複数の静電容量型柔軟触覚デバイスを用いた三軸力センサの開発

早大学位記番号:新7325早稲田大

A reconfigurable tactile display based on polymer MEMS technology

This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. The concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator (¡°endoskeletal microbubble actuator¡±) were presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate. In order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator was demonstrated. To further reduce the cost of the microvalve, a laterally-stacked multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes.Ph.D.Committee Chair: Allen,Mark; Committee Member: Bucknall,David; Committee Member: Book,Wayne; Committee Member: Griffin,Anselm; Committee Member: Yao,Donggan

Integrated Pressure/Temperature Sensor Array Based on Nickel Conductive Composite

학위논문 (박사)-- 서울대학교 대학원 : 전기·컴퓨터공학부, 2014. 2. 홍용택.Implementation of electronic artificial skin has been widely studied, from basic concept to prototypes, for potential applications in robot engineering and prosthetic replacement. Electronic Artificial skin plays a key role of sensing external environment, such as pressure and temperature, and delivering transformed signals either to robot control or human nerve system. In order to truly mimicking human skin, artificial skin at least needs to contain both pressure and temperature sensing elements in an array format. In fact, a couple of trials have been attempted to integrate sensing both elements onto single skin. Combination of commercial temperature sensing chips with printed pressure sensitive resistor or assembly of separately fabricated sensor arrays of each type has been demonstrated. These hybrid type integration or assembly approach renders rather complicated processes and thus increases fabrication cost. For sensing elements, conductive composite materials have been commonly used, whose resistance changes as geometrical dimension changes with applied pressure or temperature. In most cases, the conductive composite materials have been used only for single type of sensing element, either pressure or temperature sensor. It is challenging to differentiate two type of sensing part in one substrate with single conductive composite material and to independently read out each signal. Therefore, there have been no reported researches on using single conducting composite materials to a multi-sensing device. In addition, the conductive composite materials were typically fabricated "on" either flexible or stretchable substrate only after readout active-matrix circuitry was fabricated on the substrate. Therefore, there can be limitation in selection of materials and device structure, and process incompatibility that can makes mass manufacturing of the active-matrix sensor arrays difficult. However, when the sensor arrays are separately fabricated by embedding the sensing elements in the substrate, they can be easily incorporated into passive-matrix system or can be simply laminated on the separately fabricated active-matrix circuitry, as in case of the electronic paper front-plane technology. In this thesis, a simple fabrication method of integrated pressure/temperature sensor arrays by embedding conductive nickel (Ni) particles in poly(dimethyloxane) (PDMS) medium for electronic artificial skin application will be elucidated. The pressure and temperature sensing parts are formed in one pixel but have different heights, which are implemented by introducing a corrugated structure to Ni/PDMS composite with a pre-patterned aluminum mold. Since Ni particles are ferromagnetic materials, Ni/PDMS mixture can be patterned by exposure to patterned magnetic fields. Magnetic field exposure helps both lateral patterning and vertical particle alignment, which directly improved sensitivity and linearity of the sensor. Independent and stable read-out signals for pressure and temperature sensors are successfully obtained even under repeated measurements. This technology has advantages of simple tuning for sensitivity and operation ranges by changing particle concentration and device physical dimension, easy scaling-up to large area by seamlessly bonding small arrays or using large-area magnetic field modulator, and potential implementation of the sensor frontplane for active-matrix backplane read-out circuitry. Electronic artificial skin passive-matrix system with about 10 ppi resolution with the integrated 16 by 16 pressure and 15 by 15 temperature sensor arrays have been finally demonstrated. Furthermore, a highly stretchable electrode with demonstration of a resolution sustaining lighting device by fully utilizing the magnetic patterning/aligning method will be also studied. This stretchable electrode based on conductive composite shows unique property that is negative strain-dependency in electrical resistance. Although cyclic behavior of pure nickel composite needs more improvement, nickel-based composite materials have excellent advantages over other materials in terms of simple patterning and in-situ embedding in the matrix. This novel technology would be one of the key enabling technology in implementing future stretchable electronic display devices.Abstract i Contents ６ List of Figures ９ List of Tables １３ Chapter 1 Introduction １４ 1.1 Motivation １４ 1.2 Human Sense of Touch ２１ 1.2.1 Tactile Receptors ２４ 1.2.2 Thermoeceptor ２６ 1.2.3 Nociceptors ２６ 1.2.4 Kinesthetic Receptors ２７ 1.2.5 Tactile Sensitivity and Acuity ２７ 1.2.6 Stretchability of Human Body ２８ 1.3 Transduction Principles for Electronic Skin Applications ３０ 1.3.1 Piezoresistive ３０ 1.3.2 Piezoelectric ３４ 1.3.3 Capacitive ３５ 1.3.4 Optical ３７ 1.4 The Goal and Outline of This Thesis ４０ Chapter 2 Nickel Conductive Composite Material : Characteristics Enhancement by Magnetic Aligning Method ５６ 2.1 Introduction ５６ 2.2 Theoretical Analysis with the Maxwell Theory and the Effective Medium Theory ６２ 2.3 Materials and Fabrication Method ６７ 2.4 Results and Discussions ６９ 2.4.1 Optical Microscope Measurement ６９ 2.4.2 Electrical Characteristics ７０ 2.5 Conclusion ７５ Chapter 3 Scalable and Stretchable Fully Integrated Pressure/Temperature Sensor Array with Magnetically Aligned and Patterned Nickel Conductive Composite Material ８７ 3.1 Introduction ８７ 3.2 Materials and Fabrication Method ９１ 3.3 Finite Element Analysis for Patterning and Mechanical Characteristics ９５ 3.4 Electrical Characteristics of Integrated Sensor Array １１７ 3.5 Conclusion １２０ Chapter 4 Negatively Strain-Dependent Electrical Resistance of Magnetically Arranged Nickel Composite : Its Application to Highly Stretchable Electrode and Stretchable Lighting Devices １２５ 4.1 Introduction １２５ 4.2 Experimental １３０ 4.3 Results and Analysis １３５ 4.3.1 Electrical Characteristics with Tension Test １３５ 4.3.2 Analysis with Three-dimensional Percolation Theory １３８ 4.3.3 Highly Stretchable Electrode with Ink-jet Printed Silver １４５ 4.4 Resolution Sustainable Stretchable Lighting Device １４９ 4.5 Conclusion １５３ Chapter 5 Conclusion １６２ Abstract in Korean １７０Docto

