Parameter Identification of Pressure Sensors by Static and Dynamic Measurements

Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static measurements - an applied pressure results in a membrane deformation measured interferometrically and the corresponding output voltage. On the other hand optical measurements of the modal responses of the sensor membranes are performed. This information is used in an inverse identification algorithm to identify geometrical and material parameters based on a FE model. The number of parameters to be identified is thereby generally limited only by the number of measurable modal frequencies. A quantitative evaluation of the identification results permits furthermore the classification of processing errors like etching errors. Algorithms and identification results for membrane thickness, intrinsic stress and output voltage will be discussed in this contribution on the basis of the parameter identification of relative pressure sensors.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Material selection for Micro-Electro-Mechanical-Systems (MEMS) using Ashby's approach

A key aspect in design optimization of a product or a system is the selection of materials that best meet the design needs, ensuring maximum performance and minimum cost. Ashby's approach, originally introduced for macro-systems and products, has been very successfully employed for Micro-Electro-Mechanical-Systems (MEMS)/micromachined sensors, actuators and devices. This paper presents a comprehensive review and critical analysis of MEMS material selection studies using Ashby's approach reported in the literature during the last two decades. Performance and Material Indices derived for various microsystems and MEMS devices have been summarized. Moreover, all MEMS materials reported in the literature and the most suitable materials proposed for a variety of MEMS systems and devices have also been consolidated. A material selection case study utilizing micro-scale properties of 51 MEMS compatible materials has been presented to demonstrate that the use of different materials' bulk properties is not the best choice for MEMS materials selection. This paper will serve as a reference guide and useful resource for researchers and engineers engaged in the design and fabrication of various microsystems and MEMS sensors, actuators and devices

Modular integration and on-chip sensing approaches for tunable fluid control polymer microdevices

228 p.Doktore tesi honetan mikroemariak kontrolatzeko elementuak diseinatu eta garatuko dira, mikrobalbula eta mikrosentsore bat zehazki. Ondoren, gailu horiek batera integratuko dira likido emari kontrolatzaile bat sortzeko asmotan. Helburu nagusia gailuen fabrikazio arkitektura modular bat frogatzea da, non Lab-on-a-Chip prototipoak garatzeko beharrezko fase guztiak harmonizatuz, Cyclic-Olefin-Polymer termoplastikozko mikrogailu merkeak pausu gutxi batzuetan garatuko diren, hauen kalitate industriala bermatuz. Ildo horretan, mikrogailuak prototipotik produkturako trantsizio azkar, erraz, errentagarri eta arriskurik gabeen bidez lortu daitezkeenetz frogatuko da

Low-Cost, Water Pressure Sensing and Leakage Detection Using Micromachined Membranes

This work presents the only known SOI membrane approach, using Microelectromechanical systems (MEMS) fabrication techniques, to address viable water leakage sensing requirements at low cost. In this research, membrane thickness and diameter are used in concert to target specific stiffness values that will result in targeted operational pressure ranges of approximately 0-120 psi. A MEMS membrane device constructed using silicon-on-insulator (SOI) wafers, has been tested and packaged for the water environment. MEMS membrane arrays will be used to determine operational pressure range by bursting.Two applications of these SOI membranes in aqueous environment are investigated in this research. The first one is water pressure sensing. We demonstrate that robustness of these membranes depends on their thickness and surface area. Their mechanical strength and robustness against applied pressure are determined using Finite Element Analysis (FEA). The mechanical response of a membrane pressure sensor is determined by physical factors such as surface area, thickness and material properties. The second application of this device is water leak detection. In devices such as pressure sensors, microvalves and micropumps, membranes can be subjected to immense pressure that causes them to fail or burst. However, this event can be used to indicate the precise pressure level that malfunction occurred. These membrane arrays can be used to determine pressure values by bursting. We discuss the background information related to the proposed device: MEMS fabrication processes (especially related to proposed device), common MEMS materials, general micromachining process steps, packaging and wire bonding techniques, and common micromachined pressure sensors. Besides, FEA on SOLIDWORKS simulation module is utilized to understand membrane sensitivity and robustness. In addition, we focus on theories supporting the simulated results. We also discuss the device fabrication process, which consists of the tested device’s fabrication process, Deep Reactive Ion Etching (DRIE) for membrane formation, two different realizable fabrication technique (depending on sensing material) of sensing element, metal contact pads, and connectors deposition. In addition, a brief description and operation procedures of the device fabrication tools are provided as well. We also include detailed electrical and mechanical testing procedures and the collected data

