Piezoelectric Floating Element Shear Stress Sensor for the Wind Tunnel Flow Measurement

A piezoelectric sensor with a floating element was developed for direct measurement of flow induced shear stress. The piezoelectric sensor was designed to detect the pure shear stress while suppressing the effect of normal stress generated from the vortex lift-up by applying opposite poling vectors to the piezoelectric elements. During the calibration stage, the prototyped sensor showed a high sensitivity to shear stress (91.3 2.1 pC/Pa) due to the high piezoelectric coefficients (d31=1330 pC/N) of the constituent 0.67Pb(Mg13Nb23)O3-0.33PbTiO3 (PMN- 33%PT) single crystal. By contrast, the sensor showed almost no sensitivity to normal stress (less than 1.2 pC/Pa) because of the electromechanical symmetry of the sensing structure. The usable frequency range of the sensor is up to 800 Hz. In subsonic wind tunnel tests, an analytical model was proposed based on cantilever beam theory with an end-tip-mass for verifying the resonance frequency shift in static stress measurements. For dynamic stress measurements, the signal-tonoise ratio (SNR) and ambient vibration-filtered pure shear stress sensitivity were obtained through signal processing. The developed piezoelectric shear stress sensor was found to have an SNR of 15.8 2.2 dB and a sensitivity of 56.5 4.6 pC/Pa in the turbulent flow

Energy Harvesting Based on a Novel Piezoelectric 0.7PbZn0.3Ti0.7O3-0.3Na2TiO3 Nanogenerator

Recently, piezoelectric materials have achieved remarkable attention for charging wireless sensor nodes. Among piezoelectric materials, non-ferroelectric materials are more cost effective because they can be prepared without a polarization process. In this study, a non-ferroelectric nanogenerator was manufactured from 0.7PbZn0.3Ti0.7O3-0.3Na2TiO3 (PZnT-NT). It was demonstrated that the increment of conductivity via adding the Na2TiO3 plays an essential role in increasing the permittivity of the non-ferroelectric nanogenerator and hence improved the generated power density. The dielectric measurements of this material demonstrated high conductivity that quenched the polarization phase. The performance of the device was studied experimentally over a cantilever test rig; the vibrating cantilever (0.4 ms-2) was excited by a motor operated at 30 Hz. The generated power successfully illuminated a light emitting diode (LED). The PZnT-NT nanogenerator produced a volume power density of 0.10 μw/mm3 and a surface power density of 10 μw/cm2. The performance of the proposed device with a size of (20 × 15 × 1 mm3) was higher in terms of power output than that of the commercial microfiber composite (MFC) (80 × 57 × 0.335 mm3) and piezoelectric bimorph device (70 × 50 × 0.7 mm3). Compared to other existing ferroelectric and non-ferroelectric nanogenerators, the proposed device demonstrated great performance in harvesting the energy at low acceleration and in a low frequency environment

Frequency Tuning Concepts For Piezoelectric Cantilever Beams And Plates For Energy Harvesting

A great deal of research has repeatedly demonstrated that piezoelectric energy harvestershold the promise of providing an alternative power source that can enhance or replaceconventional batteries and power wireless devices. Also, ambient vibrations have been the focus as a source due to the amount of energy available in them. By using energy harvesting devices to extract energy from their environments, the sensors that they power can be self-reliant and maintenance time and cost can be reduced. In order to harvest the most energy with the device, the beam's fundamental mode must be excited. However, this is not always possible due to manufacturing of the device or fluctuations in the vibration source. By being able to change thefrequencies of the beam, the device can be more effective in harvesting energy. This workutilizes a shunt capacitor-tuning concept on a piezoelectric bimorph energy harvester. Designparameters are investigated and discussed to achieve the most tuning from the device. Static and dynamic beam and plate models are derived to predict natural frequencies and power and arelater used to compare to experimental results. Results are presented for the tunability of a square cantilever bimorph. In addition, the amount of power able to be harvested from each layer of the bimorph is tested. Finally, several other tuning methods are discussed

Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Aluminum nitride deposition/characterization & pMEMs/SAW device simulation/fabrication

Aluminum Nitride (AlN) is a promising material for piezoelectric MicroElectroMechanical Systems (pMEMS) and Surface Acoustic Wave (SAW) devices. AlN is a direct bandgap semiconductor possessing moderate piezoelectric coefficients, a high Curie temperature, and a high acoustic velocity. Potential applications of AlN thin film devices include high temperature pMEMS microvalves for use in Solid Oxide Fuel Cell (SOFC) flow control systems and high frequency/sensitivity SAW platforms for use in biosensors.;Since AlN is a robust material capable of operating at high temperatures and harsh environments, it can be used in settings where other widely used piezoelectrics such as Lead Zirconate Titanate (PZT) and Zinc Oxide (ZnO) fail. Piezoelectric beams are commonly used in MEMS and have many possible applications in smart sensor and actuator systems. In this work, the results of 3-dimensional Finite Element Analysis (FEA) of AlN homogeneous bimorphs (d31 mode) are shown. The coupled-field FEA simulations were performed using the commercially available software tool ANSYSRTM Academic Research, v.11.0. The effect of altering the contact geometry and position on the displacement, electric field, stress, and strain distributions for the static case is reported.;Surface acoustic wave devices have drawn increasing interest for use as highly sensitive sensors. Specifically, SAW platforms are being explored for chemical and biological sensor applications. Because AlN has one of the highest acoustic velocities of all the piezoelectric materials, high frequency (and thus highly sensitive) sensors are feasible. In this work, AlN SAW Rayleigh wave platforms were designed, fabricated, and tested. The insertion loss of the SAW platforms for two InterDigitated Transducers (IDTs) separation distances is also presented

