1,440 research outputs found
A VCO-based CMOS readout circuit for capacitive MEMS microphones
Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered 'always-on” applications increasingly requires a low power consumption. In this paper, we show a new readout circuit approach which is based on a mostly digital Sigma Delta (SigmaDelta) analog-to-digital converter (ADC). The operating principle of the readout circuit consists of coupling the MEMS sensor to an impedance converter that modulates the frequency of a stacked-ring oscillator—a new voltage-controlled oscillator (VCO) circuit featuring a good trade-off between phase noise and power consumption. The frequency coded signal is then sampled and converted into a noise-shaped digital sequence by a time-to-digital converter (TDC). A time-efficient design methodology has been used to optimize the sensitivity of the oscillator combined with the phase noise induced by 1/𝑓 and thermal noise. The circuit has been prototyped in a 130 nm CMOS process and directly bonded to a standard MEMS microphone. The proposed VCO-based analog-to-digital converter (VCO-ADC) has been characterized electrically and acoustically. The peak signal-to-noise and distortion ratio (SNDR) obtained from measurements is 77.9 dB-A and the dynamic range (DR) is 100 dB-A. The current consumption is 750 muA at 1.8 V and the effective area is 0.12 mm2. This new readout circuit may represent an enabling advance for low-cost digital MEMS microphones.This research was funded by project TEC2017-82653-R of CICYT, Spain
Doctor of Philosophy
dissertationSince the late 1950s, scientists have been working toward realizing implantable devices that would directly monitor or even control the human body's internal activities. Sophisticated microsystems are used to improve our understanding of internal biological processes in animals and humans. The diversity of biomedical research dictates that microsystems must be developed and customized specifically for each new application. For advanced long-term experiments, a custom designed system-on-chip (SoC) is usually necessary to meet desired specifications. Custom SoCs, however, are often prohibitively expensive, preventing many new ideas from being explored. In this work, we have identified a set of sensors that are frequently used in biomedical research and developed a single-chip integrated microsystem that offers the most commonly used sensor interfaces, high computational power, and which requires minimum external components to operate. Included peripherals can also drive chemical reactions by setting the appropriate voltages or currents across electrodes. The SoC is highly modular and well suited for prototyping in and ex vivo experimental devices. The system runs from a primary or secondary battery that can be recharged via two inductively coupled coils. The SoC includes a 16-bit microprocessor with 32 kB of on chip SRAM. The digital core consumes 350 μW at 10 MHz and is capable of running at frequencies up to 200 MHz. The integrated microsystem has been fabricated in a 65 nm CMOS technology and the silicon has been fully tested. Integrated peripherals include two sigma-delta analog-to-digital converters, two 10-bit digital-to-analog converters, and a sleep mode timer. The system also includes a wireless ultra-wideband (UWB) transmitter. The fullydigital transmitter implementation occupies 68 x 68 μm2 of silicon area, consumes 0.72 μW static power, and achieves an energy efficiency of 19 pJ/pulse at 200 MHz pulse repetition frequency. An investigation of the suitability of the UWB technology for neural recording systems is also presented. Experimental data capturing the UWB signal transmission through an animal head are presented and a statistical model for large-scale signal fading is developed
Digital CMOS ISFET architectures and algorithmic methods for point-of-care diagnostics
Over the past decade, the surge of infectious diseases outbreaks across the globe is redefining how healthcare is provided and delivered to patients, with a clear trend towards distributed diagnosis at the Point-of-Care (PoC). In this context, Ion-Sensitive Field Effect Transistors (ISFETs) fabricated on standard CMOS technology have emerged as a promising solution to achieve a precise, deliverable and inexpensive platform that could be deployed worldwide to provide a rapid diagnosis of infectious diseases. This thesis presents advancements for the future of ISFET-based PoC diagnostic platforms, proposing and implementing a set of hardware and software methodologies to overcome its main challenges and enhance its sensing capabilities.