Automated Sensing Methods in Soft Stretchable Sensors for Soft Robotic Gripper

A soft robot is made from deformable and flexible materials such as silicone, rubber, polymers, etc. Soft robotics is a rapidly evolving field where the human-robot-interaction and bio-inspired design align. The physical characteristics such as highly deformable material and dexterity make soft robots widely applicable. A soft robotic gripper is a robotic hand that acts like a human hand and grasps any object. The most common applications of soft robotics grippers are gripping and locomotion in sensitive applications where high dynamic and sensitivity are essential. Nowadays, soft robotics grippers are used without any sensing method and feedback as it is crucial to make the output feedback from the gripper. The major drawback of soft robotic grippers is their need for more precision sensing. In traditional robots, we can integrate any sensor to detect the force and orientation of objects. Still, soft robotic grippers rely on the deformation sensing method, where the sensor must be highly flexible and deformable. With a precise sensing method, it is easier to determine the exact position or orientation of the object being gripped, and it limits the application of the soft robotic gripper. Sometimes, soft robots are employed in harsh environments to solve problems. With the sensing feedback, automation may become more reliable and succeed altogether. So, in this research, we have designed and fabricated a soft sensor to integrate with the gripper and to observe the feedback of the gripper. We propose integrated multimodal sensing that incorporates applied pressure and resistance change. The sensor provides feedback when the grippers hold any object, and the output response is the resistance change of the sensor. The liquid metal is susceptible and can respond to low force levels. We presented the 3D design, FEM simulation, fabrication, and integration of the gripper and sensor, and by showing both simulation and experimental results, the gripper is validated for real-time application. FEM simulation simulates behavior, optimizing design and predicting performance. We have designed and fabricated a soft sensor that yields microfluidic channel arrays embedded with liquid metal Galinstan alloy and a soft robotic gripper hand. Different printing processes and characterization results are presented for the sensor and actuator. The fabrication process of the gripper and sensor is adequately described. The gripper output characteristics are tested for bending angle, load test, elongation, and object holding under various applied pressure. Additionally, the sensor was tested for stretchability, linearity and durability, and human gesture integration with the finger, and this sensor can be easily reused/ reproduced. Furthermore, the sensor exhibits good sensitivity concerning different pressure and grasping various objects. Finally, we collected data using this sensor-integrated gripper and trained the dataset using machine learning models for automation. With more data, this can be an autonomous gripper with intelligent sensing methodologies. Moreover, this proposed stretchable sensor can be integrated into any existing gripper for innovative real-time applications

