Improving the Resolution and Throughput of Achromatic Talbot Lithography

High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observed with diffraction gratings, is achromatic Talbot lithography (ATL). This method offers many advantages over other techniques, such as high resolution, large depth of focus, high throughput, etc. Although the technique has been studied in the past, its limits have not yet been explored. Increasing the efficiency and the resolution of the method is essential and might enable many applications in science and technology. In this work, we combine this technique with spatially coherent and quasi-monochromatic light at extreme ultraviolet (EUV) wavelengths and explore new mask design schemes in order to enhance its throughput and resolution. We report on simulations of various mask designs in order to explore their efficiency. Advanced and optimized nanofabrication techniques have to be utilized to achieve high quality and efficient masks for ATL. Exposures using coherent EUV radiation from the Swiss light source (SLS) have been performed, pushing the resolution limits of the technique for dense hole or dot patterning down to 40 nm pitch. In addition, through extensive simulations, alternative mask designs with rings instead of holes are explored for the efficient patterning of hole/dot arrays. We show that these rings exhibit similar aerial images to hole arrays, while enabling higher efficiency and thereby increased throughput for ATL exposures. The mask designs with rings show that they are less prone to problems associated with pattern collapse during the nanofabrication process and therefore are promising for achieving higher resolution

Assessing the carry-over effects of both human capital and organizational forgetting on sustainability performance using dynamic data envelopment analysis

Many studies have documented that human capital, which is a result of professional knowledge accumulation, continuously improves sustainability performance over time. Organizational forgetting is the loss of such professional knowledge, and it results in lower sustainability performance. Thus, human capital and organizational forgetting can be respectively treated as good and bad carry-overs. Both human capital and organizational forgetting may reflect business cycle fluctuations. The data envelopment analysis model has not been employed to examine the impact of either human capital or organizational forgetting on sustainability performance in multi-stages. The aim of this study is to develop a three-stage approach to incorporate the carry-over effects of both human capital and organizational forgetting and the effects of business cycle fluctuations on overall and term sustainability performance using data from Taiwan’s 16 major industrial sectors. The study finds that the carry-over effects of human capital and organizational forgetting lead to accurate estimations of sustainability performance and illustrates that the development of the industrial economy is a critical factor for adjusting human capital. Governments should implement economic stabilization policies and increase investment in education and safe capital to improve human capital accumulation and enhance sustainability performance

Lightly Weighted Automatic Audio Parameter Extraction for the Quality Assessment of Consensus Auditory-Perceptual Evaluation of Voice

The Consensus Auditory-Perceptual Evaluation of Voice is a widely employed tool in clinical voice quality assessment that is significant for streaming communication among clinical professionals and benchmarking for the determination of further treatment. Currently, because the assessment relies on experienced clinicians, it tends to be inconsistent, and thus, difficult to standardize. To address this problem, we propose to leverage lightly weighted automatic audio parameter extraction, to increase the clinical relevance, reduce the complexity, and enhance the interpretability of voice quality assessment. The proposed method utilizes age, sex, and five audio parameters: jitter, absolute jitter, shimmer, harmonic-to-noise ratio (HNR), and zero crossing. A classical machine learning approach is employed. The result reveals that our approach performs similar to state-of-the-art (SOTA) methods, and outperforms the latent representation obtained by using popular audio pre-trained models. This approach provide insights into the feasibility of different feature extraction approaches for voice evaluation. Audio parameters such as jitter and the HNR are proven to be suitable for characterizing voice quality attributes, such as roughness and strain. Conversely, pre-trained models exhibit limitations in effectively addressing noise-related scorings. This study contributes toward more comprehensive and precise voice quality evaluations, achieved by a comprehensively exploring diverse assessment methodologies.Comment: Published in IEEE 42th International Conference on Consumer Electronics (ICCE 2024

Dome-Shaped Ellipsoidal Reflector Antenna for UHF-RFID Readers with Confined Near-Field Detection Region