The first part of this thesis focuses on novel hardware architectures that enable direct integration with computational capabilities while providing pixel programmability and adaptability required to overcome pressing challenges on ISFET-based PoC platforms. This section explores oscillator-based ISFET architectures, a set of sensing front-ends that encodes the chemical information on the duty cycle of a PWM signal. Two initial architectures are proposed and fabricated in AMS 0.35um, confirming multiple degrees of programmability and potential for multi-sensing. One of these architectures is optimised to create a dual-sensing pixel capable of sensing both temperature and chemical information on the same spatial point while modulating this information simultaneously on a single waveform. This dual-sensing capability, verified in silico using TSMC 0.18um process, is vital for DNA-based diagnosis where protocols such as LAMP or PCR require precise thermal control.
The COVID-19 pandemic highlighted the need for a deliverable diagnosis that perform nucleic acid amplification tests at the PoC, requiring minimal footprint by integrating sensing and computational capabilities. In response to this challenge, a paradigm shift is proposed, advocating for integrating all elements of the portable diagnostic platform under a single piece of silicon, realising a ``Diagnosis-on-a-Chip". This approach is enabled by a novel Digital ISFET Pixel that integrates both ADC and memory with sensing elements on each pixel, enhancing its parallelism. Furthermore, this architecture removes the need for external instrumentation or memories and facilitates its integration with computational capabilities on-chip, such as the proposed ARM Cortex M3 system.
These computational capabilities need to be complemented with software methods that enable sensing enhancement and new applications using ISFET arrays. The second part of this thesis is devoted to these methods. Leveraging the programmability capabilities available on oscillator-based architectures, various digital signal processing algorithms are implemented to overcome the most urgent ISFET non-idealities, such as trapped charge, drift and chemical noise. These methods enable fast trapped charge cancellation and enhanced dynamic range through real-time drift compensation, achieving over 36 hours of continuous monitoring without pixel saturation.
Furthermore, the recent development of data-driven models and software methods open a wide range of opportunities for ISFET sensing and beyond. In the last section of this thesis, two examples of these opportunities are explored: the optimisation of image compression algorithms on chemical images generated by an ultra-high frame-rate ISFET array; and a proposed paradigm shift on surface Electromyography (sEMG) signals, moving from data-harvesting to information-focused sensing. These examples represent an initial step forward on a journey towards a new generation of miniaturised, precise and efficient sensors for PoC diagnostics.Open Acces
High-Bandwidth Voltage-Controlled Oscillator based architectures for Analog-to-Digital Conversion
The purpose of this thesis is the proposal and implementation of data conversion
open-loop architectures based on voltage-controlled oscillators (VCOs) built with
ring oscillators (RO-based ADCs), suitable for highly digital designs, scalable to
the newest complementary metal-oxide-semiconductor (CMOS) nodes.
The scaling of the design technologies into the nanometer range imposes the
reduction of the supply voltage towards small and power-efficient architectures,
leading to lower voltage overhead of the transistors. Additionally, phenomena
like a lower intrinsic gain, inherent noise, and parasitic effects (mismatch between
devices and PVT variations) make the design of classic structures for ADCs more
challenging. In recent years, time-encoded A/D conversion has gained relevant
popularity due to the possibility of being implemented with mostly digital structures.
Within this trend, VCOs designed with ring oscillator based topologies
have emerged as promising candidates for the conception of new digitization
techniques.
RO-based data converters show excellent scalability and sensitivity, apart from
some other desirable properties, such as inherent quantization noise shaping and
implicit anti-aliasing filtering. However, their nonlinearity and the limited time
delay achievable in a simple NOT gate drastically limits the resolution of the converter,
especially if we focus on wide-band A/D conversion. This thesis proposes
new ways to alleviate these issues.
Firstly, circuit-based techniques to compensate for the nonlinearity of the ring
oscillator are proposed and compared to equivalent state-of-the-art solutions.
The proposals are designed and simulated in a 65-nm CMOS node for open-loop
RO-based ADC architectures. One of the techniques is also validated experimentally
through a prototype. Secondly, new ways to artificially increase the effective
oscillation frequency are introduced and validated by simulations. Finally, new
approaches to shape the quantization noise and filter the output spectrum of a
RO-based ADC are proposed theoretically. In particular, a quadrature RO-based
band-pass ADC and a power-efficient Nyquist A/D converter are proposed and
validated by simulations.