Polyvinylidene fluoride - based MEMS tactile sensor for minimally invasive surgery

Minimally invasive surgery (MIS) procedures have been growing rapidly for the past couple of decades. In MIS operations, endoscopic tools are inserted through a small incision on human's body. Although these procedures have many advantages such as fast recovery time, minimum damage to human body and reduced post operative complications, it does not provide any tactile feedback to the surgeon. This thesis reports on design, finite element analysis, fabrication and testing of a micromachined piezoelectric endoscopic tactile sensor. Similar to the commercial endoscopic graspers, the sensor is teeth like in order to grasp slippery tissues. It consists of three layers; the first layer is a silicon layer of teeth shapes on the top and two supports at the bottom forming a thin plate and a U-Channel. The second layer is a patterned Polyvinylidene Fluoride (PVDF) film, and the third layer is a supporting Plexiglas. The patterned PVDF film was placed on the middle between the other two layers. When a concentric load is applied to the sensor, the magnitude and the position of the applied load are obtained from the outputs of the sensing elements which are sandwiched between the silicon supports and the Plexiglas. In addition, when a soft object/tissue is place on the sensor and load is applied the degree of the softness/compliance of the object is obtained from the outputs from the middle PVDF sensing elements, which are glued to the back of the thin silicon plate. The outputs are related to the deformation of the silicon plate which related to the contacting object softness. The sensor has high sensitivity and high dynamic range as a result it can potentially detect a small dynamic load such as a pulse load as well as a high load such as a firm grasping of a tissue by an endoscopic grasper. The entire surface of the tactile sensor is also active, which is an advantage in detecting the precise position of the applied point load on the grasper. The finite element analysis and experimental results are in close agreement with each other. The sensor can potentially be integrated with the gasper of a commercially available endoscopic graspe

Investigation of 3D Printed Porous Polydimethylsiloxane (PDMS)/Carbon Nanotube (CNT) Nanocomposites for Sensing Application

Sensors manufactured using piezoresistive elastomeric nanocomposites have a wide range of applications in fields such as structural health monitoring, robotics and biomedical industries. These nanocomposites are a mixture of highly deformable polymers and conducting nanofillers that have the special property of experiencing a change in their electrical conductivity when compressed or stretched. The use of Additive Manufacturing processes such as Stereolithography Apparatus (SLA) and Direct Ink Writing (DIW) to construct sensors from these nanocomposites has provided numerous advantages including increased sensitivity of the sensors and the fabrication of complex geometry. However, bulk material sensors, manufactured additively or using conventional methods, display a greater effect of hysteresis, especially at strains higher than 10%, which limits their sensitivity. In order to address this challenge, this thesis focuses on the use of porosity in the form of varying infill densities and patterns made possible by Additive Manufacturing processes to significantly reduce these bulk material effects. The additive manufacturing of porous structures requires the nanocomposite material to hold its shape well after extrusion, and it should keep its shape when subsequent layers of material are deposited above it. Pristine polymers such as polydimethylsiloxane (PDMS) have no yield point which is a signifier of material that can hold its shape, therefore they cannot be successfully 3D printed while freestanding since they collapse and spread after extrusion. A thixotropic silica filler and carbon nanotubes (CNTs) were used to allow the material to hold shape and have a significantly higher yield stress required for porous structures to successfully print. Peak hold and amplitude sweep tests were conducted on nanomaterial consisting of 1.5% CNT and silica content ranging from 5-20% in order to quantify the rheological properties of the material. While all the silica content percentages had yield points and could hold shape during 3D printing, the material formulation containing 15% silica was selected as the ideal material due to its high yield point and low brittleness. Cuboids were 3D printed from this material using three infill patterns, three infill densities and two syringe needle sizes. The fabricated samples are characterized using a scanning electron microscope (SEM) to validate the microstructural features, layer bonding and infill densities. Each sensor’s pressure sensing capability is investigated using cyclic compression loading at various maximum strains. Sensing experiments show an increase in both stress and strain sensitivity, as well as a decrease in the mechanical and electrical hysteresis with the introduction of porosity. These results indicate that introducing porosity using 3D printing is a sensible strategy to improve the piezoresistive performance of nanocomposites and to allow for the tunability of sensing capacity in pressure sensors. The mechanical performance of the sensors was analyzed along with tensile samples of the same infill patterns and densities. The fracture stress was determined and the locations of failure were analyzed. Finite Element Analysis was used to analyze the stress distribution within the material as well as to predict the location of failure. Mechanical results show a significant increase in the fracture stress of the porous compression samples above 40% infill density, therefore highlighting their durability and robustness. Results also show a reduction in the fracture stress for tension samples, highlighting their weakness under tensile loads

