Hybrid microfluidic cooling and thermal isolation technologies for 3D ICs

A key challenge for three dimensional (3D) integrated circuits (ICs) is thermal management. There are two main thermal challenges in typical 3D ICs. First, in the homogeneous integration with multiple high-power tiers, an effective cooling solution that scales with the number of dice in the stack is needed. Second, in the heterogeneous integration, an effective thermal isolation solution is needed to ‘protect’ the low-power tier from the high-power tier. This research focuses to address these two thermal challenges through hybrid microfluidic cooling and thermal isolation technologies. Within-tier microfluidic cooling is proposed and demonstrated to cool a stack with multiple high-power tiers. Electrical thermal co-analysis is performed to understand the trade-offs between through silicon via (TSV) parasitics and heat sink performance. A TSV-compatible micropin-fin heat sink is designed, fabricated and thermally characterized in a single tier, and benchmarked with a conventional air-cooled heat sink. The designed heat sink has a thermal resistance of 0.269 K·cm2/W at a flow rate of 70 mL/min. High aspect ratios TSVs (18:1) are integrated in the micropin-fins. Within-tier microfluidic cooling is then implemented in 3D stacks to emulate different heating scenarios, such as memory-on-processor and processor-on-processor. Air gap and mechanically flexible interconnects (MFIs) are proposed for the first time to decrease the vertical thermal coupling between high-power (e.g. processor) and low-power tiers (e.g. memory or nanophotonics). A two-tier testbed with the proposed thermal isolation technology is designed, fabricated and tested. Compared with conventional 3D integration approach, thermal isolation technology helps reduce the temperature at a fixed location in the low-tier by 12.9 °C. The resistance of a single MFI is measured to be 46.49 mΩ.Ph.D

TSV placement optimization for liquid cooled 3D-ICs with emerging NVMs

Three dimensional integrated circuits (3D-ICs) are a promising solution to the performance bottleneck in planar integrated circuits. One of the salient features of 3D-ICs is their ability to integrate heterogeneous technologies such as emerging non-volatile memories (NVMs) in a single chip. However, thermal management in 3D-ICs is a significant challenge, owing to the high heat flux (~ 250 W/cm2). Several research groups have focused either on run-time or design-time mechanisms to reduce the heat flux and did not consider 3D-ICs with heterogeneous stacks. The goal of this work is to achieve a balanced thermal gradient in 3D-ICs, while reducing the peak temperatures. In this research, placement algorithms for design-time optimization and choice of appropriate cooling mechanisms for run-time modulation of temperature are proposed. Specifically, an architectural framework which introduce weight-based simulated annealing (WSA) algorithm for thermal-aware placement of through silicon vias (TSVs) with inter-tier liquid cooling is proposed for design-time. In addition, integrating a dedicated stack of emerging NVMs such as RRAM, PCRAM and STTRAM, a run-time simulation framework is developed to analyze the thermal and performance impact of these NVMs in 3D-MPSoCs with inter-tier liquid cooling. Experimental results of WSA algorithm implemented on MCNC91 and GSRC benchmarks demonstrate up to 11 K reduction in the average temperature across the 3D-IC chip. In addition, power density arrangement in WSA improved the uniformity by 5%. Furthermore, simulation results of PARSEC benchmarks with NVM L2 cache demonstrates a temperature reduction of 12.5 K (RRAM) compared to SRAM in 3D-ICs. Especially, RRAM has proved to be thermally efficient replacement for SRAM with 34% lower energy delay product (EDP) and 9.7 K average temperature reduction

Microfluidic thermal management of 2.5D and 3D microsystems

Both 2.5 dimensional (2.5D) and 3 dimensional (3D) stacked integrated chip (SIC) heterogeneous architectures are promising to go beyond Moore's law for compact, high-performance, energy-efficient microsystems. However, these systems face significant thermal management challenges due to the increased volumetric heat generation rates, and reduced surface area. In addition, highly spatially and temporally non-uniform heat generation occurs due to different functionalities of various heterogeneous chips. This dissertation focuses on thermal management challenges for both 2.5D and 3D-SICs, by utilizing micro-gap liquid cooling with enhanced non-uniform heterogeneous pin-fin structures. Single phase convection thermal performance of heterogeneous pin-fin enhanced micro-gap liquid cooling under non-uniform power map has been evaluated under steady state conditions. Heat transfer and pressure drop characteristics of dielectric coolants in cooling manifold with cooling enhanced structure and hergeneous pin-fins have been parametrically studied by full-scale computational fluid mechanics/heat transfer (CFD/HT) to achieve non-uniform cooling capacities for multi-chip test structures of 2.5D-SICs. Non-uniform heterogeneous pin-fin structures in cold plates have been numerically and systematically optimized using design of experiment method, coupling with full-scale CFD/HT simulations. A compact thermal model accounting for both spatially and temporally varying heat-flux distributions for inter-layer liquid cooling of 3D-SICs, with realistic leakage power simulation feature has also been developed as a thermal-electrical co-design tool for 3D-SICs. In addition to the active micro-gap liquid cooling thermal managements, this dissertation also investigates the passive micro-gap two-phase liquid cooling using a miniature-thermosyphon with dielectric coolant Novec 7200, for future 3D-SICs. Experimental characterizations, including heat transfer measurements, and bubble flow visualizations are performed under two phase conditions. Implementation of miniature-thermosyphon on 3D-SICs provides non-uniform in-plane as well as cross-plane cooling capacities, which can be used and further enhanced for 3D-SICs thermal management with heterogeneous chips.Ph.D