Modelling and parameter identification of electromechanical systems for energy harvesting and sensing

Advanced modelling of electro-mechanical systems for energy harvesting (EH) and sensing is important to develop reliable self-powered autonomous electronic devices and for structural health monitoring (SHM). In this perspective, a novel computational approach is here proposed for both real-time and off-line parameter identification (PI). The system response is governed by a set of four partial differential equations (PDE) where the three displacement components and the electrical potential are the unknowns. Firstly, the finite element (FE) method is used to reduce the PDE problem into a set of ordinary differential equations (ODE). Then, a state- space model is derived with the aim to limit the PI problem to a subset of unknowns. After that, an identification error is introduced and the Lyapunov theory is used to derive the PI algorithm. The numerical implementation is based on a sensitivity analysis feedback block. The overall proposed computational strategy is robust and results in an exponential asymptotic convergence. The accuracy of the PI method is demonstrated by analysing the time–domain response of an array of piezoelectric bimorphs subjected to low–frequency structural random vibrations. The selected case–study is an existing cable–stayed bridge, for which an extensive dynamic monitoring campaign has provided the experimental data. Once time histories of the device response are obtained through time–dependent dynamic FE simulations, the PI algorithm is used to determine the unknown lumped coefficients of the state-space model. The comparison between FE method and lumped parameters model in terms of tip displacement and output voltage demonstrates the superior predictive capability of the new PI algorithm. As a result of the sensitivity analysis, guidelines to assess the optimal array configuration are also provided

POWER MAXIMIZATION FOR PYROELECTRIC, PIEZOELECTRIC, AND HYBRID ENERGY HARVESTING

The goal of this dissertation consists of improving the efficiency of energy harvesting using pyroelectric and piezoelectric materials in a system by the proper characterization of electrical parameters, widening frequency, and coupling of both effects with the appropriate parameters. A new simple stand-alone method of characterizing the impedance of a pyroelectric cell has been demonstrated. This method utilizes a Pyroelectric single pole low pass filter technique, PSLPF. Utilizing the properties of a PSLPF, where a known input voltage is applied and capacitance Cp and resistance Rp can be calculated at a frequency of 1 mHz to 1 Hz. This method demonstrates that for pyroelectric materials the impedance depends on two major factors: average working temperature, and the heating rate. Design and implementation of a hybrid approach using multiple piezoelectric cantilevers is presented. This is done to achieve mechanical and electrical tuning, along with bandwidth widening. In addition, a hybrid tuning technique with an improved adjusting capacitor method was applied. An toroid inductor of 700 mH is shunted in to the load resistance and shunt capacitance. Results show an extended frequency range up to 12 resonance frequencies (300% improvement) with improved power up to 197%. Finally, a hybrid piezoelectric and pyroelectric system is designed and tested. Using a voltage doubler, circuit for rectifying and collecting pyroelectric and piezoelectric voltages individually is proposed. The investigation showed that the hybrid energy is possible using the voltage doubler circuit from two independent sources for pyroelectrictity and piezoelectricity due to marked differences of optimal performance

Development and Force/Position control of a new Hybrid Thermo-Piezoelectric MicroGripper dedicated to micromanipulation tasks.

International audienceA new microgripper dedicated to micromanipulation and microassembly tasks is presented in this paper. Based on a new actuator, called thermo-piezoelectric actuator, the microgripper presents both a high range and a high positioning resolution. The principle of the microgripper is based on the combination of the thermal actuation (for the coarse positioning) and the piezoelectric actuation (for the fine positioning). In order to improve the performances of the microgripper, its actuators are modeled and a control law for both the position and the manipulation force is synthesized afterwards. A new control scheme adapted for the actuators of the hybrid thermo-piezoelectric microgripper is therefore proposed. To prove the interest of the developed microgripper and of the proposed control scheme, the control of a pick-and-release task using this microgripper is carried out. The experimental results confirm their efficiency and demonstrate that the new microgripper and the control law are well suited for micromanipulation and microassembly applications

Incorporating nanomaterials with MEMS devices.

This dissertation demonstrates an elegant method, known as \u27micro-origami\u27 or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography. Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as pop-up structures in this work. The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold. The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications. Chapter II illustrates how control of the folding order can generate complex three-dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process. Chapter III depicts the fabrication process of different types of bistable structures. It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications. Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device. We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation. We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications. Finally, in Conclusion discuss the contributions of this dissertation, existent limitations and plans of the future work