Characterization of 28 nm FDSOI MOS and application to the design of a low-power 2.4 GHz LNA

IoT is expected to connect billions of devices all over world in the next years, and in a near future, it is expected to use LR-WPAN in a wide variety of applications. Not all the devices will require of high performance but will require of low power hungry systems since most of them will be powered with a battery. Conventional CMOS technologies cannot cover these needs even scaling it to very small regimes, which appear other problems. Hence, new technologies are emerging to cover the needs of this devices. One promising technology is the UTBB FDSOI, which achieves good performance with very good energy efficiency. This project characterizes this technology to obtain a set of parameters of interest for analog/RF design. Finally, with the help of a low-power design methodology (gm/Id approach), a design of an ULP ULV LNA is performed to check the suitability of this technology for IoT

Reliability Investigations of MOSFETs using RF Small Signal Characterization

Modern technology needs and advancements have introduced various new concepts such as Internet-of-Things, electric automotive, and Artificial intelligence. This implies an increased activity in the electronics domain of analog and high frequency. Silicon devices have emerged as a cost-effective solution for such diverse applications. As these silicon devices are pushed towards higher performance, there is a continuous need to improve fabrication, power efficiency, variability, and reliability. Often, a direct trade-off of higher performance is observed in the reliability of semiconductor devices. The acceleration-based methodologies used for reliability assessment are the adequate time-saving solution for the lifetime's extrapolation but come with uncertainty in accuracy. Thus, the efforts to improve the accuracy of reliability characterization methodologies run in parallel. This study highlights two goals that can be achieved by incorporating high-frequency characterization into the reliability characteristics. The first one is assessing high-frequency performance throughout the device's lifetime to facilitate an accurate description of device/circuit functionality for high-frequency applications. Secondly, to explore the potential of high-frequency characterization as the means of scanning reliability effects within devices. S-parameters served as the high-frequency device's response and mapped onto a small-signal model to analyze different components of a fully depleted silicon-on-insulator MOSFET. The studied devices are subjected to two important DC stress patterns, i.e., Bias temperature instability stress and hot carrier stress. The hot carrier stress, which inherently suffers from the self-heating effect, resulted in the transistor's geometry-dependent magnitudes of hot carrier degradation. It is shown that the incorporation of the thermal resistance model is mandatory for the investigation of hot carrier degradation. The property of direct translation of small-signal parameter degradation to DC parameter degradation is used to develop a new S-parameter based bias temperature instability characterization methodology. The changes in gate-related small-signal capacitances after hot carrier stress reveals a distinct signature due to local change of flat-band voltage. The measured effects of gate-related small-signal capacitances post-stress are validated through transient physics-based simulations in Sentaurus TCAD.:Abstract Symbols Acronyms 1 Introduction 2 Fundamentals 2.1 MOSFETs Scaling Trends and Challenges 2.1.1 Silicon on Insulator Technology 2.1.2 FDSOI Technology 2.2 Reliability of Semiconductor Devices 2.3 RF Reliability 2.4 MOSFET Degradation Mechanisms 2.4.1 Hot Carrier Degradation 2.4.2 Bias Temperature Instability 2.5 Self-heating 3 RF Characterization of fully-depleted Silicon on Insulator devices 3.1 Scattering Parameters 3.2 S-parameters Measurement Flow 3.2.1 Calibration 3.2.2 De-embedding 3.3 Small-Signal Model 3.3.1 Model Parameters Extraction 3.3.2 Transistor Figures of Merit 3.4 Characterization Results 4 Self-heating assessment in Multi-finger Devices 4.1 Self-heating Characterization Methodology 4.1.1 Output Conductance Frequency dependence 4.1.2 Temperature dependence of Drain Current 4.2 Thermal Resistance Behavior 4.2.1 Thermal Resistance Scaling with number of fingers 4.2.2 Thermal Resistance Scaling with finger spacing 4.2.3 Thermal Resistance Scaling with GateWidth 4.2.4 Thermal Resistance Scaling with Gate length 4.3 Thermal Resistance Model 4.4 Design for Thermal Resistance Optimization 5 Bias Temperature Instability Investigation 5.1 Impact of Bias Temperature Instability stress on Device Metrics 5.1.1 Experimental Details 5.1.2 DC Parameters Drift 5.1.3 RF Small-Signal Parameters Drift 5.2 S-parameter based on-the-fly Bias Temperature Instability Characterization Method 5.2.1 Measurement Methodology 5.2.2 Results and Discussion 6 Investigation of Hot-carrier Degradation 6.1 Impact of Hot-carrier stress on Device performance 6.1.1 DC Metrics Degradation 6.1.2 Impact on small-signal Parameters 6.2 Implications of Self-heating on Hot-carrier Degradation in n-MOSFETs 6.2.1 Inclusion of Thermal resistance in Hot-carrier Degradation modeling 6.2.2 Convolution of Bias Temperature Instability component in Hot-carrier Degradation 6.2.3 Effect of Source and Drain Placement in Multi-finger Layout 6.3 Vth turn-around effect in p-MOSFET 7 Deconvolution of Hot-carrier Degradation and Bias Temperature Instability using Scattering parameters 7.1 Small-Signal Parameter Signatures for Hot-carrier Degradation and Bias Temperature Instability 7.2 TCAD Dynamic Simulation of Defects 7.2.1 Fixed Charges 7.2.2 Interface Traps near Gate 7.2.3 Interface Traps near Spacer Region 7.2.4 Combination of Traps 7.2.5 Drain Series Resistance effect 7.2.6 DVth Correction 7.3 Empirical Modeling based deconvolution of Hot-carrier Degradation 8 Conclusion and Recommendations 8.1 General Conclusions 8.2 Recommendations for Future Work A Directly measured S-parameters and extracted Y-parameters B Device Dimensions for Thermal Resistance Modeling C Frequency response of hot-carrier degradation (HCD) D Localization Effect of Interface Traps Bibliograph

