Reliability Investigations of MOSFETs using RF Small Signal Characterization

Modern technology needs and advancements have introduced various new concepts such as Internet-of-Things, electric automotive, and Artificial intelligence. This implies an increased activity in the electronics domain of analog and high frequency. Silicon devices have emerged as a cost-effective solution for such diverse applications. As these silicon devices are pushed towards higher performance, there is a continuous need to improve fabrication, power efficiency, variability, and reliability. Often, a direct trade-off of higher performance is observed in the reliability of semiconductor devices. The acceleration-based methodologies used for reliability assessment are the adequate time-saving solution for the lifetime's extrapolation but come with uncertainty in accuracy. Thus, the efforts to improve the accuracy of reliability characterization methodologies run in parallel. This study highlights two goals that can be achieved by incorporating high-frequency characterization into the reliability characteristics. The first one is assessing high-frequency performance throughout the device's lifetime to facilitate an accurate description of device/circuit functionality for high-frequency applications. Secondly, to explore the potential of high-frequency characterization as the means of scanning reliability effects within devices. S-parameters served as the high-frequency device's response and mapped onto a small-signal model to analyze different components of a fully depleted silicon-on-insulator MOSFET. The studied devices are subjected to two important DC stress patterns, i.e., Bias temperature instability stress and hot carrier stress. The hot carrier stress, which inherently suffers from the self-heating effect, resulted in the transistor's geometry-dependent magnitudes of hot carrier degradation. It is shown that the incorporation of the thermal resistance model is mandatory for the investigation of hot carrier degradation. The property of direct translation of small-signal parameter degradation to DC parameter degradation is used to develop a new S-parameter based bias temperature instability characterization methodology. The changes in gate-related small-signal capacitances after hot carrier stress reveals a distinct signature due to local change of flat-band voltage. The measured effects of gate-related small-signal capacitances post-stress are validated through transient physics-based simulations in Sentaurus TCAD.:Abstract Symbols Acronyms 1 Introduction 2 Fundamentals 2.1 MOSFETs Scaling Trends and Challenges 2.1.1 Silicon on Insulator Technology 2.1.2 FDSOI Technology 2.2 Reliability of Semiconductor Devices 2.3 RF Reliability 2.4 MOSFET Degradation Mechanisms 2.4.1 Hot Carrier Degradation 2.4.2 Bias Temperature Instability 2.5 Self-heating 3 RF Characterization of fully-depleted Silicon on Insulator devices 3.1 Scattering Parameters 3.2 S-parameters Measurement Flow 3.2.1 Calibration 3.2.2 De-embedding 3.3 Small-Signal Model 3.3.1 Model Parameters Extraction 3.3.2 Transistor Figures of Merit 3.4 Characterization Results 4 Self-heating assessment in Multi-finger Devices 4.1 Self-heating Characterization Methodology 4.1.1 Output Conductance Frequency dependence 4.1.2 Temperature dependence of Drain Current 4.2 Thermal Resistance Behavior 4.2.1 Thermal Resistance Scaling with number of fingers 4.2.2 Thermal Resistance Scaling with finger spacing 4.2.3 Thermal Resistance Scaling with GateWidth 4.2.4 Thermal Resistance Scaling with Gate length 4.3 Thermal Resistance Model 4.4 Design for Thermal Resistance Optimization 5 Bias Temperature Instability Investigation 5.1 Impact of Bias Temperature Instability stress on Device Metrics 5.1.1 Experimental Details 5.1.2 DC Parameters Drift 5.1.3 RF Small-Signal Parameters Drift 5.2 S-parameter based on-the-fly Bias Temperature Instability Characterization Method 5.2.1 Measurement Methodology 5.2.2 Results and Discussion 6 Investigation of Hot-carrier Degradation 6.1 Impact of Hot-carrier stress on Device performance 6.1.1 DC Metrics Degradation 6.1.2 Impact on small-signal Parameters 6.2 Implications of Self-heating on Hot-carrier Degradation in n-MOSFETs 6.2.1 Inclusion of Thermal resistance in Hot-carrier Degradation modeling 6.2.2 Convolution of Bias Temperature Instability component in Hot-carrier Degradation 6.2.3 Effect of Source and Drain Placement in Multi-finger Layout 6.3 Vth turn-around effect in p-MOSFET 7 Deconvolution of Hot-carrier Degradation and Bias Temperature Instability using Scattering parameters 7.1 Small-Signal Parameter Signatures for Hot-carrier Degradation and Bias Temperature Instability 7.2 TCAD Dynamic Simulation of Defects 7.2.1 Fixed Charges 7.2.2 Interface Traps near Gate 7.2.3 Interface Traps near Spacer Region 7.2.4 Combination of Traps 7.2.5 Drain Series Resistance effect 7.2.6 DVth Correction 7.3 Empirical Modeling based deconvolution of Hot-carrier Degradation 8 Conclusion and Recommendations 8.1 General Conclusions 8.2 Recommendations for Future Work A Directly measured S-parameters and extracted Y-parameters B Device Dimensions for Thermal Resistance Modeling C Frequency response of hot-carrier degradation (HCD) D Localization Effect of Interface Traps Bibliograph