All the techniques proposed in this work are especially devoted for highbandwidth
applications, such as Internet-of-Things (IoT) nodes or maximally
digital radio receivers. Nevertheless, their field of application is not restricted to
them, and could be extended to others like biomedical instrumentation or sensing.El propósito de esta tesis doctoral es la propuesta y la implementación de arquitecturas
de conversión de datos basadas en osciladores en anillos, compatibles
con diseños mayoritariamente digitales, escalables en los procesos CMOS de fabricación
más modernos donde las estructuras digitales se ven favorecidas.
La miniaturización de las tecnologías CMOS de diseño lleva consigo la reducción
de la tensión de alimentación para el desarrollo de arquitecturas pequeñas
y eficientes en potencia. Esto reduce significativamente la disponibilidad de tensión
para saturar transistores, lo que añadido a una ganancia cada vez menor
de los mismos, ruido y efectos parásitos como el “mismatch” y las variaciones
de proceso, tensión y temperatura han llevado a que sea cada vez más complejo
el diseño de estructuras analógicas eficientes. Durante los últimos años la conversión
A/D basada en codificación temporal ha ganado gran popularidad dado
que permite la implementación de estructuras mayoritariamente digitales. Como
parte de esta evolución, los osciladores controlados por tensión diseñados con topologías
de oscilador en anillo han surgido como un candidato prometedor para
la concepción de nuevas técnicas de digitalización.
Los convertidores de datos basados en osciladores en anillo son extremadamente
sensibles (variación de frecuencia con respecto a la señal de entrada) así como
escalables, además de otras propiedades muy atractivas, como el conformado
espectral de ruido de cuantificación y el filtrado “anti-aliasing”. Sin embargo, su
respuesta no lineal y el limitado tiempo de retraso alcanzable por una compuerta
NOT restringen la resolución del conversor, especialmente para conversión A/D
en aplicaciones de elevado ancho de banda. Esta tesis doctoral propone nuevas
técnicas para aliviar este tipo de problemas.
En primer lugar, se proponen técnicas basadas en circuito para compensar el
efecto de la no linealidad en los osciladores en anillo, y se comparan con soluciones
equivalentes ya publicadas. Las propuestas se diseñan y simulan en tecnología
CMOS de 65 nm para arquitecturas en lazo abierto. Una de estas técnicas
presentadas es también validada experimentalmente a través de un prototipo.
En segundo lugar, se introducen y validan por simulación varias formas de incrementar
artificialmente la frecuencia de oscilación efectiva. Para finalizar, se
proponen teóricamente dos enfoques para configurar nuevas formas de conformación
del ruido de cuantificación y filtrado del espectro de salida de los datos
digitales. En particular, son propuestos y validados por simulación un ADC pasobanda
en cuadratura de fase y un ADC de Nyquist de gran eficiencia en potencia. Todas las técnicas propuestas en este trabajo están destinadas especialmente
para aplicaciones de alto ancho de banda, tales como módulos para el Internet
de las cosas o receptores de radiofrecuencia mayoritariamente digitales. A pesar
de ello, son extrapolables también a otros campos como el de la instrumentación
biomédica o el de la medición de señales mediante sensores.Programa de Doctorado en Ingeniería Eléctrica, Electrónica y Automática por la Universidad Carlos III de MadridPresidente: Juan Pablo Alegre Pérez.- Secretario: Celia López Ongil.- Vocal: Fernando Cardes Garcí
Linearization of Time-encoded ADCs Architectures for Smart MEMS Sensors in Low Power CMOS Technology
Mención Internacional en el título de doctorIn the last few years, the development of mobile technologies and machine learning
applications has increased the demand of MEMS-based digital microphones.
Mobile devices have several microphones enabling noise canceling, acoustic beamforming
and speech recognition. With the development of machine learning applications
the interest to integrate sensors with neural networks has increased.
This has driven the interest to develop digital microphones in nanometer CMOS
nodes where the microphone analog-front end and digital processing, potentially
including neural networks, is integrated on the same chip.
