Estudo da eletromigração em circuitos integrados na fase de projeto

Orientadores: Roberto Lacerda de Orio, Leandro Tiago ManeraTese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Elétrica e de ComputaçãoResumo: O dano por eletromigração nas interconexões é um gargalo bem conhecido dos circuitos integrados, pois causam problemas de confiabilidade. A operação em temperaturas e densidades de corrente elevadas acelera os danos, aumentando a resistência da interconexão e, portanto, reduzindo a vida útil do circuito. Este problema tem se acentuado com o escalonamento da tecnologia. Para garantir a confiabilidade da interconexão e, como consequência, a confiabilidade do circuito integrado, métodos tradicionais baseados no chamado Efeito Blech e numa densidade de corrente máxima permitida são implementados durante o projeto da interconexão. Esses métodos, no entanto, não levam em consideração o impacto da eletromigração no desempenho do circuito. Neste trabalho, a abordagem tradicional é estendida e um método para avaliar o efeito da eletromigração no desempenho de circuito integrado é desenvolvido. O método é implementado em uma ferramenta que identifica as interconexões críticas em um circuito integrado e sugere larguras adequadas com base em diferentes critérios para mitigar os danos à eletromigração e aumentar a confiabilidade. Além disso, é determinada a variação dos parâmetros de desempenho do circuito conforme a resistência das interconexões aumenta. A ferramenta é incorporada ao fluxo de projeto do circuito integrado e usa os dados dos kits de projeto e relatórios diretamente disponíveis no ambiente de projeto. Uma análise precisa da distribuição de temperatura na estrutura de interconexão é essencial para uma melhor avaliação da confiabilidade da interconexão. Portanto, é implementado um modelo para calcular a temperatura em cada nível de metalização da estrutura de interconexão. A distribuição de temperatura nas camadas de metalização de diferentes tecnologias é investigada. É mostrado que a temperatura no Metal 1 da tecnologia Intel 10 nm aumenta 75 K, 12 K mais alta que no Metal 2. Como esperado, as camadas mais próximas dos transistores sofrem um aumento de temperatura mais significativo. A ferramenta é aplicada para avaliar eletromigração nas interconexões e na robustez de diferentes circuitos, como um oscilador em anel, um circuito gerador de tensão de referência tipo bandgap e um amplificador operacional. O amplificador operacional, em particular, é cuidadosamente estudado. A metodologia proposta identifica interconexões críticas que quando danificadas por eletromigração causam grandes variações no desempenho do circuito. No pior cenário, a frequência de corte do circuito varia 65% em 5 anos de operação. Uma descoberta interessante é que a metodologia proposta identifica interconexões críticas que não seriam identificadas pelos critérios tradicionais. Essas interconexões operam com densidades de corrente abaixo do limite recomendado pelas regras de projeto. No entanto, uma dessas interconexões leva a uma variação de 30% no ganho do amplificador operacional. Em resumo, a ferramenta proposta verificou que dos 20% de caminhos com uma densidade crítica de corrente, apenas 3% degradam significativamente o desempenho do circuito. Este trabalho traz o estudo da confiabilidade das interconexões e de circuitos integrados para a fase de projeto, o que permite avaliar a degradação do desempenho do circuito antecipadamente durante o seu desenvolvimento. A ferramenta desenvolvida permite ao projetista identificar interconexões críticas que não seriam detectadas usando o critério de densidade máxima de corrente, levando a uma análise mais ampla e precisa da robustez de circuitos integradosAbstract: Electromigration damage in interconnects is a well-known bottleneck of integrated circuits, because it causes reliability problems. Operation at high temperatures and current densities accelerates the damage, increasing the interconnect resistance and, therefore, reducing the circuit lifetime. This issue has been accentuated with the technology downscaling. To guarantee the interconnect reliability and, as a consequence, the integrated circuit reliability, traditional methods based on the so-called Blech Effect and on the maximum allowed current density are implemented during interconnect design. These methods, however, do not take into account the impact of the electromigration on the circuit performance. In this work the traditional approach is extended and a method to evaluate the effect of the electromigration in an integrated circuit performance is developed. The method is implemented in a tool which identifies the critical interconnect lines of an integrated circuit and suggests the proper interconnect width based on different criteria to mitigate the electromigration damage and to increase the reliability. In addition, the variation of performance parameters of the circuit as an interconnect resistance changes is determined. The tool is incorporated into the design flow of the integrated circuit and uses the data from design kits and reports directly available from the design environment. An accurate analysis of the temperature distribution on the interconnect structure is essential to a better assessment of the interconnect reliability. Therefore, a model to compute the temperature on each metallization level of the interconnect structure is implemented. The temperature distribution on the metallization layers of different technologies is investigated. It is shown that the temperature in the Metal 1 of the Intel 10 nm can increase by 75 K, 12 K higher than in the Metal 2. As expected, the layers that are closer to the transistors undergo a more significant temperature increase. The tool is applied to evaluate the interconnects and the robustness of different circuits, namely a ring oscillator, a bandgap voltage reference circuit, and an operational amplifier, against electromigration. The operational amplifier, in particular, is thoroughly studied. The proposed methodology identifies critical interconnects which under electromigration cause large variations in the performance of the circuit. In a worst-case scenario, the cutoff frequency of the circuit varies by 65% in 5 years of operation. An interesting finding is that the proposed methodology identifies critical interconnects which would not be identified by the traditional criteria. These interconnects have current densities below the limit recommended by the design rules. Nevertheless, one of such an interconnect leads to a variation of 30% in the gain of the operational amplifier. In summary, the proposed tool verified that from the 20% paths with a critical current density, only 3% degrades significantly the circuit performance. This work brings the study of the reliability of the interconnects and of integrated circuits to the design phase, which provides the assessment of a circuit performance degradation at an early stage of development. The developed tool allows the designer to identify critical interconnects which would not be detected using the maximum current density criterion, leading to more accurate analysis of the robustness of integrated circuitsDoutoradoEletrônica, Microeletrônica e OptoeletrônicaDoutor em Engenharia Elétrica88882.329437/2019-01CAPE