Characterisation of thermal and coupling effects in advanced silicon MOSFETs

PhD ThesisNew approaches to metal-oxide-semiconductor field effect transistor (MOSFET) engineering emerge in order to keep up with the electronics market demands. Two main candidates for the next few generations of Moore’s law are planar ultra-thin body and buried oxide (UTBB) devices and three-dimensional FinFETs. Due to miniature dimensions and new materials with low thermal conductivity, performance of advanced MOSFETs is affected by self-heating and substrate effects. Self-heating results in an increase of the device temperature which causes mobility reduction, compromised reliability and signal delays. The substrate effect is a parasitic source and drain coupling which leads to frequency-dependent analogue behaviour. Both effects manifest themselves in the output conductance variation with frequency and impact analogue as well as digital performance. In this thesis self-heating and substrate effects in FinFETs and UTBB devices are characterised, discussed and compared. The results are used to identify trade-offs in device performance, geometry and thermal properties. Methods how to optimise the device geometry or biasing conditions in order to minimise the parasitic effects are suggested. To identify the most suitable technique for self-heating characterisation in advanced semiconductor devices, different methods of thermal characterisation (time and frequency domain) were experimentally compared and evaluated alongside an analytical model. RF and two different pulsed I-V techniques were initially applied to partially depleted silicon-on-insulator (PDSOI) devices. The pulsed I-V hot chuck method showed good agreement with the RF technique in the PDSOI devices. However, subsequent analysis demonstrated that for more advanced technologies the time domain methods can underestimate self-heating. This is due to the reduction of the thermal time constants into the nanosecond range and limitations of the pulsed I-V set-up. The reduction is related to the major increase of the surface to volume ratio in advanced MOSFETs. Consequently the work showed that the thermal properties of advanced semiconductor devices must be characterised within the frequency domain. For UTBB devices with 7-8 nm Si body and 10 nm ultra-thin buried oxide (BOX) the analogue performance degradation caused by the substrate effects can be stronger than the analogue performance degradation caused by self-heating. However, the substrate effects can be effectively reduced if the substrate doping beneath the buried ii oxide is adjusted using a ground plane. In the MHz – GHz frequency range the intrinsic voltage gain variation is reduced ~6 times when a device is biased in saturation if a ground plane is implemented compared with a device without a ground plane. UTBB devices with 25 nm BOX were compared with UTBB devices with 10 nm BOX. It was found that the buried oxide thinning from 25 nm to 10 nm is not critical from the thermal point of view as other heat evacuation paths (e.g. source and drain) start to play a role. Thermal and substrate effects in FinFETs were also analysed. It was experimentally shown that FinFET thermal properties depend on the device geometry. The thermal resistance of FinFETs strongly varies with the fin width and number of parallel fins, whereas the fin spacing is less critical. The results suggest that there are trade-offs between thermal properties and integration density, electrostatic control and design complexity, since these aspects depend on device geometry. The high frequency substrate effects were found to be effectively reduced in devices with sub-100 nm wide fins.Engineering and Physical Sciences Research Council (EPSRC) and EU fundin