Traditionally, analog-to-digital converters (ADCs) in digital microphones have
been implemented using high order Sigma-Delta modulators. The most common
technique to implement these high order Sigma-Selta modulators is switchedcapacitor
CMOS circuits. Recently, to reduce power consumption and make them
more suitable for tasks that require always-on operation, such as keyword recognition,
switched-capacitor circuits have been improved using inverter-based operational
amplifier integrators. Alternatively, switched-capacitor based Sigma-
Delta modulators have been replaced by continuous time Sigma-Delta converters.
Nevertheless, in both implementations the input signal is voltage encoded
across the modulator, making the integration in smaller CMOS nodes more challenging
due to the reduced voltage supply.
An alternative technique consists on encoding the input signal on time (or
frequency) instead of voltage. This is what time-encoded converters do. Lately,
time-encoding converters have gained popularity as they are more suitable to
nanometer CMOS nodes than Sigma-Delta converters. Among the ones that have
drawn more interest we find voltage-controlled oscillator based ADCs (VCOADCs).
VCO-ADCs can be implemented using CMOS inverter based ring oscillators
(RO) and digital circuitry. They also show noise-shaping properties.
This makes them a very interesting alternative for implementation of ADCs in
nanometer CMOS nodes. Nevertheless, two main circuit impairments are present
in VCO-ADCs, and both come from the oscillator non-idealities. The first of them
is the oscillator phase noise, that reduces the resolution of the ADC. The second
is the non-linear tuning curve of the oscillator, that results in harmonic distortion
at medium to high input amplitudes.
In this thesis we analyze the use of time encoding ADCs for MEMS microphones
with special focus on ring oscillator based ADCs (RO-ADCs). Firstly, we
study the use of a dual-slope based SAR noise shaped quantizer (SAR-NSQ) in
sigma-delta loops. This quantizer adds and extra level of noise-shaping to the modulator, improving the resolution. The quantizer is explained, and equations
for the noise transfer function (NTF) of a third order sigma-delta using a second
order filter and the NSQ are presented.
Secondly, we move our attention to the topic of RO-ADCs. We present a high
dynamic range MEMS microphone 130nm CMOS chip based on an open-loop
VCO-ADC. This dissertation shows the implementation of the analog front-end
that includes the oscillator and the MEMS interface, with a focus on achieving
low power consumption with low noise and a high dynamic range. The digital
circuitry is left to be explained by the coauthor of the chip in his dissertation. The
chip achieves a 80dBA peak SNDR and 108dB dynamic range with a THD of 1.5%
at 128 dBSPL with a power consumption of 438μW.
After that, we analyze the use of a frequency-dependent-resistor (FDR) to implement
an unsampled feedback loop around the oscillator. The objective is to reduce
distortion. Additionally phase noise mitigation is achieved. A first topology
including an operational amplifier to increase the loop gain is analyzed. The design
is silicon proven in a 130 nm CMOS chip that achieves a 84 dBA peak SNDR
with an analog power consumption of 600μW. A second topology without the
operational amplifier is also analyzed. Two chips are designed with this topology.
The first chip in 130 nm CMOS is a full VCO-ADC including the frequencyto-
digital converter (F2D). This chip achieves a peak SNDR of 76.6 dBA with a
power consumption of 482μW. The second chip includes only the oscillator and
is implemented in 55nm CMOS. The peak SNDR is 78.15 dBA and the analog
power consumption is 153μW.
To finish this thesis, two circuits that use an FDR with a ring oscillator are
presented. The first is a capacity-to-digital converter (CDC). The second is a filter
made with an FDR and an oscillator intended for voice activity detection tasks
(VAD).En los últimos años, el desarrollo de las tecnologías móviles y las aplicaciones de
machine-learning han aumentado la demanda de micrófonos digitales basados
en MEMS. Los dipositivos móviles tienen varios micrófonos que permiten la cancelación
de ruido, el beamforming o conformación de haces y el reconocimiento
de voz. Con el desarrollo de aplicaciones de aprendizaje automático, el interés
por integrar sensores con redes neuronales ha aumentado. Esto ha impulsado el
interés por desarrollar micrófonos digitales en nodos CMOS nanométricos donde
el front-end analógico y el procesamiento digital del micrófono, que puede
incluir redes neuronales, está integrado en el mismo chip.
