Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis

Extreme ultraviolet (EUV) lithography is seen as a main candidate for production of future generation computer technology. Due to the short wavelength of EUV light (around 13 nm) novel reflective masks have to be used in the production process. A prerequisite to meet the high quality requirements for these EUV masks is a simple and accurate method for absorber pattern profile characterization. In our previous work we demonstrated that the Finite Element Method (FEM) is very well suited for the simulation of EUV scatterometry and can be used to reconstruct EUV mask profiles from experimental scatterometric data. In this contribution we apply an indirect metrology method to periodic EUV line masks with different critical dimensions (140 nm and 540 nm) over a large range of duty cycles (1:2, ..., 1:20). We quantitatively compare the reconstructed absorber pattern parameters to values obtained from direct AFM and CD-SEM measurements. We analyze the reliability of the reconstruction for the given experimental data. For the CD of the absorber lines, the comparison shows agreement of the order of 1nm. Furthermore we discuss special numerical techniques like domain decomposition algorithms and high order finite elements and their importance for fast and accurate solution of the inverse problem.Comment: Photomask Japan 2008 / Photomask and Next-Generation Lithography Mask Technology X

Scales for co-compact embeddings of virtually free groups

Let $\Gamma$ be a group which is virtually free of rank at least 2 and let $\mathcal{F}_{td}(\Gamma)$ be the family of totally disconnected, locally compact groups containing $\Gamma$ as a co-compact lattice. We prove that the values of the scale function with respect to groups in $\mathcal{F}_{td}(\Gamma)$ evaluated on the subset $\Gamma$ have only finitely many prime divisors. This can be thought of as a uniform property of the family $\mathcal{F}_{td}(\Gamma)$.Comment: 12 pages; key words: uniform lattice, virtually free group, totally disconnected group, scale function (Error in references corrected in version 2

Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters

We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical parameters in order to fit the numerical results to results obtained from experimental scatterometry measurements. For the numerical simulations we use an adaptive finite element approach on irregular meshes. This gives us the opportunity to model geometrical structures accurately. Moreover we comment on the use of domain decomposition techniques for EUV mask simulations. Geometric mask parameters have a great influence on the diffraction pattern. We show that using accurate simulation tools it is possible to deduce the relevant geometrical parameters of EUV masks from scatterometry measurements. This work results from a collaboration between Advanced Mask Technology Center (AMTC, mask fabrication), Physikalisch-Technische Bundesanstalt (PTB, scatterometry), Zuse Institute Berlin (ZIB), and JCMwave (numerical simulation).Comment: 8 pages, 8 figures (see original publication for images with a better resolution

Sensitivity of DF-ICP-MS, PERALS and alpha-spectrometry for the determination of actinides: A comparison

We applied three techniques (DF-ICP-MS, PERALS and alpha-spectrometry) for the determination of minor actinides at environmental levels. For each method the limit of detection and the resolution were estimated in order to study the content and isotopic composition of the actinides. Two international reference materials, IAEA-135 (Irish Sea Sediment) and IAEA-300 (Baltic Sea sediment) were analyzed for activity concentrations of 238Pu, 239Pu, 240Pu, 241Pu and 241Am. The sensitivities of the three determination techniques were compare

Optical microscopy via spectral modifications of a nano-antenna

The existing optical microscopes form an image by collecting photons emitted from an object. Here we report on the experimental realization of microscopy without the need for direct optical communication with the sample. To achieve this, we have scanned a single gold nanoparticle acting as a nano-antenna in the near field of a sample and have studied the modification of its intrinsic radiative properties by monitoring its plasmon spectrum.Comment: 6 pages, 4 figures (color

Scaling Study and Thermodynamic Properties of the cubic Helimagnet FeGe

The critical behavior of the cubic helimagnet FeGe was obtained from isothermal magnetization data in very close vicinity of the ordering temperature. A thorough and consistent scaling analysis of these data revealed the critical exponents $\beta=0.368$, $\gamma=1.382$, and $\delta=4.787$. The anomaly in the specific heat associated with the magnetic ordering can be well described by the critical exponent $\alpha=-0.133$. The values of these exponents corroborate that the magnetic phase transition in FeGe belongs to the isotropic 3D-Heisenberg universality class. The specific heat data are well described by ab initio phonon calculations and confirm the localized character of the magnetic moments.Comment: 10 pages, 8 figure

Time Pressure, Time Autonomy, and Sickness Absenteeism in Hospital Employees: A Longitudinal Study on Organizational Absenteeism Records

Background Although work absenteeism is in the focus of occupational health, longitudinal studies on organizational absenteeism records in hospital work are lacking. This longitudinal study tests time pressure and lack of time autonomy to be related to higher sickness absenteeism. Methods Data was collected for 180 employees (45% nurses) of a Swiss hospital at baseline and at follow-up after 1 year. Absent times (hours per month) were received from the human resources department of the hospital. One-year follow-up of organizational absenteeism records were regressed on self-reported job satisfaction, time pressure, and time autonomy (i.e., control) at baseline. Results A multivariate regression showed significant prediction of absenteeism by time pressure at baseline and time autonomy, indicating that a stress process is involved in some sickness absenteeism behavior. Job satisfaction and the interaction of time pressure and time autonomy did not predict sickness absenteeism. Conclusion Results confirmed time pressure and time autonomy as limiting factors in healthcare and a key target in work redesign. Keywords healthcare ; occupational health ; time autonomy ; work absenteeism ; work stres

Performance of the AMS-02 Transition Radiation Detector

For cosmic particle spectroscopy on the International Space Station the AMS experiment will be equipped with a Transition Radiation Detector (TRD) to improve particle identification. The TRD has 20 layers of fleece radiator with Xe/CO2 proportional mode straw tube chambers. They are supported in a conically shaped octagon structure made of CFC-Al-honeycomb. For low power consumption VA analog multiplexers are used as front-end readout. A 20 layer prototype built from final design components has achieved proton rejections from 100 to 2000 at 90% electron efficiency for proton beam energies up to 250 GeV with cluster counting, likelihood and neural net selection algorithms.Comment: 11 pages, 25 figures, espcrc2.sty (elsevier 2-column