Miniature high dynamic range time-resolved CMOS SPAD image sensors

Since their integration in complementary metal oxide (CMOS) semiconductor technology in 2003, single photon avalanche diodes (SPADs) have inspired a new era of low cost high integration quantum-level image sensors. Their unique feature of discerning single photon detections, their ability to retain temporal information on every collected photon and their amenability to high speed image sensor architectures makes them prime candidates for low light and time-resolved applications. From the biomedical field of fluorescence lifetime imaging microscopy (FLIM) to extreme physical phenomena such as quantum entanglement, all the way to time of flight (ToF) consumer applications such as gesture recognition and more recently automotive light detection and ranging (LIDAR), huge steps in detector and sensor architectures have been made to address the design challenges of pixel sensitivity and functionality trade-off, scalability and handling of large data rates. The goal of this research is to explore the hypothesis that given the state of the art CMOS nodes and fabrication technologies, it is possible to design miniature SPAD image sensors for time-resolved applications with a small pixel pitch while maintaining both sensitivity and built -in functionality. Three key approaches are pursued to that purpose: leveraging the innate area reduction of logic gates and finer design rules of advanced CMOS nodes to balance the pixel’s fill factor and processing capability, smarter pixel designs with configurable functionality and novel system architectures that lift the processing burden off the pixel array and mediate data flow. Two pathfinder SPAD image sensors were designed and fabricated: a 96 × 40 planar front side illuminated (FSI) sensor with 66% fill factor at 8.25μm pixel pitch in an industrialised 40nm process and a 128 × 120 3D-stacked backside illuminated (BSI) sensor with 45% fill factor at 7.83μm pixel pitch. Both designs rely on a digital, configurable, 12-bit ripple counter pixel allowing for time-gated shot noise limited photon counting. The FSI sensor was operated as a quanta image sensor (QIS) achieving an extended dynamic range in excess of 100dB, utilising triple exposure windows and in-pixel data compression which reduces data rates by a factor of 3.75×. The stacked sensor is the first demonstration of a wafer scale SPAD imaging array with a 1-to-1 hybrid bond connection. Characterisation results of the detector and sensor performance are presented. Two other time-resolved 3D-stacked BSI SPAD image sensor architectures are proposed. The first is a fully integrated 5-wire interface system on chip (SoC), with built-in power management and off-focal plane data processing and storage for high dynamic range as well as autonomous video rate operation. Preliminary images and bring-up results of the fabricated 2mm² sensor are shown. The second is a highly configurable design capable of simultaneous multi-bit oversampled imaging and programmable region of interest (ROI) time correlated single photon counting (TCSPC) with on-chip histogram generation. The 6.48μm pitch array has been submitted for fabrication. In-depth design details of both architectures are discussed

Time-of-flight CMOS イメージセンサによる高精度・高速距離イメージングに関する研究

Tohoku University博士（工学）thesi

A low-voltage CMOS-compatible time-domain photodetector, device & front end electronics

