Modification of ultra low-k dielectric films by O₂ and CO₂ plasmas

Low-k materials developed for ULSI interconnects should have sufficient resistance to processing plasma. CO2 plasma is being considered as a promising candidate for low damage photoresist ash and as a surface activation chemistry for self-assembled monolayers and atomic layer deposition on low-k materials. This article explores the interaction of two organosilicate (OSG) based low-k materials with different k-values (OSG2.4 and OSG2.2) with CO2 plasma in both CCP and ICP-remote plasma chambers. Time dependent exposure of the materials to CO2 plasma revealed quick and effective sealing of OSG2.4 surface whereas it takes longer time for OSG2.2. The sealing reduces further plasma damage and leads to accumulation of CO2 in the pores of both materials. The same behavior occurs in ICP-remote plasma but without a complete sealing of the surface. This suggests the important role of ion bombardment. Damage to low-k by conventional O-2 plasma was studied alongside and it was found that for t 60 s. Furthermore, lesser time exposure to CO2 plasma was investigated with respect to source power at constant pressure and it was discovered that damage although small, increases with varying source power

UV cure of oxycarbosilane low-k films

status: publishe

Observations of the urban boundary layer in a cold climate city

Cold environment supports a large diversity of local climates. Among them, urban climates in northern cities stand out for their pronounced warm temperature anomaly known as the Urban Heat Island (UHI). UHI in northern cities has been already studies through satellite images and in-situ observations in the urban canopy layer (UCL). Yet, the vertical structure of the urban atmospheric boundary layer (UBL) has not been studied there. This work presents new observations of UBL in Nadym – a sub-Arctic Siberian city. During several intensive observing periods we run simultaneous registration of urban and rural meteorological parameters with unmanned drones, a microwave temperature profiler and a dense network of ground-based sensors. The data analysis reveals details of UHI development in the UCL and UBL, and links together horizontal urban-rural canopy-layer temperature differences, boundary layer stability, and UHI vertical extent. We show that during strong temperature inversions, UBL is less stratified than its rural counterpart, but it still remains very thin and limited in height by a few tens of meters. The observations disclose that the ground-based (50 m – 100 m above ground) temperature inversion is one of the strongest control factors for UHI in cold climate conditions in winter

Effects of methyl terminal and carbon bridging groups ratio on critical properties of porous organosilicate-glass films

Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft baking at 120–200◦ C and curing at 430◦ C. The films’ porosity was controlled by using sacrificial template Brij® L4. Changes of the films’ refractive indices, mechanical properties, k-values, porosity and pore structure versus chemical composition of the film’s matrix are evaluated and compared with methyl-terminated low-k materials. The chemical resistance of the films to annealing in oxygen-containing atmosphere is evaluated by using density functional theory (DFT). It is found that the introduction of bridging groups changes their porosity and pore structure, increases Young’s modulus, but the improvement of mechanical properties happens simultaneously with the increase in the refractive index and k-value. The 1,4-phenylene bridging groups have the strongest impact on the films’ properties. Mechanisms of oxidative degradation of carbon bridges are studied and it is shown that 1,4-phenylene-bridged films have the highest stability. Methylene-and ethylene-bridged films are less stable but methylene-bridged films show slightly higher stability than ethylene-bridged films. © 2020 by the authors. Licensee MDPI, Basel, Switzerland

Superconductivity in a disordered metal with Coulomb interactions

We study the electronic densities of states (DOS) of strongly disordered superconducting thin films of TiN. We find, using Scanning Tunneling Microscopy (STM) that the DOS decreases towards the Fermi level in the normal phase obtained by applying magnetic fields. The DOS shows spatial fluctuations whose length scale is related to the energy dependent DOS and is similar in normal and superconducting phases. This suggests that Coulomb interactions lead to a spatially varying DOS in the normal phase of a disordered superconductor

Dual threshold diode based on the superconductor-to-insulator transition in ultrathin TiN filmss

We investigate transport properties of superconducting TiN films in the vicinity of the superconductor-insulator transition (SIT). We show that the current-voltage (I-V) characteristics are mirror-symmetric with respect to the SIT and can be switched to each other by the applied magnetic field. In both superconducting and insulating states, the low-temperature I-V characteristics have pronounced diode-like threshold character, demonstrating voltage/current jumps over several orders of magnitude at the corresponding critical current or threshold voltage. We have found that for both states, the theory developed for Josephson junction arrays offers a quantitative description of the experimental results

An enhanced integrated approach to knowledgeable high-resolution environmental quality assessment

Sustaining urban environmental quality requires effective policy measures that integrate local monitoring and contextualized high-resolution modelling with actionable scenarios. Knowledgeable decision making in this field can nowadays be supported by an array of atmospheric models, but their transfer into an Integrated Urban hydrometeorological, climate and environmental Services (IUS) remains challenging. Methodological aspects that are beyond pure technicalities of the model-to-model coupling are still poorly explored. Modeling downscaling chains lack their most user-relevant link - urban-to-neighborhood scale observations and models. This study looks at a socio-environmental context of the high-resolution atmospheric modeling in the case study of the Arctic urban cluster of Apatity and Kirovsk, Russia. We demonstrate that atmospheric dynamics of the lowermost, turbulent air layers is highly localized during the most influential episodes of atmospheric pollution. Urban micro-climates create strong circulations (winds) that are sensitive to the local environmental context. As the small-scale turbulence dynamics is not spatially resolved in meteorological downscaling or statistical modeling, capturing this local context requires specialized turbulence-resolving (large-eddy simulation) models. Societal acceptance of the urban modeling could be increased in the IUS with horizontally integrated modeling driven by localized scenarios. This study presents an enhanced integrated approach, which incorporates a large-eddy simulation model PALM into meteorological downscaling chains of a climate model (EC-EARTH), a numerical weather prediction - atmospheric chemical transport model (ENVIRO-HIRLAM) and a regional-scale meteorological model (COSMO-CLM). We discuss how this approach could be further developed into an environmental component of a digital "smart city".Peer reviewe