Butterworth Pattern-based Simultaneous Damping and Tracking Controller Designs for Nanopositioning Systems

Peer reviewedPublisher PD

Application of a Fractional Order Integral Resonant Control to increase the achievable bandwidth of a nanopositioner

The congress program will essentially include papers selected on the highest standard by the IPC, according to the IFAC guidelines www.ifac-control.org/publications/Publications-requirements-1.4.pdf, and published in open access in partnership with Elsevier in the IFAC-PapersOnline series, hosted on the ScienceDirect platform www.sciencedirect.com/science/journal/24058963. Survey papers overviewing a research topic are also most welcome. Contributed papers will have usual 6 pages length limitation. 12 pages limitation will apply to survey papers.Publisher PD

High-bandwidth nanopositioning via active control of system resonance

Acknowledgements This work was supported in part by the National Natural Science Foundation of China (Grant Nos. U2013211 and 51975375), the Open Foundation of the State Key Laboratory of Fluid Power and Mechatronic Systems, China (Grant No. GZKF-202003), and the Binks Trust Visiting Research Fellowship (2018), University of Aberdeen, UK, awarded to Dr. Sumeet S. Aphale.Peer reviewedPublisher PD

Two-degrees-of-freedom PI2D controller for precise nanopositioning in the presence of hardware-induced constant time delay

This work was supported in part by the Spanish Agencia Estatal de Investigacion (AEI) under Project DPI2016-80547-R (Ministerio de Economia y Competitividad) and in part by the European Social Fund (FEDER, EU), and in part by the Spanish FPU12/00984 Program (Ministerio de Educacion, Cultura y Deporte).Peer reviewedPostprin

Quantifying the Performance Enhancement Facilitated by Fractional-Order Implementation of Classical Control Strategies for Nanopositioning

Open Access via the Elsevier/JISC agreementPeer reviewe

Two-Degrees-of-Freedom Controller delivering zero-error tracking of ramp-like trajectories for nanopositioning systems

Piezoelectrically actuated nanopositioning systems (tube or platform type) are widely employed in applications where fine mechanical displacements with resolution down to atomic scale are required. This paper presents the design, analysis, and validation of a new control scheme based on the structure of the traditional Two-Degrees-of-Freedom (2DOF) PID controller. The proposed controller is established based on a linear continuous input-output nominal model, and presents a simple structure composed by two second order transfer functions. Despite its simplicity, the controller studied in this paper is able to achieve zero error in the tracking of ramp input signals and, therefore, in the slopes of triangular signals, typically used in nanopositioning applications to trace a raster pattern. The controller also suppresses the unmodeled nonlinearities of the piezoelectric actuated nanopositioning systems without the need of an hysteresis model or a state observer. Moreover, the stability of the control system is proved, and its effectiveness is validated through experimental chattering-free control on a piezoelectric stack-actuated nanopositioning platform. Results demonstrate that the proposed controller is superior to the conventional polynomial-based, proportional-integral, and resonant controllers proposed in literature for motion-tracking tasks in nanopositioning systems

Enhanced Positioning Bandwidth in Nanopositioners via Strategic Pole Placement of the Tracking Controller

Funding: This research received no external funding.Peer reviewedPublisher PD

Dynamics and Control of Flexure-based Large Range Nanopositioning Systems.

The objective of this thesis is to demonstrate desktop-size and cost-effective flexure-based multi-axis nanopositioning capability over a motion range of several millimeters per axis. Increasing the motion range will overcome one of the main drawbacks of existing nanopositioning systems, thereby significantly improving the coverage area in nanometrology and nanomanufacturing applications. A single-axis nanopositioning system, comprising a symmetric double parallelogram flexure bearing and a traditional-architecture moving magnet actuator, is designed, fabricated, and tested. A figure of merit for the actuator is derived and shown to directly impact the system-level trade-offs in terms of range, resolution, bandwidth, and temperature rise. While linear feedback controllers provide good positioning performance for point-to-point commands, the tracking error for dynamic commands prove to be inadequate due to the nonlinearities in the actuator and its driver. To overcome this, an iterative learning controller is implemented in conjunction with linear feedback to reduce the periodic component of the tracking error by more than two orders of magnitude. Experimental results demonstrate 10 nm RMS tracking error over 8 mm motion range in response to a 2 Hz bandlimited triangular command. For the XY nanopositioning system, a lumped-parameter model of an existing XY flexure bearing is developed in order to understand the unexplained variation observed in the transfer function zeros over the operating range of motion. It is shown that the kinematic coupling, due to geometric nonlinearities in the beam mechanics, and small dimensional asymmetry, due to manufacturing tolerances, may conspire to produce complex-conjugate nonminimum phase zeros at certain operating points in the system's workspace. This phenomenon significantly restricts the overall performance of the feedback control system. After intentional use of large asymmetry is employed to overcome this problem, independent feedback and iterative learning controllers are implemented along each axis. Experimental results demonstrate 20 nm RMS radial tracking error while traversing a 2 mm diameter circle at 2 Hz.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/107086/1/parmar_1.pd

