Self-align fabrication of nano-reservoir with NV center in diamond surface for nuclear magnetic resonance of small molecules

We propose a novel structure to confine small molecules in a nanoscale reservoir and perform nano-NMR with a single NV center created near the reservoir base. We also propose a self-align process to fabricate the nano-reservoir and the single NV center adjacently in the diamond surface using electron beam lithography, nitrogen ion implantation and oxygen plasma etching. In this paper, we discuss the feasibility of the nano-NMR using nano-reservoirs in terms of the damage induced in the diamond by dry etching, the detection volume (i.e. the implantation depth) and the electron spin coherence property of the NV center.32nd International Microprocesses and Nanotechnology Conferenc