On-chip Voltage Regulator– Circuit Design and Automation

Title from PDF of title page viewed May 24, 2021Dissertation advisors: Masud H Chowdhury and Yugyung LeeVitaIncludes bibliographical references (page 106-121)Thesis (Ph.D.)--School of Computing and Engineering. University of Missouri--Kansas City, 2021With the increase of density and complexity of high-performance integrated circuits and systems, including many-core chips and system-on-chip (SoC), it is becoming difficult to meet the power delivery and regulation requirements with off-chip regulators. The off-chip regulators become a less attractive choice because of the higher overheads and complexity imposed by the additional wires, pins, and pads. The increased I2R loss makes it challenging to maintain the integrity of different voltage domains under a lower supply voltage environment in the smaller technology nodes. Fully integrated on-chip voltage regulators have proven to be an effective solution to mitigate power delivery and integrity issues. Two types of regulators are considered as most promising for on-chip implementation: (i) the low-drop-out (LDO) regulator and (ii) the switched-capacitor (SC)regulator. The first part of our research mainly focused on the LDO regulator. Inspired by the recent surge of interest for cap-less voltage regulators, we presented two fully on-chip external capacitor-less low-dropout voltage regulator design. The second part of this proposal explores the complexity of designing each block of the regulator/analog circuit and proposed a design methodology for analog circuit synthesis using simulation and learning-based approach. As the complexity is increasing day-by-day in an analog circuit, hierarchical flow mostly uses for design automation. In this work, we focused mainly on Circuit-level, one of the significant steps in the flow. We presented a novel, efficient circuit synthesis flow based on simulation and learning-based optimization methods. The proposed methodology has two phases: the learning phase and the evaluation phase. Random forest, a supervised learning is used to reduce the sample points in the design space and iteration number during the learning phase. Additionally, symmetric constraints are used further to reduce the iteration number during the sizing process. We introduced a three-step circuit synthesis flow to automate the analog circuit design. We used H-spice as a simulation tool during the evaluation phase of the proposed methodology. The three most common analog circuits are chosen: single-stage differential amplifier, operational transconductance amplifier, and two-stage differential amplifier to verify the algorithm. The tool is developed in Python, and the technology we used is0.6um. We also verified the optimized result in Cadence Virtuoso.Introduction -- On-chip power delivery system -- Fundamentals of on-chip voltage regulator -- LDO design in 45NM technology -- LDO design in technology -- Analog design automation -- Proposed analog design methodology -- Energy efficient FDSOI and FINFET based power gating circuit using data retention transistor -- Conclusion and future wor

Low-Noise Amplifier and Noise/Distortion Shaping Beamformer

The emergence of advanced technologies has increased the need for fast and efficient mobile communication that can facilitate transferring large amounts of data and simultaneously serve multiple users. Future wireless systems will rely on millimeter-wave frequencies, enabled by recent silicon hardware advancements. High-frequency millimeter-wave technology and low-noise receiver front ends and amplifiers are key for improved performance and energy efficiency. This thesis proposes two LNA topologies that offer wide input-power-matched bandwidths and low noise figures, eliminating the need for complex matching networks at the LNA input. These topologies use intrinsic feedback through gate-drain networks and/or the resistance of the SOI-transistor back-gate terminal to achieve the real part of the input impedance. The two LNAs are experimentally demonstrated with two 22-nm FDSOI LNAs. One LNA, matched with the assistance of the gate-drain network, exhibits a bandwidth ranging from 7.7-33.3 GHz, which is further improved to 6-38.7 GHz through the application of the back-gate-resistance method. The two LNAs have noise-figure minima of 1.8 and 1.9 dB, maximum gains of 14.7 and 15.6 dB, and maximum IP1dBs of -9.1 and -7.8 dBm while consuming 10 and 7.8 mW of power and occupying 0.04 and 0.03 mm^2 of active areas, respectively. This thesis also presents the first experimental demonstration of noise/distortion (ND) shaping beamformer. The NDs originating in the receiver itself are spatio-temporally shaped away from the beamformer region of support, thereby permitting their suppression by the beamformer. The demonstrator is a 24.3-28.7 GHz, 79.28 mW 4-port receiver for a 4-element antenna array implemented in 22-nm FDSOI CMOS. When shaping was enabled, the concept demonstrator provided average improvements to the NF and IP1dB of 1.6 dB and 2.25 dB, respectively (compared to a reference design), and achieved NF=2.6 dB and IP1dB=-18.7dBm while consuming 19.8 mW/channel

