Molecular Beam Deposition (MBD) and Characterisation of High-k Material as Alternative Gate Oxides for MOS-Technology

Until now the forecast of the Semmiconductors Industry Association (SIA) concerning the dimension shrinking and the performance improvement of the electrical devices, reported in the International Technology Roadmap for Semiconductors (ITRS), matched very precisely the development of semiconductor process technology. But today the traditional scaling is indeed approaching the fundamental limits of the materials consituting the building blocks of the CMOS process. A big and unresolved challenge in the traditional process shrinking approach is the gate insulator. To be able to follow the dimension shrinking according to the ITRS, the SiO2 film thickness should become below 1nm within the next three years. This thickness corresponds to few atomic layers, which means that the direct tunnel leakage current through the insulator will increase. The high leakage current and the inadequate reliability for a SiO2 layer of less than 1.5nm thickness require a replacement for SiO2. To obtain high gate capacitance and inhibit tunneling, relative thick insulator of high dielectric constant (high-k) are needed to replace silicon dioxide (SiO2) as gate oxide. Therefore new materials have to be introduced into the basic CMOS structure to replace the existing ones to further extend device scaling and the reduction of the produciont costs. The present research thesis focuses on the proposition and investigation of three alternative gate oxide systems: aluminium-, praseodymium- and lanthanum oxide (Al2O3, Pr2O3 and La2O3 respectively). For each one of these systems, the growth process by Molecular Beam Deposition (MBD) has been optimised and electrical and physical characterisation has been performed to gain a better understanding of important factors associated with alternative gate dielectrics form both a theoretical and experimental point of view. Moreover, the optimisation of the interface between gate dielectric and the silicon substrate is taken into account during the development of the deposition processes. The first part of the thesis concerns the aluminium oxide. Aluminium oxide (Al2O3) is one of the first systems which have been studied to replace silicon dioxide as gate dielectric because of its large barrier height, dielectric constant twice that of SiO2, high stability and robustness. The basic properties of Al2O3 films grown on silicon substrate are well understood and for this reason alumina can be used as reference to investigate on new materials for alternative gate oxide. Beyond the aluminium oxide, lanthanide oxides have been considered as long term solution to the high-k question. In particular preseodymium oxide (Pr2O3) and lanthanum oxide (La2O3) have attracted the attention because of their high dielectric constant (20-30) and thermal stability on silicon substrate until 1000K. The properties of thin lanthanide oxide films as dielectric system for microelectronic applications are not yet completely known ind intensive research is running to find out if this dielectric will cover all the requirements needed for the new gate oxide material. In particular the major drawback of lanthanide oxide is given by its high sensibility to humidity, which leads to degradation of the dielectric film. This thesis will try to give an answer to the open questions on the investigated materials and will show the direction for future investigations

Modeling and Simulation of Subthreshold Characteristics of Short-Channel Fully-Depleted Recessed-Source/Drain SOI MOSFETs

Non-conventional metal-oxide-semiconductor (MOS) devices have attracted researchers‟ attention for future ultra-large-scale-integration (ULSI) applications since the channel length of conventional MOS devices approached the physical limit. Among the non-conventional CMOS devices which are currently being pursued for the future ULSI, the fully-depleted (FD) SOI MOSFET is a serious contender as the SOI MOSFETs possess some unique features such as enhanced short-channel effects immunity, low substrate leakage current, and compatibility with the planar CMOS technology. However, due to the ultra-thin source and drain regions, FD SOI MOSFETs possess large series resistance which leads to the poor current drive capability of the device despite having excellent short-channel characteristics. To overcome this large series resistance problem, the source/drain area may be increased by extending S/D either upward or downward. Hence, elevated-source/drain (E-S/D) and recessed-source/drain (Re-S/D) are the two structures which can be used to minimize the series resistance problem. Due to the undesirable issues such as parasitic capacitance, current crowding effects, etc. with E-S/D structure, the Re-S/D structure is a better choice. The FD Re-S/D SOI MOSFET may be an attractive option for sub-45nm regime because of its low parasitic capacitances, reduced series resistance, high drive current, very high switching speed and compatibility with the planar CMOS technology. The present dissertation is to deal with the theoretical modeling and computer-based simulation of the FD SOI MOSFETs in general, and recessed source/drain (Re-S/D) ultra-thin-body (UTB) SOI MOSFETs in particular. The current drive capability of Re-S/D UTB SOI MOSFETs can be further improved by adopting the dual-metal-gate (DMG) structure in place of the conventional single-metal-gate-structure. However, it will be interesting to see how the presence of two metals as gate contact changes the subthreshold characteristics of the device. Hence, the effects of adopting DMG structure on the threshold voltage, subthreshold swing and leakage current of Re-S/D UTB SOI MOSFETs have been studied in this dissertation. Further, high-k dielectric materials are used in ultra-scaled MOS devices in order to cut down the quantum mechanical tunneling of carriers. However, a physically thick gate dielectric causes fringing field induced performance degradation. Therefore, the impact of high-k dielectric materials on subthreshold characteristics of Re-S/D SOI MOSFETs needs to be investigated. In this dissertation, various subthreshold characteristics of the device with high-k gate dielectric and metal gate electrode have been investigated in detail. Moreover, considering the variability problem of threshold voltage in ultra-scaled devices, the presence of a back-gate bias voltage may be useful for ultimate tuning of the threshold voltage and other characteristics. Hence, the impact of back-gate bias on the important subthreshold characteristics such as threshold voltage, subthreshold swing and leakage currents of Re-S/D UTB SOI MOSFETs has been thoroughly analyzed in this dissertation. The validity of the analytical models are verified by comparing model results with the numerical simulation results obtained from ATLAS™, a device simulator from SILVACO Inc

