Continuous time controller based on SMC and disturbance observer for piezoelectric actuators

Abstract – In this work, analog application for the Sliding Mode Control (SMC) to piezoelectric actuators (PEA) is presented. DSP application of the algorithm suffers from ADC and DAC conversions and mainly faces limitations in sampling time interval. Moreover piezoelectric actuators are known to have very large bandwidth close to the DSP operation frequency. Therefore, with the direct analog application, improvement of the performance and high frequency operation are expected. Design of an appropriate SMC together with a disturbance observer is suggested to have continuous control output and related experimental results for position tracking are presented with comparison of DSP and analog control application

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

A modified Prandtl–Ishlinskii (P–I) hysteresis model is developed to form the feedforward controller for a 3-DOF flexure-based mechanism. To improve the control accuracy of the P–I hysteresis model, a hybrid structure that includes backlash operators, dead-zone operators and a cubic polynomial function is proposed. Both the rate-dependent hysteresis modeling and adaptive dead-zone thresholds selection method are investigated. System identification was used to obtain the parameters of the newly-developed hysteresis model. Closed-loop control was added to reduce the influence from external disturbances such as vibration and noise, leading to a combined feedforward/feedback control strategy. The cross-axis coupling motion of the 3-DOF flexure-based mechanism has been explored using the established controller. Accordingly, a decoupling feedforward/feedback controller is proposed and implemented to compensate the coupled motion of the moving platform. Experimental tests are reported to examine the tracking capability of the whole system and features of the controller. It is demonstrated that the proposed decoupling control methodology can distinctly reduce the coupling motion of the moving platform and thus improve the positioning accuracy and trajectory tracking capability

Development of a passive compliant mechanism for measurement of micro/nano-scale planar three DOF motions

This paper presents the design, optimization, and computational and experimental performance evaluations of a passively actuated, monolithic, compliant mechanism. The mechanism is designed to be mounted on or built into any precision positioning stage which produces three degree of freedom (DOF) planar motions. It transforms such movements into linear motions which can then be measured using laser interferometry based sensing and measurement techniques commonly used for translational axes. This methodology reduces the introduction of geometric errors into sensor measurements, and bypasses the need for increased complexity sensing systems. A computational technique is employed to optimize the mechanism’s performance, in particular to ensure the kinematic relationships match a set of desired relationships. Computational analysis is then employed to predict the performance of the mechanism throughout the workspace of a coupled positioning stage, and the errors are shown to vary linearly with the input position. This allows the errors to be corrected through calibration. A prototype is manufactured and experimentally tested, confirming the ability of the proposed mechanism to permit measurements of three DOF motions

Modeling and Control of MEMS-based Multi-layered Prestressed Piezoelectric Cantilever Beam

Piezoelectric materials are the preferred smart materials for sensing and actuation in the form of micro and nano-engineering structures like beams and plates. Cantilever beams play a significant role as key components in atomic force microscopy and bio and chemical sensors. Adding an active layer such as lead zirconate titanate (PZT) thin-film to form smart cantilever beams with sensing and actuation capabilities is highly desirable to facilitate miniaturization, enhance performance and functionali- ties such as enabling on-chip high-speed parallel AFM. During the micro-fabrication process, residual stresses develop in the different layers of the cantilever beam, causes initial deflection. The residual stress in the different layers of the cantilever beam and the application of voltage to the PZT thin-film affects their dynamics. This the- sis investigates the dynamic behaviour and develops a control technique and a novel charge readout circuit to improve the performance of a micro-fabricated multi-layer prestressed piezoelectric cantilever beam as an actuator and a deflection sensor. Firstly, the fabrication process of a unimorph PZT cantilever beam is explained. A low thermal budget Ultra-high vacuum e-beam evaporated polysilicon thin-film (UHVEEpoly) process is used for the fabrication of multi-layered PZT cantilever beam in d31 mode. The sharp peaks at resonant frequencies in the frequency response of the PZT cantilever beam show very little damping and a large settling time of the cantilever beam. Secondly, the dynamic behaviour of the prestressed PZT cantilever beam is in- vestigated subjected to change in driving voltage. Experimental investigations show a shift in resonant frequencies of a PZT cantilever beam. However, there is no reported mathematical model that predicts the shift in resonance frequencies of a multi-layered prestressed piezoelectric cantilever beam subjected to a change in driving voltage. This work developed a mathematical model with experimental val- idation to estimate the shift in resonance frequencies of such cantilever beams with the change in the driving voltage. A very good agreement between the model predic- tions and experimental measurements for the frequency response of the cantilever beam at different driving voltages has been obtained. A novel linear formulation has been developed to predict the shift in resonance frequencies of the PZT can- i tilever beam for a wide range of driving voltages. The formulation shows that the shift in resonance frequencies of a multi-layered prestressed piezoelectric cantilever beam per unit of applied voltage is dependent on geometric parameters and material properties. Thirdly, a robust resonant controller has been designed and implemented to re- duce the settling time of a highly vibrating PZT cantilever beam. The controller design is based on a mixed negative-imaginary, passivity, and a small-gain approach. The motivation to design a resonant controller using the above-mentioned analyti- cal framework is its bandpass nature and the use of velocity feedback, as the charge collected from a vibrating PZT cantilever beam gives the velocity information of the beam. The proposed controller design results in finite gain stability for a pos- itive feedback interconnection between two stable linear systems with a large gain and phase margin. Experimental results demonstrate that the designed resonant controller is able to effectively damp the first resonant mode of a cantilever, signifi- cantly reducing settling time from 528 ms to 32 ms. The robustness of the designed resonant controller is tested against changes in the cantilever beam dynamics due to residual stress variation and or stress variation due to driving voltage. Finally, to facilitate the miniaturization of on-chip sensors and parallel high- speed AFM, a single layer of a PZT thin-film in a cantilever beam is used as a deflection sensor and an actuator instead of bulky optical deflection sensors. A novel charge readout circuit is designed for deflection sensing by capturing the electrical charge generated due to the vibration of the PZT beam. The signal-to-noise ratio and sensitivity analysis of the readout circuit shows similar results compared to the commercially available optical deflection sensors. Our work highlights very important aspects in the dynamic behaviour and perfor- mance of a multi-layered prestressed piezoelectric cantilever beam. The agreement between the proposed theoretical formulation and experimental investigations in modeling, control design, and a novel readout circuit will provide the platform for further the development and miniaturization of microcantilever-based technologies, including on-chip parallel HS-AFM