Integrated sensors for process monitoring and health monitoring in microsystems

This thesis presents the development of integrated sensors for health monitoring in Microsystems, which is an emerging method for early diagnostics of status or “health” of electronic systems and devices under operation based on embedded tests. Thin film meander temperature sensors have been designed with a minimum footprint of 240 m × 250 m. A microsensor array has been used successfully for accurate temperature monitoring of laser assisted polymer bonding for MEMS packaging. Using a frame-shaped beam, the temperature at centre of bottom substrate was obtained to be ~50 ºC lower than that obtained using a top-hat beam. This is highly beneficial for packaging of temperature sensitive MEMS devices. Polymer based surface acoustic wave humidity sensors were designed and successfully fabricated on 128° cut lithium niobate substrates. Based on reflection signals, a sensitivity of 0.26 dB/RH% was achieved between 8.6 %RH and 90.6 %RH. Fabricated piezoresistive pressure sensors have also been hybrid integrated and electrically contacted using a wire bonding method. Integrated sensors based on both LiNbO3 and ZnO/Si substrates are proposed. Integrated sensors were successfully fabricated on a LiNbO3 substrate with a footprint of 13 mm × 12 mm, having multi monitoring functions for simultaneous temperature, measurement of humidity and pressure in the health monitoring applications

Development of a Wireless MEMS Multifunction Sensor System and Field Demonstration of Embedded Sensors for Monitoring Concrete Pavements, Volume II

This two-pronged study evaluated the performance of commercial off-the-shelf (COTS) micro-electromechanical sensors and systems (MEMS) embedded in concrete pavement (Final Report Volume I) and developed a wireless MEMS multifunctional sensor system for health monitoring of pavement systems (Final Report Volume II). The Volume I report focused on the evaluation of COTS MEMS sensors embedded in concrete pavement sections. The Volume II report covers the set of MEMS sensors that were developed as single-sensing units for measuring moisture, temperature, strain, and pressure. These included the following sensors: (1) nanofiber-based moisture sensors, (2) graphene oxide (GO)–based moisture sensors, (3) flexible graphene strain sensors with liquid metal, (4) graphene strain and pressure sensors, (5) three-dimensional (3D) planar and helical structured graphene strain sensors, (6) temperature sensors, and (7) water content sensors. In addition, the MEMS temperature sensors and the MEMS water content sensors were integrated into one sensing unit as a multifunctional sensor. A wireless signal transmission system was built for MEMS sensor signal readings. Characterization of the sensors was conducted and sensor responses were analyzed using different applications. The sensors developed were installed and tested inside concrete. The results demonstrated the capability to detect sensor response changes at the installed locations

Addressing the Smart Systems Design Challenge: The SMAC Platform

This article presents the concepts, the organization, and the preliminary application results of SMAC, a smart systems co-design platform. The SMAC platform, which has been developed as Integrated Project (IP) of the 7th ICT Call under the Objective 3.2 \u201cSmart components and Smart Systems integration\u201d addresses the challenges of the integration of heterogeneous and conflicting domains that emerge in the design of smart systems. SMAC includes methodologies and EDA tools enabling multi-disciplinary and multi-scale modelling and design, simulation of multidomain systems, subsystems and components at different levels of abstraction, system integration and exploration for optimization of functional and non-functional metrics. The article presents the preliminary results obtained by adopting the SMAC platform for the design of a limb tracking smart system

Novel miniaturised and highly versatile biomechatronic platforms for the characterisation of melanoma cancer cells

There has been an increasing demand to acquire highly sensitive devices that are able to detect and characterize cancer at a single cell level. Despite the moderate progress in this field, the majority of approaches failed to reach cell characterization with optimal sensitivity and specificity. Accordingly, in this study highly sensitive, miniaturized-biomechatronic platforms have been modeled, designed, optimized, microfabricated, and characterized, which can be used to detect and differentiate various stages of melanoma cancer cells. The melanoma cell has been chosen as a legitimate cancer model, where electrophysiological and analytical expression of cell-membrane potential have been derived, and cellular contractile force has been obtained through a correlation with micromechanical deflections of a miniaturized cantilever beam. The main objectives of this study are in fourfold: (1) to quantify cell-membrane potential, (2) correlate cellular biophysics to respective contractile force of a cell in association with various stages of the melanoma disease, (3) examine the morphology of each stage of melanoma, and (4) arrive at a relation that would interrelate stage of the disease, cellular contractile force, and cellular electrophysiology based on conducted in vitro experimental findings. Various well-characterized melanoma cancer cell lines, with varying degrees of genetic complexities have been utilized. In this study, two-miniaturized-versatile-biomechatronic platforms have been developed to extract the electrophysiology of cells, and cellular mechanics (mechanobiology). The former platform consists of a microfluidic module, and stimulating and recording array of electrodes patterned on a glass substrate, forming multi-electrode arrays (MEAs), whereas the latter system consists of a microcantilever-based biosensor with an embedded Wheatstone bridge, and a microfluidic module. Furthermore, in support of this work main objectives, dedicated microelectronics together with customized software have been attained to functionalize, and empower the two-biomechatronic platforms. The bio-mechatronic system performance has been tested throughout a sufficient number of in vitro experiments.Open Acces

Use of self-calibration data for multifunctional MEMS sensor prognostics

This paper proposes a solution to monitor the degradation of a multifunctional microelectromechanical systems (MEMS) sensor (MFS) and to recalibrate the sensor output accordingly. The solution is able to predict the remaining useful life based on the recalibration history. The MFS used is a dual pressure-humidity hybrid sensor where model data have been used to demonstrate the applicability and performance of the proposed method for diagnosis, self-correction, and prognosis