Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator

This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially microfabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon, beam and paddle. Prototype C uses moving NdFeB magnets in between two microfabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-Electro-Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other microfabricated silicon based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon based microfabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 5

Integrated waveguide and nanostructured sensor platform for surface-enhanced Raman spectroscopy

Limitations of current sensors include large dimensions, sometimes limited sensitivity and inherent single-parameter measurement capability. Surface-enhanced Raman spectroscopy can be utilized for environment and pharmaceutical applications with the intensity of the Raman scattering enhanced by a factor of 106. By fabricating and characterizing an integrated optical waveguide beneath a nanostructured precious metal coated surface a new surface-enhanced Raman spectroscopy sensing arrangement can be achieved. Nanostructured sensors can provide both multiparameter and high-resolution sensing. Using the slab waveguide core to interrogate the nanostructures at the base allows for the emission to reach discrete sensing areas effectively and should provide ideal parameters for maximum Raman interactions. Thin slab waveguide films of silicon oxynitride were etched and gold coated to create localized nanostructured sensing areas of various pitch, diameter, and shape. These were interrogated using a Ti:Sapphire laser tuned to 785-nm end coupled into the slab waveguide. The nanostructured sensors vertically projected a Raman signal, which was used to actively detect a thin layer of benzyl mercaptan attached to the sensors

First Fifty Years of Chemoresistive Gas Sensors

The first fifty years of chemoresistive sensors for gas detection are here reviewed, focusing on the main scientific and technological innovations that have occurred in the field over the course of these years. A look at advances made in fundamental and applied research and leading to the development of actual high performance chemoresistive devices is presented. The approaches devoted to the synthesis of novel semiconducting materials with unprecedented nanostructure and gas-sensing properties have been also presented. Perspectives on new technologies and future applications of chemoresistive gas sensors have also been highlighted

Three-Dimensional Metal-Oxide Nanohelix Arrays Fabricated by Oblique Angle Deposition: Fabrication, Properties, and Applications

Three-dimensional (3D) nanostructured thin films have attracted great attention due to their novel physical, optical, and chemical properties, providing tremendous possibilities for future multifunctional systems and for exploring new physical phenomena. Among various techniques to fabricate 3D nanostructures, oblique angle deposition (OAD) is a very promising method for producing arrays of a variety of 3D nanostructures with excellent controllability, reproducibility, low cost, and compatibility with modern micro-electronic processes. This article presents a comprehensive overview of the principle of OAD, and unique structural and optical properties of OAD-fabricated thin films including excellent crystallinity, accurate tunability of refractive indices, and strong light scattering effect which can be utilized to remarkably enhance performances of various systems such as antireflection coatings, optical filters, photoelectrodes for solar-energy-harvesting cells, and sensing layers for various sensors.1114Ysciescopu

Fully Integrated Biochip Platforms for Advanced Healthcare

Recent advances in microelectronics and biosensors are enabling developments of innovative biochips for advanced healthcare by providing fully integrated platforms for continuous monitoring of a large set of human disease biomarkers. Continuous monitoring of several human metabolites can be addressed by using fully integrated and minimally invasive devices located in the sub-cutis, typically in the peritoneal region. This extends the techniques of continuous monitoring of glucose currently being pursued with diabetic patients. However, several issues have to be considered in order to succeed in developing fully integrated and minimally invasive implantable devices. These innovative devices require a high-degree of integration, minimal invasive surgery, long-term biocompatibility, security and privacy in data transmission, high reliability, high reproducibility, high specificity, low detection limit and high sensitivity. Recent advances in the field have already proposed possible solutions for several of these issues. The aim of the present paper is to present a broad spectrum of recent results and to propose future directions of development in order to obtain fully implantable systems for the continuous monitoring of the human metabolism in advanced healthcare applications

Dye-Based Photonic Sensing Systems

[EN] We report on dye-based photonic sensing systems which are fabricated and packaged at wafer scale. For the first time luminescent organic nanocomposite thin-films deposited by plasma technology are integrated in photonic sensing systems as active sensing elements. The realized dye-based photonic sensors include an environmental NO2 sensor and a sunlight ultraviolet light (UV) A + B sensor. The luminescent signal from the nanocomposite thin-films responds to changes in the environment and is selectively filtered by a photonic structure consisting of a Fabry Perot cavity. The sensors are fabricated and packaged at wafer-scale, which makes the technology viable for volume manufacturing. Prototype photonic sensor systems have been tested in real-world scenarios.The authors thank the EU (Phodye Strep Project 033793 and ERC Starting Grant M&M's 277879), and the Spanish Ministry of Economy and Competitiveness (MAT-2010-21228) and Junta de Andalucia (P09-TEP-5283) for financial support.Aparicio, F.; Alcaire, M.; González-Elipe, A.; Barranco, A.; Holgado, M.; Casquel, R.; Sanza, F.... (2016). Dye-Based Photonic Sensing Systems. Sensors and Actuators B Chemical. 228:649-657. https://doi.org/10.1016/j.snb.2016.01.092S64965722