Piezoelectric Fused Silica Resonators for Timing References.

MEMS resonators have the capability to match or exceed the performance of state-of-the-art quartz timing references at a fraction of the size, power, and cost. To enable this capability, this work investigates the use of fused silica as a substrate for piezoelectrically actuated resonators for applications in timing references. This thesis presents the design and fabrication of a piezoelectrically actuated fused silica resonator. The fabricated resonators show a quality factor (Q) of 19,671 at 4.96 MHz with an insertion loss of 16.9 dB, and is the first reported example of a piezoelectrically actuated fused silica resonator in literature. An in-depth investigation into loss mechanisms in fused silica is performed in order to identify and address the major losses in the device and maximize potential performance. Multiple experimental and analytical investigations are presented, with a new form of loss, known as charge redistribution, presented as a possible dominant loss in these piezoelectric resonators. This loss mechanism is analytically modeled and simulated to have a Q of 25,100, within 20% of the experimentally measured devices. The temperature sensitivity of fused silica is also addressed; as fused silica shows a temperature coefficient of elasticity almost three times higher than that shown in uncompensated silicon. Both active and passive methods of temperature compensation are implemented, including a fused silica ovenized platform and nickel-refilled trenches for temperature compensation. The nickel-refilled trenches are shown to reduce temperature sensitivity in piezoelectrically actuated fused silica resonators from 78 ppm/K to 50 ppm/K, with larger compensation possible but complete compensation infeasible from passive techniques alone. From this, a dual-mode system is proposed for use in ovenized systems where two modes are simultaneously activated in a single device volume. In this system, one mode acts as a stable reference frequency and the second mode acts as a temperature sensor, allowing for extremely accurate ovenization. A silicon-based prototype is developed, showing a +14 ppm/K temperature difference between the two modes, with additional temperature differential possible through the addition of material-based passive compensation.PHDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/135878/1/peczalsk_1.pd

Design and experimental validation of a piezoelectric actuator tracking control based on fuzzy logic and neural compensation

This work proposes two control feedback-feedforward algorithms, based on fuzzy logic in combination with neural networks, aimed at reducing the tracking error and improving the actuation signal of piezoelectric actuators. These are frequently used devices in a wide range of applications due to their high precision in micro- and nanopositioning combined with their mechanical stiffness. Nevertheless, the hysteresis is one the main phenomenon that degrades the performance of these actuators in tracking operations. The proposed control schemes were tested experimentally in a commercial piezoelectric actuator. They were implemented with a dSPACE 1104 device, which was used for signal generation and acquisition purposes. The performance of the proposed control schemes was compared to conventional structures based on proportional-integral-derivative and fuzzy logic in feedback configuration. Experimental results show the advantages of the proposed controllers, since they are capable of reducing the error to significant magnitude orders.The authors wish to express their gratitude to the Basque Government, through the project EKOHEGAZ (ELKARTEK KK-2021/00092), to the Diputación Foral de Álava (DFA), through the project CONAVANTER, and to the UPV/EHU, through the project GIU20/063, for supporting this work