During the last decades, the usage of silicon photodetectors, both as stand-alone sensor or integrated in arrays, grew tremendously. They are now found in almost any application and any market range, from leisure products to high-end scientific apparatuses, including, among others, industrial, automotive, and medical equipment. The impressive growth in photodetector applications is closely linked to the development of CMOS technology, which now offers inexpensive and efficient analog and digi-tal signal processing capabilities. Detectors are often integrated with their respective front end and application-specific digital circuit on the same silicon die, forming complete systems on chip. In some cases the detector itself is not on the same chip but often part of the same package. However, this trend of co-integration of analog front end and digital circuits complicates the design of the analog part. The ever-decreasing supply voltage and the smaller transistors in advanced processes (which are driven by the development of digital cir-cuits) negatively impact the performance of the analog structures and complicates their design. For photodetector systems, the effect most importantly translates into a degradation of dynamic range and signal-to-noise ratio. One way to circumvent the problem of low supply voltages is to shift the operation from voltage domain to time domain. By doing so, the signal is no longer constrained by the supply rails and analog amplification is avoided. The signal takes the form of a time-based modulation, such as pulse-width modulation or pulse-frequency modulation. Another advantage is that the output signal of a time-domain photodetection system is directly interfaceable with digital circuits. In this work, a new type of CMOS-compatible photodetector displaying intrinsic light-to-time conversion is proposed. Its physical structure consists of a MOS gate interleaved with a PN junction. The MOS structure is acting as a photogate. The depletion region shrinks when photogenerated carriers fill the potential well. At some point, the anode of the PN structure is de-isolated from the rest of the detector and triggers a positive-feedback effect that leads to a very steep current increase through the PN-junction. This translates into a signal of very high amplitude and independent from light-intensity, which can be almost directly interfaced with digital circuits. This simplifies the front end circuit compared to photodiode-based systems. The physical behavior of the device is analyzed with the help of TCAD simulations and simple behavioral and shot-noise models are proposed. The device has been co-integrated with its driver and front end circuit in a standard CMOS process and its characteristics have been measured with a custom-made measurement system. The effect of bias parameters on the performance of the sensor are also analyzed. The limitations of the device are discussed, the most important ones being dark current and linearity. Techno-logical solutions, such as the implementation of the detector on Silicon-on-Insulator technology, are proposed to overcome the limitations. Finally, some application demonstrators have been realized. Other applications that could benefit from the detector are suggested, such as digital applications taking advantage of the latching behavior of the device, and a Photoplethysmography (PPG) system that uses a PLL-based control loop to minimize the emitting LED-current

Radiation Damage in CMOS Image Sensors for Space Applications

The space radiation environment is damaging to silicon devices, such as Complementary Metal Oxide Semiconductor (CMOS) image sensors, affecting their performance over time or causing total failure. The first part of this work investigates a Charge Coupled Device (CCD) style CMOS image sensor designed for TDI (Time Delay and Integration) mode imaging, a mode commonly used for Earth observation. Damage from high energy protons in the space environment decreases the Charge Transfer Efficiency (CTE) and increases the dark current of such devices. Experimental work on proton damaged devices is presented, showing the effects on CTE and dark current. The results are compared to a standard CCD by a simulation to take into account the different dimensions and operating conditions of the two devices. The second part of this work describes an experimental campaign to determine the effects of process variations (namely the introduction of deep doping wells and the variation of epitaxial silicon thickness) on the rate of Single Event Latchup (SEL) in CMOS Active Pixel Sensor (APS) devices. SEL is a potentially destructive phenomenon which occurs in CMOS technology but not in CCDs. Test devices were subjected to heavy ion bombardement and SEL rates recorded for a range of heavy ions causing varying amounts of ionisation. A simulation using Technology Computer Aided Design (TCAD) was developed to predict the SEL rates due to heavy ions and to understand the characteristic shape of the SEL cross section vs. Linear Energy Transfer (LET) curves produced by SEL experiments. The simuation was carried out for structures representative of each of the design variants

