3次元型トランジスタを用いたLSIの設計法

Design technology of LSI such as system LSI ana memory using 3 dimensional transistors has been described. By using 3 dimensional transistors, FinFET, double gate transistor and stacked double gate transistor, pattern area of logic gate and full adder circuit can be reduced drastically compared with that with conventional planar transistor. By using double gate transistor and Carbon Nano Tube transistor the reconfigurable circuit with many logic functions can be realized with small pattern area. Furthermore, staked NAND MRAM with 3 dimensional spin transistor has been newly proposed. This stacked NAND MRAM is a promising candidate which replaces currently available DRAM and NAND flash memory.Design technology of LSI such as system LSI ana memory using 3 dimensional transistors has been described. By using 3 dimensional transistors, FinFET, double gate transistor and stacked double gate transistor, pattern area of logic gate and full adder circuit can be reduced drastically compared with that with conventional planar transistor. By using double gate transistor and Carbon Nano Tube transistor the reconfigurable circuit with many logic functions can be realized with small pattern area. Furthermore, staked NAND MRAM with 3 dimensional spin transistor has been newly proposed. This stacked NAND MRAM is a promising candidate which replaces currently available DRAM and NAND flash memory

Polarity Control at Runtime:from Circuit Concept to Device Fabrication

Semiconductor device research for digital circuit design is currently facing increasing challenges to enhance miniaturization and performance. A huge economic push and the interest in novel applications are stimulating the development of new pathways to overcome physical limitations affecting conventional CMOS technology. Here, we propose a novel Schottky barrier device concept based on electrostatic polarity control. Specifically, this device can behave as p- or n-type by simply changing an electric input bias. This device combines More-than-Moore and Beyond CMOS elements to create an efficient technology with a viable path to Very Large Scale Integration (VLSI). This thesis proposes a device/circuit/architecture co-optimization methodology, where aspects of device technology to logic circuit and system design are considered. At device level, a full CMOS compatible fabrication process is presented. In particular, devices are demonstrated using vertically stacked, top-down fabricated silicon nanowires with gate-all-around electrode geometry. Source and drain contacts are implemented using nickel silicide to provide quasi-symmetric conduction of either electrons or holes, depending on the mode of operation. Electrical measurements confirm excellent performance, showing Ion/Ioff > 10^7 and subthreshold slopes approaching the thermal limit, SS ~ 60mV/dec (~ 63mV/dec) for n(p)-type operation in the same physical device. Moreover, the shown devices behave as p-type for a polarization bias (polarity gate voltage, Vpg) of 0V, and n-type for a Vpg = 1V, confirming their compatibility with multi-level static logic circuit design. At logic gate level, two- and four-transistor logic gates are fabricated and tested. In particular, the first fully functional, two-transistor XOR logic gate is demonstrated through electrical characterization, confirming that polarity control can enable more compact logic gate design with respect to conventional CMOS. Furthermore, we show for the first time fabricated four- transistors logic gates that can be reconfigured as NAND or XOR only depending on their external connectivity. In this case, logic gates with full swing output range are experimentally demonstrated. Finally, single device and mixed-mode TCAD simulation results show that lower Vth and more optimized polarization ranges can be expected in scaled devices implementing strain or high-k technologies. At circuit and system level, a full semi-custom logic circuit design tool flow was defined and configured. Using this flow, novel logic libraries based on standard cells or regular gate fabrics were compared with standard CMOS. In this respect, results were shown in comparison to CMOS, including a 40% normalized area-delay product reduction for the analyzed standard cell libraries, and improvements of over 2× in terms of normalized delay for regular Controlled Polarity (CP)-based cells in the context of Structured ASICs. These results, in turn, confirm the interest in further developing and optimizing CP devices, as promising candidates for future digital circuit technology

Regular Fabric Design with Ambipolar CNTFETs for FPGA and Structured ASIC Applications