Etude de la variabilité en technologie FDSOI : du transistor aux cellules mémoires SRAM

The scaling of bulk MOSFETs transistors is facing various difficulties at the nanometer era. The variability of the electrical characteristics becomes a major challenge which increases as the device dimensions are scaled down. Fully-Depleted Silicon On Insulator (FDSOI) technology, developed as an alternative to bulk transistors, exhibits a better electrostatic immunity which enables higher performances. Moreover, the reduction of the Random Dopant Fluctuation allows excellent variability immunity for the FDSOI technology due to its undoped channel. It leads to a yield enhancement and a reduction of the minimum supply voltage of SRAM circuits. The variability has been analyzed deeply during this thesis in this technology, both on the threshold voltage (VT) and on the ON-state current (ISAT). The correlation between the electrical characteristics of MOSFETs devices (i.e., the threshold voltage and the standard deviation σVT) and SRAM cells (i.e., the SNM and σSNM) has been investigated thanks to an extensive experimental study and modeling. This purpose of this thesis is also to analyze the specific FDSOI variability source: silicon thickness fluctuations. An analytical model has been developed in order to quantify the impact of local TSi variations on the VT variability for 28 and 20nm technology nodes, as well as on a 200Mb SRAM array. This model also enables to evaluate the silicon thickness mean (µTsi) and standard deviation (σTsi) specifications for next technology nodes.La miniaturisation des transistors MOSFETs sur silicium massif présente de nombreux enjeux en raison de l'apparition de phénomènes parasites. Notamment, la réduction de la surface des dispositifs entraîne une dégradation de la variabilité de leurs caractéristiques électriques. La technologie planaire totalement désertée, appelée communément FDSOI (pour Fully Depleted Silicon on Insulator), permet d'améliorer le contrôle électrostatique de la grille sur le canal de conduction et par conséquent d'optimiser les performances. De plus, de par la présence d'un canal non dopé, il est possible de réduire efficacement la variabilité de la tension de seuil des transistors. Cela se traduit par un meilleur rendement et par une diminution de la tension minimale d'alimentation des circuits SRAM (pour Static Random Access Memory). Une étude détaillée de la variabilité intrinsèque à cette technologie a été réalisée durant ce travail de recherche, aussi bien sur la tension de seuil (VT) que sur le courant de drain à l'état passant (ISAT). De plus, le lien existant entre la fluctuation des caractéristiques électriques des transistors et des circuits SRAM a été expérimentalement analysé en détail. Une large partie de cette thèse est enfin dédiée à l'investigation de la source de variabilité spécifique à la technologie FDSOI : les fluctuations de l'épaisseur du film de silicium. Un modèle analytique a été développé durant cette thèse afin d'étudier l'influence des fluctuations locales de TSi sur la variabilité de la tension de seuil des transistors pour les nœuds technologiques 28 et 20nm, ainsi que sur un circuit SRAM de 200Mb. Ce modèle a également pour but de fournir des spécifications en termes d'uniformité σTsi et d'épaisseur moyenne µTsi du film de silicium pour les prochains nœuds technologiques

Silicon on ferroelectric insulator field effect transistor (SOF-FET) a new device for the next generation ultra low power circuits