Concept, design, simulation, and fabrication of an ultra-scalable vertical MOSFET

A new orientation to the conventional MOSFET is proposed. Processing issues, as well as short channel effects have been making planar MOSFET scaling increasingly difficult. It is predicted by the 2001 International Technology Roadmap for Semiconductors (ITRS) that non-planar devices will be needed for production as early as 2007. The device proposed in this thesis is similar in operation to the planar MOSFET, however the current transport from source to drain, normally in the same plane as the wafer surface, is oriented perpendicular to the die surface. The proposed device has successfully been simulated, showing a proof of concept. Fabrication of the proposed devices led to the creation of vertical MOS Gated Tunnel Diodes. This work, in fact, represents possibly the first demonstration of this type of technology. Suggestions are made to improve upon the proposed vertical MOSFET as well as the vertical MOS Gated Tunnel Diode

Modelling and simulation study of NMOS Si nanowire transistors

Nanowire transistors (NWTs) represent a potential alternative to Silicon FinFET technology in the 5nm CMOS technology generation and beyond. Their gate length can be scaled beyond the limitations of FinFET gate length scaling to maintain superior off-state leakage current and performance thanks to better electrostatic control through the semiconductor nanowire channels by gate-all-around (GAA) architecture. Furthermore, it is possible to stack nanowires to enhance the drive current per footprint. Based on these considerations, vertically-stacked lateral NWTs have been included in the latest edition of the International Technology Roadmap for Semiconductors (ITRS) to allow for further performance enhancement and gate pitch scaling, which are key criteria of merit for the new CMOS technology generation. However, electrostatic confinement and the transport behaviour in these devices are more complex, especially in or beyond the 5nm CMOS technology generation. At the heart of this thesis is the model-based research of aggressively-scaled NWTs suitable for implementation in or beyond the 5nm CMOS technology generation, including their physical and operational limitations and intrinsic parameter fluctuations. The Ensemble Monte Carlo approach with Poisson-Schrödinger (PS) quantum corrections was adopted for the purpose of predictive performance evaluation of NWTs. The ratio of the major to the minor ellipsoidal cross-section axis (cross-sectional aspect ratio - AR) has been identified as a significant contributing factor in device performance. Until now, semiconductor industry players have carried out experimental research on NWTs with two different cross-sections: circular cylinder (or elliptical) NWTs and nanosheet (or nanoslab) NWTs. Each version has its own benefits and drawbacks; however, the key difference between these two versions is the cross-sectional AR. Several critical design questions, including the optimal NWT cross-sectional aspect ratio, remain unanswered. To answer these questions, the AR of a GAA NWT has been investigated in detail in this research maintaining the cross-sectional area constant. Signatures of isotropic charge distributions within Si NWTs were observed, exhibiting the same attributes as the golden ratio (Phi), the significance of which is well-known in the fields of art and architecture. To address the gap in the existing literature, which largely explores NWT scaling using single-channel simulation, thorough simulations of multiple channels vertically-stacked NWTs have been carried out with different cross-sectional shapes and channel lengths. Contact resistance, non-equilibrium transport and quantum confinement effects have been taken into account during the simulations in order to realistically access performance and scalability. Finally, the individual and combined effects of key statistical variability (SV) sources on threshold voltage (VT), subthreshold slope (SS), ON-current (Ion) and drain-induced barrier lowering (DIBL) have been simulated and discussed. The results indicate that the variability of NWTs is impacted by device architecture and dimensions, with a significant reduction in SV found in NWTs with optimal aspect ratios. Furthermore, a reduction in the variability of the threshold voltage has been observed in vertically-stacked NWTs due to the cancelling-out of variability in double and triple lateral channel NWTs