In this paper, we propose for the first time the application of ambipolar CNTFETs with in-field controllable polarities to design regular fabrics with static logic. We exploit the high expressive power provided by complementary static logic built with ambipolar CNTFETs to design compact and efficient configurable gates. After evaluating a polarity-aware logic design for the configurable gates, we selected a number of gates with an And-Or-Inverter structure and produced a first comparison with existent medium-grained logic blocks, like the Actel ACT1 and 4-input LUTs [1]. Preliminary evaluation of our gates indicates improvements of around 47% over the ACT1 and of about 18× with respect to 4-input LUTs in terms of area×normalized delay

Top-Down Fabrication of Gate-All-Around Vertically-Stacked Silicon Nanowire FETs with Controllable Polarity

Asthe currentMOSFET scaling trend is facing strong limitations, technologies exploiting novel degrees of freedom at physical and architecture level are promising candidates to enable the continuation of Moore's predictions. In this paper, we report on the fabrication of novel ambipolar Silicon nanowire (SiNW) Schottky-barrier (SB) FET transistors featuring two independent gate-all-around electrodes and vertically stacked SiNW channels. A top-down approach was employed for the nanowire fabrication, using an e-beam lithography defined design pattern. In these transistors, one gate electrode enables the dynamic configuration of the device polarity (n- or p-type) by electrostatic doping of the channel in proximity of the source and drain SBs. The other gate electrode, acting on the center region of the channel switches ON or OFF the device. Measurement results on silicon show I-on/I-off > 10(6) and subthreshold slopes approaching the thermal limit, SS approximate to 64 mV/dec (70 mV/dec) for p(n)-type operation in the same physical device. Finally, we show that the XOR logic operation is embedded in the device characteristic, and we demonstrate for the first time a fully functional two-transistor XOR gate

Process/Design Co-optimization of Regular Logic Tiles for Double-Gate Silicon Nanowire Transistors

Ambipolar transistors with on-line configurability to n-type and p-type polarity are desirable for future integrated circuits. Regular logic tiles have been recognized as an efficient layout fabric for ambipolar devices. In this work, we present a process/design co-optimization approach for designing logic tiles for double-gate silicon nanowire field effect transistors (DG- SiNWFET) technology. A compact Verilog-A model of the device is extracted from TCAD simulations. Cell libraries with different tile configurations are mapped to study the performance of DG-SiNWFET technology at various technology nodes. With an optimal tile size comprising of 6 vertically-stacked nanowires, we observe 1.6x improvement in area, 2x decrease in the leakage power and 1.8x improvement in delay when compared to Si- CMOS