Advanced gate stacks for nano-scale CMOS technology

Ph.DDOCTOR OF PHILOSOPH

Predicting power scalability in a reconfigurable platform

This thesis focuses on the evolution of digital hardware systems. A reconfigurable platform is proposed and analysed based on thin-body, fully-depleted silicon-on-insulator Schottky-barrier transistors with metal gates and silicide source/drain (TBFDSBSOI). These offer the potential for simplified processing that will allow them to reach ultimate nanoscale gate dimensions. Technology CAD was used to show that the threshold voltage in TBFDSBSOI devices will be controllable by gate potentials that scale down with the channel dimensions while remaining within appropriate gate reliability limits. SPICE simulations determined that the magnitude of the threshold shift predicted by TCAD software would be sufficient to control the logic configuration of a simple, regular array of these TBFDSBSOI transistors as well as to constrain its overall subthreshold power growth. Using these devices, a reconfigurable platform is proposed based on a regular 6-input, 6-output NOR LUT block in which the logic and configuration functions of the array are mapped onto separate gates of the double-gate device. A new analytic model of the relationship between power (P), area (A) and performance (T) has been developed based on a simple VLSI complexity metric of the form ATσ = constant. As σ defines the performance “return” gained as a result of an increase in area, it also represents a bound on the architectural options available in power-scalable digital systems. This analytic model was used to determine that simple computing functions mapped to the reconfigurable platform will exhibit continuous power-area-performance scaling behavior. A number of simple arithmetic circuits were mapped to the array and their delay and subthreshold leakage analysed over a representative range of supply and threshold voltages, thus determining a worse-case range for the device/circuit-level parameters of the model. Finally, an architectural simulation was built in VHDL-AMS. The frequency scaling described by σ, combined with the device/circuit-level parameters predicts the overall power and performance scaling of parallel architectures mapped to the array

Fault and Defect Tolerant Computer Architectures: Reliable Computing With Unreliable Devices

This research addresses design of a reliable computer from unreliable device technologies. A system architecture is developed for a fault and defect tolerant (FDT) computer. Trade-offs between different techniques are studied and yield and hardware cost models are developed. Fault and defect tolerant designs are created for the processor and the cache memory. Simulation results for the content-addressable memory (CAM)-based cache show 90% yield with device failure probabilities of 3 x 10(-6), three orders of magnitude better than non fault tolerant caches of the same size. The entire processor achieves 70% yield with device failure probabilities exceeding 10(-6). The required hardware redundancy is approximately 15 times that of a non-fault tolerant design. While larger than current FT designs, this architecture allows the use of devices much more likely to fail than silicon CMOS. As part of model development, an improved model is derived for NAND Multiplexing. The model is the first accurate model for small and medium amounts of redundancy. Previous models are extended to account for dependence between the inputs and produce more accurate results

Low-frequency noise in downscaled silicon transistors: Trends, theory and practice

By the continuing downscaling of sub-micron transistors in the range of few to one deca-nanometers, we focus on the increasing relative level of the low-frequency noise in these devices. Large amount of published data and models are reviewed and summarized, in order to capture the state-of-the-art, and to observe that the 1/area scaling of low-frequency noise holds even for carbon nanotube devices, but the noise becomes too large in order to have fully deterministic devices with area less than 10nm×10nm. The low-frequency noise models are discussed from the point of view that the noise can be both intrinsic and coupled to the charge transport in the devices, which provided a coherent picture, and more interestingly, showed that the models converge each to other, despite the many issues that one can find for the physical origin of each model. Several derivations are made to explain crossovers in noise spectra, variable random telegraph amplitudes, duality between energy and distance of charge traps, behaviors and trends for figures of merit by device downscaling, practical constraints for micropower amplifiers and dependence of phase noise on the harmonics in the oscillation signal, uncertainty and techniques of averaging by noise characterization. We have also shown how the unavoidable statistical variations by fabrication is embedded in the devices as a spatial “frozen noise”, which also follows 1/area scaling law and limits the production yield, from one side, and from other side, the “frozen noise” contributes generically to temporal 1/f noise by randomly probing the embedded variations during device operation, owing to the purely statistical accumulation of variance that follows from cause-consequence principle, and irrespectively of the actual physical process. The accumulation of variance is known as statistics of “innovation variance”, which explains the nearly log-normal distributions in the values for low-frequency noise parameters gathered from different devices, bias and other conditions, thus, the origin of geometric averaging in low-frequency noise characterizations. At present, the many models generally coincide each with other, and what makes the difference, are the values, which, however, scatter prominently in nanodevices. Perhaps, one should make some changes in the approach to the low-frequency noise in electronic devices, to emphasize the “statistics behind the numbers”, because the general physical assumptions in each model always fail at some point by the device downscaling, but irrespectively of that, the statistics works, since the low-frequency noise scales consistently with the 1/area law