Mechanismentechnik in Ilmenau, Budapest und Niš: Technische Universität Ilmenau, 29. - 31. August 2012

In diesem Band sind Beiträge des Workshops „Mechanismentechnik in Ilmenau, Budapest und Niš 2012“ zusammengestellt. Diese spiegeln gemeinsame Arbeiten der drei Universitäten – Technische Universität Ilmenau, Universität Budapest (Budapest University of Technology and Economics) und Universität Niš (University of Niš) – wider. Der Inhalt des Bandes ist in drei Abschnitte aufgeteilt. Im ersten Abschnitt handelt es sich um Beiträge über die Entwicklung und Untersuchung nachgiebiger Mechanismen mit Anwendung in der Ventiltechnik sowie Mechanismen mit stoffschlüssigen Gelenken für spezielle Anforderungen. Nachgiebige Sensoren und Aktuatoren für die Greifer- und Robotertechnik werden im zweiten Abschnitt vorgestellt. Abschließend wird die Problematik der Materialcharakterisierung und von neuen Simulationsmethoden nachgiebiger Mechanismen diskutiert

User-interactive wirelessly-communicating “smart” textiles made from multimaterial fibers

En raison de la nature intime des interactions homme-textiles (essentiellement, nous sommes entourés par les textiles 24/7 - soit sous la forme de vêtements que nous portons ou comme rembourrage dans nos voitures, maisons, bureaux, etc.), les textiles intelligents sont devenus des plates-formes de plus en plus attrayantes pour les réseaux de capteurs innovants biomédicaux, transducteurs, et des microprocesseurs dédiés à la surveillance continue de la santé. En même temps, l'approche commune dans le domaine des textiles intelligents consiste en l'adaptation de la microélectronique planaire classique à une sorte de substrat souple. Cela se traduit souvent par de mauvaises propriétés mécaniques et donc des compromis au niveau du confort et de l'acceptation des usagers, qui à leur tour peuvent probablement expliquer pourquoi ces solutions émergent rarement du laboratoire et, à l'exception de certains cas très spécifiques, ne soit pas utilisés dans la vie de tous les jours. Par ailleurs, nous assistons présentement à un changement de paradigme au niveau de l'informatique autonome classique vers le concept de calculs distribués (ou informatique en nuage). Dans ce cas, la puissance de calcul du nœud individuel ou d'un dispositif de textile intelligent est moins importante que la capacité de transmettre des données à l'Internet. Dans ce travail, je propose une nouvelle approche basée sur l'intégration de polymère, verre et métal dans des structures de fibres miniaturisées afin de réaliser des dispositifs de textiles intelligents de prochaine génération avec des fonctionnalités de niveau supérieur (comme la communication sans fil, la reconnaissance tactile, les interconnexions électriques) tout en ayant une forme minimalement envahissante. Tout d'abord, j'étudie différents modèles d'antennes compatibles avec la géométrie des fibres et des techniques de fabrication. Ensuite, je démontre expérimentalement que ces antennes en fibres multi-matériaux peuvent être intégrées dans les textiles lors d’un processus standard de fabrication de textiles. Les tests effectués sur ces textiles ont montré que, pour les scénarios «sur-corps et hors-corps», les propriétés émissives en termes de perte de retour (S11), le patron (diagramme) de radiation, l'efficacité (gain), et le taux d'erreur binaire (TEB) sont directement comparables à des solutions classiques rigides. Ces antennes sont adéquates pour les communications à courte portée des applications de communications sans fil ayant un débit de données de Mo/s (méga-octets par seconde) (via protocoles Bluetooth et IEEE 802.15.4 à la fréquence de 2,4 GHz). Des simulations numériques de taux d'absorption spécifique démontrent également le plein respect des règles de sécurité imposées par Industrie Canada pour les réseaux sans fil à proximité du corps humain. Puisque les matériaux composites de fibres métal-verre-polymère sont fabriqués en utilisant des fibres de silice creuses de diamètre submillimétrique et la technique de dépôt d'argent à l'état liquide, les éléments conducteurs sont protégés de l'environnement et ceci