3D TCAD Study of the Implications of Channel Width and Interface States on FD-SOI Z2-FETs

3-D numerical technology computer-aided design simulations, based on experimental results, are performed to study the origin of the large Z 2 -FET dynamic random access memory (DRAM) memory cell-to-cell variability on fully depleted silicon-on-insulator (FD-SOI) technology. The body width, cross section shape, and the passivation-induced lateral and top interface state density impacts on the device dynamic memory operation are investigated. The width and body shape arise as marginal metrics not strongly inducing fluctuations in the device triggering conditions. However, the interface state (D it ) control, especially at the top of the ungated section, emerges as the main challenge since traps significantly increase the ON-voltage variability threatening the capacitor-less DRAM operation.H2020 REMINDER European (grant agreement No 687931) and Spanish National TEC2017-89800-R and PCIN-2015-146 projects are acknowledged for financial support

Monte Carlo study of current variability in UTB SOI DG MOSFETs

The scaling of conventional silicon based MOSFETs is increasingly difficult into the nanometer regime due to short channel effects, tunneling and subthreshold leakage current. Ultra-thin body silicon-on-insulator based architectures offer a promising alternative, alleviating these problems through their geometry. However, the transport behaviour in these devices is more complex, especially for silicon thicknesses below 10 nm, with enhancement from band splitting and volume inversion competing with scattering from phonons, Coulomb interactions, interface roughness and body thickness fluctuation. Here, the effect of the last scattering mechanism on the drive current is examined as it is considered a significant limitation to device performance for body thicknesses below 5 nm. A simulation technique that properly captures non-equilibrium transport, includes quantum effects and maintains computational efficiency is essential for the study of this scattering mechanism. Therefore, a 3D Monte Carlo simulator has been developed which includes this scattering effect in an ab initio fashion, and quantum corrections using the Density Gradient formalism. Monte Carlo simulations using `frozen field' approximation have been carried out to examine the dependence of mobility on silicon thickness in large, self averaging devices. This approximation is then used to carry out statistical studies of uniquely different devices to examine the variability of on-current. Finally, Monte Carlo simulations self consistent with Poisson's equation have been carried out to further investigate this mechanism

A Construction Kit for Efficient Low Power Neural Network Accelerator Designs

Implementing embedded neural network processing at the edge requires efficient hardware acceleration that couples high computational performance with low power consumption. Driven by the rapid evolution of network architectures and their algorithmic features, accelerator designs are constantly updated and improved. To evaluate and compare hardware design choices, designers can refer to a myriad of accelerator implementations in the literature. Surveys provide an overview of these works but are often limited to system-level and benchmark-specific performance metrics, making it difficult to quantitatively compare the individual effect of each utilized optimization technique. This complicates the evaluation of optimizations for new accelerator designs, slowing-down the research progress. This work provides a survey of neural network accelerator optimization approaches that have been used in recent works and reports their individual effects on edge processing performance. It presents the list of optimizations and their quantitative effects as a construction kit, allowing to assess the design choices for each building block separately. Reported optimizations range from up to 10'000x memory savings to 33x energy reductions, providing chip designers an overview of design choices for implementing efficient low power neural network accelerators

