Modeling and Control of Piezoactive Micro and Nano Systems

Piezoelectrically-driven (piezoactive) systems such as nanopositioning platforms, scanning probe microscopes, and nanomechanical cantilever probes are advantageous devices enabling molecular-level imaging, manipulation, and characterization in disciplines ranging from materials science to physics and biology. Such emerging applications require precise modeling, control and manipulation of objects, components and subsystems ranging in sizes from few nanometers to micrometers. This dissertation presents a comprehensive modeling and control framework for piezoactive micro and nano systems utilized in various applications. The development of a precise memory-based hysteresis model for feedforward tracking as well as a Lyapunov-based robust-adaptive controller for feedback tracking control of nanopositioning stages are presented first. Although hysteresis is the most degrading factor in feedforward control, it can be effectively compensated through a robust feedback control design. Moreover, an adaptive controller can enhance the performance of closed-loop system that suffers from parametric uncertainties at high-frequency operations. Comparisons with the widely-used PID controller demonstrate the effectiveness of the proposed controller in tracking of high-frequency trajectories. The proposed controller is then implemented in a laser-free Atomic Force Microscopy (AFM) setup for high-speed and low-cost imaging of surfaces with micrometer and nanometer scale variations. It is demonstrated that the developed AFM is able to produce high-quality images at scanning frequencies up to 30 Hz, where a PID controller is unable to present acceptable results. To improve the control performance of piezoactive nanopositioning stages in tracking of time-varying trajectories with frequent stepped discontinuities, which is a common problem in SPM systems, a supervisory switching controller is designed and integrated with the proposed robust adaptive controller. The controller switches between two control modes, one mode tuned for stepped trajectory tracking and the other one tuned for continuous trajectory tracking. Switching conditions and compatibility conditions of the control inputs in switching instances are derived and analyzed. Experimental implementation of the proposed switching controller indicates significant improvements of control performance in tracking of time-varying discontinuous trajectories for which single-mode controllers yield undesirable results. Distributed-parameters modeling and control of rod-type solid-state actuators are then studied to enable accurate tracking control of piezoactive positioning systems in a wide frequency range including several resonant frequencies of system. Using the extended Hamilton\u27s principle, system partial differential equation of motion and its boundary conditions are derived. Standard vibration analysis techniques are utilized to formulate the truncated finite-mode state-space representation of the system. A new state-space controller is then proposed for asymptotic output tracking control of system. Integration of an optimal state-observer and a Lyapunov-based robust controller are presented and discussed to improve the practicability of the proposed framework. Simulation results demonstrate that distributed-parameters modeling and control is inevitable if ultra-high bandwidth tracking is desired. The last part of the dissertation, discusses new developments in modeling and system identification of piezoelectrically-driven Active Probes as advantageous nanomechanical cantilevers in various applications including tapping mode AFM and biomass sensors. Due to the discontinuous cross-section of Active Probes, a general framework is developed and presented for multiple-mode vibration analysis of system. Application in the precise pico-gram scale mass detection is then presented using frequency-shift method. This approach can benefit the characterization of DNA solutions or other biological species for medical applications

Design and control of a 6-degree-of-freedom precision positioning system

This paper presents the design and test of a6-degree-of-freedom (DOF) precision positioning system, which is assembledby two different 3-DOF precision positioning stages each driven by three piezoelectric actuators (PEAs). Based on the precision PEAs and flexure hinge mechanisms, high precision motion is obtained.The design methodology and kinematic characteristics of the6-DOF positioning system areinvestigated. According to an effective kinematic model, the transformation matrices are obtained, which is used to predict the relationship between the output displacement from the system arrangement and the amountof PEAsexpansion. In addition, the static and dynamic characteristics of the 6-DOF system have been evaluated by finite element method (FEM) simulation andexperiments. The design structure provides a high dynamic bandwidth withthe first naturalfrequency of 586.3 Hz.Decoupling control is proposed to solve the existing coupling motion of the 6-DOF system. Meanwhile, in order to compensate for the hysteresis of PEAs, the inverse Bouc-Wen model was applied as a feedforward hysteresis compensator in the feedforward/feedback hybrid control method. Finally, extensive experiments were performed to verify the tracking performance of the developed mechanism

Modeling and tracking control of a novel XYθz stage

A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage

Control and structural optimization for maneuvering large spacecraft

Presented here are the results of an advanced control design as well as a discussion of the requirements for automating both the structures and control design efforts for maneuvering a large spacecraft. The advanced control application addresses a general three dimensional slewing problem, and is applied to a large geostationary platform. The platform consists of two flexible antennas attached to the ends of a flexible truss. The control strategy involves an open-loop rigid body control profile which is derived from a nonlinear optimal control problem and provides the main control effort. A perturbation feedback control reduces the response due to the flexibility of the structure. Results are shown which demonstrate the usefulness of the approach. Software issues are considered for developing an integrated structures and control design environment

Control of Towing Kites for Seagoing Vessels

In this paper we present the basic features of the flight control of the SkySails towing kite system. After introduction of coordinate definitions and basic system dynamics we introduce a novel model used for controller design and justify its main dynamics with results from system identification based on numerous sea trials. We then present the controller design which we successfully use for operational flights for several years. Finally we explain the generation of dynamical flight patterns.Comment: 12 pages, 18 figures; submitted to IEEE Trans. on Control Systems Technology; revision: Fig. 15 corrected, minor text change

Disturbance Observer-based Robust Control and Its Applications: 35th Anniversary Overview

Disturbance Observer has been one of the most widely used robust control tools since it was proposed in 1983. This paper introduces the origins of Disturbance Observer and presents a survey of the major results on Disturbance Observer-based robust control in the last thirty-five years. Furthermore, it explains the analysis and synthesis techniques of Disturbance Observer-based robust control for linear and nonlinear systems by using a unified framework. In the last section, this paper presents concluding remarks on Disturbance Observer-based robust control and its engineering applications.Comment: 12 pages, 4 figure

Mechatronics of systems with undetermined configurations

This work is submitted for the award of a PhD by published works. It deals with some of the efforts of the author over the last ten years in the field of Mechatronics. Mechatronics is a new area invented by the Japanese in the late 1970's, it consists of a synthesis of computers and electronics to improve mechanical systems. To control any mechanical event three fundamental features must be brought together: the sensors used to observe the process, the control software, including the control algorithm used and thirdly the actuator that provides the stimulus to achieve the end result. Simulation, which plays such an important part in the Mechatronics process, is used in both in continuous and discrete forms. The author has spent some considerable time developing skills in all these areas. The author was certainly the first at Middlesex to appreciate the new developments in Mechatronics and their significance for manufacturing. The author was one of the first mechanical engineers to recognise the significance of the new transputer chip. This was applied to the LQG optimal control of a cinefilm copying process. A 300% improvement in operating speed was achieved, together with tension control. To make more efficient use of robots they have to be made both faster and cheaper. The author found extremely low natural frequencies of vibration, ranging from 3 to 25 Hz. This limits the speed of response of existing robots. The vibration data was some of the earliest available in this field, certainly in the UK. Several schemes have been devised to control the flexible robot and maintain the required precision. Actuator technology is one area where mechatronic systems have been the subject of intense development. At Middlesex we have improved on the Aexator pneumatic muscle actuator, enabling it to be used with a precision of about 2 mm. New control challenges have been undertaken now in the field of machine tool chatter and the prevention of slip. A variety of novel and traditional control algorithms have been investigated in order to find out the best approach to solve this problem