préserve aussi les propriétés mécaniques et esthétiques des vêtements. Cet aspect est confirmé par des essais correspondant aux normes de l'industrie du textile, l'étirement standard et des essais de flexion. De plus, appliquer des revêtements superhydrophobes (WCA = 152º, SA = 6º) permet une communication sans fil sans interruption de ces textiles sous l'application directe de l'eau, même après plusieurs cycles de lavage. Enfin, le prototype de textile intelligent fabriqué interagit avec l'utilisateur à travers un détecteur tactile et transmet les données tactiles à travers le protocole Bluetooth à un smartphone. Cette démonstration valide l’approche des fibres multi-matériaux pour une variété d'applications.As we are surrounded by textiles 24/7, either in the form of garments that we wear or as upholstery in our cars, homes, offices, etc., textiles are especially attractive platforms for arrays of innovative biomedical sensors, transducers, and microprocessors dedicated, among other applications, to continuous health monitoring. In the same time, the common approach in the field of smart textiles consists in adaptation of conventional planar microelectronics to some kind of flexible substrate, which often results in poor mechanical properties and thus compromises wearing comfort and complicates garment care, which results in low user acceptance. This explains why such solutions rarely emerge from the lab and, with the exception of some very specific cases, cannot be seen in the everyday life. Furthermore, we are currently witnessing a global shift from classical standalone computing to the concept of distributed computation (e.g. so-called thin clients and cloud storage). In this context, the computation power of the individual node or smart textile device in this case, becomes progressively less important than the ability to relay data to the Internet. In this work, I propose a novel approach based on the idea of integration of polymer, glass and metal into miniaturized fiber structures in order to achieve next-generation smart textile devices with higher-level functionalities, such as wireless communication, touch recognition, electrical interconnects, with minimally-invasive attributes. First, I investigate different possible fiber-shaped antenna designs and fabrication techniques. Next, I experimentally demonstrate that such multi-material fiber antennas can be integrated into textiles during standard textile manufacturing process. Tests conducted on these textiles have shown that, for on-body and off-body scenarios, the emissive properties in terms of return loss (S11), radiation pattern, efficiency (gain), and bit-error rate (BER) are directly comparable to classic ‘rigid’ solutions and adequately address short-range wireless communications applications at Mbps data-rates (via Bluetooth and IEEE 802.15.4 protocols at 2.4 GHz frequency). Numerical simulations of the specific absorption rate (SAR) also demonstrate full compliance with safety regulations imposed by Industry Canada for wireless body area network devices. Since metal-glass-polymer fiber composites were fabricated using sub-millimetre hollow-core silica fibers and liquid state silver deposition technique, the conductor elements are shielded against the environment and preserve the mechanical and cosmetic properties of the garments. This is confirmed by the textile industry standard stretching and bending tests. Additionally, applied superhydrophobic coatings (WCA=152º, SA=6º) allow uninterrupted wireless communication of the textiles under direct water application even after multiple washing cycles. Finally, I fabricated a user-interactive and wireless-communicating smart textile prototype, that interacts with the user through capacitive touch-sensing and relays the touch data through Bluetooth protocol to a smartphone. This demonstration validates that the proposed approach based on multi-material fibers is suitable for applications to sensor fabrics and bio-sensing textiles connected in real time to mobile communications infrastructures, suitable for a variety of health and life science applications