Title from PDF of title page, viewed on March 12, 2014Thesis advisor: Masud H. ChowdhuryVitaIncludes bibliographical references (pages 116-131)Thesis (M. S.)--School of Computer and Engineering. University of Missouri--Kansas City, 2013Field effect transistors (FETs) are the foundation for all electronic circuits and processors. These devices have progressed massively to touch its final steps in subnanometer level. Left and right proposals are coming to rescue this progress. Emerging nano-electronic devices (resonant tunneling devices, single-atom transistors, spin devices, Heterojunction Transistors rapid flux quantum devices, carbon nanotubes, and nanowire devices) took a vast share of current scientific research. Non-Si electronic materials like III-V heterostructure, ferroelectric, carbon nanotubes (CNTs), and other nanowire based designs are in developing stage to become the core technology of non-classical CMOS structures. FinFET present the current feasible commercial nanotechnology. The scalability and low power dissipation of this device allowed for an extension of silicon based devices. High short channel effect (SCE) immunity presents its major advantage. Multi-gate structure comes to light to improve the gate electrostatic over the channel. The new structure shows a higher performance that made it the first candidate to substitute the conventional MOSFET. The device also shows a future scalability to continue Moor’s Law. Furthermore, the device is compatible with silicon fabrication process. Moreover, the ultra-low-power (ULP) design required a subthreshold slope lower than the thermionic-emission limit of 60mV/ decade (KT/q). This value was unbreakable by the new structure (SOI-FinFET). On the other hand most of the previews proposals show the ability to go beyond this limit. However, those pre-mentioned schemes have publicized a very complicated physics, design difficulties, and process non-compatibility. The objective of this research is to discuss various emerging nano-devices proposed for ultra-low-power designs and their possibilities to replace the silicon devices as the core technology in the future integrated circuit. This thesis proposes a novel design that exploits the concept of negative capacitance. The new field effect transistor (FET) based on ferroelectric insulator named Silicon-On-Ferroelectric Insulator Field Effect Transistor (SOF-FET). This proposal is a promising methodology for future ultra-lowpower applications, because it demonstrates the ability to replace the silicon-bulk based MOSFET, and offers subthreshold swing significantly lower than 60mV/decade and reduced threshold voltage to form a conducting channel. The SOF-FET can also solve the issue of junction leakage (due to the presence of unipolar junction between the top plate of the negative capacitance and the diffused areas that form the transistor source and drain). In this device the charge hungry ferroelectric film already limits the leakage.Abstract -- List of illustrations - List of tables -- Acknowledgements -- Dedication -- Introduction -- Carbon nanotube field effect transistor -- Multi-gate transistors -FinFET -- Subthreshold swing -- Tunneling field effect transistors -- I-mos and nanowire fets -- Ferroelectric based field effect transistors -- An analytical model to approximate the subthreshold swing for soi-finfet -- Silicon-on-ferroelectric insulator field effect transistor (SOF-FET) -- Current-voltage characteristics of sof-fet -- Advantages, manufacturing process and future work of the proposed device -- Appendix -- Reference

MODELING AND SPICE IMPLEMENTATION OF SILICON-ON-INSULATOR (SOI) FOUR GATE (G4FET) TRANSISTOR

As the device dimensions have reduced from micrometer to nanometer range, new bulk silicon devices are now facing many undesirable effects of scaling leading device engineers to look for new process technologies. Silicon-on-insulator (SOI) has emerged as a very promising candidate for resolving the major problems plaguing the bulk silicon technology. G4FET [G4FET] is a SOI transistor with four independent gates. Although G4FET has already shown great potential in different applications, the widespread adoption of a technology in circuit design is heavily dependent upon good SPICE (Simulation Program with Integrated Circuit Emphasis) models. CAD (Computer Aided Design) tools are now ubiquitous in circuit design and a fast, robust and accurate SPICE model is absolutely necessary to transform G4FET into a mainstream technology. The research goal is to develop suitable SPICE models for G4FET to aid circuit designers in designing innovative analog and digital circuits using this new transistor. The first phase of this work is numerical modeling of the G4FET where four different numerical techniques are implemented, each with its merits and demerits. The first two methods are based on multivariate Lagrange interpolation and multidimensional Bernstein polynomial. The third numerical technique is based on multivariate regression polynomial to aid modeling with dense gridded data. Another suitable alternative namely multidimensional linear and cubic spline interpolation is explored as the fourth numerical modeling approach to solve some of the problems resulting from single polynomial approximation. The next phase of modeling involves developing a macromodel combining already existing SPICE models of MOSFET (metal–oxide–semiconductor field-effect transistor) and JFET (junction-gate field-effect transistor). This model is easy to implement in circuit simulators and provides good results compared to already demonstrated experimental works with innovative G4FET circuits. The final phase of this work involves the development of a physics-based compact model of G4FET with some empirical fitting parameters. A model for depletion-all-around operation is implemented in circuit simulator based on previous work. Another simplified model, combining MOS and JFET action, is implemented in circuit simulator to model the accumulation mode operation of G4FET