Modeling & Simulation of High Performance Nanoscale MOSFETs

Silicon-on-insulator (SOI) has been the forerunner of the CMOS technology in the last few decades offering superior CMOS devices with higher speed, higher density and reduced second order effects for submicron VLSI applications.A new type of transistor without junctions and no doping concentration gradients is analysed and demonstrated. These device structures address the challenge of short channel effects (SCEs) resulting with scaling of transistor dimensions and higher performance for deep submicron VLSI integration. Recent experimental studies have invigorated interest in partially depleted (PD) SOI devices because of their potentially superior scalability relative to bulk silicon CMOS devices. SELBOX structure offer an alternative way of suppressing kink effect and self heating effects in PD-SOI devices with a proper selection of oxide gap length. Also in order to mitigate the difficulties in fabrication of ultra thin devices for the semiconductor industry, resulting from scaling of gate length in MOSFET, a new device structure called junctionless (JL) transistors have recently been reported as an alternative device. In conclusion, extensive numerical simulation studies were used to explore and compare the electrical characteristics of SELBOX SOI MOSFET with a conventional single-material gate (SMG) bulk MOSFET. The proposed work investigates the DC and AC characteristics of the junctionless transistors. Also the performance analysis of JL transistors is compared and presented with the conventional DG MOSFET structure. The results presented in this work are expected to provide incentive for further experimental exploration

Multigate MOSFETs for digital performance and high linearity, and their fabrication techniques

The aggressive downscaling of complementary metal–oxide–semiconductor (CMOS) technology is facing great challenges to overcome severe short-channel effects. Multigate MOSFETs are one of the most promising candidates for scaling beyond Si CMOS, due to better electrostatic control as compared to conventional planar MOSFETs. Conventional dry etching-induced surface damage is one of the main sources of performance degradation for multigate transistors, especially for III-V high mobility materials. It is also challenging to increase the fin aspect ratio by dry etching because of the non-ideal anisotropic etching profile. Here, we report a novel method, inverse metal-assisted chemical etching (i-MacEtch), in lieu of conventional RIE etching, for 3D fin channel formation. InP junctionless FinFETs with record high-aspect-ratio (~ 50:1) fins are demonstrated by this method for the first time. The i-MacEtch process flow eliminates dry-etching-induced plasma damage, high energy ion implantation damage, and high temperature annealing, allowing for the fabrication of InP fin channels with atomically smooth sidewalls. The sidewall features resulting from this unique and simplified process ensure high interface quality between high-k dielectric layer and InP fin channel. Experimental and theoretical analyses show that high-aspect-ratio FinFETs, which could deliver more current per area under much relaxed horizontal geometry requirements, are promising in pushing the technology node ahead where conventional scaling has met its physical limits. The performance of the FinFET was further investigated through numerical simulation. A new kind of FinFET with asymmetric gate and source/drain contacts has been proposed and simulated. By benchmarking with conventional symmetric FinFET, better short-channel behavior with much higher current density is confirmed. The design guidelines are provided. The overall circuit delay can be minimized by optimizing gate lengths according to different local parasites among circuits in interconnection-delay-dominated SoC applications. Continued transistor scaling requires even stronger gate electrostatic control over the channel. The ultimate scaling structure would be gate-all-around nanowire MOSFETs. We demonstrate III-V junctionless gate-all-around (GAA) nanowire (NW) MOSFETs for the first time. For the first time, source/drain (S/D) resistance and thermal budget are minimized by regrowth using metalorganic chemical vapor deposition (MOCVD) in III-V MOSFETs. The fabricated short-channel (Lg=80 nm) GaAs GAA NWFETs with extremely narrow nanowire width (WNW= 9 nm) show excellent transconductance (gm) linearity at biases (300 mV), characterized by the high third intercept point (2.6 dBm). The high linearity is especially important for low power applications because it is insensitive to bias conditions

Advanced Technology for Source Drain Resistance Reduction in Nanoscale FinFETs

Dual gate MOSFET structures such as FinFETs are widely regarded as the most promising option for continued scaling of silicon based transistors after 2010. This work examines key process modules that enable reduction of both device area and fin width beyond requirements for the 16nm node. Because aggressively scaled FinFET structures suffer significantly degraded device performance due to large source/drain series resistance (RS/D), several methods to mitigate RS/D such as maximizing contact area, silicide engineering, and epitaxially raised S/D have been evaluated