Tradicionalmente, los convertidores analógicos-digitales (ADC) en micrófonos
digitales han sido implementados utilizando moduladores Sigma-Delta de
orden elevado. La técnica más común para implementar estos moduladores Sigma-
Delta es el uso de circuitos CMOS de capacidades conmutadas. Recientemente,
para reducir el consumo de potencia y hacerlos más adecuados para las tareas que
requieren una operación continua, como el reconocimiento de palabras clave, los
convertidores Sigma-Delta de capacidades conmutadas has sido mejorados con
el uso de integradores implementados con amplificadores operacionales basados
en inversores CMOS. Alternativamente, los Sigma-Delta de capacidades conmutadas
han sido reemplazados por moduladores en tiempo continuo. No obstante,
en ambas implementaciones, la señal de entrada es codificada en voltaje durante
el proceso de conversión, lo que hace que la integración en nodos CMOS más
pequeños sea complicada debido a la menor tensión de alimentación.
Una técnica alternativa consiste en codificar la señal de entrada en tiempo (o
frecuencia) en lugar de tensión. Esto es lo que hacen los convertidores de codificación
temporal. Recientemente, los convertidores de codificación temporal
han ganado popularidad ya que son más adecuados para nodos CMOS nanométricos
que los convertidores Sigma-Delta. Entre los que más interés han despertado
encontramos los ADCs basados en osciladores controlados por tensión
(VCO-ADC). Los VCO-ADC se pueden implementar usando osciladores en anillo
(RO) implementados con inversores CMOS y circuitos digitales. Esta familia
de convertidores también tiene conformado de ruido. Esto los convierte en una
alternativa muy interesante para la implementación de convertidores en nodos
CMOS nanométricos. Sin embargo, dos problemas principales están presentes en
este tipo de ADCs debidos ambos a las no idealidades del oscilador. El primero
de los problemas es la presencia de ruido de fase en el oscilador, lo que reduce la resolución del ADC. El segundo es la curva de conversion voltaje-frecuencia no
lineal del oscilador, lo que causa distorsión a amplitudes medias y altas.
En esta tesis analizamos el uso de ADCs de codificación temporal para micrófonos
MEMS, con especial interés en ADCS basados en osciladores de anillo
(RO-ADC). En primer lugar, estudiamos el uso de un cuantificador SAR con conformado
de ruido (SAR-NSQ) en moduladores Sigma-Delta. Este cuantificador
agrega un orden adicional de conformado de ruido al modulador, mejorando la
resolución. En este documento se explica el cuantificador y obtienen las ecuaciones
para la función de transferencia de ruido (NTF) de un sigma-delta de tercer
orden usando un filtro de segundo orden y el NSQ.
En segundo lugar, dirigimos nuestra atención al tema de los RO-ADC. Presentamos
el chip de un micrófono MEMS de alto rango dinámico en CMOS de
130 nm basado en un VCO-ADC de bucle abierto. En esta tesis se explica la implementación
del front-end analógico que incluye el oscilador y la interfaz con
el MEMS. Esta implementación se ha llevado a cabo con el objetivo de lograr un
bajo consumo de potencia, un bajo nivel de ruido y un alto rango dinámico. La
descripción del back-end digital se deja para la tesis del couator del chip. La
SNDR de pico del chip es de 80dBA y el rango dinámico de 108dB con una THD
de 1,5% a 128 dBSPL y un consumo de potencia de 438μW.
Finalmente, se analiza el uso de una resistencia dependiente de frecuencia
(FDR) para implementar un bucle de realimentación no muestreado alrededor
del oscilador. El objetivo es reducir la distorsión. Además, también se logra la
mitigación del ruido de fase del oscilador. Se analyza una primera topologia de
realimentación incluyendo un amplificador operacional para incrementar la ganancia
de bucle. Este diseño se prueba en silicio en un chip CMOS de 130nm que
logra un pico de SNDR de 84 dBA con un consumo de potencia de 600μW en la
parte analógica. Seguidamente, se analiza una segunda topología sin el amplificador
operacional. Se fabrican y miden dos chips diseñados con esta topologia.
