gains over a measured commercially available system. The HSFD is able to perform steps with 8 ms 95% settling time, 2% dynamic accuracy, and 0.005% static accuracy while operating with a resolution of 10.5 nm (l[sigma]) over a range of 500 [mu]m at a cost of about $1400. This performance is 3x faster stepping, 2x better dynamic accuracy, ~~100x better static accuracy, equivalent resolution and range to the top of the line commercial devices at less than half of the cost. The reduced cost is envisioned to enable greater distribution and use of nano-positioning imaging stages, while the increased performance is envisioned to enable faster, more benign (in the case of biological sciences) and more precise imaging. The increased use and data gathering ability of the new device are envisioned to enable fields of research such as biology and materials science to extend their bounds further into the micro/nano-scale as well as further along the time scale for both high speed and low speed processes.by Robert M. Panas.S.M

Design and computational optimization of a flexure-based XY nano-positioning stage

This thesis presents the design and computational optimization of a two-axis nano-positioning stage. The devised stage relies on double parallelogram flexure bearings with under-constraint eliminating linkages to enable motion in the primary degrees-of-freedom. The structural parameters of the underlying flexures were optimized to provide a large-range and high bandwidth with sub-micron resolution while maintaining a compact size. A finite element model was created to establish a functional relationship between the geometry of the flexure elements and the stiffness behavior. Then, a neural network was trained from the simulation results to explore the design space with a low computational expense. The neural net was integrated with a genetic algorithm to optimize the design of the flexures for compactness and dynamic performance. The optimal solutions resulted in a reduction of stage footprint by 14% and an increase in the first natural frequency by 75% relative to a baseline design, all while preserving the same 50mm range in each axis with a factor of safety of 2. This confirms the efficacy of the proposed approach in improving stage performance through an optimization of its constituent flexures.Mechanical Engineerin

Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner

Precision motion systems find a broad range of application in various fields such as micro/nano machining tools, lithography scanners, testing and metrology machines, micro-assembly, biotechnology, optics manufacturing, magnetic data-storage, and optical disk drives. In this thesis, an ultraprecision motion stage (nano-positioner) is designed and built based on the concept of a low-cost desktop precision micro machine tool. Linear positioning performance requirements of such a machine tool are used as design objectives. The nano-positioner’s mechatronic design is carried out in such a way to integrate different components towards high performance in terms of high dynamic range, high feedrate, servo accuracy, and geometric accuracy. A self-aligning air-bearing/bushing arrangement is employed for frictionless motion with infinite theoretical resolution, as well as reduced assembly costs and footprint. The air discharge from the air bearings/bushings are also utilized for assistance in the removal of heat dissipated from actuator coils. A voice coil actuator (VCA) is chosen for continuous, non-contact operation, and designed from scratch. A number of dimensional variables of the cylindrical VCA are set according to required forces, motion range, production/assembly tolerances, magnet availability, leakage flux, etc. The remainder of variables is determined according to two novel optimization objectives defined independent of the coil wire gauge, which separately aim for maximum stage acceleration capacity and minimum heat generation per generated force. The actuators are operated in a complementary double configuration for control simplicity which allows for a straightforward and robust design for controller stability. Controller design is carried out at current control and position control levels. Current frequency response of the voice coil actuators is obtained, and they are observed to possess additional high frequency dynamics on top of the expected first order lumped resistance and inductance model. These are attributed to the eddy currents in the stator structure. A closed loop bandwidth of better than 907 [Hz] is achieved using the integrator plus lead current controller. The position controller is designed using the identified overall plant which includes the moving body, current dynamics and the force response. The lead-lag position controller is tuned at 450 [Hz] cross-over frequency and 40 [deg] phase margin. The control error during the tracking of a step trajectory filtered at 40 [Hz] is found to vary between ±5 [nm], indicating a 4 million dynamic range over the 20 [mm] stroke length. Dynamic Error Budgeting (DEB) method has been used to resolve the components of the error, and the largest contributor is found to be the sensor noise. The actual positioning error, which is an ideal signal excluding sensor noise is estimated using the same methodology and disturbance models, and it is found to be 0.680 [nm] root-mean-square (RMS). For the trajectory following case, experiments are carried out with and without a compensation scheme for encoder quadrature detection errors. The compensation is observed to reduce the ±45 [nm] control error to ±15 [nm]. For the assessment of stage performance and the verification of design choices, modal testing and laser interferometric metrology have been applied to the linear nano-positioner. For modal testing, two independent methods are used and their predictions are compared. In the first method, a graphical approach, namely the peak-picking method, is employed to identify modal parameters (natural frequency and damping ratio) and mode shapes. In the second method, a modal testing software package is used to identify the same using automated algorithms. The first mode, which is the most critical one for controller design, is identified at 65 [Hz] as a roll mode, followed by horizontal, vertical, and pitch modes at 450, 484, and 960 [Hz], respectively. The geometric errors of the system are identified using laser interferometric measurements, using various optical setups for linear and angular components. An error budget is formed using these results, together with the estimated thermal errors and servo errors. The accuracy of the stage is determined to be ±5.0 [μm], which had a ±1.1 [μm] non-repeatable component. In the future, the controller structure can be enhanced with an additional pole beyond the crossover frequency, in order to suppress unnecessary oscillations of the control effort signal around the set point due to the encoder noise transmitted to the controller input. Using an estimation of air bearing pitch stiffness from the catalogue values for normal stiffness, the roll mode was predicted at 672 [Hz]. The much lower natural frequency for that mode identified in modal testing (65 [Hz]) can be attributed to the shortcomings of the estimation method, primarily the neglect of the distortion of the supporting air cushion at the bearing interface due to out of plane rotations. In the future, experimental data can be obtained to characterize the air bearing pitch stiffness more accurately. It was observed that the preferred compensation scheme for the encoder quadrature detection errors is unable to match third and fourth harmonics of the encoder measurement error sufficiently. In the future, better compensation methods can be investigated for an improved match. During laser interferometric measurements, measurement uncertainty due to laser beam misalignment and air turbulence were inferred to be high. In the future, better ways to align the laser with the optics, as well as methods for improved assessment and compensation of environmental effects can be investigated

Creative design and modelling of large-range translation compliant parallel manipulators

Compliant parallel mechanisms/manipulators (CPMs) are parallel manipulators that transmit motion/load by deformation of their compliant members. Due to their merits such as the eliminated backlash and friction, no need for lubrication, reduced wear and noise, and monolithic configuration, they have been used in many emerging applications as scanning tables, bio-cell injectors, nano-positioners, and etc. How to design large-range CPMs is still a challenging issue. To meet the needs for large-range translational CPMs for high-precision motion stages, this thesis focuses on the systematic conceptual design and modelling of large-range translational CPMs with distributed-compliance. Firstly, several compliant parallel modules with distributed-compliance, such as spatial multi-beam modules, are identified as building blocks of translational CPMs. A normalized, nonlinear and analytical model is then derived for the spatial multi-beam modules to address the non-linearity of load-equilibrium equations. Secondly, a new design methodology for translational CPMs is presented. The main characteristic of the proposed design approach is not only to replace kinematic joints as in the literature, but also to replace kinematic chains with appropriate multiple degrees-of-freedom (DOF) compliant parallel modules. Thirdly, novel large-range translational CPMs are constructed using the proposed design methodology and identified compliant parallel modules. The proposed novel CPMs include, for example, a 1-DOF compliant parallel gripper with auto-adaptive grasping function, a stiffness-enhanced XY CPM with a spatial compliant leg, and an improved modular XYZ CPM using identical spatial double four-beam modules. Especially, the proposed XY CPM and XYZ CPM can achieve a 10mm’s motion range along each axis in the case studies. Finally, kinematostatic modelling of the proposed translational CPMs is presented to enable rapid performance characteristic analysis. The proposed analytical models are also compared with finite element analysis