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Study and Development of Mechatronic Devices and Machine Learning Schemes for Industrial Applications

Obiettivo del presente progetto di dottorato è lo studio e sviluppo di sistemi meccatronici e di modelli machine learning per macchine operatrici e celle robotizzate al fine di incrementarne le prestazioni operative e gestionali. Le pressanti esigenze del mercato hanno imposto lavorazioni con livelli di accuratezza sempre più elevati, tempi di risposta e di produzione ridotti e a costi contenuti. In questo contesto nasce il progetto di dottorato, focalizzato su applicazioni di lavorazioni meccaniche (e.g. fresatura), che includono sistemi complessi quali, ad esempio, macchine a 5 assi e, tipicamente, robot industriali, il cui utilizzo varia a seconda dell’impiego. Oltre alle specifiche problematiche delle lavorazioni, si deve anche considerare l’interazione macchina-robot per permettere un’efficiente capacità e gestione dell’intero impianto. La complessità di questo scenario può evidenziare sia specifiche problematiche inerenti alle lavorazioni (e.g. vibrazioni) sia inefficienze più generali che riguardano l’impianto produttivo (e.g. asservimento delle macchine con robot, consumo energetico). Vista la vastità della tematica, il progetto si è suddiviso in due parti, lo studio e sviluppo di due specifici dispositivi meccatronici, basati sull’impiego di attuatori piezoelettrici, che puntano principalmente alla compensazione di vibrazioni indotte dal processo di lavorazione, e l’integrazione di robot per l’asservimento di macchine utensili in celle robotizzate, impiegando modelli di machine learning per definire le traiettorie ed i punti di raggiungibilità del robot, al fine di migliorarne l’accuratezza del posizionamento del pezzo in diverse condizioni. In conclusione, la presente tesi vuole proporre soluzioni meccatroniche e di machine learning per incrementare le prestazioni di macchine e sistemi robotizzati convenzionali. I sistemi studiati possono essere integrati in celle robotizzate, focalizzandosi sia su problematiche specifiche delle lavorazioni in macchine operatrici sia su problematiche a livello di impianto robot-macchina. Le ricerche hanno riguardato un’approfondita valutazione dello stato dell’arte, la definizione dei modelli teorici, la progettazione funzionale e l’identificazione delle criticità del design dei prototipi, la realizzazione delle simulazioni e delle prove sperimentali e l’analisi dei risultati.The aim of this Ph.D. project is the study and development of mechatronic systems and machine learning models for machine tools and robotic applications to improve their performances. The industrial demands have imposed an ever-increasing accuracy and efficiency requirement whilst constraining the cost. In this context, this project focuses on machining processes (e.g. milling) that include complex systems such as 5-axes machine tool and industrial robots, employed for various applications. Beside the issues related to the machining process itself, the interaction between the machining centre and the robot must be considered for the complete industrial plant’s improvement. This scenario´s complexity depicts both specific machining problematics (e.g. vibrations) and more general issues related to the complete plant, such as machine tending with an industrial robot and energy consumption. Regarding the immensity of this area, this project is divided in two parts, the study and development of two mechatronic devices, based on piezoelectric stack actuators, for the active vibration control during the machining process, and the robot machine tending within the robotic cell, employing machine learning schemes for the trajectory definition and robot reachability to improve the corresponding positioning accuracy. In conclusion, this thesis aims to provide a set of solutions, based on mechatronic devices and machine learning schemes, to improve the conventional machining centre and the robotic systems performances. The studied systems can be integrated within a robotic cell, focusing on issues related to the specific machining process and to the interaction between robot-machining centre. This research required a thorough study of the state-of-the-art, the formulation of theoretical models, the functional design development, the identification of the critical aspects in the prototype designs, the simulation and experimental campaigns, and the analysis of the obtained results

A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing

Precision positioning stages with large strokes and high positioning accuracy are attractive for high-performance micro/nano manufacturing. This paper presents the dynamic design and characteristic investigation of a novel XY micropositioning stage. Firstly, the mechanism of the stage was introduced. The XY stage was directly driven by two linear motors, and the X- and Y- axes kinematic decoupling was realized through a novel flexible decoupling mechanism based on flexure hinges and preloaded spring. The dynamic model of the XY stage was established, and the influences of the rotational stiffness of the flexure hinge and the initial positions of the working table on the dynamic rotation of the positioning stage were investigated. The stiffness and geometric parameters of the flexure hinges were determined at the condition that the angular displacements of the working table were within ±0.5° with a motion stroke of ±25 mm. Finally the stage performance was investigated through simulation and experiments, the X- and Y-axes step responses, the rotation angular and positioning accuracy of the stage were obtained. The results show that the stage exhibits good performance and can be used for micro/nano manufacturing