Design Automation and Application for Emerging Reconfigurable Nanotechnologies

In the last few decades, two major phenomena have revolutionized the electronic industry – the ever-increasing dependence on electronic circuits and the Complementary Metal Oxide Semiconductor (CMOS) downscaling. These two phenomena have been complementing each other in a way that while electronics, in general, have demanded more computations per functional unit, CMOS downscaling has aptly supported such needs. However, while the computational demand is still rising exponentially, CMOS downscaling is reaching its physical limits. Hence, the need to explore viable emerging nanotechnologies is more imperative than ever. This thesis focuses on streamlining the existing design automation techniques for a class of emerging reconfigurable nanotechnologies. Transistors based on this technology exhibit duality in conduction, i.e. they can be configured dynamically either as a p-type or an n-type device on the application of an external bias. Owing to this dynamic reconfiguration, these transistors are also referred to as Reconfigurable Field-Effect Transistors (RFETs). Exploring and developing new technologies just like CMOS, require tackling two main challenges – first, design automation flow has to be modified to enable tailor- made circuit designs. Second, possible application opportunities should be explored where such technologies can outsmart the existing CMOS technologies. This thesis targets the above two objectives for emerging reconfigurable nanotechnologies by proposing approaches for enabling an Electronic Design Automation (EDA) flow for circuits based on RFETs and exploring hardware security as an application that exploits the transistor-level dynamic reconfiguration offered by this technology. This thesis explains the bottom-up approach adopted to propose a logic synthesis flow by identifying new logic gates and circuit design paradigms that can particularly exploit the dynamic reconfiguration offered by these novel nanotechnologies. This led to the subsequent need of finding natural Boolean logic abstraction for emerging reconfigurable nanotechnologies as it is shown that the existing abstraction of negative unate logic for CMOS technologies is sub-optimal for RFETs-based circuits. In this direction, it has been shown that duality in Boolean logic is a natural abstraction for this technology and can truly represent the duality in conduction offered by individual transistors. Finding this abstraction paved the way for defining suitable primitives and proposing various algorithms for logic synthesis and technology mapping. The following step is to explore compatible physical synthesis flow for emerging reconfigurable nanotechnologies. Using silicon nanowire-based RFETs, .lef and .lib files have been provided which can provide an end-to-end flow to generate .GDSII file for circuits exclusively based on RFETs. Additionally, new approaches have been explored to improve placement and routing for circuits based on reconfigurable nanotechnologies. It has been demonstrated how these approaches led to superior results as compared to the native flow meant for CMOS. Lastly, the unique property of transistor-level reconfiguration offered by RFETs is utilized to implement efficient Intellectual Property (IP) protection schemes against adversarial attacks. The ability to control the conduction of individual transistors can be argued as one of the impactful features of this technology and suitably fits into the paradigm of security measures. Prior security schemes based on CMOS technology often come with large overheads in terms of area, power, and delay. In contrast, RFETs-based hardware security measures such as logic locking, split manufacturing, etc. proposed in this thesis, demonstrate affordable security solutions with low overheads. Overall, this thesis lays a strong foundation for the two main objectives – design automation, and hardware security as an application, to push emerging reconfigurable nanotechnologies for commercial integration. Additionally, contributions done in this thesis are made available under open-source licenses so as to foster new research directions and collaborations.:Abstract List of Figures List of Tables 1 Introduction 1.1 What are emerging reconfigurable nanotechnologies? 1.2 Why does this technology look so promising? 