4,405 research outputs found
MEMS-enabled silicon photonic integrated devices and circuits
Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process
Diamond Integrated Optomechanical Circuits
Diamond offers unique material advantages for the realization of micro- and
nanomechanical resonators due to its high Young's modulus, compatibility with
harsh environments and superior thermal properties. At the same time, the wide
electronic bandgap of 5.45eV makes diamond a suitable material for integrated
optics because of broadband transparency and the absence of free-carrier
absorption commonly encountered in silicon photonics. Here we take advantage of
both to engineer full-scale optomechanical circuits in diamond thin films. We
show that polycrystalline diamond films fabricated by chemical vapour
deposition provide a convenient waferscale substrate for the realization of
high quality nanophotonic devices. Using free-standing nanomechanical
resonators embedded in on-chip Mach-Zehnder interferometers, we demonstrate
efficient optomechanical transduction via gradient optical forces. Fabricated
diamond resonators reproducibly show high mechanical quality factors up to
11,200. Our low cost, wideband, carrier-free photonic circuits hold promise for
all-optical sensing and optomechanical signal processing at ultra-high
frequencies
Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator
Sensitive transduction of the motion of a microscale cantilever is central to
many applications in mass, force, magnetic resonance, and displacement sensing.
Reducing cantilever size to nanoscale dimensions can improve the bandwidth and
sensitivity of techniques like atomic force microscopy, but current optical
transduction methods suffer when the cantilever is small compared to the
achievable spot size. Here, we demonstrate sensitive optical transduction in a
monolithic cavity-optomechanical system in which a sub-picogram silicon
cantilever with a sharp probe tip is separated from a microdisk optical
resonator by a nanoscale gap. High quality factor (Q ~ 10^5) microdisk optical
modes transduce the cantilever's MHz frequency thermally-driven vibrations with
a displacement sensitivity of ~ 4.4x10^-16 m\sqrt[2]{Hz} and bandwidth > 1 GHz,
and a dynamic range > 10^6 is estimated for a 1 s measurement.
Optically-induced stiffening due to the strong optomechanical interaction is
observed, and engineering of probe dynamics through cantilever design and
electrostatic actuation is illustrated
A chip-scale integrated cavity-electro-optomechanics platform
We present an integrated optomechanical and electromechanical nanocavity, in
which a common mechanical degree of freedom is coupled to an ultrahigh-Q
photonic crystal defect cavity and an electrical circuit. The sys- tem allows
for wide-range, fast electrical tuning of the optical nanocavity resonances,
and for electrical control of optical radiation pressure back-action effects
such as mechanical amplification (phonon lasing), cooling, and stiffening.
These sort of integrated devices offer a new means to efficiently interconvert
weak microwave and optical signals, and are expected to pave the way for a new
class of micro-sensors utilizing optomechanical back-action for thermal noise
reduction and low-noise optical read-out.Comment: 11 pages, 7 figure
Scanning micro interferometer with tunable diffraction grating for low noise parallel operation
Large area high throughput metrology plays an important role in several technologies like MEMS. In current metrology systems the parallel operation of multiple metrology probes in a tool has been hindered by their bulky sizes. This study approaches this problem by developing a metrology technique based on miniaturized scanning grating interferometers (μSGIs). Miniaturization of the interferometer is realized by novel micromachined tunable gratings fabricated using SOI substrates. These stress free flat gratings show sufficient motion (~500nm), bandwidth (~50 kHz) and low damping ratio (~0.05). Optical setups have been developed for testing the performance of μSGIs and preliminary results show 6.6 μm lateral resolution and sub-angstrom vertical resolution. To achieve high resolution and to reduce the effect of ambient vibrations, the study has developed a novel control algorithm, implemented on FPGA. It has shown significant reduction of vibration noise in 6.5 kHz bandwidth achieving 6x10-5 nmrms/√Hz noise resolution. Modifications of this control scheme enable long range displacement measurements, parallel operation and scanning samples for their dynamic profile. To analyze and simulate similar optical metrology system with active micro-components, separate tools are developed for mechanical, control and optical sub-systems. The results of these programs enable better design optimization for different applications.Ph.D.Committee Chair: Degertekin, Levent; Committee Co-Chair: Kurfess, Thomas; Committee Member: Adibi, Ali; Committee Member: Danyluk, Steven; Committee Member: Hesketh, Pete
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