Quality of Experience in Immersive Video Technologies

Over the last decades, several technological revolutions have impacted the television industry, such as the shifts from black & white to color and from standard to high-definition. Nevertheless, further considerable improvements can still be achieved to provide a better multimedia experience, for example with ultra-high-definition, high dynamic range & wide color gamut, or 3D. These so-called immersive technologies aim at providing better, more realistic, and emotionally stronger experiences. To measure quality of experience (QoE), subjective evaluation is the ultimate means since it relies on a pool of human subjects. However, reliable and meaningful results can only be obtained if experiments are properly designed and conducted following a strict methodology. In this thesis, we build a rigorous framework for subjective evaluation of new types of image and video content. We propose different procedures and analysis tools for measuring QoE in immersive technologies. As immersive technologies capture more information than conventional technologies, they have the ability to provide more details, enhanced depth perception, as well as better color, contrast, and brightness. To measure the impact of immersive technologies on the viewersâ QoE, we apply the proposed framework for designing experiments and analyzing collected subjectsâ ratings. We also analyze eye movements to study human visual attention during immersive content playback. Since immersive content carries more information than conventional content, efficient compression algorithms are needed for storage and transmission using existing infrastructures. To determine the required bandwidth for high-quality transmission of immersive content, we use the proposed framework to conduct meticulous evaluations of recent image and video codecs in the context of immersive technologies. Subjective evaluation is time consuming, expensive, and is not always feasible. Consequently, researchers have developed objective metrics to automatically predict quality. To measure the performance of objective metrics in assessing immersive content quality, we perform several in-depth benchmarks of state-of-the-art and commonly used objective metrics. For this aim, we use ground truth quality scores, which are collected under our subjective evaluation framework. To improve QoE, we propose different systems for stereoscopic and autostereoscopic 3D displays in particular. The proposed systems can help reducing the artifacts generated at the visualization stage, which impact picture quality, depth quality, and visual comfort. To demonstrate the effectiveness of these systems, we use the proposed framework to measure viewersâ preference between these systems and standard 2D & 3D modes. In summary, this thesis tackles the problems of measuring, predicting, and improving QoE in immersive technologies. To address these problems, we build a rigorous framework and we apply it through several in-depth investigations. We put essential concepts of multimedia QoE under this framework. These concepts not only are of fundamental nature, but also have shown their impact in very practical applications. In particular, the JPEG, MPEG, and VCEG standardization bodies have adopted these concepts to select technologies that were proposed for standardization and to validate the resulting standards in terms of compression efficiency

Computational and Numerical Simulations

Computational and Numerical Simulations is an edited book including 20 chapters. Book handles the recent research devoted to numerical simulations of physical and engineering systems. It presents both new theories and their applications, showing bridge between theoretical investigations and possibility to apply them by engineers of different branches of science. Numerical simulations play a key role in both theoretical and application oriented research

Parallel reconfigurable single photon avalanche diode array for optical communications

There is a pressing need to develop alternative communications links due to a number of physical phenomena, limiting the bandwidth and energy efficiency of wire-based systems or economic factors such as cost, material-supply reliability and environmental costs. Networks have moved to optical connections to reduce costs, energy use and to supply high data rates. A primary concern is that current optical-detection devices require high optical power to achieve fast data rates with high signal quality. The energy required therefore, quickly becomes a problem. In this thesis, advances in single-photon avalanche diodes (SPADs) are utilised to reduce the amount of light needed and to reduce the overall energy budget. Current high performance receivers often use exotic materials, many of which have severe environmental impact and have cost, supply and political restrictions. These present a problem when it comes to integration; hence silicon technology is used, allowing small, mass-producible, low power receivers. A reconfigurable SPAD-based integrating receiver in standard 130nm imaging CMOS is presented for links with a readout bandwidth of 100MHz. A maximum count rate of 58G photon/s is observed, with a dynamic range of ≈ 79dB, a sensitivity of ≈ −31.7dBm at 100MHz and a BER of ≈ 1x10−9. We investigate the properties of the receiver for optical communications in the visible spectrum, using its added functionality and reconfigurability to experimentally explore non-ideal influences. The all-digital 32x32 SPAD array, achieves a minimum dead time of 5.9ns, and a median dark count rate (DCR) of 2.5kHz per SPAD. High noise devices can be weighted or removed to optimise the SNR. The power requirements, transient response and received data are explored and limiting factors similar to those of photodiode receivers are observed. The thesis concludes that data can be captured well with such a device but more electrical energy is needed at the receiver due to its fundamental operation. Overall, optical power can be reduced, allowing significant savings in either transmitter power or the transmission length, along with the advantages of an integrated digital chip