Nanometer lithography on silicon and hydrogenated amorphous silicon with low-energy electrons

We report the local oxidation of hydrogen terminated silicon (Si) surfaces induced with the scanning-tunneling microscope (STM) operating in air and by a beam of free low-energy electrons. With STM, oxide lines were written in Si(100) and Si(110) and transferred into the substrate by wet etching. In case of Si(110) trenches with a width as small as 35 nm and a depth of 300 nm were made. The same process has also successfully been applied to the patterning of hydrogenated amorphous silicon (a-Si:H) thin films. We demonstrate the fabrication of metallic ‘nanowires’ using a-Si:H as resist layer. With regard to the process of oxidation, it is found that the oxide written with STM is apparently not proportional to the electron current, in contrast to results obtained with a beam of free electrons in an oxygen gas-environment. The dose needed to remove the hydrogen was determined as a function of electron energy. This dose is minimal for 100 eV electrons amounting to 4 mC/cm2

Interdisciplinary system architectures in agile modular development in the product generation development model using the example of a machine tool manufacturer

This paper considers the orientation of product development structures towards interdisciplinary system architectures using the example of a tool machine manufacturer. Due to the change from simple mechanical products to extensively designed systems, whose successful development requires the integration of all disciplines involved, it is analyzed which requirements there are for these interdisciplinary system architectures in today\u27s development environment. In addition, it is validated on the basis of the investigation environment that interdisciplinary system structures are necessary for the development on the different levels of the system view. In doing so, the investigation environment addresses the concept of extracting customer-relevant features (systems) from a physical-tailored modular system (supersystem) in order to develop and test them autonomously, as well as to transfer them to the entire product range in a standardized manner. The elaboration identifies basic requirements for the development of a knowledge base in interdisciplinary system structures and places them into the context of an agile modular kit development

Once-Daily Triple Therapy in Patients with COPD: Patient-Reported Symptoms and Quality of Life.

INTRODUCTION: Directly recorded patient experience of symptoms and health-related quality of life (HRQoL) can complement lung function and exacerbation rate data in chronic obstructive pulmonary disease (COPD) clinical studies. The FULFIL study recorded daily symptoms and activity limitation together with additional patient-reported outcomes of dyspnea and HRQoL, as part of the prespecified analyses. FULFIL co-primary endpoint data have been previously reported. METHODS: FULFIL was a phase III, 24-week, randomized, double-blind, double-dummy, multicenter study comparing once-daily single inhaler triple therapy [fluticasone furoate/umeclidinium/vilanterol (FF/UMEC/VI)] 100 µg/62.5 µg/25 µg with twice-daily inhaled corticosteroid/long-acting β2-agonist therapy [budesonide/formoterol (BUD/FOR)] 400 µg/12 µg in patients with symptomatic COPD at risk of exacerbations. A subset participated for 52 weeks. Patient-reported assessments were: Evaluating Respiratory Symptoms in COPD™ (E-RS: COPD), St George's Respiratory Questionnaire (SGRQ) for COPD, COPD Assessment Test (CAT), baseline and transitional dyspnea indices (TDI) and daily and global anchor questions for activity limitation. RESULTS: FF/UMEC/VI showed greater reductions from baseline in 4-weekly mean E-RS: COPD total and all subscale scores compared with BUD/FOR; differences were statistically significant (P < 0.05) at each time period. FF/UMEC/VI also demonstrated greater improvements from baseline at weeks 4 and 24 in SGRQ domain scores and TDI focal score compared with BUD/FOR. At weeks 4 and 24, improvements greater than the minimal clinically important difference from baseline were observed in CAT score with FF/UMEC/VI, but not BUD/FOR; differences were statistically significant (P ≤ 0.003). CONCLUSION: These findings demonstrate sustained daily symptom and HRQoL benefits of FF/UMEC/VI versus BUD/FOR. The inclusion of the CAT may provide data that are readily generalizable to everyday clinical practice. TRIAL REGISTRATION: ClinicalTrials.gov number: NCT02345161. FUNDING: GSK

MMTF: The Maryland-Magellan Tunable Filter

This paper describes the Maryland-Magellan Tunable Filter (MMTF) on the Magellan-Baade 6.5-meter telescope. MMTF is based on a 150-mm clear aperture Fabry-Perot (FP) etalon that operates in low orders and provides transmission bandpass and central wavelength adjustable from ~5 to ~15 A and from ~5000 to over ~9200 A, respectively. It is installed in the Inamori Magellan Areal Camera and Spectrograph (IMACS) and delivers an image quality of ~0.5" over a field of view of 27' in diameter (monochromatic over ~10'). This versatile and easy-to-operate instrument has been used over the past three years for a wide variety of projects. This paper first reviews the basic principles of FP tunable filters, then provides a detailed description of the hardware and software associated with MMTF and the techniques developed to observe with this instrument and reduce the data. The main lessons learned in the course of the commissioning and implementation of MMTF are highlighted next, before concluding with a brief outlook on the future of MMTF and of similar facilities which are soon coming on line.Comment: 38 pages, 12 figures, 3 tables, now accepted for publication to the Astronomical Journa

Building Fuzzy Elevation Maps from a Ground-based 3D Laser Scan for Outdoor Mobile Robots

Mandow, A; Cantador, T.J.; Reina, A.J.; Martínez, J.L.; Morales, J.; García-Cerezo, A. "Building Fuzzy Elevation Maps from a Ground-based 3D Laser Scan for Outdoor Mobile Robots," Robot2015: Second Iberian Robotics Conference, Advances in Robotics, (2016) Advances in Intelligent Systems and Computing, vol. 418. This is a self-archiving copy of the author’s accepted manuscript. The final publication is available at Springer via http://link.springer.com/book/10.1007/978-3-319-27149-1.The paper addresses terrain modeling for mobile robots with fuzzy elevation maps by improving computational speed and performance over previous work on fuzzy terrain identification from a three-dimensional (3D) scan. To this end, spherical sub-sampling of the raw scan is proposed to select training data that does not filter out salient obstacles. Besides, rule structure is systematically defined by considering triangular sets with an unevenly distributed standard fuzzy partition and zero order Sugeno-type consequents. This structure, which favors a faster training time and reduces the number of rule parameters, also serves to compute a fuzzy reliability mask for the continuous fuzzy surface. The paper offers a case study using a Hokuyo-based 3D rangefinder to model terrain with and without outstanding obstacles. Performance regarding error and model size is compared favorably with respect to a solution that uses quadric-based surface simplification (QSlim).This work was partially supported by the Spanish CICYT project DPI 2011-22443, the Andalusian project PE-2010 TEP-6101, and Universidad de Málaga-Andalucía Tech