1.3 Electronics Design Automation 1.4 The game of see-saw: key challenges vs benefits for emerging reconfigurable nanotechnologies 1.4.1 Abstracting ambipolarity in logic gate designs 1.4.2 Enabling electronic design automation for RFETs 1.4.3 Enhanced functionality: a suitable fit for hardware security applications 1.5 Research questions 1.6 Entire RFET-centric EDA Flow 1.7 Key Contributions and Thesis Organization 2 Preliminaries 2.1 Reconfigurable Nanotechnology 2.1.1 1D devices 2.1.2 2D devices 2.1.3 Factors favoring circuit-flexibility 2.2 Feasibility aspects of RFET technology 2.3 Logic Synthesis Preliminaries 2.3.1 Circuit Model 2.3.2 Boolean Algebra 2.3.3 Monotone Function and the property of Unateness 2.3.4 Logic Representations 3 Exploring Circuit Design Topologies for RFETs 3.1 Contributions 3.2 Organization 3.3 Related Works 3.4 Exploring design topologies for combinational circuits: functionality-enhanced logic gates 3.4.1 List of Combinational Functionality-Enhanced Logic Gates based on RFETs 3.4.2 Estimation of gate delay using the logical effort theory 3.5 Invariable design of Inverters 3.6 Sequential Circuits 3.6.1 Dual edge-triggered TSPC-based D-flip flop 3.6.2 Exploiting RFET’s ambipolarity for metastability 3.7 Evaluations 3.7.1 Evaluation of combinational logic gates 3.7.2 Novel design of 1-bit ALU 3.7.3 Comparison of the sequential circuit with an equivalent CMOS-based design 3.8 Concluding remarks 4 Standard Cells and Technology Mapping 4.1 Contributions 4.2 Organization 4.3 Related Work 4.4 Standard cells based on RFETs 4.4.1 Interchangeable Pull-Up and Pull-Down Networks 4.4.2 Reconfigurable Truth-Table 4.5 Distilling standard cells 4.6 HOF-based Technology Mapping Flow for RFETs-based circuits 4.6.1 Area adjustments through inverter sharings 4.6.2 Technology Mapping Flow 4.6.3 Realizing Parameters For The Generic Library 4.6.4 Defining RFETs-based Genlib for HOF-based mapping 4.7 Experiments 4.7.1 Experiment 1: Distilling standard-cells from a benchmark suite 4.7.2 Experiment 2A: HOF-based mapping . 4.7.3 Experiment 2B: Using the distilled standard-cells during mapping 4.8 Concluding Remarks 5 Logic Synthesis with XOR-Majority Graphs 5.1 Contributions 5.2 Organization 5.3 Motivation 5.4 Background and Preliminaries 5.4.1 Terminologies 5.4.2 Self-duality in NPN classes 5.4.3 Majority logic synthesis 5.4.4 Earlier work on XMG 5.4.5 Classification of Boolean functions 5.5 Preserving Self-Duality 5.5.1 During logic synthesis 5.5.2 During versatile technology mapping 5.6 Advanced Logic synthesis techniques 5.6.1 XMG resubstitution 5.6.2 Exact XMG rewriting 5.7 Logic representation-agnostic Mapping 5.7.1 Versatile Mapper 5.7.2 Support of supergates 5.8 Creating Self-dual Benchmarks 5.9 Experiments 5.9.1 XMG-based Flow 5.9.2 Experimental Setup 5.9.3 Synthetic self-dual benchmarks 5.9.4 Cryptographic benchmark suite 5.10 Concluding remarks and future research directions 6 Physical synthesis flow and liberty generation 6.1 Contributions 6.2 Organization 6.3 Background and Related Work 6.3.1 Related Works 6.3.2 Motivation 6.4 Silicon Nanowire Reconfigurable Transistors 6.5 Layouts for Logic Gates 6.5.1 Layouts for Static Functional Logic Gates 6.5.2 Layout for Reconfigurable Logic Gate 6.6 Table Model for Silicon Nanowire RFETs 6.7 Exploring Approaches for Physical Synthesis 6.7.1 Using the Standard Place & Route Flow 6.7.2 Open-source Flow 6.7.3 Concept of Driver Cells 6.7.4 Native Approach 6.7.5 Island-based Approach 6.7.6 Utilization Factor 6.7.7 Placement of the Island on the Chip 6.8 Experiments 6.8.1 Preliminary comparison with CMOS technology 6.8.2 Evaluating different physical synthesis approaches 6.9 Results and discussions 6.9.1 Parameters Which Affect The Area 6.9.2 Use of Germanium Nanowires Channels 6.10 Concluding Remarks 7 Polymporphic Primitives for Hardware Security 7.1 Contributions 7.2 Organization 7.3 The Shift To Explore Emerging Technologies For Security 7.4 Background 7.4.1 IP protection schemes 7.4.2 Preliminaries 7.5 Security Promises 7.5.1 RFETs for logic locking (transistor-level locking) 7.5.2 RFETs for split manufacturing 7.6 Security Vulnerabilities 7.6.1 Realization of short-circuit and open-circuit scenarios in an RFET-based inverter 7.6.2 Circuit evaluation on sub-circuits 7.6.3 Reliability concerns: A consequence of short-circuit scenario 7.6.4 Implication of the proposed security vulnerability 7.7 Analytical Evaluation 7.7.1 Investigating the security promises 7.7.2 Investigating the security vulnerabilities 7.8 Concluding remarks and future research directions 8 Conclusion 8.1 Concluding Remarks 8.2 Directions for Future Work Appendices A Distilling standard-cells B RFETs-based Genlib C Layout Extraction File (.lef) for Silicon Nanowire-based RFET D Liberty (.lib) file for Silicon Nanowire-based RFET