This letter proposes and demonstrates the concept of ellipsoidal reflector antennas for radio frequency identification reader applications at UHF band. The antenna can be potentially integrated with environmental structures to confine the reader detection region. The energy bounding characteristics result from the dual-focus feature of an ellipsoidal reflector in its near-field region, as the feed located at one of the two foci can create a focused field distribution around the other focus. An axial energy focusing is, thus, formed to confine the energy in a restricted region (near-field beam focusing), also minimizing the interference effects outside of the targeted area. Both numerical simulations and experimental results are presented to demonstrate the feasibility of this antenna concept

BETTER POSTURAL CONTROL DURING ACCURATE SHOOTING IN ELITE FEMALE BASKETBALL PLAYERS

The purpose of this study was to evaluate the differences of postural control (PC) during accurate and inaccurate shooting in elite female basketball players. 21 female professional basketball players recruited as subjects. The PC was evaluated by the Accusway as sway radius, velocity, radial and 95% area of the center of pressure (COP) during standard penalty line shooting. The results showed that the COP sway area during accurate shooting was significantly smaller than during inaccurate shooting (74.0 ± 37.9 vs. 110.6 ± 49.1, p < .05). Moreover, no significant differences were found between situations in the COP radius and velocity. This study found that during the accurate shooting, elite female basketball player had better PC which demonstrated that significant smaller COP sway area than inaccurate shooting

Comparison of the use of prenatal care services and the risk of preterm birth between pregnant women with disabilities and those without disabilities: A nationwide cohort study

ObjectiveThe difficulties faced by pregnant women with disabilities in accessing health care may make them less likely to receive prenatal care. The aims of this study were to compare the number of prenatal services and the risk of preterm birth between pregnant women with and without disabilities.MethodsA total of 2999 pregnant women aged ≥20 years with birth records in 2011–2014 in Taiwan were enrolled. Data were obtained from the Registration File for Physical and Mental Disabilities and the National Health Insurance Research Database. A 1:4 matching between pregnant women with disabilities and those without disabilities was performed. The logistic regression analysis with generalized estimating equations was used to analyze.ResultsThe median of prenatal care services used by pregnant women with disabilities was 9.00 (interquartile range, IQR: 2.00). Pregnant women with disabilities used fewer services than those without disabilities (median, 10.00; IQR: 1.00). The disabled group (8.44%) had a significantly higher proportion of preterm births than did the non-disabled group (5.40%). The disabled group was at a 1.30 times higher risk of preterm births than was the non-disabled group.ConclusionsPregnant women with disabilities used significantly fewer prenatal care services and had a significantly higher risk of preterm birth than pregnant women without disabilities

Resistless EUV lithography: Photon-induced oxide patterning on silicon

In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated silicon (100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its high resolution and throughput, but future progress in resolution can be hampered because of the inherent limitations of the resists. We show that EUV photons can induce surface reactions on a partially hydrogen-terminated silicon surface and assist the growth of an oxide layer, which serves as an etch mask. This mechanism is different from the hydrogen desorption in scanning tunneling microscopy–based lithography. We achieve silicon dioxide/silicon gratings with 75-nanometer half-pitch and 31-nanometer height, demonstrating the efficacy of the method and the feasibility of patterning with EUV lithography without the use of a photoresist. Further development of the resistless EUV lithography method can be a viable approach to nanometer-scale lithography by overcoming the inherent resolution and roughness limitations of photoresist materials

Metadiscourse repertoire of L1 Mandarin undergraduates writing in English : a cross-contextual, cross-disciplinary study

This article presents a qualitative, comparative study of metadiscourse in the academic writing of two groups of undergraduate students working in two different disciplines. The groups of students were: 1) Native speakers of Mandarin studying in China through the medium of English; 2) Native speakers of Mandarin studying in the UK through the medium of English. For each group of students, we examined writing undertaken in two undergraduate disciplinary courses: Literary Criticism and Translation Studies. Our aim was to extend research into English writing by L1 Mandarin speakers, and to identify patterns of difference and similarity both between educational contexts and between disciplines. Results suggest that patterns of metadiscourse use in our corpus are associated with both disciplinary and contextual factors, but that contextual factors may have a stronger effect than disciplinary factors. For our data, local institutional culture seems to have a noticeable influence on student writers' use of metadiscourse