El primero de ellos en CMOS de 130 nm es un VCO-ADC completo que incluye
el convertidor de frecuencia a digital (F2D). Este chip alcanza un pico SNDR de
76,6 dBA con un consumo de potencia de 482μW. El segundo incluye solo el oscilador
y está implementado en CMOS de 55nm. El pico SNDR es 78.15 dBA y el
el consumo de potencia analógica es de 153μW.
Para cerrar esta tesis, se presentan dos circuitos que usan la FDR con un oscilador
en anillo. El primero es un convertidor de capacidad a digital (CDC). El
segundo es un filtro realizado con una FDR y un oscilador, enfocado a tareas de
detección de voz (VAD).Programa de Doctorado en Ingeniería Eléctrica, Electrónica y Automática por la Universidad Carlos III de MadridPresidente: Antonio Jesús Torralba Silgado.- Secretaria: María Luisa López Vallejo.- Vocal: Pieter Rombout
SNDR Limits of Oscillator-Based Sensor Readout Circuits.
This paper analyzes the influence of phase noise and distortion on the performance of oscillator-based sensor data acquisition systems. Circuit noise inherent to the oscillator circuit manifests as phase noise and limits the SNR. Moreover, oscillator nonlinearity generates distortion for large input signals. Phase noise analysis of oscillators is well known in the literature, but the relationship between phase noise and the SNR of an oscillator-based sensor is not straightforward. This paper proposes a model to estimate the influence of phase noise in the performance of an oscillator-based system by reflecting the phase noise to the oscillator input. The proposed model is based on periodic steady-state analysis tools to predict the SNR of the oscillator. The accuracy of this model has been validated by both simulation and experiment in a 130 nm CMOS prototype. We also propose a method to estimate the SNDR and the dynamic range of an oscillator-based readout circuit that improves by more than one order of magnitude the simulation time compared to standard time domain simulations. This speed up enables the optimization and verification of this kind of systems with iterative algorithms.This work has been funded by projects 610484 FP7-IAPP of the European Union and TEC2014-56879-R of CICYT, Spain. The authors would like to thank Roberto Nonis and Pedro Amaral from Infineon Technologies Austria AG for helpful discussions
Design of CMOS Digital Silicon Photomultipliers with ToF for Positron Emission Tomography
This thesis presents a contribution to the design of single-photon detectors for
medical imaging. Specifically, the focus has been on the development of a pixel
capable of single-photon counting in CMOS technology, and the associated
sensor thereof. These sensors can work under low light conditions and provide
timing information to determine the time-stamp of the incoming photons.
For instance, this is particularly attractive for applications that rely either on
time-of-flight measurements or on exponential decay determination of the light
source, like positron emission tomography or fluorescence-lifetime imaging,
respectively. This thesis proposes the study of the pixel architecture to optimize
its performance in terms of sensitivity, linearity and signal to noise ratio.
The design of the pixel has followed a bottom-up approach, taking care of
the smallest building block and studying how the different architecture choices
affect performance. Among the various building blocks needed, special emphasis has been placed on the following:
• the Single-Photon Avalanche Diode (SPAD), a photodiode able to detect
photons one by one;
• the front-end circuitry of this diode, commonly called quenching and
recharge circuit;
• the Time-to-Digital Converter (TDC), which determines the timing performance of the pixel.
The proposed architectural exploration provides a comprehensive insight
into the design space of the pixel, allowing to determine the optimum design
points in terms of sensor sensitivity, linearity or signal to noise ratio, thus helping designers to navigate through non-straightforward trade-offs.
The proposed TDC is based on a voltage-controlled ring oscillator, since this
architecture provides moderate time resolutions while keeping the footprint,
the power, and conversion time relatively small. Two pseudo-differential delay
stages have been studied, one with cross-coupled PMOS transistors and the
other with cross-coupled inverters. Analytical studies and simulations have
shown that cross-coupled inverters are the most appropriate to implement
the TDC because they achieve better time resolution with smaller energy per
conversion than cross-coupled PMOS transistor stages.
A 1.3×1.3 mm2 pixel has been implemented in an 110 nm CMOS image sensor technology, to have the benefits of sub-micron technologies along with the
cleanliness of CMOS image sensor technologies. The fabricated chips have been
used to characterize the single-photon avalanche diodes. The results agree with
expectations: a maximum photon detection probability of 46 % and a median
dark count rate of 0.4 Hz/µm2 with an excess voltage of 3 V. Furthermore, the
characterization of the TDC shows that the time resolution is below 100 ps,
which agrees with post-layout simulations. The differential non-linearity is
±0.4LSB, and the integral non-linearity is ±6.1LSB.