Double-gate single electron transistor : modeling, design & evaluation of logic architectures

Dans les années à venir, l'industrie de la microélectronique doit développer de nouvelles filières technologiques qui pourront devenir des successeurs ou des compléments de la technologie CMOS ultime. Parmi ces technologies émergentes relevant du domaine « Beyond CMOS », ce travail de recherche porte sur les transistors mono-électroniques (SET) dont le fonctionnement est basé sur la quantification de la charge électrique, le transport quantique et la répulsion Coulombienne. Les SETs doivent être étudiés à trois niveaux : composants, circuits et système. Ces nouveaux composants, utilisent à leur profit le phénomène dit de blocage de Coulomb permettant le transit des électrons de manière séquentielle, afin de contrôler très précisément le courant véhiculé. En effet, l'émergence du caractère granulaire de la charge électrique dans le transport des électrons par effet tunnel, permet d'envisager la réalisation de remplaçants potentiels des transistors ou de cellules mémoire à haute densité d'intégration, basse consommation. L'objectif principal de ce travail de thèse est d'explorer et d'évaluer le potentiel des transistors mono-électroniques double-grille métalliques (DG-SETs) pour les circuits logiques numériques. De ce fait, les travaux de recherches proposés sont divisés en trois parties : i) le développement des outils de simulation et tout particulièrement un modèle analytique de DG-SET ; ii) la conception de circuits numériques à base de DG-SETs dans une approche « cellules standards » ; et iii) l'exploration d'architectures logiques versatiles à base de DG-SETs en exploitant la double-grille du dispositif. Un modèle analytique pour les DG-SETs métalliques fonctionnant à température ambiante et au-delà est présenté. Ce modèle est basé sur des paramètres physiques et géométriques et implémenté en langage Verilog-A. Il est utilisable pour la conception de circuits analogiques ou numériques hybrides SET-CMOS. A l'aide de cet outil, nous avons conçu, simulé et évalué les performances de circuits logiques à base de DG-SETs afin de mettre en avant leur utilisation dans les futurs circuits ULSI. Une bibliothèque de cellules logiques, à base de DG-SETs, fonctionnant à haute température est présentée. Des résultats remarquables ont été atteints notamment en termes de consommation d'énergie. De plus, des architectures logiques telles que les blocs élémentaires pour le calcul (ALU, SRAM, etc.) ont été conçues entièrement à base de DG-SETs. La flexibilité offerte par la seconde grille du DG-SET a permis de concevoir une nouvelle famille de circuits logiques flexibles à base de portes de transmission. Une réduction du nombre de transistors par fonction et de consommation a été atteinte. Enfin, des analyses Monte-Carlo sont abordées afin de déterminer la robustesse des circuits logiques conçus à l'égard des dispersions technologiques

Modèle de placement pour les architectures nano-composantes

RÉSUMÉ Depuis la création de l’industrie des transistors CMOS, on assiste à un développement sans précédent de la miniaturisation. L’ITRS prévoit la limite des technologies basées sur le CMOS en 2020. Dans ce contexte, apparait de nouvelles disciplines, au coeur de la nanotechnologie, qui permettent de définir de nouvelles technologies permettant de compléter et/ou remplacer les transistors CMOS. Ces nouveaux transistors ouvrent la voie vers un nouveau paradigme d’architectures nano-composantes. Ces architectures ont trois principales caractéristiques : Les cellules logiques sont dynamiquement reconfigurables. Ce qui donne la possibilité d’exécuter en pipeline plusieurs fonctions différentes; La granularité est très fine. Ceci impose de considérer l’extensibilité des outils qui permettront l’exploitation de ces architectures; Elles ont une structure hiérarchique particulière : Dans les architectures nano-composantes les cellules logiques sont organisées en matrices avec des connexions statiques et les matrices en réseau de matrices avec des connexions dynamiques. Ces architectures peuvent alors être paramétrées en fonction de la taille des matrices (nombre de cellules) et de la taille du réseau (nombre de matrices). Pour prouver l’efficacité des architectures nano-composantes, il va falloir envisager la réalisation physique de systèmes complexes très performants basés sur ces technologies ainsi que l’utilisation des ces nano-systèmes. Comme l’accès au prototypage est très difficile et qu’il est souhaitable de réduire le temps de production des systèmes, la définition de nouveaux outils de conception assistée par ordinateur (CAO) s’avère nécessaire. Plusieurs outils CAO permettant la définition de systèmes basés sur les architectures conventionnelles existent. Cependant, ces outils ne prennent pas en compte les caractéristiques des architectures nano-composantes.----------ABSTRACT International Technology Roadmap for Semiconductors (ITRS) predicts that CMOS devices will reach their limits in 2022. Consequently, new devices and more efficient technologies are required. In this context, many efforts have been made to extend or replace conventional, CMOS devices. Some devices based on Field Effect Transistor (FET) nanotechnology such as the Dual Gate Carbon NanoTube FET (DG-CNTFET), the Nano Wire FET (NWFET) or the Grapheme FET (GFET) are promising candidates to replace CMOS devices. They lead to define new paradigm of non-conventional architectures (so called nano-component architecture). Nano-component architectures have three main characteristics: The logic cells are dynamically reconfigurable. This characteristic allows performing pipeline on several different functions; The granularity is ultra-fine (at most 2-bit operation). This characteristic implies to take into consideration scalability to exploit those architectures; The logic cells are organized with hierarchical structure and connectivity restrictions. In this structure, cells are organized in matrix and the matrices are organized in cluster. Exploiting those characteristics, nano–architecture are expected, compared to conventional architectures, to reduce the area and the cost and to improve the performance of a broad range of applications. In order to explore the potential of nano-architecture, new CAD tools are required. Those tools must take into account many parameters in nano-architecture definition: the number of cell in matrices, the number of matrices in cluster, the hierarchical structure, the connectivity restrictions, the fine granularity, the high reconfiguration, the pipeline and parallel execution… Although many CAD tools defined for conventional architecture have been proposed, they do not take into consideration nano-architecture parameters

