Analyse eines digitalen Zwillings zur zeitkontinuierlichen Batchoptimierung in der Halbleiterfertigung

Motivated by the ongoing growth in demand for microchips, high production costs and the complex interplay of human, machine, material and method (4M), suppliers strive to develop more advanced production planning and control regimes for semiconductor production. Batching decisions often dramatically influence the overall performance of wafer fabs in terms of capacity utilization, due date compliance, cycle time and variability. To optimize such processes, we present an integrated testbed for batch formation optimization. Using a simulation of multiple semiconductor work centers, we explore how to optimize work in progress (WIP) flow with a continuous real-time scheduler and previously published batch formation heuristics. The proposed solver is designed to only optimize capacity-limited operations. By considering real-world operations requirements and semiconductor process specifics such as qualification criteria and re-entrance in our model, we demonstrate how to realize significant throughput gains. We explore and demonstrate the developed digital twin through a powerful BI frontend for historical analysis and real-time shop floor monitoring

Hybrid ASP-based multi-objective scheduling of semiconductor manufacturing processes (Extended version)

Modern semiconductor manufacturing involves intricate production processes consisting of hundreds of operations, which can take several months from lot release to completion. The high-tech machines used in these processes are diverse, operate on individual wafers, lots, or batches in multiple stages, and necessitate product-specific setups and specialized maintenance procedures. This situation is different from traditional job-shop scheduling scenarios, which have less complex production processes and machines, and mainly focus on solving highly combinatorial but abstract scheduling problems. In this work, we address the scheduling of realistic semiconductor manufacturing processes by modeling their specific requirements using hybrid Answer Set Programming with difference logic, incorporating flexible machine processing, setup, batching and maintenance operations. Unlike existing methods that schedule semiconductor manufacturing processes locally with greedy heuristics or by independently optimizing specific machine group allocations, we examine the potentials of large-scale scheduling subject to multiple optimization objectives.Comment: 17 pages, 1 figure, 4 listings, 1 table; a short version of this paper is presented at the 18th European Conference on Logics in Artificial Intelligence (JELIA 2023

Production Scheduling

Generally speaking, scheduling is the procedure of mapping a set of tasks or jobs (studied objects) to a set of target resources efficiently. More specifically, as a part of a larger planning and scheduling process, production scheduling is essential for the proper functioning of a manufacturing enterprise. This book presents ten chapters divided into five sections. Section 1 discusses rescheduling strategies, policies, and methods for production scheduling. Section 2 presents two chapters about flow shop scheduling. Section 3 describes heuristic and metaheuristic methods for treating the scheduling problem in an efficient manner. In addition, two test cases are presented in Section 4. The first uses simulation, while the second shows a real implementation of a production scheduling system. Finally, Section 5 presents some modeling strategies for building production scheduling systems. This book will be of interest to those working in the decision-making branches of production, in various operational research areas, as well as computational methods design. People from a diverse background ranging from academia and research to those working in industry, can take advantage of this volume

A Novel Fuzzy-Neural Slack-Diversifying Rule Based on Soft Computing Applications for Job Dispatching in a Wafer Fabrication Factory

This study proposes a slack-diversifying fuzzy-neural rule to improve job dispatching in a wafer fabrication factory. Several soft computing techniques, including fuzzy classification and artificial neural network prediction, have been applied in the proposed methodology. A highly effective fuzzy-neural approach is applied to estimate the remaining cycle time of a job. This research presents empirical evidence of the relationship between the estimation accuracy and the scheduling performance. Because dynamic maximization of the standard deviation of schedule slack has been shown to improve performance, this work applies such maximization to a slack-diversifying fuzzy-neural rule derived from a two-factor tailored nonlinear fluctuation smoothing rule for mean cycle time (2f-TNFSMCT). The effectiveness of the proposed rule was checked with a simulated case, which provided evidence of the rule’s effectiveness. The findings in this research point to several directions that can be exploited in the future

Data analytics for time constraint adherence prediction in a semiconductor manufacturing use-case