Dynamics and Control of Smart Structures for Space Applications

Smart materials are one of the key emerging technologies for a variety of space systems ranging in their applications from instrumentation to structural design. The underlying principle of smart materials is that they are materials that can change their properties based on an input, typically a voltage or current. When these materials are incorporated into structures, they create smart structures. This work is concerned with the dynamics and control of three smart structures: a membrane structure with shape memory alloys for control of the membrane surface flatness, a flexible manipulator with a collocated piezoelectric sensor/actuator pair for active vibration control, and a piezoelectric nanopositioner for control of instrumentation. Shape memory alloys are used to control the surface flatness of a prototype membrane structure. As these actuators exhibit a hysteretic nonlinearity, they need their own controller to operate as required. The membrane structures surface flatness is then controlled by the shape memory alloys, and two techniques are developed: genetic algorithm and proportional-integral controllers. This would represent the removal of one of the main obstacles preventing the use of membrane structures in space for high precision applications, such as a C-band synthetic aperture radar antenna. Next, an adaptive positive position feedback law is developed for control of a structure with a collocated piezoelectric sensor/actuator pair, with unknown natural frequencies. This control law is then combined with the input shaping technique for slew maneuvers of a single-link flexible manipulator. As an alternative to the adaptive positive position feedback law, genetic algorithms are investigated as both system identification techniques and as a tool for optimal controller design in vibration suppression. These controllers are all verified through both simulation and experiments. The third area of investigation is on the nonlinear dynamics and control of piezoelectric actuators for nanopositioning applications. A state feedback integral plus double integral synchronization controller is designed to allow the piezoelectrics to form the basis of an ultra-precise 2-D Fabry-Perot interferometer as the gap spacing of the device could be controlled at the nanometer level. Next, an output feedback linear integral control law is examined explicitly for the piezoelectric actuators with its nonlinear behaviour modeled as an input nonlinearity to a linear system. Conditions for asymptotic stability are established and then the analysis is extended to the derivation of an output feedback integral synchronization controller that guarantees global asymptotic stability under input nonlinearities. Experiments are then performed to validate the analysis. In this work, the dynamics and control of these smart structures are addressed in the context of their three applications. The main objective of this work is to develop effective and reliable control strategies for smart structures that broaden their applicability to space systems

Design and Optimal Control of a Magnet Assisted Scanning Stage for Precise and Energy Efficient Positioning

Scanning stages are characterized by repeated back and forth motions and are widely used in advanced manufacturing processes like photo-lithography, laser-scribing, inspection, metrology, 3D printing, and precision parts assembly, many of which are closely related to the semiconductor (i.e., integrated circuit) manufacturing industry. In order to deliver more high- performance semiconductor chips, i.e., to keep up with predictions made by Moore’s Law, the scanning stages employed by the industry need to move faster while maintaining nanometer-level precision. Achieving these two goals simultaneously requires extensive use of thermal and vibration-induced error mitigation methods, because the motors, and subsequently the surrounding stage components, become heated and flexible parts of scanning stages are easily excited by their aggressive motions (with high acceleration/deceleration). Most of the available solutions tackle the heat and vibration mitigation problems separately, even though the two problems originate from one source, i.e., the large inertial loads generated by the scanning stage’s actuators. Much benefit (e.g., size and cost reductions) can be achieved by considering the two problems simultaneously by addressing their root cause. This dissertation proposes a design-based approach to simultaneously mitigate thermal and vibration-induced errors of scanning stages. Exploiting the repeated back-and-forth motions of scanning, permanent magnet (PM) based assist devices are designed to provide assist force needed during the motion reversal portions of scanning trajectories. The PM-based assist devices store the kinetic energy of the moving table during deceleration and release the stored energy when the table accelerates. Consequently, the force requirements of the primary actuator decrease, thus lowering its heat generation due to copper (resistive) losses. Moreover, the reaction forces borne by the PM assistive devices are channeled to the ground, bypassing the vibration isolated base upon which the scanning stage rests, thus reducing unwanted vibration. To increase the force density of the PMs, a 2D Halbach arrangement is adopted in a prototype scanning stage. Moreover, an efficient and low-cost servo system, optimized for versatility, is integrated into the scanning stage for automatic positioning of the PMs. The designed magnet assisted scanning stage is an over-actuated system, meaning that it has more control inputs than outputs. For the best utilization of its actuators, a feedforward approach for optimal allocation of control efforts to its actuators is developed. The stage, controlled with the optimal feedforward control inputs, achieves significant reductions of actuator heat and vibration-induced errors when applied to typical scanning motions used in semiconductor manufacturing (silicon wafer processing). To further improve the positioning accuracy of the stage, an Iterative Learning Control (ILC) approach for over-actuated systems is developed, exploiting the repeated motion of scanning stages. The optimal ILC update law is designed, considering model and input force uncertainties, for robust monotonic convergence of tracking errors, and the resultant control force is efficiently allocated to multiple actuators. Applied to the magnet assisted scanning stage, the proposed ILC approach additionally reduces tracking errors arising from the mismatch between the model and actual system, thus significantly improving the positioning accuracy of the stage.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/149847/1/yydkyoon_1.pd