The Conference on High Temperature Electronics

The status of and directions for high temperature electronics research and development were evaluated. Major objectives were to (1) identify common user needs; (2) put into perspective the directions for future work; and (3) address the problem of bringing to practical fruition the results of these efforts. More than half of the presentations dealt with materials and devices, rather than circuits and systems. Conference session titles and an example of a paper presented in each session are (1) User requirements: High temperature electronics applications in space explorations; (2) Devices: Passive components for high temperature operation; (3) Circuits and systems: Process characteristics and design methods for a 300 degree QUAD or AMP; and (4) Packaging: Presently available energy supply for high temperature environment

NASA Tech Briefs, February 2001

The topics include: 1) Application Briefs; 2) National Design Engineering Show Preview; 3) Marketing Inventions to Increase Income; 4) A Personal-Computer-Based Physiological Training System; 5) Reconfigurable Arrays of Transistors for Evolvable Hardware; 6) Active Tactile Display Device for Reading by a Blind Person; 7) Program Automates Management of IBM VM Computer Systems; 8) System for Monitoring the Environment of a Spacecraft Launch; 9) Measurement of Stresses and Strains in Muscles and Tendons; 10) Optical Measurement of Temperatures in Muscles and Tendons; 11) Small Low-Temperature Thermometer With Nanokelvin Resolution; 12) Heterodyne Interferometer With Phase-Modulated Carrier; 13) Rechargeable Batteries Based on Intercalation in Graphite; 14) Signal Processor for Doppler Measurements in Icing Research; 15) Model Optimizes Drying of Wet Sheets; 16) High-Performance POSS-Modified Polymeric Composites; 17) Model Simulates Semi-Solid Material Processing; 18) Modular Cryogenic Insulation; 19) Passive Venting for Alleviating Helicopter Tail-Boom Loads; 20) Computer Program Predicts Rocket Noise; 21) Process for Polishing Bare Aluminum to High Optical Quality; 22) External Adhesive Pressure-Wall Patch; 23) Java Implementation of Information-Sharing Protocol; 24) Electronic Bulletin Board Publishes Schedules in Real Time; 25) Apparatus Would Extract Water From the Martian Atmosphere; 26) Review of Research on Supercritical vs Subcritical Fluids; 27) Hybrid Regenerative Water-Recycling System; 28) Study of Fusion-Driven Plasma Thruster With Magnetic Nozzle; 29) Liquid/Vapor-Hydrazine Thruster Would Produce Small Impulses; and 30) Thruster Based on Sublimation of Solid Hydrazin

