Metal contacts to lowly doped Si and ultra thin SOI

We present our investigations on the fabrication of ohmic and Schottky contacts of several metals on lowly doped bulk Si and SOI wafers. Through this paper we evaluate the fabrication of rectifying devices in which no doping is intentionally introduced

Low-temperature process steps for realization of non-volatile memory devices

In this work, the low-temperature process steps required for the realization of nano-crystal non-volatile memory cells are discussed. An amorphous silicon film, crystallized using a diode pumped solid state green laser irradiating at 532 nm, is proposed as an active layer. The deposition of the subsequent functional layers (e.g., gate oxide) can be done using CVD and ALD reactors in a cluster tool. We show that a high nanocrystal density (Si-NC), required for a good functionality of the memory device, can be obtained by using disilane (Si2H6) or trisilane (Si3H8, known as Silcore®) as precursors for LPCVD instead of silane, at a deposition temperature of 325 °C. The nanocrystals are encapsulated with an ALD-Al2O3 layer (deposited at 300 °C), which serves as oxidation barrier. The passivation of the realized structure is done with an ALD-TiN layer deposited at 425 °C. In this work, we realized Al/TiN/Al2O3/Si-NC/SiO2/Si(100) multilayer floating-gate structures, where the crystallized amorphous silicon film was for the time being replaced by a mono-crystalline silicon wafer, and the gate oxide was thermally grown instead of a low-temperature PECVD oxide. The structures were characterized in terms of their performance as memory cells. In addition, the feasibility to use laser crystallization for improving the amorphous silicon films (prior to the gate oxide deposition) was explored

Measures to reduce fine dust emission from poultry houses: reduction from broiler houses by ionization

In this study the effect was determined of a commercially available air ionization system on the reduction of airborne dust in a broiler house. Results showed a reduction, based on particle mass, of 36% and 10% for PM10 and PM2.5, respectivel

Slim Plakwerk

De techniek van ioniseren lijkt perspectiefvol tegen fijnstofemissie uit vleeskuikenstallen. Dit blijkt uit onderzoek op Het Spelderholt

Options for dust reduction from poultry houses

Large poultry houses emit high amounts of fine dust (PM10) and in many cases they exceed the ambient air quality standard set by the EU. Technologies for PM10 reduction need to be developed on short term to minimize PM10 emissions from poultry houses. Studied options for dust reduction were: application of an oil film on the litter and application of an ionization system. Rapeseed oil was sprayed daily in a quantity of 8 to 24 ml/m2 in broiler houses and 20 ml/m2 in layer houses. The ionization system was applied in a broiler house and had a voltage difference of -30kV, with a current of approximately 0.7 mA. Daily emissions of PM10 particles were determined at regular intervals by measuring concentrations at the ventilation inlet and outlet and by measuring the airflow rate. For the oil system PM10 emission reductions were in the ranges of 55 – 85% in broilers and 25 – 40% in layers. The ionization system, applied in broilers, reduced PM10 emission on average by 36%

Fijnstofemissie uit stallen: leghennen in volièrehuisvesting = Dust emission from animal houses: layer hens in aviary systems

In this study emissions of fine dust (PM10 and PM2.5) from houses for layer hens in aviary systems were determined. In addition, emissions of ammonia, greenhouse gases and odour were determine

Fijnstofemissie uit stallen: vleeskalkoenen

In this study emissions of fine dust (PM10 and PM2.5) from houses for turkeys were determined. In addition, emissions of ammonia, greenhouse gases and odour were determine

Fijnstofemissie uit stallen: vleeskuikens = Dust emission from animal houses: broilers

In this study emissions of fine dust (PM10 and PM2.5) from houses for broilers were determined. In addition, emissions of ammonia, greenhouse gases and odour were determine

Fijnstofemissie uit stallen: dragende zeugen = Dust emission from animal houses: pregnant sows

In this study emissions of fine dust (PM10 and PM2.5) from houses for pregnant sows were determined. In addition, emissions of ammonia, greenhouse gases and odour were determined