Microfabrication and Applications of Opto-Microfluidic Sensors

A review of research activities on opto-microfluidic sensors carried out by the research groups in Canada is presented. After a brief introduction of this exciting research field, detailed discussion is focused on different techniques for the fabrication of opto-microfluidic sensors, and various applications of these devices for bioanalysis, chemical detection, and optical measurement. Our current research on femtosecond laser microfabrication of optofluidic devices is introduced and some experimental results are elaborated. The research on opto-microfluidics provides highly sensitive opto-microfluidic sensors for practical applications with significant advantages of portability, efficiency, sensitivity, versatility, and low cost

Monolithic optofluidic ring resonator lasers created by femtosecond laser nanofabrication

We designed, fabricated, and characterized a monolithically integrated optofluidic ring resonator laser that is mechanically, thermally, and chemically robust. The entire device, including the ring resonator channel and sample delivery microfluidics, was created in a block of fused-silica glass using a 3-dimensional femtosecond laser writing process. The gain medium, composed of Rhodamine 6G (R6G) dissolved in quinoline, was flowed through the ring resonator. Lasing was achieved at a pump threshold of approximately 15 μJ/mm2. Detailed analysis shows that the Q-factor of the optofluidic ring resonator is 3.3 × 104, which is limited by both solvent absorption and scattering loss. In particular, a Q-factor resulting from the scattering loss can be as high as 4.2 × 104, suggesting the feasibility of using a femtosecond laser to create high quality optical cavities

Femtosecond laser microfabricated devices for biophotonic applications

Femtosecond Laser DirectWriting has emerged as a key enabling technology for realising miniaturised biophotonic applications offering clear advantages over competing soft-lithography, ion-exchange and sol-gel based fabrication techniques. Waveguide writing and selective etching with three-dimensional design flexibility allows the development of innovative and unprecedented optofluidic architectures using this technology. The work embodied in this thesis focuses on utilising the advantages offered by direct laser writing in fabricating integrated miniaturised devices tailored for biological analysis. The first application presented customised the selective etching phenomenon in fused silica by tailoring the femtosecond pulse properties during the writing process. A device with an embedded network of microchannels with a significant difference in aspect-ratio was fabricated, which was subsequently applied in achieving the high-throughput label-free sorting of mammalian cells based on cytoskeletal deformability. Analysis on the device output cell population revealed minimal effect of the device on cell viability. The second application incorporated an embedded microchannel in fused silica with a monolithically integrated near-infrared optical waveguide. This optofluidic device implemented the thermally sensitive emission spectrum of semiconductor nanocrystals in undertaking remote thermometry of the localised microchannel environment illuminated by the waveguide. Aspects relating to changing the wavelength of illumination from the waveguide were analysed. The effect of incorporating carbon nanotubes as efficient heaters within the microchannel was investigated. Spatio-thermal imaging of the microchannel illuminated by the waveguide revealed the thermal effects to extend over distances appreciably longer than the waveguide cross-section. On the material side of direct laser writing, ultra-high selective etching is demonstrated in the well-known laser crystal Nd:YAG. This work presents Nd:YAG as a material with the potential to develop next-generation optofluidic devices

Femtosecond Laser Microfabrication of an Integrated Device for Optical Release and Sensing of Bioactive Compounds

Flash photolysis of caged compounds is one of the most powerful approaches to investigate the dynamic response of living cells. Monolithically integrated devices suitable for optical uncaging are in great demand since they greatly simplify the experiments and allow their automation. Here we demonstrate the fabrication of an integrated bio-photonic device for the optical release of caged compounds. Such a device is fabricated using femtosecond laser micromachining of a glass substrate. More in detail, femtosecond lasers are used both to cut the substrate in order to create a pit for cell growth and to inscribe optical waveguides for spatially selective uncaging of the compounds present in the culture medium. The operation of this monolithic bio-photonic device is tested using both free and caged fluorescent compounds to probe its capability of multipoint release and optical sensing. Application of this device to the study of neuronal network activity can be envisaged

Photonic microfluidic technologies for phytoplankton research

Phytoplankton is a crucial component for the correct functioning of different ecosystems, climate regulation and carbon reduction. Being at least a quarter of the biomass of the world’s vegetation, they produce approximately 50% of atmospheric O2 and remove nearly a third of the anthropogenic carbon released into the atmosphere through photosynthesis. In addition, they support directly or indirectly all the animals of the ocean and freshwater ecosystems, being the base of the food web. The importance of their measurement and identification has increased in the last years, becoming an essential consideration for marine management. The gold standard process used to identify and quantify phytoplankton is manual sample collection and microscopy-based identification, which is a tedious and time-consuming task and requires highly trained professionals. Microfluidic Lab-on-a-Chip technology represents a potential technical solution for environmental monitoring, for example, in situ quantifying toxic phytoplankton. Its main advantages are miniaturisation, portability, reduced reagent/sample consumption and cost reduction. In particular, photonic microfluidic chips that rely on optical sensing have emerged as powerful tools that can be used to identify and analyse phytoplankton with high specificity, sensitivity and throughput. In this review, we focus on recent advances in photonic microfluidic technologies for phytoplankton research. Different optical properties of phytoplankton, fabrication and sensing technologies will be reviewed. To conclude, current challenges and possible future directions will be discussed.This work was supported by Ministerio de Ciencia e Innovación and Agencia Estatal de Investigación (PID2019-107270RB-C21/AIE/10.13039/501100011033. J.F.A. received funding from Ministerio de Ciencia, Innovación y Universidades of Spain under Juan de la Cierva Incorporación grant

CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving

In this study, we investigate the effects of CO2 laser polishing on microscopic structures fabricated by femtosecond laser assisted carving (FLAC). FLAC is the peripheral laser irradiation of 2.5D structures suitable for low repetition rate lasers and is first used to define the microwell structures in fused silica followed by chemical etching. Subsequently, the bottom surface of patterned microwells is irradiated with a pulsed CO2 laser. The surfaces were characterized using an atomic force microscope (AFM) and scanning electron microscope (SEM) in terms of roughness and high quality optical imaging before and after the CO2 laser treatment. The AFM measurements show that the surface roughness improves more than threefold after CO2 laser polishing, which promises good channel quality for applications that require optical imaging. In order to demonstrate the ability of this method to produce low surface roughness systems, we have fabricated a microfluidic channel. The channel is filled with polystyrene bead-laden fluid and imaged with transmission mode microscopy. The high quality optical images prove CO2 laser processing as a practical method to reduce the surface roughness of microfluidic channels fabricated by femtosecond laser irradiation. We further compared the traditional and laser-based glass micromachining approaches, which includes FLAC followed by the CO2 polishing technique. � 2016 IOP Publishing Ltd

Development of a microfluidic device for gaseous formaldehyde sensing = Développement d\u27un dispositif microfluidique pour la détection de formaldéhyde à l\u27état gazeux

Formaldehyd (HCHO) ist eine chemische Verbindung, die bei der Herstellung einer großen Zahl von Haushaltsprodukten verwendet wird.Charakteristisch ist seine hohe Flüchtigkeit aufgrund einer niedrigen Siedetemperatur ($T = - 19\ ℃$). Daher ist HCOH fast überall als Luftschadstoff in Innenräumen vorhanden. Die Miniaturisierung analytischer Systeme zu Handheld-Gerät hat das Potenzial, nicht nur effizientere, sondern auch empfindlichere Instrumente für die Echtzeitüberwachung dieses gefährlichen Luftschadstoffs zu ermöglichen. Die vorliegende Doktorarbeit präsentiert die Entwicklung eines Mikrofluidik-Geräts für die Erfassung von HCHO basierend auf der Hantzsch-Reaktion.Hierbei wurde der Schwerpunkt auf die Komponente für Fluoreszenzdetektion gelegt. Es wurde eine umfangreiche Literaturrecherche durchgeführt, die es erlaubt, den Stand der Technik auf dem Gebiet der Miniaturisierung des Fluoreszenzsensors zusammenzufassen. Auf Grund dieser Studie wurde ein modulares Fluoreszenzdetektionskonzept vorgeschlagen, das um einen CMOS-Bildsensor (CIS) herum entwickelt wurde. Zwei dreischichtige Fluidikzellenkonfigurationen (Konfiguration 1: Quarz - SU-8 3050 - Quarz und Konfiguration 2: Silizium - SU-8 3050 - Quarz) wurden in Betracht gezogen und parallel unter den gleichen experimentellen Bedingungen getestet. Die Verfahren der Mikrofabrikation der fluidischen Zellen wurden detailliert beschrieben, einschließlich des Integrationsprozesses der Standardkomponenten und der experimentellen Verfahren. Der CIS-basierte Fluoreszenzdetektor bewies seine Leistungsfähigkeit, eine anfängliche HCHO-Konzentration von 10 µg/L vollständig in 3,5-Diacetyl-1,4-dihydrolutidin (DDL- derivatisiert) sowohl für die Quarz- als auch für die Silizium-Fluidikzellen zu detektieren. Beide Systemewiesenein Abfragevolumen von 3,5 µL auf. Ein offensichtlich höheres Signal-Rausch-Verhältnis (SNR) wurde für die Silizium-Fluidzelle ($\text{SNR}_{\text{silicon}} = 6.1$) im Vergleich zur Quarz-Fluidzelle ($\text{SNR}_{\text{quartz}} = 4.9$) beobachtet. Die Verstärkung der Signalintensität in der Silizium-Fluidzelle ist wahrscheinlich auf den Silizium-Absorptionskoeffizienten bei der Anregungswellenlänge zurückzuführen,$a\left( \lambda_{\text{abs}} = 420\ nm \right) = 5 \bullet 10^{4}\text{cm}^{- 1}$. Dieser Koeffizient ist ungefähr fünfmal höher als der Absorptionskoeffizient bei der Fluoreszenzemissionswellenlänge $a\left(\lambda_{\text{em}} = 515\ nm \right) = 9.25 \bullet 10^{3}\text{cm}^{- 1}$. HCHO wird aufgrund seiner relativ hohen Konstanten für das Henry-Gesetz sehr schnell in ein flüssiges Reagenz aufgenommen. Somit hängt die Auswahl des molekularen Einfangverfahrens (Schwallströmung, Ringströmung oder membranbasierte Strömungswechselwirkung) von derLeistungsfähigkeit des Fluoreszenzdetektors ab. Ein vorläufiges Konzept, das auf der Verwendung einer Gas-Flüssigkeitsmembran-basierten Wechselwirkung zum ständigen Abfangen des gasförmigen HCHO basiert, wurde eingeführt. Hierzu wurden kompatible Materialien und Herstellungsmethoden identifiziert. Darüber hinaus wurden CFD-Simulationen durchgeführt, um die Mikrokanallänge unter verschiedenen hydrodynamischen Bedingungen abzuschätzen, die für eine vollständige HCHO-Derivatisierung erforderlich sind. Eine Verbesserung und Vereinfachung auf der Grundlage von sehrnempfindlichen Fluoreszenzdetektoren mit niedrigen Detektionsgrenzen könnte zukünftig basierend z. B. auf Schwallströmung oder Ringströmung möglich sein