Photoemission occurs during characterization - an indication that the avalanches are not quenched properly. The cause of this has been identified to be
in the design of the SPAD and the quenching circuit. SPADs are sensitive devices which maximum reverse current must be well defined and limited by the
quenching circuit, otherwise unwanted effects like excessive cross-talk, noise,
and power consumption may happen. Although this issue limits the operation
of the implemented pixel, the information obtained during the characterization
will help to avoid mistakes in future implementations
Data acquisition techniques based on frequency-encoding applied to capacitive MEMS microphones
Mención Internacional en el título de doctorThis thesis focuses on the development of capacitive sensor readout circuits
and data converters based on frequency-encoding. This research
has been motivated by the needs of consumer electronics industry, which
constantly demands more compact readout circuit for MEMS microphones
and other sensors. Nowadays, data acquisition is mainly based
on encoding signals in voltage or current domains, which is becoming
more challenging in modern deep submicron CMOS technologies.
Frequency-encoding is an emerging signal processing technique based
on encoding signals in the frequency domain. The key advantage of
this approach is that systems can be implemented using mostly-digital
circuitry, which benefits from CMOS technology scaling. Frequencyencoding
can be used to build phase referenced integrators, which can
replace classical integrators (such as switched-capacitor based integrators)
in the implementation of efficient analog-to-digital converters and
sensor interfaces. The core of the phase referenced integrators studied in
this thesis consists of the combination of different oscillator topologies
with counters and highly-digital circuitry.
This work addresses two related problems: the development of capacitive
MEMS sensor readout circuits based on frequency-encoding, and the
design and implementation of compact oscillator-based data converters
for audio applications.
In the first problem, the target is the integration of the MEMS sensor
into an oscillator circuit, making the oscillation frequency dependent on
the sensor capacitance. This way, the sound can be digitized by measuring
the oscillation frequency, using digital circuitry. However, a MEMS
microphone is a complex structure on which several parasitic effects can
influence the operation of the oscillator. This work presents a feasibility
analysis of the integration of a MEMS microphone into different oscillator
topologies. The conclusion of this study is that the parasitics of the
MEMS limit the performance of the microphone, making it inefficient.
In contrast, replacing conventional ADCs with frequency-encoding based
ADCs has proven a very efficient solution, which motivates the next
problem.
In the second problem, the focus is on the development of high-order
oscillator-based Sigma-Delta modulators. Firstly, the equivalence between classical
integrators and phase referenced integrators has been studied, followed
by an overview of state-of-art oscillator-based converters. Then,
a procedure to replace classical integrators by phase referenced integrators
is presented, including a design example of a second-order oscillator based
Sigma-Delta modulator. Subsequently, the main circuit impairments that
limit the performance of this kind of implementations, such as phase
noise, jitter or metastability, are described.
This thesis also presents a methodology to evaluate the impact of
phase noise and distortion in oscillator-based systems. The proposed
method is based on periodic steady-state analysis, which allows the rapid
estimation of the system dynamic range without resorting to transient
simulations. In addition, a novel technique to analyze the impact of
clock jitter in Sigma-Delta modulators is described.
Two integrated circuits have been implemented in 0.13 μm CMOS
technology to demonstrate the feasibility of high-order oscillator-based Sigma-Delta modulators. Both chips have been designed to feature secondorder
noise shaping using only oscillators and digital circuitry. The first
testchip shows a malfunction in the digital circuitry due to the complexity
of the multi-bit counters. The second chip, implemented using
single-bit counters for simplicity, shows second-order noise shaping and
reaches 103 dB-A of dynamic range in the audio bandwidth, occupying
only 0.04 mm2.Esta tesis se centra en el desarrollo de conversores de datos e interfaces
para sensores capacitivos basados en codificación en frecuencia. Esta
investigación está motivada por las necesidades de la industria, que constantemente
demanda reducir el tamaño de este tipo de circuitos. Hoy en
día, la adquisición de datos está basada principalmente en la codificación
de señales en tensión o en corriente. Sin embargo, la implementación
de este tipo de soluciones en tecnologías CMOS nanométricas presenta
varias dificultades.