Etude des transistors MOSFET à barrière Schottky, à canal Silicium et Germanium sur couches minces

Until the early 2000’s Dennard’s scaling rules at the transistor level have enabled to achieve a performance gain while still preserving the basic structure of the MOSFET building block from one generation to the next. However, this conservative approach has already reached its limits as shown by the introduction of channel stressors for the sub-130 nm technological nodes, and later high-k/metal gate stacks for the sub-65 nm nodes. Despite the introduction of high-k gate dielectrics, constraints in terms of gate leakage and reliability have been delaying the diminution of the equivalent oxide thickness (EOT). Concurrently, lowering the supply voltage (VDD) has become a critical necessity to reduce both the active and passive power density in integrated circuits. Hence the challenge: how to keep decreasing both gate length and supply voltage faster than the EOT without losing in terms of ON-state/OFF-state performance trade-off? Several solutions can be proposed aiming at solving this conundrum for nanoscale transistors, with architectures in rupture with the plain old Silicon-based MOSFET with doped Source and Drain invented in 1960. One approach consists in achieving an ION increase while keeping IOFF (and Vth) mostly unchanged. Specifically, two options are considered in detail in this manuscript through a review of their respective historical motivations, state-of-the-art results as well as remaining fundamental (and technological) challenges: i/ the reduction of the extrinsic parasitic resistance through the implementation of metallic Source and Drain (Schottky Barrier FET architecture); ii/ the reduction of the intrinsic channel resistance through the implementation of Germanium-based mobility boosters (Ge CMOS, compressively-strained SiGe channels, n-sSi/p-sSiGe Dual Channel co-integration). In particular, we study the case of thin films on insulator (SOI, SiGeOI, GeOI substrates), a choice justified by: the preservation of the electrostatic integrity for the targeted sub-22nm nodes; the limitation of ambipolar leakage in SBFETs; the limitation of junction leakage in (low-bandgap) Ge-based FETs. Finally, we show why, and under which conditions the association of the SBFET architecture with a Ge-based channel could be potentially advantageous with respect to conventional Si CMOS.Jusqu’au début des années 2000, les règles de scaling de Dennard ont permis de réaliser des gains en performance tout en conservant la structure de la brique de base transistor d’une génération technologique à la suivante. Cependant, cette approche conservatrice a d’ores et déjà atteint ses limites, comme en témoigne l’introduction de la contrainte mécanique pour les générations sub-130nm, et les empilements de grille métal/high-k pour les nœuds sub-65nm. Malgré l’introduction de diélectriques à forte permittivité, des limites en termes de courants de fuite de grille et de fiabilité ont ralenti la diminution de l’épaisseur équivalente d’oxyde (EOT). De façon concommitante, la diminution de la tension d’alimentation (VDD) est devenue une priorité afin de réduire la densité de puissance dissipée dans les circuits intégrés. D’où le défi actuel: comment continuer de réduire à la fois la longueur de grille et la tension d’alimentation plus rapidement que l’EOT sans pour autant dégrader le rapport de performances aux états passant et bloqué (ON et OFF) ? Diverses solutions peuvent être proposées, passant par des architectures s’éloignant du MOSFET conventionnel à canal Si avec source et drain dopés tel que défini en 1960. Une approche consiste en réaliser une augmentation du courant passant (ION) tout en laissant le courant à l’état bloqué (IOFF) et la tension de seuil (Vth) inchangés. Concrètement, deux options sont considérées en détail dans ce manuscrit à travers une revue de leurs motivations historiques respectives, les résultats de l’état de l’art ainsi que les obstacles (fondamentaux et technologiques) à leur mise en œuvre : i/ la réduction de la résistance parasite extrinsèque par l’introduction de source et drain métalliques (architecture transistor à barrière Schottky) ; ii/ la réduction de la résistance de canal intrinsèque par l’introduction de matériaux à haute mobilité à base de Germanium (CMOS Ge, canaux SiGe en contrainte compressive, co-intégration Dual Channel n-sSi/p-sSiGe). En particulier, nous étudions le cas de couches minces sur isolant (substrats SOI, SiGeOI, GeOI), un choix motivé par: la préservation de l’intégrité électrostatique pour les nœuds technologiques sub-22nm; la limitation du courant de fuite ambipolaire dans les SBFETs; la limitation du courant de fuites de jonctions dans les MOSFETs à base de Ge (qui est un matériau à faible bandgap). Enfin, nous montrons pourquoi et dans quelles conditions l’association d’une architecture SBFET et d’un canal à base de Germanium peut être avantageuse vis-à-vis du CMOS Silicium conventionnel