Semiconductor manufacturing represents a challenging industrial environments, where products require more than several hundred operations, each representing the technical state-of-the-art. Products vary greatly in volume, design and required production processes and, additionally, product portfolios and technologies change rapidly. Thus, technologically restricted rapid product development, stringent quality related clean room requirements and high precision manufacturing equipment application enforce operational excellence, in particular time constraints adherence. Product specific time constraints between two or more successive process operations are an industry-specific challenge, as violations lead to additional scrapping or reworking costs. Time constraint adherence is linked to dispatching and currently manually assessed. To overcome this error-prone manual task, this article presents a data-based decision process to predict time constraint adherence in semiconductor manufacturing. Real-world historical data is analyzed and appropriate statistical models and scoring functions derived. Compared to other relevant literature regarding time constraint violations, the central contribution of this article is the design, generation and validation of a model for product quality-related time constraint adherence based on a real-world semiconductor plant

Parallel batching with multi-size jobs and incompatible job families

Parallel batch scheduling has many applications in the industrial sector, like in material and chemical treatments, mold manufacturing and so on. The number of jobs that can be processed on a machine mostly depends on the shape and size of the jobs and of the machine. This work investigates the problem of batching jobs with multiple sizes and multiple incompatible families. A flow formulation of the problem is exploited to solve it through two column generation-based heuristics. First, the column generation finds the optimal solution of the continuous relaxation, then two heuristics are proposed to move from the continuous to the integer solution of the problem: one is based on the price-and-branch heuristic, the other on a variable rounding procedure. Experiments with several combinations of parameters are provided to show the impact of the number of sizes and families on computation times and quality of solutions

Control-friendly scheduling algorithms for multi-tool, multi-product manufacturing systems

textThe fabrication of semiconductor devices is a highly competitive and capital intensive industry. Due to the high costs of building wafer fabrication facilities (fabs), it is expected that products should be made efficiently with respect to both time and material, and that expensive unit operations (tools) should be utilized as much as possible. The process flow is characterized by frequent machine failures, drifting tool states, parallel processing, and reentrant flows. In addition, the competitive nature of the industry requires products to be made quickly and within tight tolerances. All of these factors conspire to make both the scheduling of product flow through the system and the control of product quality metrics extremely difficult. Up to now, much research has been done on the two problems separately, but until recently, interactions between the two systems, which can sometimes be detrimental to one another, have mostly been ignored. The research contained here seeks to tackle the scheduling problem by utilizing objectives based on control system parameters in order that the two systems might behave in a more beneficial manner. A non-threaded control system is used that models the multi-tool, multi-product process in a state space form, and estimates the states using a Kalman filter. Additionally, the process flow is modeled by a discrete event simulation. The two systems are then merged to give a representation of the overall system. Two control system matrices, the estimate error covariance matrix from the Kalman filter and a square form of the system observability matrix called the information matrix, are used to generate several control-based scheduling algorithms. These methods are then tested against more tradition approaches from the scheduling literature to determine their effectiveness on both the basis of how well they maintain the outputs near their targets and how well they minimize the cycle time of the products in the system. The two metrics are viewed simultaneously through use of Pareto plots and merits of the various scheduling methods are judged on the basis of Pareto optimality for several test cases.Chemical Engineerin

Intelligent shop scheduling for semiconductor manufacturing

Semiconductor market sales have expanded massively to more than 200 billion dollars annually accompanied by increased pressure on the manufacturers to provide higher quality products at lower cost to remain competitive. Scheduling of semiconductor manufacturing is one of the keys to increasing productivity, however the complexity of manufacturing high capacity semiconductor devices and the cost considerations mean that it is impossible to experiment within the facility. There is an immense need for effective decision support models, characterizing and analyzing the manufacturing process, allowing the effect of changes in the production environment to be predicted in order to increase utilization and enhance system performance. Although many simulation models have been developed within semiconductor manufacturing very little research on the simulation of the photolithography process has been reported even though semiconductor manufacturers have recognized that the scheduling of photolithography is one of the most important and challenging tasks due to complex nature of the process. Traditional scheduling techniques and existing approaches show some benefits for solving small and medium sized, straightforward scheduling problems. However, they have had limited success in solving complex scheduling problems with stochastic elements in an economic timeframe. This thesis presents a new methodology combining advanced solution approaches such as simulation, artificial intelligence, system modeling and Taguchi methods, to schedule a photolithography toolset. A new structured approach was developed to effectively support building the simulation models. A single tool and complete toolset model were developed using this approach and shown to have less than 4% deviation from actual production values. The use of an intelligent scheduling agent for the toolset model shows an average of 15% improvement in simulated throughput time and is currently in use for scheduling the photolithography toolset in a manufacturing plant