La codificación de frecuencia es una técnica emergente en el procesado
de señales basada en codificar señales en el dominio de la frecuencia.
La principal ventaja de esta alternativa es que los sistemas pueden implementarse
usando circuitos mayoritariamente digitales, los cuales se
benefician de los avances de la tecnología CMOS. La codificación en
frecuencia puede emplearse para construir integradores referidos a la
fase, que pueden reemplazar a los integradores clásicos (como los basados
en capacidades conmutadas) en la implementación de conversores
analógico-digital e interfaces de sensores. Los integradores referidos a la
fase estudiados en esta tesis consisten en la combinación de diferentes
topologías de osciladores con contadores y circuitos principalmente digitales.
Este trabajo aborda dos cuestiones relacionadas: el desarrollo de circuitos
de lectura para sensores MEMS capacitivos basados en codificación
temporal, y el diseño e implementación de conversores de datos
compactos para aplicaciones de audio basados en osciladores.
En el primer caso, el objetivo es la integración de un sensor MEMS
en un oscilador, haciendo que la frecuencia de oscilación depe capacidad del sensor. De esta forma, el sonido puede ser digitalizado
midiendo la frecuencia de oscilación, lo cual puede realizarse usando circuitos
en su mayor parte digitales. Sin embargo, un micrófono MEMS es
una estructura compleja en la que múltiples efectos parasíticos pueden
alterar el correcto funcionamiento del oscilador. Este trabajo presenta
un análisis de la viabilidad de integrar un micrófono MEMS en diferentes
topologías de oscilador. La conclusión de este estudio es que los parasíticos
del MEMS limitan el rendimiento del micrófono, causando que esta
solución no sea eficiente. En cambio, la implementación de conversores
analógico-digitales basados en codificación en frecuencia ha demostrado
ser una alternativa muy eficiente, lo cual motiva el estudio del siguiente
problema.
La segunda cuestión está centrada en el desarrollo de moduladores Sigma-Delta de alto orden basados en osciladores. En primer lugar se ha estudiado
la equivalencia entre los integradores clásicos y los integradores
referidos a la fase, seguido de una descripción de los conversores basados
en osciladores publicados en los últimos años. A continuación se
presenta un procedimiento para reemplazar integradores clásicos por integradores
referidos a la fase, incluyendo un ejemplo de diseño de un
modulador Sigma-Delta de segundo orden basado en osciladores. Posteriormente
se describen los principales problemas que limitan el rendimiento de este
tipo de sistemas, como el ruido de fase, el jitter o la metaestabilidad.
Esta tesis también presenta un nuevo método para evaluar el impacto
del ruido de fase y de la distorsión en sistemas basados en osciladores. El
método propuesto está basado en simulaciones PSS, las cuales permiten
la rápida estimación del rango dinámico del sistema sin necesidad de
recurrir a simulaciones temporales. Además, este trabajo describe una
nueva técnica para analizar el impacto del jitter de reloj en moduladores Sigma-Delta.
En esta tesis se han implementado dos circuitos integrados en tecnología
CMOS de 0.13 μm, con el fin de demostrar la viabilidad de los
moduladores Sigma-Delta de alto orden basados en osciladores. Ambos chips han
sido diseñados para producir conformación espectral de ruido de segundo
orden, usando únicamente osciladores y circuitos mayoritariamente digitales.
El primer chip ha mostrado un error en el funcionamiento de los
circuitos digitales debido a la complejidad de las estructuras multi-bit
utilizadas. El segundo chip, implementado usando contadores de un solo
bit con el fin de simplificar el sistema, consigue conformación espectral
de ruido de segundo orden y alcanza 103 dB-A de rango dinámico en el
ancho de banda del audio, ocupando solo 0.04 mm2.Programa Oficial de Doctorado en Ingeniería Eléctrica, Electrónica y AutomáticaPresidente: Georges G.E. Gielen.- Secretario: José Manuel de la Rosa.- Vocal: Ana Rus
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