Design Of A Piezoelectric Tactile Sensor

Tez (Yüksek Lisans) -- İstanbul Teknik Üniversitesi, Fen Bilimleri Enstitüsü, 2012Thesis (M.Sc.) -- İstanbul Technical University, Institute of Science and Technology, 2012İnsanlardaki dokunma duyusu, dokunsal algılayıcıların ana ilham kaynağı olmuştur. Bu çalışmadaki amaç ise dokunma duyusuna yakınsayacak yeni nesil sentetik polimer fiber dizisinin tasarımı ve üretimidir. Bu fiber dizisinin üzerindeki basınç dağılımını algılaması amaçlanmaktadır. Tasarlanan fiber dizisinin hem yüzey pürüzlülüğüne adapte olabilen biyolojiden esinlenilmiş fiber yapısının bulunması, hem de oluşan temas ile ortaya çıkan basıncı elektriksek potansiyel farka çevirebilecek piezoelektrik ince tabakaya sahip olması gerekmektedir. Yapılan çalışmada basıncı algılama kabiliyetine sahip PVDF piezoelektrik tabakaya ilave edilmiş PDMS polimer düşey fiber dizisini sonlu eleman metodu kullanılarak analizi yapılmıştır. Piezoelektrik polimer uygulanan kuvvet sonucunda elektriksek potansiyel farkı yaratmaktadır. Bu potansiyel fark mikro/nano polimer fiberler sayesinde ayrıştırılabilir ve bu ayrıştırma polimer tabaka üzerindeki basıncın haritalandırılmasına yarar. Tasarlanan algılayıcıda PDMS polimerden üretilmiş fiberlerin çıkış voltajına ve insan elinin uzamsal çözünürlüğe yakınsamasındaki boyutsal değişkenlere etkisi araştırılmıştır. Tüm bu tasarım ölçütlerinin sağlanabilmesi statik ve dinamik çalışma koşullarının incelenmesi ve dokunma algısının altında yatan nörofizyolojinin özümsenmesini içermektedir. Piezoelektrik polimerin elektrotlanması sayesinde gecko ayaklarının yapışma ve yüzeyi tanıma özelliği taklit edilmeye çalışılmıştır. Fiberlerin geometrileri sayesinde basıncın belli bir alana yoğunlaştırılması sağlanmış bu sayede birim kuvvete elde edilecek potansiyel farkın artırılması ve algılayıcının hassasiyetinin artırımı sağlanmıştır. Fakat piezoelektrik PVDF polimerin yüzey enerjisinin diğer polimerlere oranla daha düşük kalmasından dolayı yapışma özelliği yetersiz kalmaktadır. Bu ise üzerine yerleştirilmiş PDMS ya da PMMA gidi sık kullanılan polimerler sayesinde telafi edilmiştir.The human sense of touch is the main inspiration to tactile sensing. The aim of this thesis is to design and manufacture a novel synthetic polymer fiber array with sensing capability of the pressure distribution. The polymer fiber array has both bio-inspired fibrillar structures that can adapt to the surface roughness and polymer piezoelectric film that can generate potential difference proportional to the pressure generated by the contact with the surrounding. In this work, the sensing capability of polyvinylidene fluoride (PVDF) piezoelectric film integrated with PDMS (Polydimethylsiloxane) polymer vertical fiber array has been analyzed using finite element method (FEM). Piezoelectric polymer generates electric potential difference with the applied force, which can be decoupled by the micro/nano polymer pillars, results in the mapping of the pressure distribution among the polymer film. The contribution of the pillars, made out of PDMS (Polydimethylsiloxane), to the output voltage and the dimensional parameters are examined for a satisfactory design that can meet the spatial resolution of the human hand. In order to meet all design requirements, the sensor design should include the static and dynamic analysis and understanding of neurophysiology of touch. By electroding the polymer film, it is aimed to mimic the adhesion and surface adaptation characteristics of the foot of gecko. The geometry of the fiber increases the pressure concentration and the sensitivity of the sensor. However, since the surface energy of PVDF polymer is low, polymers like PDMS or PMMA have been used to compensate the drawback.Yüksek LisansM.Sc