Extreme ultraviolet mask surface cleaning effects on lithography process performance

Extreme UV (EUV) masks are expected to undergo cleaning processes in order to maintain the lifetimes necessary for high volume manufacturing. For this study, the impact of repetitive cleaning of EUV masks on imaging performance is evaluated. Two high quality industry standard EUV masks are used, with one of the masks undergoing repeated cleaning and the other one kept as a reference. Lithographic performance, in terms of process window analysis and line edge roughness, was monitored after every two cleans and was compared to the reference mask performance. Surface analysis by atomic force microscopy did not show changes in the midspatial frequency roughness measured after each clean. After a total of eight cleans, minimal degradation is observed in the lithographic performance of the mask. From these observations, the authors conclude that the cleaning cycles completed thus far did not damage the mask multilayer or the absorber structures. The cleaning cycles will be continued until significant loss in imaging fidelity is found. © 2010 American Vacuum Society

Dynamical lattice QCD thermodynamics with domain wall fermions

We present results from simulations of two flavor QCD thermodynamics at N_t=4 with domain wall fermions. In contrast to other lattice fermion formulations, domain wall fermions preserve the full chiral symmetry of the continuum at finite lattice spacing (up to terms exponentially small in an extra parameter). Just above the phase transition, we find that the axial U(1) symmetry is broken only by a small amount. We discuss an ongoing calculation to determine the order and properties of the phase transition using domain wall fermions, since the global symmetries of the theory are expected to be important here.Comment: 4 pages, 4 eps figures, LaTeX. To appear in the Proceedings of the XVth Particles and Nuclei International Conference (PANIC '99), Uppsala, Sweden, 10-16 June 199

Celecoxib concentration predicts decrease in prostaglandin E\u3csub\u3e2\u3c/sub\u3e concentrations in nipple aspirate fluid from high risk women

BACKGROUND: Epidemiologic studies suggest that long term low dose celecoxib use significantly lowers breast cancer risk. We previously demonstrated that 400 mg celecoxib taken twice daily for 2 weeks lowered circulating plasma and breast nipple aspirate fluid (NAF) prostaglandin (PG)E2 concentrations in post- but not premenopausal high risk women. We hypothesized that circulating concentrations of celecoxib influenced PGE2 response, and that plasma levels of the drug are influenced by menopausal status. To address these hypotheses, the aims of the study were to determine: 1) if circulating plasma concentrations of celecoxib correlated with the change in plasma or NAF PGE2 concentrations from baseline to end of treatment, and 2) whether menopausal status influenced circulating levels of celecoxib. METHODS: Matched NAF and plasma were collected from 46 high risk women who were administered celecoxib twice daily for two weeks, 20 subjects receiving 200 mg and 26 subjects 400 mg of the agent. NAF and plasma samples were collected before and 2 weeks after taking celecoxib. RESULTS: In women taking 400 mg bid celecoxib, plasma concentrations of the agent correlated inversely with the change in NAF PGE2 levels from pre- to posttreatment. Nonsignificant trends toward higher celecoxib levels were observed in post- compared to premenopausal women. There was a significant decrease in NAF but not plasma PGE2 concentrations in postmenopausal women who took 400 mg celecoxib (p = 0.03). CONCLUSION: In high risk women taking 400 mg celecoxib twice daily, plasma concentrations of celecoxib correlated with downregulation of PGE2 production by breast tissue. Strategies synergistic with celecoxib to downregulate PGE2 are of interest, in order to minimize the celecoxib dose required to have an effect

Stuck in Time: Negative Income Shock Constricts the Temporal Window of Valuation Spanning the Future and the Past

Insufficient resources are associated with negative consequences including decreased valuation of future reinforcers. To determine if these effects result from scarcity, we examined the consequences of acute, abrupt changes in resource availability on delay discounting-the subjective devaluation of rewards as delay to receipt increases. In the current study, 599 individuals recruited from Amazon Mechanical Turk read a narrative of a sudden change (positive, neutral, or negative) to one\u27s hypothetical future income and completed a delay discounting task examining future and past monetary gains and losses. The effects of the explicit zero procedure, a framing manipulation, was also examined. Negative income shock significantly increased discounting rates for gains and loses occurring both in the future and the past. Positive income windfalls significantly decreased discounting to a lesser extent. The framing procedure significantly reduced discounting under all conditions. Negative income shocks may result in short-term choices

Environmental assessment of the near-net-shape electrochemical metallisation process and the Kroll-electron beam melting process for titanium manufacture

The enforcement of environmental policies, in recent years, has become one of the major driving forces for industrial upgrading. Therefore, this study is focused on the evaluation of the environmental impact of a newly proposed titanium additive manufacturing process, including its in-depth comparison with the conventional method. This new method, referred to as Near-net-shape Electrochemical Metallisation, is based on the in-situ metallisation (via the FFC-Cambridge Process) of 3D-printed titanium oxide precursors (using Direct Ink Writing Process). In order to evaluate the main contributors to the environmental damage and to compare them with the conventional route for titanium manufacturing, the gate-to-gate Life Cycle Assessment has been conducted following established international standards. From this, the main contributors within the Near-net-shape Electrochemical Metallisation process were identified to be electricity and synthetic rutile, with medium impacts from argon and nickel. It was found that major impacts were challenging to be reduced without affecting the properties of the final product. However, the medium impacts can theoretically be modified, yielding potential improvements in the sustainability of the process by 10%. When compared to the conventional route (consisting of the Kroll Process, Free Fall Gas Atomisation and Electron Beam Melting), the end point results demonstrated that, by adopting the Near-net-shape Electrochemical Metallisation Process, the overall impact of titanium fabrication was dramatically reduced. Specifically, an average reduction of 68% for the ecosystem, human health and resources was observed