Multiple-Independent-Gate Field-Effect Transistors for High Computational Density and Low Power Consumption

Transistors are the fundamental elements in Integrated Circuits (IC). The development of transistors significantly improves the circuit performance. Numerous technology innovations have been adopted to maintain the continuous scaling down of transistors. With all these innovations and efforts, the transistor size is approaching the natural limitations of materials in the near future. The circuits are expected to compute in a more efficient way. From this perspective, new device concepts are desirable to exploit additional functionality. On the other hand, with the continuously increased device density on the chips, reducing the power consumption has become a key concern in IC design. To overcome the limitations of Complementary Metal-Oxide-Semiconductor (CMOS) technology in computing efficiency and power reduction, this thesis introduces the multiple- independent-gate Field-Effect Transistors (FETs) with silicon nanowires and FinFET structures. The device not only has the capability of polarity control, but also provides dual-threshold- voltage and steep-subthreshold-slope operations for power reduction in circuit design. By independently modulating the Schottky junctions between metallic source/drain and semiconductor channel, the dual-threshold-voltage characteristics with controllable polarity are achieved in a single device. This property is demonstrated in both experiments and simulations. Thanks to the compact implementation of logic functions, circuit-level benchmarking shows promising performance with a configurable dual-threshold-voltage physical design, which is suitable for low-power applications. This thesis also experimentally demonstrates the steep-subthreshold-slope operation in the multiple-independent-gate FETs. Based on a positive feedback induced by weak impact ionization, the measured characteristics of the device achieve a steep subthreshold slope of 6 mV/dec over 5 decades of current. High Ion/Ioff ratio and low leakage current are also simultaneously obtained with a good reliability. Based on a physical analysis of the device operation, feasible improvements are suggested to further enhance the performance. A physics-based surface potential and drain current model is also derived for the polarity-controllable Silicon Nanowire FETs (SiNWFETs). By solving the carrier transport at Schottky junctions and in the channel, the core model captures the operation with independent gate control. It can serve as the core framework for developing a complete compact model by integrating advanced physical effects. To summarize, multiple-independent-gate SiNWFETs and FinFETs are extensively studied in terms of fabrication, modeling, and simulation. The proposed device concept expands the family of polarity-controllable FETs. In addition to the enhanced logic functionality, the polarity-controllable SiNWFETs and FinFETs with the dual-threshold-voltage and steep-subthreshold-slope operation can be promising candidates for future IC design towards low-power applications