Heterogeneous 2.5D integration on through silicon interposer

© 2015 AIP Publishing LLC. Driven by the need to reduce the power consumption of mobile devices, and servers/data centers, and yet continue to deliver improved performance and experience by the end consumer of digital data, the semiconductor industry is looking for new technologies for manufacturing integrated circuits (ICs). In this quest, power consumed in transferring data over copper interconnects is a sizeable portion that needs to be addressed now and continuing over the next few decades. 2.5D Through-Si-Interposer (TSI) is a strong candidate to deliver improved performance while consuming lower power than in previous generations of servers/data centers and mobile devices. These low-power/high-performance advantages are realized through achievement of high interconnect densities on the TSI (higher than ever seen on Printed Circuit Boards (PCBs) or organic substrates), and enabling heterogeneous integration on the TSI platform where individual ICs are assembled at close proximity

Printed temperature sensor array for high-resolution thermal mapping

Fully-printed temperature sensor arrays—based on a flexible substrate and featuring a high spatial-temperature resolution—are immensely advantageous across a host of disciplines. These range from healthcare, quality and environmental monitoring to emerging technologies, such as artificial skins in soft robotics. Other noteworthy applications extend to the fields of power electronics and microelectronics, particularly thermal management for multi-core processor chips. However, the scope of temperature sensors is currently hindered by costly and complex manufacturing processes. Meanwhile, printed versions are rife with challenges pertaining to array size and sensor density. In this paper, we present a passive matrix sensor design consisting of two separate silver electrodes that sandwich one layer of sensing material, composed of poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS). This results in appreciably high sensor densities of 100 sensor pixels per cm2 for spatial-temperature readings, while a small array size is maintained. Thus, a major impediment to the expansive application of these sensors is efficiently resolved. To realize fast and accurate interpretation of the sensor data, a neural network (NN) is trained and employed for temperature predictions. This successfully accounts for potential crosstalk between adjacent sensors. The spatial-temperature resolution is investigated with a specially-printed silver micro-heater structure. Ultimately, a fairly high spatial temperature prediction accuracy of 1.22 °C is attained

Investigation into yield and reliability enhancement of TSV-based three-dimensional integration circuits

Three dimensional integrated circuits (3D ICs) have been acknowledged as a promising technology to overcome the interconnect delay bottleneck brought by continuous CMOS scaling. Recent research shows that through-silicon-vias (TSVs), which act as vertical links between layers, pose yield and reliability challenges for 3D design. This thesis presents three original contributions.The first contribution presents a grouping-based technique to improve the yield of 3D ICs under manufacturing TSV defects, where regular and redundant TSVs are partitioned into groups. In each group, signals can select good TSVs using rerouting multiplexers avoiding defective TSVs. Grouping ratio (regular to redundant TSVs in one group) has an impact on yield and hardware overhead. Mathematical probabilistic models are presented for yield analysis under the influence of independent and clustering defect distributions. Simulation results using MATLAB show that for a given number of TSVs and TSV failure rate, careful selection of grouping ratio results in achieving 100% yield at minimal hardware cost (number of multiplexers and redundant TSVs) in comparison to a design that does not exploit TSV grouping ratios. The second contribution presents an efficient online fault tolerance technique based on redundant TSVs, to detect TSV manufacturing defects and address thermal-induced reliability issue. The proposed technique accounts for both fault detection and recovery in the presence of three TSV defects: voids, delamination between TSV and landing pad, and TSV short-to-substrate. Simulations using HSPICE and ModelSim are carried out to validate fault detection and recovery. Results show that regular and redundant TSVs can be divided into groups to minimise area overhead without affecting the fault tolerance capability of the technique. Synthesis results using 130-nm design library show that 100% repair capability can be achieved with low area overhead (4% for the best case). The last contribution proposes a technique with joint consideration of temperature mitigation and fault tolerance without introducing additional redundant TSVs. This is achieved by reusing spare TSVs that are frequently deployed for improving yield and reliability in 3D ICs. The proposed technique consists of two steps: TSV determination step, which is for achieving optimal partition between regular and spare TSVs into groups; The second step is TSV placement, where temperature mitigation is targeted while optimizing total wirelength and routing difference. Simulation results show that using the proposed technique, 100% repair capability is achieved across all (five) benchmarks with an average temperature reduction of 75.2? (34.1%) (best case is 99.8? (58.5%)), while increasing wirelength by a small amount

Thermal aware design techniques for multiprocessor architectures in three dimensions

Tesis inédita de la Universidad Complutense de Madrid, Facultad de Informática, Departamento de Arquitectura de Computadores y Automática, leída el 28-11-2013Depto. de Arquitectura de Computadores y AutomáticaFac. de InformáticaTRUEunpu

SCALABLE FRAMEWORK WITH IDENTICAL MEMORY DIES TO ACHIEVE HIGH-CLOCK FREQUENCY

Our design implements a scalable 3-D-nonuniform memory access (NUMA) architecture according to low latency logarithmic interconnects, which enables stacking of multiple identical memory dies (MDs), supports multiple outstanding transactions, and achieves high clock frequencies because of its highly pipelined nature. We implemented our design with STMicroelectronics CMOS-28-nm low-power technology and acquired time frequency of 500 MHz, as much as eight stacked dies (4 MB) having a memory density loss. Large needed size, and ability to tolerate latency and variations in memory access time make L2 memory a appropriate choice for 3-D integration. Within this paper, we present a synthesizable 3-D-stacking L2 memory IP component, which may be mounted on a cluster-based multicore platform through its network-on-nick interfaces offering high-bandwidth memory access with low average latency. Benchmark simulation results show adding 3-D-NUMA to some multicluster system can result in a typical performance boost of 34%. In addition, experiments and estimations make sure 3-D-NUMA is energy and power efficient, temperature friendly, and it has improvements appropriate for low-cost manufacturing. Finally, improvement is quite possible in 3-D-NUMA in contrast to its 2-D counterparts, while using condition from the art through-plastic-via technologies