NASA Tech Briefs, Fall 1979

Topics include: NASA TU Services: Technology Utilization services that can assist you in learning about and applying NASA technology; New Product Ideas: A summary of selected innovations of value to manufacturers for the development of new products; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Life Sciences; Mechanics; Machinery; Fabrication Technology; Mathematics and Information Sciences

Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-Force magnetometers

Tesi en modalitat de compendi de publicacionsToday, the most common form of mass-production semiconductor device fabrication is Complementary Metal-Oxide Semiconductor (CMOS) technology. The dedicated Integrated Circuit (IC) interfaces of commercial sensors are manufactured using this technology. The sensing elements are generally implemented using Micro-Electro-Mechanical-Systems (MEMS), which need to be manufactured using specialized micro-machining processes. Finally, the CMOS circuitry and the MEMS should ideally be combined in a single package. For some applications, integration of CMOS electronics and MEMS devices on a single chip (CMOS-MEMS) has the potential of reducing fabrication costs, size, parasitics and power consumption, compared to other integration approaches. Remarkably, a CMOS-MEMS device may be built with the back-end-of-line (BEOL) layers of the CMOS process. But, despite its advantages, this particular approach has proven to be very challenging given the current lack of commercial products in the market. The main objective of this Thesis is to prove that a high-performance MEMS, sealed and packaged in a standard package, may be accurately modeled and manufactured using the BEOL layers of a CMOS process in a reliable way. To attain this, the first highly reliable novel CMOS-MEMS Lorentz Force Magnetometer (LFM) was successfully designed, modeled, manufactured, characterized and subjected to several reliability tests, obtaining a comparable or superior performance to the typical solid-state magnetometers used in current smartphones. A novel technique to avoid magnetic offsets, the main drawback of LFMs, was presented and its performance confirmed experimentally. Initially, the issues encountered in the manufacturing process of MEMS using the BEOL layers of the CMOS process were discouraging. Vapor HF release of MEMS structures using the BEOL of CMOS wafers resulted in undesirable damaging effects that may lead to the conclusion that this manufacturing approach is not feasible. However, design techniques and workarounds for dealing with the observed issues were devised, tested and implemented in the design of the LFM presented in this Thesis, showing a clear path to successfully fabricate different MEMS devices using the BEOL.Hoy en día, la forma más común de producción en masa es una tecnología llamada Complementary Metal-Oxide Semiconductor (CMOS). La interfaz de los circuitos integrados (IC) de sensores comerciales se fabrica usando, precisamente, esta tecnología. Actualmente es común que los sensores se implementen usando Sistemas Micro-Electro-Mecánicos (MEMS), que necesitan ser fabricados usando procesos especiales de micro-mecanizado. En un último paso, la circuitería CMOS y el MEMS se combinan en un único elemento, llamado package. En algunas aplicaciones, la integración de la electrónica CMOS y los dispositivos MEMS en un único chip (CMOS-MEMS) alberga el potencial de reducir los costes de fabricación, el tamaño, los parásitos y el consumo, al compararla con otras formas de integración. Resulta notable que un dispositivo CMOS-MEMS pueda ser construido con las capas del back-end-of-line (BEOL) de un proceso CMOS. Pero, a pesar de sus ventajas, este enfoque ha demostrado ser un gran desafío como demuestra la falta de productos comerciales en el mercado. El objetivo principal de esta Tesis es probar que un MEMS de altas prestaciones, sellado y empaquetado en un encapsulado estándar, puede ser correctamente modelado y fabricado de una manera fiable usando las capas del BEOL de un proceso CMOS. Para probar esto mismo, el primer magnetómetro CMOS-MEMS de fuerza de Lorentz (LFM) fue exitosamente diseñado, modelado, fabricado, caracterizado y sometido a varias pruebas de fiabilidad, obteniendo un rendimiento comparable o superior al de los típicos magnetómetros de estado sólido, los cuales son usados en móviles actuales. Cabe destacar que en esta Tesis se presenta una novedosa técnica con la que se evitan offsets magnéticos, el mayor inconveniente de los magnetómetros de fuerza Lorentz. Su efectividad fue confirmada experimentalmente. En los inicios, los problemas asociados al proceso de fabricación de MEMS usando las capas BEOL de obleas CMOS resultaba desalentador. Liberar estructuras MEMS hechas con obleas CMOS con vapor de HF producía efectos no deseados que bien podrían llevar a la conclusión de que este enfoque de fabricación no es viable. Sin embargo, se idearon y probaron técnicas de diseño especiales y soluciones ad-hoc para contrarrestar estos efectos no deseados. Se implementaron en el diseño del magnetómetro de Lorentz presentado en esta Tesis, arrojando excelentes resultados, lo cual despeja el camino hacia la fabricación de diferentes dispositivos MEMS usando las capas BEOL.Postprint (published version

NASA Tech Briefs, July 1995

Topics include: mechanical components, electronic components and circuits, electronic systems, physical sciences, materials, computer programs, mechanics, machinery, manufacturing/fabrication, mathematics and information sciences, book and reports, and a special section of Federal laboratory computing Tech Briefs

Effect of wearout processes on the critical timing parameters and reliability of CMOS bistable circuits

The objective of the research presented in this thesis was to investigate the effects of wearout processes on the performance and reliability of CMOS bistable circuits. The main wearout process affecting reliability of submicron MOS devices was identified as hot-carrier stress (and the resulting degradation in circuit performance). The effect of hot-carrier degradation on the resolving time leading to metastability of the bistable circuits also have been investigated. Hot-carrier degradation was identified as a major reliability concern for CMOS bistable circuits designed using submicron technologies. The major hot-carrier effects are the impact ionisation of hot- carriers in the channel of a MOS device and the resulting substrate current and gate current generation. The substrate current has been used as the monitor for the hot-carrier stress and have developed a substrate current model based on existing models that have been extended to incorporate additional effects for submicron devices. The optimisation of the substrate current model led to the development of degradation and life-time models. These are presented in the thesis. A number of bistable circuits designed using 0.7 micron CMOS technology design rules were selected for the substrate current model analysis. The circuits were simulated using a set of optimised SPICE model parameters and the stress factors on each device was evaluated using the substrate current model implemented as a post processor to the SPICE simulation. Model parameters for each device in the bistable were degraded according to the stress experienced and simulated again to determine the degradation in characteristic timing parameters for a predetermined stress period. A comparative study of the effect of degradation on characteristic timing parameters for a number of latch circuits was carried out. The life-times of the bistables were determined using the life-time model. The bistable circuits were found to enter a metastable state under critical timing conditions. The effect of hot-carrier stress induced degradation on the metastable state operation of the bistables were analysed. Based on the analysis of the hot-carrier degradation effects on the latch circuits, techniques are suggested to reduce hot-carrier stress and to improve circuit life-time. Modifications for improving hot- carrier reliability were incorporated into all the bistable circuits which were re-simulated to determine the improvement in life-time and reliability of the circuits under hot-carrier stress. The improved circuits were degraded based on the new stress factors and the degradation effects on the critical timing parameters evaluated and these were compared with those before the modifications. The improvements in the life-time and the reliability of the selected bistable circuits were quantified. It has been demonstrated that the hot-carrier reliability for all the selected bistable circuits can be improved by design techniques to reduce the stress on identified critically stressed devices

NASA Tech Briefs, August 1993

Topics include: Computer Graphics; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Programs; Mechanics; Machinery; Fabrication Technology; Mathematics and Information Sciences; Life Sciences; Books and Reports

NASA Tech Briefs, November 2000

Topics covered include: Computer-Aided Design and Engineering; Electronic Components and Circuits; Electronic Systems; Test and Measurement; Physical Sciences; Materials; Computer Programs; Mechanics; Machinery/Automation; Manufacturing/Fabrication; Mathematics and Information Sciences; Data Acquisition